Clamping device

Abstract

The utility model provides a clamping device which is used in photomask box cleaning equipment and comprises a distance adjusting mechanism and a clamping part connected with the distance adjusting mechanism, the distance adjusting part is used for adjusting the distance between the clamping part and a side panel in the first direction, and when the clamping part abuts against the side panel, the clamping device is matched with a first limiting part, and the clamping part is matched with a second limiting part; the photomask box base clamping device is used for clamping a photomask box base in the first direction, the vibration risk caused by high-speed rotation and water flow lasing is effectively eliminated, the stability of a photomask box in the cleaning process is ensured, and equipment dynamic balance unbalance and potential structural damage caused by vibration are avoided. Collision and friction between the photomask box base and the limiting piece in the cleaning equipment are avoided, the abrasion rate of the photomask box base is reduced, the service life of the photomask box is prolonged, and the cleanliness of the cleaned photomask box is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of mask box cleaning, in particular to a clamping device. Background Art

[0002] In the semiconductor and microelectronics manufacturing industries, reticle pods are essential equipment for storing photomasks. Their primary design objective is to provide a clean, dust-free, and anti-static storage environment for them. They effectively reduce contamination from external dust and other contaminants, while also protecting them from collisions and damage during production and transportation, ensuring their integrity and performance.

[0003] Due to the stringent requirements of the mask storage environment, reticle pods require cleaning after a certain number of uses to remove accumulated contaminants and maintain performance. Existing reticle pod cleaning techniques typically involve separating the top and base of the pod and placing it on a cleaning rack within a cleaning machine. The cleaning rack consists of a frame and stoppers to ensure the stability and safety of the reticle during the cleaning process.

[0004] The cleaning process includes rinsing, rinsing, drying, drying, and cooling, all of which are automatically performed by the cleaning machine. Throughout the cleaning process, the cassette rotates between high and low speeds, utilizing centrifugal force to enhance the cleaning effect. However, during the cleaning process, due to the high-speed rotation of the cassette and the jet of water, the cassette may vibrate on the cleaning rack. This vibration can cause the equipment's dynamic balance to become unbalanced, leading to machine errors and impacting production capacity. Furthermore, collisions between the cassette and the cleaning rack during the cleaning process can cause wear and scratches on the cassette. This wear not only reduces the cassette's cleanliness but also shortens its service life, potentially affecting the quality and reliability of the final product.

[0005] Therefore, in order to prevent the dynamic balance of the equipment from being unbalanced and to reduce the wear of the mask box, the present application provides a clamping device. Utility Model Content

[0006] In view of the problems in the prior art that the mask box may vibrate on the cleaning rack during the cleaning process, and the collision between the mask box and the cleaning rack may cause wear and scratches on the mask box, the present application provides a clamping device. The clamping device includes a distance adjustment mechanism and a clamping member. The distance adjustment mechanism can adjust the distance between the clamping member and the side panel along the first direction so that the clamping member abuts against the side panel, thereby ensuring that the mask box base is clamped during the cleaning process, effectively eliminating the risk of vibration caused by high-speed rotation and water jet, ensuring the stability of the mask box during the cleaning process, and avoiding imbalance of the dynamic balance of the equipment and potential structural damage caused by vibration; after the mask box base is clamped, the collision and friction between the mask box base and the cleaning rack are avoided, and the wear and scratches of the mask box base are avoided, thereby extending the service life of the mask box and improving the cleanliness of the mask box after cleaning.

[0007] One embodiment of the present application provides a clamping device, the clamping device being used in a photomask box cleaning device, the photomask box cleaning device comprising a cleaning rack, the cleaning rack comprising side panels arranged opposite to each other along a first direction; a guide post being provided between the two side panels along the first direction; first limiting members being provided at both ends of the guide post close to the cleaning rack along the first direction, the first limiting member being provided with a limiting protrusion along the first direction; a second limiting member being provided at one side of the guide post along the second direction, the second limiting member being provided with a groove along the second direction; the first limiting member, the limiting protrusion, the groove, and the guide post forming an accommodating space for supporting a photomask box base; the first direction being perpendicular to the second direction;

[0008] In which, the clamping device is provided on the surface of the first limiting member facing away from the accommodating space, and the clamping device at least includes a distance adjustment mechanism and a clamping member connected to the distance adjustment mechanism; the distance adjustment member is used to adjust the distance between the clamping member and the side panel in the first direction, and when the clamping member abuts against the side panel, the clamping device cooperates with the first limiting member to clamp the photomask box base in the first direction.

