Positioning device for sputter coating production

Abstract

The utility model provides a positioning device for sputter coating production, which comprises a sample disc, an object placing groove arranged on the upper surface of the sample disc, a moving groove arranged at the bottom of the object placing groove, a main lead screw movably connected in the moving groove through a bearing, a bottom plate fixedly connected with the bottom of the object placing groove, and a main sliding groove correspondingly arranged on the surface of the bottom relative to the moving groove. And a moving plate is slidably connected into the moving groove through a main screw rod in threaded connection, meanwhile, the position, opposite to the main sliding groove, of the upper surface of the moving plate is correspondingly connected with a main sliding block, the upper surface of the main sliding block is fixedly connected with a positioning column, and a positioning plate is fixedly connected to the upper surface of the main sliding block through the positioning column. Through the cooperation of the bottom plate, the main lead screw, the movable plate, the main sliding block and the positioning plate, a corresponding positioning and clamping structure can be arranged in the sample disc, then the stability of a substrate placed in the sample disc can be effectively enhanced, and the coating quality of the surface of the substrate is enhanced.

Description

Technical Field

[0001] The utility model relates to the technical field of sputtering coating positioning, in particular to a positioning device for sputtering coating production. Background Art

[0002] Sputtering coating technology is a surface treatment method commonly used in modern industry. Its main principle is to use a high-speed electron beam to bombard the surface of the target material, causing the target atoms to escape and form gas. In this process, the metal or compound target material in the reactor is excited in an inert gas or reaction atmosphere, causing the target material to undergo a chemical reaction and form a thin film on the surface of the substrate. The corresponding vacuum coating equipment and the manufacture of corresponding special positioning fixtures are also becoming increasingly important in the improvement of coating technology.

[0003] After searching, a fixture for magnetron sputtering coating of ceramic wafers for chip components disclosed in the prior art (Announcement No.: CN208430224U) is recorded in the article as "including a revolving turntable, a plurality of sample trays placed on the upper surface of the revolving turntable, a rotating shaft connected to the revolving turntable and capable of driving the revolving turntable to rotate with it, and a driving device for connecting and driving the rotating shaft to rotate, the sample tray and the revolving turntable are relatively positioned by a positioning assembly, and a receiving groove for placing the ceramic wafer to be coated is formed on the upper surface of the sample tray." The fixture uses the sample tray as a station fixture for placing the coated ceramic wafer, and directly places the sample tray on the revolving turntable, adopts a vertical sputtering method, and coats the ceramic wafer. The ceramic sheet is placed directly into the sample tray without the need to fix the coated ceramic sheet, which will not damage the thin and fragile coated sheet, simplifying the operation, and can improve the uniformity of the coated sheet and ensure the integrity of the coated sheet. However, the size of the accommodating groove opened on the sample tray in the fixture is constant, and in the actual production process, it cannot be ensured that the size of coated ceramic sheets of different specifications can always be adapted to the size of the accommodating groove. Therefore, when the size of the coated ceramic sheet is relatively small, the coated ceramic sheet is prone to corresponding positional deviation during the coating process. Although it will not slide out of the sample tray during revolution, it will also cause the thickness of the coating layer on the surface of the coated ceramic sheet to be uneven, thereby reducing the coating quality of the coated ceramic sheet. Utility Model Content

[0004] In order to overcome the defects of the prior art, a positioning device for sputtering coating production is provided to solve the problems raised in the above background technology.

[0005] In order to achieve the above-mentioned purpose, a positioning device for sputtering coating production is provided, including: a sample plate, the upper surface of the revolving turntable is movably connected to the sample plate through a positioning protrusion, a sample groove is opened on the upper surface of the sample plate, a movable groove is opened at the bottom of the sample groove, a main screw rod is movably connected to the movable groove through a bearing, and the bottom of the sample groove is fixedly connected to the bottom plate, a main slide groove is opened corresponding to the position of the bottom surface relative to the movable groove, and the movable plate is slidably connected to the movable groove through a screw-connected main screw rod, and at the same time, the upper surface of the movable plate is connected to the main slider corresponding to the position of the main slide groove, the upper surface of the main slider is fixedly connected to the positioning column, and the positioning plate is fixedly connected to the upper surface of the main slider through the positioning column.

[0006] Preferably, the sample tray has a circular structure, the axial cross-section formed by the combination of the sample tray and the storage tank has a concave structure, and the movable groove opened at the bottom of the storage tank has a rectangular structure.

[0007] Preferably, there are two groups of movable plates, both of which are rectangular structures, and the length of the movable plates is adapted to the width of the movable groove. At the same time, the two groups of movable plates are slidably connected to the two ends of the movable groove by screwing the main screw rod.

