Heating device and heating jacket device

Abstract

The utility model provides a heating device and a heating jacket device, and relates to the field of generic semiconductor processing. The resistance wires are arranged on the heating plate; the plurality of first self-recovery thermal protection devices are distributed at different positions on the heating plate, and the plurality of first self-recovery thermal protection devices are connected in parallel to form a first self-recovery thermal protection unit; the temperature sensors are distributed on the heating plate and used for detecting the temperature of the heating plate and outputting temperature detection signals; the PID controller is used for receiving the temperature detection signal and outputting a control signal according to the temperature detection signal; and the switch unit receives the control signal and is in an on or off state according to the control signal, and the switch unit, the first self-recovery thermal protection unit, the resistance wire and an external power supply for supplying power are connected in series to form a heating path.

Description

Technical Field

[0001] The present application relates to the field of semiconductor processing, and in particular to a heating device and a heating jacket device. Background Art

[0002] During the semiconductor processing process, a variety of gases and liquids need to be transported through pipelines (usually metal pipelines), such as from one processing chamber to another. In order to ensure that the temperature of the gases and liquids is within an acceptable range during the pipeline transportation process, and to avoid problems such as condensation of gases when they are cooled during pipeline transportation and solidification and blockage of liquids when they are cooled during pipeline transportation, the transportation pipelines need to be temperature controlled.

[0003] See also Figure 1 A typical schematic diagram of a pipe heating jacket is shown. A typical heating jacket comprises an outer silicone cloth 110, insulating glass fiber wool 120, a silicone rubber heating device 130, and an inner Teflon cloth 140, which are stacked in sequence. The inner Teflon cloth 140 is used to wrap around a pipe 150, allowing the heating jacket to wrap around the pipe 150 and heat it.

[0004] Typically, a resistance wire is disposed within the silicone rubber heating device 130. When energized, the resistance wire generates heat energy. Because the outer layer of the heating device is insulated by the insulating glass fiber wool 120, the heat energy can only be transferred inward (toward the pipeline 150), thereby heating the pipeline 150. In actual implementation, temperature control is achieved through PID control, for example, maintaining a target temperature of 180 degrees (i.e., normal operating temperature).

[0005] In actual implementation, for safety reasons, a thermal fuse (whose specification temperature is higher than the target temperature) is usually installed on the heating path of the silicone rubber heating device 130 as a safety guarantee to prevent the temperature of the silicone rubber heating device 130 from getting out of control during use.

[0006] However, the existing solutions have the following disadvantages:

[0007] During the actual use of the silicone rubber heating device 130, there may be factors such as the heating part not tightly wrapping the pipe 150 or the heating part not fitting the size, which will cause the silicone rubber heating device 130 to burn out. The temperature sensor 240 and thermal fuse used for PID control can only detect the temperature of one point, which will cause high temperature to be generated in a local position of the silicone rubber heating device 130, and burn the insulating glass fiber cotton 120 and the inner layer of Teflon cloth 140 on both sides of the silicone rubber heating device 130, and affect the temperature of the transmitted liquid or gas.

[0008] The temperature sensor 240 used for thermal melting or PID control exceeds its service life and fails, causing the silicone rubber heating device 130 to be in a heating state all the time, causing the temperature of the silicone rubber heating device 130 to continue to rise, and burn the insulating glass fiber cotton 120 and the inner layer of Teflon cloth 140 on both sides of the silicone rubber heating device 130, and affecting the temperature of the transmitted liquid or gas.

[0009] When the temperature at the thermal fuse reaches the trigger temperature due to the aforementioned issues, the thermal fuse activates, disconnecting the heating circuit. Since the thermal fuse is a disposable electrical component with no self-recovery capability, its activation will render the entire silicone rubber heating device 130 useless and scrapped. The silicone rubber heating device 130 within the heating jacket assembly cannot be repaired on-site, requiring the entire heating jacket assembly to be replaced, which is costly and results in poor product stability. Utility Model Content

[0010] The utility model provides a heating device, comprising: a heating plate; a resistance wire arranged on the heating plate; a plurality of first self-recovery type thermal protection devices distributed at different positions on the heating plate, wherein the plurality of first self-recovery type thermal protection devices are connected in parallel to form a first self-recovery type thermal protection unit; a temperature sensor distributed on the heating plate, for detecting the temperature of the heating plate and outputting a temperature detection signal; a PID controller, receiving the temperature detection signal and outputting a control signal according to the temperature detection signal; a switch unit, receiving the control signal and being in an on or off state according to the control signal, wherein the switch unit, the first self-recovery type thermal protection unit, the resistance wire and an external power supply for power supply are connected in series to form a heating path.