[0009] As an embodiment, the distance adjustment mechanism includes a connecting rod and a driving member, the first end of the connecting rod is rotatably connected to the driving member, and the second end of the connecting rod is rotatably connected to the first end of the clamping member.

[0010] As an embodiment, the connecting rod has an arc-shaped structure.

[0011] As an embodiment, the clamping device further includes a base, and the base is fixed to a surface of the first limiting member facing away from the accommodating space.

[0012] As an embodiment, the driving member is connected to the base via a rotating shaft, and the driving member includes a first state and a second state when rotating around the rotating shaft. The first state is that the clamping member is in contact with the side panel; the second state is that there is a gap between the clamping member and the side panel.

[0013] As an embodiment, the driving member rotates 0° to 180° around the rotating shaft.

[0014] As an embodiment, the driving member is provided with a handle.

[0015] As an embodiment, a guide hole is provided on the base, and the second end of the clamping member passes through the guide hole.

[0016] As an embodiment, the clamping member is a clamping rod.

[0017] As described above, the clamping device of the present application has the following beneficial effects:

[0018] The clamping device of the present application includes a distance adjustment mechanism and a clamping member. The distance adjustment mechanism adjusts the distance between the clamping member and the side panel so that the clamping member abuts against the side panel, thereby clamping the base of the mask box, effectively eliminating the vibration risk caused by high-speed rotation and water jetting, ensuring the stability of the mask box during the cleaning process, avoiding dynamic imbalance of the equipment and potential structural damage caused by vibration; avoiding collision and friction between the base of the mask box and the limit parts in the cleaning equipment, reducing the wear rate of the base of the mask box, extending the service life of the mask box, and improving the cleanliness of the mask box after cleaning. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It shows a schematic structural diagram of a cleaning rack in a photomask box cleaning device in the prior art.

[0020] Figure 2 Shown is a structural schematic diagram of a clamping device according to an embodiment of the present utility model.

[0021] Figure 3 It is a structural schematic diagram showing that a clamping device according to an embodiment of the present invention is disposed on a cleaning rack in a mask box cleaning device.

[0022] Component number description

[0023] 10, cleaning rack; 11, side panel; 12, guide column; 13, first stopper; 14, stopper protrusion; 15, second stopper;

[0024] 20, mask box base;

[0025] 100, clamping device; 110, distance adjustment mechanism; 101, connecting rod; 102, driving member; 120, clamping member; 130, base; 131, guide hole. DETAILED DESCRIPTION

[0026] The following describes the embodiments of the present invention through specific examples. Those skilled in the art will readily understand the other advantages and benefits of the present invention from the disclosure herein. The present invention may also be implemented or applied through various other specific embodiments, and the details in this specification may be modified or altered based on different perspectives and applications without departing from the spirit of the present invention.

[0027] See also Figures 1 to 3 It should be noted that the illustrations provided in this embodiment are merely schematic illustrations of the basic concept of the present invention. Therefore, the illustrations only show components related to the present invention and are not drawn according to the number, shape, and size of components in actual implementation. In actual implementation, the type, quantity, and proportion of each component may be changed arbitrarily, and the component layout may also be more complex.

[0028] In the semiconductor manufacturing and microelectronics industries, photomasks (also known as photomasks or photolithography masks) are critical components used to transfer circuit patterns onto semiconductor wafers. The quality of these masks directly impacts the performance and reliability of the resulting chips. Therefore, proper storage and maintenance of these masks are crucial to ensure they are free from contamination from external factors such as dust and static electricity, thereby ensuring the accuracy and quality of chip production.