[0008] Preferably, the two groups of main sliders fixedly connected to the upper surface of the movable plate are both in a rectangular parallelepiped structure, and the end faces of the main sliders are in a shuttle-shaped structure, while the protruding edges on both sides of the main sliders are in an arc-shaped structure.

[0009] Preferably, the bottom plate has a circular structure, the sizes of the bottom plate and the storage slot are adapted, and the bottom plate is fixedly connected to the storage slot by a snap fastener, and the two groups of main slide grooves symmetrically opened on the surface of the bottom plate are both long strip structures, and two groups of sealing layers are symmetrically connected on both sides of the upper end opening of the main slide groove, and the two groups of sealing layers are both long strip structures, and the width of the sealing layer is equal to half the width of the main slide groove.

[0010] Preferably, the positioning column fixedly connected to the upper surface of the main slider has a cylindrical structure, and the arc surface of the positioning column is evenly fixedly connected to multiple groups of protrusions, and the multiple groups of protrusions are all hemispherical structures, and the positioning plate has a long strip structure, and the positioning plate and the main slider are combined together to form a Π-shaped structure, and the lower surface of the positioning plate is slidably connected to the upper surface of the base plate.

[0011] Preferably, a positioning groove is provided on the lower surface of the positioning plate corresponding to the position of the positioning column, a fastening sleeve is fixedly connected in the positioning groove, and the fastening sleeve has a cylindrical structure, and the inner diameter of the fastening sleeve is adapted to the diameter of the positioning column. At the same time, a fastening layer is fixedly connected to one side of the positioning plate close to the center of the storage slot, and an auxiliary groove is provided on the other side of the positioning plate.

[0012] Compared with the prior art, the beneficial effect of the present invention is that through the cooperation of the main screw, the movable plate, the main slider and the positioning plate, the interior of the sample tray can be equipped with a corresponding positioning and clamping structure, and then after substrates of different specifications are placed in the storage slot, they can be positioned and clamped accordingly, thereby avoiding the displacement of the substrate's own position due to the revolution process during the sputtering coating process, and then helping to enhance the uniformity of the coating layer on the substrate surface and improve the quality of the substrate coating. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 It is a front view schematic diagram of an embodiment of the utility model.

[0014] Figure 2 It is a schematic top view of an embodiment of the present utility model.

[0015] Figure 3 This is a schematic side view of a sample tray according to an embodiment of the present invention.

[0016] Figure 4 This is a schematic top view of a sample tray according to an embodiment of the present invention.

[0017] In the figure: 1. Revolution turntable; 2. Sample plate; 3. Positioning protrusion; 4. Main screw; 5. Moving plate; 6. Bottom plate; 7. Main slider; 8. Sealing layer; 9. Positioning plate; 10. Fastening sleeve; 11. Positioning column; 12. Main slide. DETAILED DESCRIPTION

[0018] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0019] Reference Figures 1 to 4 As shown, the utility model provides a positioning device for sputtering coating production, including: a sample plate 2, the upper surface of the revolving turntable 1 is movably connected to the sample plate 2 through a positioning protrusion 3, a material groove is opened on the upper surface of the sample plate 2, a movable groove is opened at the bottom of the material groove, the movable groove is movably connected to the main screw rod 4 through a bearing, and the bottom of the material groove is fixedly connected to the bottom plate 6, a main slide groove 12 is opened corresponding to the position of the bottom surface relative to the movable groove, and the movable plate 5 is slidably connected to the movable groove through the screwed main screw rod 4, and at the same time, the upper surface of the movable plate 5 is connected to the main slider 7 corresponding to the position of the main slide groove 12, the upper surface of the main slider 7 is fixedly connected to the positioning column 11, and the positioning plate 9 is fixedly connected to the upper surface of the main slider 7 through the positioning column 11.

[0020] When the sheet is moved to the next position, the slider 7 and the positioning plate 9 are moved relative to each other, thereby preventing the sheet from sliding unexpectedly due to rotation. When the sheet is moved to the next position, the slider 7 and the positioning plate 9 are moved relative to each other, thereby preventing the sheet from sliding unexpectedly due to rotation. When the sheet is moved to the next position, the slider 7 and the positioning plate 9 are moved relative to each other, thereby preventing the sheet from sliding unexpectedly due to rotation. When the sheet is moved to the next position, the slider 7 and the positioning plate 9 are moved relative to each other, thereby preventing the sheet from sliding unexpectedly due to rotation. When the sheet is moved to the next position, the slider 7 and the positioning plate 9 are moved relative to each other, thereby preventing the sheet from sliding unexpectedly due to rotation.