[0011] Furthermore, the heating plate is used to wrap the pipeline.

[0012] Furthermore, the heating plate has an X direction and a Y direction at a certain angle to the X direction, and the multiple first self-recovery thermal protection devices are distributed at different positions along the Y direction of the heating plate, wherein the Y direction of the heating plate is consistent with the length direction of the pipeline wrapped by it.

[0013] Furthermore, the plurality of first self-recovery thermal protection devices are evenly distributed in the Y direction of the heating plate.

[0014] Furthermore, when the temperature detection signal is higher than a temperature threshold, the control signal controls the switch unit to be disconnected; otherwise, the control signal controls the switch unit to be connected.

[0015] Furthermore, it also includes: multiple second self-recovering thermal protection devices, distributed at different positions on the heating plate, wherein the multiple second self-recovering thermal protection devices are connected in parallel to form a second self-recovering thermal protection unit, wherein the switch unit, the first self-recovering thermal protection unit, the second self-recovering thermal protection unit, the resistance wire and the external power supply for power supply are connected in series to form a heating path.

[0016] Furthermore, the first self-recovering thermal protection device and the second self-recovering thermal protection device are normally closed self-recovering thermal protection devices. When their own temperatures rise to their operating temperature values, the normally closed self-recovering thermal protection devices are activated to cut off the connection between their two ends. When their own temperatures drop to the recovery temperature, the connection between their two ends is automatically restored.

[0017] Furthermore, the operating temperature value of the first self-recovery thermal protection device is greater than the temperature threshold.

[0018] Furthermore, the operating temperature value of the second self-resetting thermal protection device is greater than the operating temperature value of the first self-resetting thermal protection device, and the operating temperature value of the first self-resetting thermal protection device is greater than the temperature setting value.

[0019] Furthermore, the operating temperature value of the first self-resetting thermal protection device is greater than the operating temperature value of the second self-resetting thermal protection device, and the operating temperature value of the second self-resetting thermal protection device is greater than the temperature setting value.

[0020] The present application also proposes a heating jacket device, comprising: an outer layer of silicone cloth, insulating glass fiber wool, a silicone rubber heating device and an inner layer of Teflon cloth stacked in sequence, wherein the inner layer of Teflon cloth is used to wrap the pipeline, so that the heating jacket device wraps the pipeline to heat the pipeline, and the silicone rubber heating device is the above-mentioned heating device. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.

[0022] Figure 1 A schematic diagram of a typical pipeline heating jacket setup is shown.

[0023] Figure 2 A schematic diagram of an equivalent circuit of a heating device provided in one embodiment of the present utility model is shown.

[0024] Figure 3A schematic diagram of a heating device provided in one embodiment of the present utility model is shown.

[0025] Figure 4 A schematic diagram of a heating device provided by another embodiment of the present invention is shown.

[0026] Figure 5 A schematic diagram of an equivalent circuit of a heating device provided in another embodiment of the present invention is shown.

[0027] Figure 6 A schematic diagram of a heating device provided by another embodiment of the present invention is shown. DETAILED DESCRIPTION

[0028] The following will be combined with the drawings in the embodiments of this application to clearly and completely describe the technical solutions in the embodiments of this application. Obviously, the embodiments described are part of the embodiments of this application, not all of them. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without making creative efforts are within the scope of protection of this application.

[0029] It should be understood that the terms "first," "second," and the like in the claims, specification, and drawings of this application are used to distinguish different objects, rather than to describe a specific order. The terms "comprise" and "comprising" used in the specification and claims of this application indicate the presence of the described features, integers, steps, operations, elements, and / or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and / or combinations thereof.

