Nozzle fixing structure

Abstract

The utility model provides a nozzle fixing structure which comprises a first support, a second support and a third support, the first support, the second support and the third support are formed on a spraying arm, the second support is fixed on the first support in a vertical position adjustable mode, the third support is fixed on the second support in a vertical swing angle adjustable mode, and a nozzle fixing portion is arranged on the third support. The height and angle of the nozzle can be adjusted, and the requirement of a new cleaning process is met.

Description

Technical Field

[0001] The utility model belongs to the technical field of semiconductor cleaning, and in particular relates to a nozzle fixing structure. Background Art

[0002] If wafers are contaminated by dust particles or metal during the manufacturing process, it can easily damage the chip's internal circuitry, causing short circuits or open circuits, leading to integrated circuit failure. Therefore, in addition to eliminating external contamination sources, wafers must be cleaned using wafer spray equipment before processes such as high-temperature diffusion and ion implantation. During wafer cleaning, nozzles on a spray arm spray clean water and process fluid onto the wafer.

[0003] Currently, the nozzles cannot be adjusted in height and angle on the spray arms, which cannot meet the needs of new cleaning processes. Utility Model Content

[0004] Based on this, in order to solve the above technical problems, a nozzle fixing structure is provided.

[0005] In order to solve the above technical problems, the present invention adopts the following technical solutions:

[0006] A nozzle fixing structure is characterized in that it includes a first bracket, a second bracket and a third bracket formed on the spray arm, the second bracket is fixed to the first bracket in an adjustable up and down position, the third bracket is fixed to the second bracket in an adjustable up and down swing angle, and the third bracket has a nozzle fixing part.

[0007] The first bracket of the utility model is formed on the spray arm, the second bracket is fixed to the first bracket in an adjustable up and down position, the third bracket is fixed to the second bracket in an adjustable up and down swing angle, and the third bracket has a nozzle fixing part, so that the nozzle height and angle can be adjusted to meet the needs of the new cleaning process. BRIEF DESCRIPTION OF THE DRAWINGS

[0008] Figure 1 It is a structural diagram of the utility model;

[0009] Figure 2 It is a structural schematic diagram of the reverse side of the present invention. DETAILED DESCRIPTION

[0010] The following will illustrate the implementation of the present utility model in conjunction with the drawings in the specification. It should be noted that the implementation methods involved in this specification are not exhaustive and do not represent the only implementation methods of the present utility model. The following corresponding embodiments are only for the purpose of clearly illustrating the utility model content of the utility model patent and are not intended to limit its implementation methods. For ordinary technicians in this field, different forms of changes and modifications can be made on the basis of the description of this embodiment. All obvious changes or modifications that belong to the technical concept and utility model content of the present utility model are also within the scope of protection of the present utility model.

[0011] like Figure 1 As shown, an embodiment of the present application provides a nozzle fixing structure, including a first bracket 1100 , a second bracket 1200 , and a third bracket 1300 .

[0012] The first bracket 1100 is formed on the spray arm 2, which includes a vertical fixing plate 1110 and an L-shaped plate 1120. The horizontal portion 1121 of the L-shaped plate 1120 is fixed to the front side (the left side in the figure) of the fixing plate 1110. The front side surface of the vertical portion 1122 located in front of the horizontal portion 1121 forms a first straight rack 1122a in the up and down direction with the tooth surface facing forward. The front side of the vertical portion 1122 forms two first positioning screw holes in the left and right directions (not shown in the figure), and the two first positioning screw holes are arranged at intervals in the upper and lower directions.

[0013] The second bracket 1200 is in the shape of a plate. Figure 2 As shown, a second linear rack 1210 with a tooth surface facing backward is connected to the middle of the reverse side by bolts in the up-down direction, and the second linear rack 1210 corresponds to the first linear rack 1122a.

[0014] like Figure 1 As shown, the second bracket 1200 has two positioning waist-shaped holes 1220, which are arranged at intervals up and down and correspond one to one with the two first positioning screw holes respectively, and each positioning waist-shaped hole 1220 is arranged vertically.

[0015] like Figure 1 As shown, an inner arc-shaped rack 1230 and second positioning screw holes in left and right directions (not shown in the figure) are formed on the front side of the second bracket 1200.

[0016] The inner arc rack 1230 means that its teeth are located on the inner concave surface of the rack body. In this embodiment, the tooth surface formed by the teeth of the inner arc rack 1230 faces downward, and the central angle of the inner arc rack 1230 is 90 degrees. It is arranged to extend from the twelve o'clock direction to the three o'clock direction.

[0017] The second positioning screw hole is formed on the second bracket 1200 at a position corresponding to the center of the inner arc-shaped rack 1230 .

[0018] like Figure 1 As shown, the third bracket 1300 is a fan-shaped plate having an outer arc-shaped rack 1310 corresponding to the inner arc-shaped rack 1230 and a positioning circular hole 1320 corresponding to the second positioning screw hole.

[0019] The outer arc-shaped rack 1310 refers to a rack whose tooth portion is located on the outer convex surface of the rack body, which is formed on the circumferential surface of the fan-shaped plate body. In this embodiment, the tooth surface formed by the tooth portion of the outer arc-shaped rack 1310 faces upward and is shorter than the inner arc-shaped rack 1230.