[0021] As a preferred embodiment, the sample tray 2 has a circular structure, the axial cross-section formed by the combination of the sample tray 2 and the storage tank has a concave structure, and the movable groove opened at the bottom of the storage tank has a rectangular structure.

[0022] In this embodiment, if Figure 1 、 Figure 2 and Figure 3 The setting of the placement slot can perform corresponding preliminary positioning of the substrate, preventing the substrate from accidentally leaving the sample tray 2 during the rotation of the sample tray 2, thereby facilitating subsequent positioning and clamping processing.

[0023] As a preferred embodiment, there are two groups of movable plates 5, both of which are rectangular structures, and the length of the movable plates 5 is adapted to the width of the movable groove. At the same time, the two groups of movable plates 5 are slidably connected at both ends of the movable groove by screwing the main screw rod 4.

[0024] In this embodiment, if Figure 1 、 Figure 3 and Figure 4 The main screw rod 4 adopts a bidirectional screw rod with positive and negative teeth, which makes it easier for the two groups of moving plates 5 at both ends of the moving groove to move synchronously relative to or opposite to each other, and the sizes of the moving plates 5 and the moving groove are matched, which can effectively enhance the stability of the moving plates 5 when moving.

[0025] As a preferred embodiment, the two groups of main sliders 7 fixedly connected to the upper surface of the movable plate 5 are both rectangular structures, and the end faces of the main sliders 7 are shuttle-shaped structures, while the protruding edges on both sides of the main sliders 7 are arc-shaped structures.

[0026] In this embodiment, if Figure 1 、 Figure 3 and Figure 4The protruding inclined surfaces on both sides of the main slider 7 can help increase the difficulty of separating the sealing layer 8 when the main slider 7 moves in the main slide 12, and the arc-shaped setting of the protruding edges of the main slider 7 can also help reduce the chance of the sealing layer 8 being worn when being squeezed apart.

[0027] As a preferred embodiment, the bottom plate 6 has a circular structure, the sizes of the bottom plate 6 and the storage slot are adapted, and the bottom plate 6 is fixedly connected to the storage slot by a snap fastener, and the two groups of main slide grooves 12 symmetrically opened on the surface of the bottom plate 6 are both long strip structures, and the two sides of the upper end opening of the main slide groove 12 are symmetrically connected to the two groups of sealing layers 8, both of which are long strip structures, and the width of the sealing layer 8 is equal to half the width of the main slide groove 12.

[0028] In this embodiment, if Figure 1 、 Figure 3 and Figure 4 The setting of the bottom plate 6 allows the main screw rod 4 and the movable plate 5 installed inside the sample tray 2 to be effectively hidden and shielded. At the same time, the sealing layer 8 is made of silicone material, and the size of the sealing layer 8 is set so that the position in the main slide 12 is far away from the main slider 7, and the sealing layers 8 on both sides of the upper opening of the main slide 12 can fit each other, thereby reducing the probability of external foreign matter falling into the movable groove through the main slide 12 and reducing the probability of failure of the internal structure of the sample tray 2.

[0029] As a preferred embodiment, the positioning column 11 fixedly connected to the upper surface of the main slider 7 has a cylindrical structure, and the arc surface of the positioning column 11 is evenly fixedly connected to multiple groups of protrusions, and the multiple groups of protrusions are all hemispherical structures, and the positioning plate 9 has a long strip structure, and the positioning plate 9 and the main slider 7 are combined together to form a Π-shaped structure, and at the same time, the lower surface of the positioning plate 9 is slidably connected to the upper surface of the base plate 6.

[0030] In this embodiment, if Figure 1 、 Figure 3 and Figure 4 The setting of the positioning column 11 enables the main slider 7 to be easily loaded and unloaded with the positioning plate 9, and the setting of the protrusion can help enhance the stability of the connection after the positioning column 11 is embedded in the inner cavity of the fastening sleeve 10, thereby helping to enhance the positioning and clamping effect of the positioning plate 9 on the substrate.

[0031] As a preferred embodiment, a positioning groove is provided on the lower surface of the positioning plate 9 corresponding to the position of the positioning column 11, and a fastening sleeve 10 is fixedly connected in the positioning groove. The fastening sleeve 10 has a cylindrical structure, and the inner diameter of the fastening sleeve 10 is adapted to the diameter of the positioning column 11. At the same time, a fastening layer is fixedly connected to one side of the positioning plate 9 close to the center of the storage slot, and an auxiliary groove is provided on the other side of the positioning plate 9.