[0030] See also Figure 2 The equivalent circuit diagram of the heating device provided by one embodiment of the present invention is shown, and Figure 3 The schematic diagram of a heating device provided by an embodiment of the present invention is shown, and the heating device 200 includes:

[0031] Heating plate 210;

[0032] The resistance wire 220 is arranged on the heating plate 210;

[0033] A plurality of first self-recovery type thermal protection devices are distributed at different positions on the heating plate 210 , wherein the plurality of first self-recovery type thermal protection devices are connected in parallel to form a first self-recovery type thermal protection unit 230 ;

[0034] The temperature sensor 240 is distributed on the heating plate 210 and is used to detect the temperature of the heating plate 210 and output a temperature detection signal Tc;

[0035] The PID controller 250 receives the temperature detection signal Tc and outputs a control signal Sc according to the temperature detection signal Tc;

[0036] The switch unit S1 receives the control signal Sc and is in the on or off state according to the control signal Sc.

[0037] The switch unit S1, the first self-recovery thermal protection unit 230, the resistance wire 220 and the external power supply for power supply are connected in series to form a heating path.

[0038] Figure 3 FIG. 2 shows only the first self-recovery thermal protection unit 230 distributed on the heating plate 210 . In fact, the resistance wire 220 , the temperature sensor 240 , the PID controller 250 and the switch unit S1 are also distributed on the heating plate 210 .

[0039] Please combine Figure 1 In actual implementation, the heating device 200 may be Figure 1 The silicone rubber heating device shown in FIG. The heating plate 210 is used to wrap a pipeline for transmitting gas or liquid, so that the heating device 200 wraps the pipeline for transmitting gas or liquid, and the resistance wire 220 is arranged on the heating plate 210. When the heating path is connected, the resistance wire 220 generates heat to heat the pipeline.

[0040] As mentioned above, the temperature of the heating plate 210 is sampled by the temperature sensor 240, so that the PID controller 250 controls the on and off of the heating path according to the temperature detection signal Tc to realize the control of the temperature of the heating plate 210, such as controlling it at a target temperature of 180 degrees (i.e., normal operating temperature). On this basis, the present application connects a first self-recovery thermal protection unit 230 formed by a plurality of first self-recovery thermal protection devices in parallel in the heating path. When there are faults such as the heating part wrapping the pipeline 150 not tightly or the heating part size not fitting, PID control failure, etc., when the operating temperature of the first self-recovery thermal protection device is reached, the first self-recovery thermal protection device will be disconnected, and when the plurality of first self-recovery thermal protection devices are all disconnected, the heating path will be disconnected. That is, the power-off triggered by a single first self-recovery thermal protection device will not cause the entire heating device 200 to be powered off, which helps the heating device 200 to maintain the temperature within a suitable range, provide a long-lasting and stable heating effect, and maintain a stable temperature. When the temperature returns to the recovery temperature of the first self-recovery thermal protection device, the first self-recovery thermal protection device automatically returns to the normally closed state, connects the circuit again, and resumes heating without the need to replace the heating jacket device as a whole, and there is no maintenance cost.

[0041] In one embodiment, if Figure 3As shown, the heating plate 210 has an X-direction and a Y-direction at a certain angle to the X-direction. Multiple first self-recovering thermal protection devices are distributed at different positions along the Y-direction of the heating plate 210, where the Y-direction of the heating plate 210 is consistent with the length direction of the pipeline it wraps. In other words, the multiple first self-recovering thermal protection devices are distributed at different positions along the length of the pipeline, thereby being able to respond to the temperature at different positions along the length of the pipeline. This is because, according to the applicant's research, when the heating plate 210 wraps around a pipeline, temperature deviations generally occur at different positions along the length of the pipeline on the heating plate 210, while no significant temperature deviations occur along the circumference of the pipeline on the heating plate.