[0020] The positioning circular hole 1320 is formed on the sector-shaped plate at a position corresponding to the center of the outer arc-shaped rack 1310 .

[0021] Among them, the second bracket 1200 is adjustably fixed to the first bracket 1100 in the upper and lower positions: the first bracket 1100 and the second bracket 1200 are meshed and connected by the first linear rack 1122a and the second linear rack 1210, and are fixed by the first positioning screw 3 that passes through the positioning waist hole 1220 and is locked with the first positioning screw hole. When it is necessary to adjust the height of the second bracket 1200 on the first bracket 1100, loosen the first positioning screw 3, adjust the meshing position of the first linear rack 1122a and the second linear rack 1210, and after the second bracket 1200 reaches the target height, retighten the first positioning screw 3.

[0022] The third bracket 1300 is fixed on the second bracket 1200 with an adjustable up and down swing angle: the second bracket 1200 and the third bracket 1300 are connected by the inner arc rack 1230 and the outer arc rack 1310, and are fixed by the second positioning screw 4 passing through the positioning circular hole 1320 and locked with the second positioning screw hole. When the angle of the third bracket 1300 needs to be adjusted, loosen the second positioning screw 4, adjust the meshing position of the inner arc rack 1230 and the outer arc rack 1310, and when the third bracket 1300 reaches the target angle, retighten the second positioning screw 4.

[0023] Based on the above-mentioned engagement structure, it is not only convenient for the user to adjust to the required height and angle, but also can ensure that the height and angle are not affected by vibration.

[0024] A nozzle fixing portion 1330 is integrally formed on the third bracket 1300. In this embodiment, the nozzle fixing portion 1330 is arranged on the front side of the above-mentioned fan-shaped plate body. It is designed to be a tube body with screw holes 1331 on the circumference of the tube body. The nozzle 5 passes through the tube body and is locked on the circumference by screws.

[0025] From the above, it can be seen that the embodiment of the present application provides a nozzle fixing structure, in which the first bracket is formed on the spray arm, the second bracket is fixed to the first bracket in an adjustable up and down position, the third bracket is fixed to the second bracket in an adjustable up and down swing angle, and the third bracket has a nozzle fixing part, so that the nozzle height and angle can be adjusted to meet the requirements of the new cleaning process.

[0026] In addition, the embodiment of the present application realizes the adjustment of height and angle through the meshing structure, which not only facilitates the user to adjust to the required height and angle, but also ensures that the height and angle are not affected by the vibration generated by the process.

[0027] Obviously, those skilled in the art should realize that the above embodiments are only used to illustrate the present invention and are not used to limit the present invention. As long as they are within the spirit of the present invention, any changes or modifications to the above embodiments will fall within the scope of the claims of the present invention.

Claims

1. A nozzle fixing structure, characterized in that: The spraying device comprises a first bracket, a second bracket and a third bracket formed on the spray arm, wherein the second bracket is fixed to the first bracket in an adjustable vertical position, the third bracket is fixed to the second bracket in an adjustable vertical swing angle, and the third bracket has a nozzle fixing portion; The first bracket includes a vertical fixing plate and an L-shaped plate, the horizontal portion of the L-shaped plate is fixed to the front side of the fixing plate, the front side surface of the vertical portion located in front of the horizontal portion forms a first linear rack in the up-down direction with the tooth surface facing forward, the front side of the vertical portion forms a first positioning screw hole in the left-right direction, the second bracket is plate-shaped, the reverse side of which forms a second linear rack in the up-down direction with the tooth surface facing backward, the second bracket has a positioning waist-shaped hole corresponding to the first positioning screw hole and arranged vertically, the first bracket and the second bracket are meshed and connected by the first linear rack and the second linear rack, and are fixed by a first positioning screw that passes through the positioning waist-shaped hole and is locked in the first positioning screw hole; An inner arc rack and second positioning screw holes in the left and right directions are formed on the front of the second bracket, and the second positioning screw holes are formed on the second bracket at a position corresponding to the center of the inner arc rack. The third bracket is a fan-shaped plate body, which has an outer arc rack corresponding to the inner arc rack and a positioning circular hole corresponding to the second positioning screw hole. The outer arc rack is formed on the circumferential surface of the fan-shaped plate body, and the positioning circular hole is formed on the fan-shaped plate body at a position corresponding to the center of the outer arc rack. The second bracket and the third bracket are engaged with each other through the inner arc rack and the outer arc rack, and are fixed by a second positioning screw that passes through the positioning circular hole and is locked with the second positioning screw hole.

2. The nozzle fixing structure according to claim 1, characterized in that: The tooth surface of the inner arc-shaped rack faces downward, and the tooth surface of the outer arc-shaped rack faces upward and is shorter than the inner arc-shaped rack.

3. The nozzle fixing structure according to claim 1, characterized in that: The nozzle fixing portion is arranged on the front side of the fan-shaped plate body.

4. The nozzle fixing structure according to claim 1, characterized in that: The nozzle fixing part is a tube body for the nozzle to pass through, and the peripheral surface of the tube body is provided with screw holes.

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