[0032] In this embodiment, if Figure 1 、 Figure 3and Figure 4 The fastening sleeve 10 is made of soft rubber, and the protrusions arranged on the surface of the positioning column 11 can enhance the friction resistance of the contact surface with the fastening sleeve 10. At the same time, the auxiliary groove opened on the positioning plate 9 can facilitate workers to quickly disassemble the positioning plate 9, and the fastening layer is made of silicone material, which can assist in enhancing the positioning and clamping effect of the positioning plate 9 on the substrate.

[0033] The positioning device for sputtering coating production of the present invention cooperates with the base plate 6, the main screw 4, the movable plate 5, the main slider 7 and the positioning plate 9, so that the interior of the sample tray 2 can have a corresponding positioning and clamping structure, which can effectively enhance the stability of the substrate placed in the sample tray 2, enhance the coating quality on the surface of the substrate, and substrates of different specifications can be placed in the sample tray 2 for corresponding sputtering coating, thereby enhancing the practicality of the positioning device in the sample tray 2.

[0034] Although the embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations may be made to these embodiments without departing from the principles and spirit of the present invention, and the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A positioning device for sputtering film production, comprising: The sample tray (2) is provided with a sample tray (2) and the upper surface of the revolving turntable (1) is movably connected to the sample tray (2) through a positioning protrusion (3), and is characterized in that: a sample tray (2) is provided with a sample slot on the upper surface, a movable slot is provided at the bottom of the sample tray (2), a main screw rod (4) is movably connected to the movable slot through a bearing, and the bottom of the sample tray is fixedly connected to the bottom plate (6), a main slide groove (12) is provided corresponding to the position of the bottom surface relative to the movable slot, and the movable plate (5) is slidably connected to the movable slot through the main screw rod (4) that is screwed, and at the same time, the upper surface of the movable plate (5) is connected to the main slide groove (12) corresponding to the position of the main slide groove (12), the upper surface of the main slide groove (7) is fixedly connected to the positioning column (11), and the positioning plate (9) is fixedly connected to the upper surface of the main slide groove (7) through the positioning column (11).

2. A positioning device for sputtering film production according to claim 1, characterized in that: The sample tray (2) has a circular structure, the axial cross-section formed by the sample tray (2) and the storage tank is in a concave shape, and the movable groove provided at the bottom of the storage tank is in a rectangular structure.

3. A positioning device for sputtering film production according to claim 1, characterized in that: There are two groups of movable plates (5), both of which are rectangular in structure, and the length of the movable plates (5) is adapted to the width of the movable groove. At the same time, the two groups of movable plates (5) are slidably connected to the two ends of the movable groove by screwing the main screw rod (4).

4. A positioning device for sputtering film production according to claim 1, characterized in that: The two groups of main sliders (7) fixedly connected to the upper surface of the movable plate (5) are both rectangular parallelepiped structures, and the end faces of the main sliders (7) are shuttle-shaped structures, while the protruding edges on both sides of the main sliders (7) are both arc-shaped structures.

5. A positioning device for sputtering film production according to claim 1, characterized in that: The bottom plate (6) is of circular structure, and the sizes of the bottom plate (6) and the storage slot are adapted to each other. The bottom plate (6) is fixedly connected to the storage slot by a buckle, and the two groups of main chutes (12) symmetrically opened on the surface of the bottom plate (6) are both of long strip structure, and the two sides of the upper end opening of the main chutes (12) are symmetrically connected to the two groups of sealing layers (8), and the two groups of sealing layers (8) are both of long strip structure, and the width of the sealing layer (8) is equal to half of the width of the main chutes (12).

6. A positioning device for sputtering film production according to claim 1, characterized in that: The positioning column (11) fixedly connected to the upper surface of the main slider (7) has a cylindrical structure, and the arc surface of the positioning column (11) is evenly fixedly connected to multiple groups of protrusions, and the multiple groups of protrusions all have a hemispherical structure. The positioning plate (9) has a long strip structure, and the positioning plate (9) and the main slider (7) are combined to form a Π-shaped structure, and the lower surface of the positioning plate (9) is slidably connected to the upper surface of the bottom plate (6).

7. A positioning device for sputtering film production according to claim 1, characterized in that: A positioning groove is provided on the lower surface of the positioning plate (9) at a position corresponding to the positioning column (11), and a fastening sleeve (10) is fixedly connected in the positioning groove. The fastening sleeve (10) is in a cylindrical structure, and the inner diameter of the fastening sleeve (10) is adapted to the diameter of the positioning column (11). At the same time, a fastening layer is fixedly connected to one side of the positioning plate (9) close to the center of the storage slot, and an auxiliary groove is provided on the other side of the positioning plate (9).

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