[0042] In actual implementation, the number of first self-recovery type thermal protection devices can be set according to the length of the pipeline to be heated (i.e., the length of the heating plate 210 in the Y direction). Generally, as the length of the pipeline increases, the number of first self-recovery type thermal protection devices increases. For example, for a 1m long pipeline, two first self-recovery type thermal protection devices can be arranged in parallel in the Y direction of the heating plate 210. Figure 3 More specifically, Figure 3 As shown, two first self-recovery type thermal protection devices are respectively distributed at both ends of the Y direction of the heating plate 210. For example, for a 1.3m long pipeline, three first self-recovery type thermal protection devices in parallel can be arranged in the Y direction of the heating plate 210. Figure 4 The schematic diagram of the heating device provided by another embodiment of the present invention is shown in FIG. Figure 4 As shown, two first self-recovery type thermal protection devices are respectively distributed at both ends of the Y direction of the heating plate 210, and one first self-recovery type thermal protection device is distributed in the middle position of the Y direction of the heating plate 210. That is, multiple first self-recovery type thermal protection devices are evenly distributed in the Y direction of the heating plate 210. Of course Figure 3 and Figure 4 These are just two embodiments. More first self-recovering thermal protection devices can be selected as needed, and their positions can also be slightly adjusted. In this way, multiple first self-recovering thermal protection devices are connected in parallel and distributed at different positions on the entire heating device 200 to collect the temperatures at different positions on the entire heating device 200. When a fault phenomenon such as empty burning occurs, resulting in local overheating, the triggering of individual first self-recovering thermal protection devices will not cause the entire heating device to be powered off, which helps the heating device to maintain the temperature within a suitable range, provide a long-lasting and stable heating effect, and maintain a stable temperature. When all first self-recovering thermal protection devices are triggered, the entire heating device is powered off to achieve overheating protection, which makes thermal protection more comprehensive and safer.

[0043] As described above, it can be understood that the first self-resetting thermal protection device is a normally closed self-resetting thermal protection device. When its own temperature rises to its operating temperature value, the normally closed self-resetting thermal protection device actuates to cut off the connection between its two ends. When its own temperature drops to, or returns to, the recovery temperature, the connection between its two ends is automatically restored. In other words, it can automatically disconnect or restore without the need for human maintenance. In actual implementation, the first self-resetting thermal protection device can be a temperature-controlled switch, a thermostat, a thermal protection switch, or a temperature switch, as long as it is normally closed and self-resetting. For example, in one embodiment, a self-resetting thermal protection device including a bimetallic strip can be selected. When the appliance is operating normally, the bimetallic strip is in a free state and the contacts are in a closed state. When the temperature rises to the operating temperature value, the bimetallic element is heated to generate internal stress and actuates rapidly, opening the contacts and cutting off the circuit, thereby providing thermal protection. When the temperature drops to the recovery temperature, the contacts automatically close, resuming normal operation.

[0044] For PID control, when the temperature detection signal Tc is higher than a temperature threshold, the control signal Sc output by the PID controller 250 controls the switch unit S1 to be turned off, thereby disconnecting the heating path and lowering the temperature of the heating plate 210. Otherwise, the control signal Sc controls the switch unit S1 to be turned on, thereby connecting the heating path and heating the resistance wire 220 to raise the temperature of the heating plate 210. In this way, by controlling the on and off of the switch unit S1, the temperature of the heating plate 210 is controlled, thereby controlling the temperature of the gas or liquid in the pipeline. In actual implementation, the PID controller 250 can be any type of controller, and this application does not limit this.

[0045] for Figure 2 The heating device 200 shown, with its temperature sensor 240, PID controller 250, and switch unit S1, forms a control loop for the temperature of the heating plate 210. The first self-resetting thermal protection unit 230 constitutes the primary self-resetting protection device of the heating device 200. In actual implementation, the operating temperature of the first self-resetting thermal protection device is greater than the temperature threshold. This allows the first self-resetting thermal protection unit 230 to provide protection in the event of PID control failure.

[0046] In a specific embodiment, the operating temperature value of the first self-recovery thermal protection device can be selected as 210°C, and the temperature threshold of the PID control can be selected as 180°C.