[0029] Traditional photomask storage methods typically utilize cassettes, specially designed containers for storing and protecting reticles. These cassettes are designed to reduce external contamination, prevent static electricity, and protect reticles from impact and damage during production and transportation. However, due to the demanding requirements of the photomask storage environment, cassettes accumulate contaminants after a certain number of uses, requiring regular cleaning to maintain their performance.

[0030] The existing mask box generally includes a top cover and a base. When cleaning, the top cover and the base of the mask box are separated and placed on the cleaning rack 10 of the mask box cleaning equipment for cleaning. Figure 1 As shown, the cleaning rack 10 has support plates arranged at the top and bottom, and the four sides located between the top support plate and the bottom support plate are divided into two pairs of opposite sides; along the first direction, side panels 11 are arranged on one pair of opposite sides, and the other pair of opposite sides are open to form a hollow structure of the cleaning rack 10; along the first direction, a plurality of guide columns 12 are arranged between the two side panels 11. Figure 1Four guide posts are provided in the structure. The following description uses four guide posts as the basis, but it is understood that the number of guide posts 12 provided between the two side panels 11 can be determined based on actual conditions. First stoppers 13 are provided at both ends of the guide posts 12 near the side panels 11 along a first direction. The first stoppers 13 pass through two of the guide posts 12. A limiting protrusion 14 is provided on the first stopper 13 along the first direction. The limiting protrusion 14 cooperates with the guide posts 12 to limit the movement of the pod base 20 in a third direction. Second stoppers 15 are provided on the other two guide posts 12. A groove is provided on the second stopper 15 along the second direction (the groove opening is along the second direction). Thus, the first stopper 3, the limiting protrusion 14, the guide posts 12, and the groove of the second stopper 15 form a receiving space for supporting the pod base 20. The first, second, and third directions are perpendicular to each other. For example, the first direction can be along the X-axis, the second direction can be along the Y-axis, and the third direction can be along the Z-axis. Since the mask box base 20 is inserted into the accommodating space along the second direction, the distance from the limiting protrusion 14 to the guide column 12 in the third direction is slightly greater than the height of the mask box base 20, and the distance between the two first limiting members 13 is slightly greater than the length of the mask box base 20 along the first direction. At the same time, the cleaning process includes steps such as rinsing, flushing, drying, drying and cooling, which are automatically completed by the cleaning machine. During the entire cleaning process, the mask box is in a state of continuous switching between high and low speed rotation, and centrifugal force is used to enhance the cleaning effect. During the cleaning process, due to the high-speed rotation of the mask box base 20 and the water jetting, the mask box base 20 may vibrate on the mask box cleaning rack 10. This vibration may cause the dynamic balance of the equipment to be unbalanced, thereby causing the machine to report an error and affect production capacity. At the same time, during the cleaning process, the collision between the mask box base 20 and the mask box cleaning equipment 10 may cause wear and scratches on the mask box base 20. This wear not only reduces the cleanliness of the mask box, but also shortens its service life, which may affect the quality and reliability of the final product.

[0031] In order to solve the above-mentioned defects, the present application provides a clamping device 100, which will be described in detail through the following embodiments.

[0032] This embodiment provides a clamping device 100, such as Figure 2 and Figure 3As shown, the clamping device 100 includes a distance adjustment mechanism 110 and a clamping member 120. The distance adjustment mechanism 110 is connected to the clamping member 120 and is used to adjust the distance between the clamping member 120 and the side panel 11 in the first direction. When the clamping member 120 abuts the side panel 11, the clamping device 100 cooperates with the first limiting member 13 to clamp the pod base 20 in the first direction. By clamping the mask box base 20 during the cleaning process, the risk of vibration caused by high-speed rotation and water jetting is effectively eliminated. The clamping device 100 ensures the stability of the mask box base 20 during the cleaning process, avoiding the imbalance of the dynamic balance of the equipment and potential structural damage caused by vibration; reducing the movement of the mask box base 20 during the cleaning process, thereby allowing more precise water flow positioning and a more uniform cleaning effect. This stability improves the cleaning efficiency, shortens the cleaning time, and ensures the cleaning quality; reduces the collision and friction between the mask box base 20 and the first limit member 13 and the second limit member 15 on the cleaning rack 10, avoiding wear and scratches caused by physical contact, significantly improving the cleanliness of the mask box after cleaning, reducing the wear rate of the mask box base 20, extending the service life of the mask box, reducing the replacement frequency and maintenance costs, and improving production efficiency and economic benefits.