[0047] Of course, the temperature threshold of the PID control and the operating temperature value of the first self-resetting thermal protection device can be adjusted according to actual needs, and can also be set according to the characteristics of the heating jacket device, as long as the gas or liquid temperature is guaranteed to be at the desired value and the heating jacket device is not damaged. For example, in another specific embodiment, the operating temperature value of the first self-resetting thermal protection device can be selected as 240°C, and the temperature threshold of the PID control can be selected as 180°C. Compared to the embodiment in which the operating temperature value of the first self-resetting thermal protection device is selected as 210°C, the first self-resetting thermal protection device with an operating temperature value of 240°C can achieve protection for higher temperatures.

[0048] In actual implementation, Figure 3 and Figure 4 As shown, the first self-recovery type thermal protection device and the temperature sensor 240 are distributed at different positions on the heating plate 210, so that the temperature at different positions on the heating plate 210 can be detected and control and protection can be achieved accordingly.

[0049] In another embodiment of the present application, please refer to Figure 5 The equivalent circuit diagram of the heating device provided by another embodiment of the present invention is shown, and Figure 6 The schematic diagram of the heating device 200 provided in another embodiment of the present invention is shown in FIG. Figure 2 The heating device shown also includes:

[0050] A plurality of second self-recovery type thermal protection devices are distributed at different positions on the heating plate 210, wherein the plurality of second self-recovery type thermal protection devices are connected in parallel to form a second self-recovery thermal protection unit 260.

[0051] The switch unit S1, the first self-resetting thermal protection unit 230, the second self-resetting thermal protection unit 260, the resistance wire 220 and the external power supply for power supply are connected in series to form a heating path.

[0052] In this way, the first self-recovery thermal protection unit 230 and the second self-recovery thermal protection unit 260 form a two-level protection, making the protection more comprehensive.

[0053] In actual implementation, the functions, characteristics and working principles of the second self-recovery thermal protection device are the same as those of the first self-recovery thermal protection device, and are not described in detail here.

[0054] In actual implementation, the operating temperature value of the second self-recovery type thermal protection device can be selected to be greater than the operating temperature value of the first self-recovery type thermal protection device, and the operating temperature value of the first self-recovery type thermal protection device can be greater than the temperature setting value. For example, the operating temperature value of the second self-recovery type thermal protection device can be selected to be 240℃, the operating temperature value of the first self-recovery type thermal protection device can be selected to be 210℃, and the temperature threshold of the PID control can be selected to be 180℃. That is, relative to Figure 2 In addition to the primary protection consisting of multiple parallel-connected first self-resetting thermal protection devices with lower temperatures, the secondary protection consisting of multiple parallel-connected second self-resetting thermal protection devices with higher temperatures provides more comprehensive protection. In this case, if the primary protection fails, such as when the multiple parallel-connected first self-resetting thermal protection devices should have disconnected but have not, the resistance wire 220 continues to heat. When the operating temperature of the second self-resetting thermal protection device is reached, the second self-resetting thermal protection device disconnects. Similarly, the heating path is not cut off until all the second self-resetting thermal protection devices have operated.

[0055] In actual implementation, the operating temperature value of the first self-recovery type thermal protection device can be selected to be greater than the operating temperature value of the second self-recovery type thermal protection device, and the operating temperature value of the second self-recovery type thermal protection device can be greater than the temperature setting value. For example, the operating temperature value of the first self-recovery type thermal protection device can be selected to be 240℃, the operating temperature value of the second self-recovery type thermal protection device can be selected to be 210℃, and the temperature threshold of the PID control can be selected to be 180℃. That is, relative to Figure 2 On the basis of higher temperature protection, low temperature protection is added to make the protection more comprehensive.

[0056] In actual implementation, please refer to Figure 6 The first self-recovery type thermal protection device, the second self-recovery type thermal protection device and the temperature sensor 240 are distributed at different positions on the heating plate 210 , so that the temperatures at different positions on the heating plate 210 can be detected.