[0033] In an optional embodiment, if Figure 2 As shown, the distance adjustment mechanism 110 includes a connecting rod 101 and a driving member 102. The first end of the connecting rod 101 is rotatably connected to one end of the driving member 102, and the second end of the connecting rod 101 is rotatably connected to the first end of the clamping member 120. The driving member 102 drives the connecting rod 101 to drive the clamping member 120 to move, and converts the rotational motion into a linear motion of the clamping member 120, thereby realizing the distance adjustment of the clamping member 120 to the side panel 11 in the first direction, thereby realizing the clamping device 100 to clamp the mask box base 20.

[0034] In an optional embodiment, if Figure 2 As shown, the clamping device 100 further includes a base 130, which is fixed to the surface of the first limiting member 13 facing away from the accommodation space ( Figure 3 The base 130 is made of, for example, 304 stainless steel. The base 130 is fixed to the first limiter 13 via fasteners. The fasteners can be, for example, bolts. The bolts can be made of, for example, 304 stainless steel and have a diameter of, for example, 3 mm to 5 mm.

[0035] In an optional embodiment, if Figure 2As shown, the driving member 102 and the base 130 are connected by a rotating shaft (not marked in the figure). When the driving member 102 rotates around the rotating shaft, it includes a first state and a second state. The first state is that the driving member 102 cooperates with the connecting rod 101 to drive the clamping member 120 to abut against the side panel 11, so that the clamping device 100 clamps the mask box base 20, avoids the shaking and vibration of the mask box base 20 during cleaning in the cleaning rack 10, ensures the stability of the mask box base 20 during the cleaning process, avoids the imbalance of the equipment dynamic balance and potential structural damage caused by vibration, and at the same time reduces the wear of the mask box base 20, extends the service life of the mask box base 20, and improves the cleanliness of the mask box base 20; the second state is that the driving member 102 and the connecting rod 101 cooperate to drive the clamping member 120 and the side panel 11 to have a gap, so as to make the clamping force between the clamping device 100 and the mask box base 20 disappear, making it convenient to remove the mask box base 20 from the cleaning rack 10.

[0036] In an optional embodiment, the driving member 102 rotates 0° to 180° around the rotation axis, for example, the driving member 102 rotates 0° and 180° around the rotation axis. When the driving member 102 rotates 0° around the rotation axis, the driving member 102 can be in the second state described above; when the driving member rotates 180° around the rotation axis, the driving member 102 can be in the first state described above.

[0037] In an optional embodiment, the driving member 102 is provided with a handle to facilitate manual driving of the clamping device 100.

[0038] In an optional embodiment, a guide hole 131 is provided on the base 130. The second end of the clamping member 120 is penetrated by the guide hole 131. The first end of the clamping member 120 is rotatably connected to the second end of the connecting rod 101. Specifically, the second end of the connecting rod 101 rotates about the shaft connecting the clamping member 120 and the connecting rod 101, driving the clamping member 120 to move back and forth linearly along the guide hole 131, thereby achieving abutment between the clamping member 120 and the side panel 11 or a certain space between them. The base 130 includes a first flat plate and a second flat plate, the first and second flat plates being vertically connected. The first flat plate is provided with a plurality of threaded holes. The first flat plate is fixedly connected to the bottom surface of the first limiting member 13 by bolts. The first flat plate is connected to the driving member 102 by a rotating shaft. The second flat plate is provided with the guide hole 131. The provision of the guide hole 131 ensures that the movement of the clamping member 120 is linear.

[0039] In an optional embodiment, the clamping member 120 is a clamping rod. The clamping member 120 is adapted to the guide hole 131 .

[0040] This embodiment also provides a cleaning process for a mask box, including the following steps:

[0041] Use a box opener to open the reticle box that needs to be cleaned, and place the reticle box base 20 and the top cover of the reticle box on the cleaning rack 10 of the reticle box cleaning machine respectively. Each cleaning rack 10 can hold 3 sets of reticle boxes (only the structure for placing the reticle box base 20 is shown in the figure). After the reticle box base 20 is put in place, manually push the driving member 102 of the clamping device 100, and the driving member 102 drives the connecting rod 101 and the clamping member 120 to move, so that the clamping member 120 abuts against the side panel 11 of the cleaning rack 10 to clamp the reticle box base 20. After all 6 cleaning racks are placed and clamped, close the safety door of the cleaning machine, start the cleaning machine and start cleaning;

[0042] After cleaning is completed, manually rotate the driving member 102 of the clamping device 100, and the driving member 102 drives the connecting rod 101 and the clamping member 120 to move, so that a gap is formed between the clamping member 120 and the side panel 11 of the cleaning rack 10, and the clamping force between the clamping device 100 and the photomask box base 20 disappears. Use the box opener to assemble the photomask box to complete the operation.

[0043] The above embodiments are merely illustrative of the principles and effects of the present invention and are not intended to limit the present invention. Anyone skilled in the art may modify or alter the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or alterations made by one of ordinary skill in the art without departing from the spirit and technical principles disclosed in the present invention are intended to be covered by the claims of the present invention.

Claims

1. A clamping device, characterized in that: The clamping device is used in a photomask box cleaning device, the photomask box cleaning device includes a cleaning rack, the cleaning rack includes side panels arranged opposite to each other along a first direction; a guide column is provided between the two side panels along the first direction; along the first direction, first limiting members are respectively provided at both ends of the guide column close to the cleaning rack, and the first limiting member is provided with a limiting protrusion along the first direction; along the second direction, a second limiting member is provided on one side of the guide column, and the second limiting member is provided with a groove along the second direction: the first limiting member, the limiting protrusion, the groove and the guide column form an accommodating space for supporting the photomask box base; the first direction is perpendicular to the second direction; In which, the clamping device is provided on the surface of the first limiting member facing away from the accommodating space, and the clamping device at least includes a distance adjustment mechanism and a clamping member connected to the distance adjustment mechanism; the distance adjustment member is used to adjust the distance between the clamping member and the side panel in the first direction, and when the clamping member abuts against the side panel, the clamping device cooperates with the first limiting member to clamp the photomask box base in the first direction.

2. The clamping device according to claim 1, characterized in that The distance adjustment mechanism includes a connecting rod and a driving member, wherein the first end of the connecting rod is rotatably connected to the driving member, and the second end of the connecting rod is rotatably connected to the first end of the clamping member.

3. The clamping device according to claim 2, characterized in that The connecting rod is in an arc-shaped structure.

4. The clamping device according to claim 3, characterized in that The clamping device further includes a base, which is fixed to a surface of the first limiting member facing away from the accommodating space.

5. The clamping device according to claim 4, characterized in that The driving member is connected to the base via a rotating shaft. When the driving member rotates around the rotating shaft, it includes a first state and a second state. The first state is that the clamping member abuts against the side panel; the second state is that there is a gap between the clamping member and the side panel.

6. The clamping device according to claim 5, characterized in that The driving member rotates 0° to 180° around the rotating shaft.

7. The clamping device according to claim 6, characterized in that The driving member is provided with a handle.

8. The clamping device according to claim 4, characterized in that A guide hole is provided on the base, and the second end of the clamping member passes through the guide hole.

9. The clamping device according to claim 1 or 8, characterized in that: The clamping piece is a clamping rod.

Images