[0057] In actual implementation, this application also provides a heating jacket device, which can be found in Figure 1 It includes an outer layer of silicone cloth, thermal insulation glass fiber cotton, a silicone rubber heating device and an inner layer of Teflon cloth stacked in sequence, wherein the inner layer of Teflon cloth is used to wrap the pipeline, so that the heating jacket device wraps the pipeline to heat the pipeline, wherein the silicone rubber heating device is the above-mentioned heating device 200.

[0058] The above structure can effectively avoid the problem of stopping heating due to a temperature error alarm, while ensuring that the temperature of the heating device is basically constant, safe and reliable, and has no maintenance costs.

[0059] The above specific embodiments and accompanying drawings are merely illustrative of the technical solutions and technical effects of the present invention and are not intended to limit the present invention. Any person skilled in the art may, without violating the technical principles and spirit of the present invention, modify or alter the above embodiments within the scope of the claims, and all such modifications and variations shall fall within the scope of protection of the present invention.

Claims

1. A heating device for heating a pipeline, characterized in that: include: Heating plate; resistance wires arranged on the heating plate; a plurality of first self-recovery type thermal protection devices, distributed at different positions on the heating plate, wherein the plurality of first self-recovery type thermal protection devices are connected in parallel to form a first self-recovery type thermal protection unit; A temperature sensor is distributed on the heating plate, and is used to detect the temperature of the heating plate and output a temperature detection signal; a PID controller, receiving the temperature detection signal and outputting a control signal according to the temperature detection signal; The switch unit receives the control signal and is in an on or off state according to the control signal. The switch unit, the first self-recovery thermal protection unit, the resistance wire and an external power supply for power supply are connected in series to form a heating path.

2. The heating device according to claim 1, characterized in that The heating plate is used to wrap the pipeline.

3. The heating device according to claim 2, characterized in that The heating plate has an X direction and a Y direction at a certain angle to the X direction, and the multiple first self-recovery thermal protection devices are distributed at different positions along the Y direction of the heating plate, wherein the Y direction of the heating plate is consistent with the length direction of the pipeline wrapped by it.

4. The heating device according to claim 3, characterized in that The plurality of first self-recovery type thermal protection devices are evenly distributed in the Y direction of the heating plate.

5. The heating device according to claim 1 or 4, characterized in that: When the temperature detection signal is higher than a temperature threshold, the control signal controls the switch unit to be turned off; otherwise, the control signal controls the switch unit to be turned on.

6. The heating device according to claim 5, characterized in that Also includes: A plurality of second self-recovery type thermal protection devices are distributed at different positions on the heating plate, wherein the plurality of second self-recovery type thermal protection devices are connected in parallel to form a second self-recovery thermal protection unit. The switch unit, the first self-resetting thermal protection unit, the second self-resetting thermal protection unit, the resistance wire and an external power supply for power supply are connected in series to form a heating path.

7. The heating device according to claim 6, characterized in that The first self-recovery thermal protection device and the second self-recovery thermal protection device are normally closed self-recovery thermal protection devices. When their own temperatures rise to their operating temperature values, the normally closed self-recovery thermal protection devices are activated to cut off the connection between their two ends. When their own temperatures drop to the recovery temperature, the connection between their two ends is automatically restored.

8. The heating device according to claim 5, characterized in that The operating temperature value of the first self-recovery thermal protection device is greater than the temperature threshold.

9. The heating device according to claim 6, characterized in that The operating temperature value of the second self-resetting thermal protection device is greater than the operating temperature value of the first self-resetting thermal protection device, and the operating temperature value of the first self-resetting thermal protection device is greater than the temperature setting value.

10. The heating device according to claim 6, characterized in that The operating temperature value of the first self-resetting thermal protection device is greater than the operating temperature value of the second self-resetting thermal protection device, and the operating temperature value of the second self-resetting thermal protection device is greater than a temperature setting value.

11. A heating jacket device, characterized in that: include: An outer layer of silicone cloth, insulating glass fiber wool, a silicone rubber heating device and an inner layer of Teflon cloth are stacked in sequence, wherein the inner layer of Teflon cloth is used to wrap the pipeline, so that the heating jacket device wraps the pipeline to heat the pipeline, and the silicone rubber heating device is the heating device according to claim 1.

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