Carrier for vacuum coating

Abstract

The utility model relates to a carrier for vacuum coating, which comprises a carrier body, an insertion part A1, an insertion part A2 and a carrying part are arranged on the carrier body, the carrying part is used for carrying a workpiece, the insertion part A1 is used for forming detachable insertion fit with a transfer device, the transfer device is used for conveying the carrier along an A direction, the A direction is a horizontal direction, and the A direction is a horizontal direction. The A2 inserting part is used for being in detachable inserting fit with the carrying mechanism in the B direction, the carrying assembly is used for carrying a carrier conveyed by the transfer device, and the B direction and the A direction are arranged in a crossed mode. According to the scheme provided by the utility model, the transferring and feeding requirements of heavy-weight workpieces can be met, and the transferring and feeding stability of the workpieces is improved.

Description

Technical Field

[0001] The utility model relates to the field of vacuum coating, in particular to a carrier for vacuum coating. Background Art

[0002] By providing two chambers—one for coating workpieces and the other for loading and unloading—coating efficiency and quality are improved. The two chambers require a transfer device and a carrier to transfer workpieces between the two chambers. Currently used carriers have varying degrees of deficiencies in reliability and ease of use, necessitating further optimization. Summary of the Invention

[0003] The purpose of the utility model is to provide a carrier for vacuum coating, which can improve the reliability of transferring workpieces between chambers.

[0004] In order to achieve the above-mentioned purpose, the present invention is implemented according to the technical solution described below.

[0005] A carrier for vacuum coating, characterized in that it includes a carrier body, on which are provided an A1 plug-in portion, an A2 plug-in portion and a supporting portion, the supporting portion being used to support the workpiece, the A1 plug-in portion being used to form a detachable plug-in fit with a transfer device, the transfer device being used to transport the carrier along direction A, where direction A is a horizontal direction, the A2 plug-in portion being used to form a detachable plug-in fit with a supporting mechanism along direction B, the supporting assembly being used to support the carrier transported by the transfer device, where direction B is a direction arranged crosswise with direction A.

[0006] A further solution is: direction B is the direction of vertical arrangement.

[0007] The carrier body is also provided with a heat conducting portion, which is used to conduct heat to heat the workpiece on the carrier body.

[0008] The supporting part is composed of an annular placement groove arranged on the upper surface of the carrier body, the notch of the annular placement groove is arranged upward, and the groove width of the annular placement groove matches the size of the workpiece.

[0009] The A1 plug-in part is composed of a ring-shaped support provided at the lower part of the carrier body.

[0010] The carrier body is a cylindrical structure, and the A1 plug-in portion is composed of an annular plug-in groove provided on the side wall of the carrier body. The annular plug-in groove and the carrier body are arranged concentrically, and the notch of the annular plug-in groove points in the same radial direction as the carrier body.

[0011] The heat conducting portion is composed of heat conducting holes arranged on the bottom of the annular receiving groove, and the heat conducting holes are arranged at intervals along the circumference of the carrier body.

[0012] The carrier body consists of an A1 body and an A2 body arranged upper and lower. The outer diameter of the A1 body is larger than the outer diameter of the A2 body. The annular mounting groove is set on the upper surface of the A1 body, the annular plug-in groove is set on the side wall of the A2 body and is adjacent to the A2 body. The heat conduction hole is located on the outside of the A2 body.

[0013] The A2 plug-in portion is composed of a plug-in positioning hole provided in the middle of the carrier body, and the length direction of the plug-in positioning hole is consistent with the height direction of the carrier body.

[0014] The plug-in positioning hole and the carrier body are arranged concentrically, the lower end of the plug-in positioning hole is set to be an expanded hole shape, and an annular concave portion is also set on the upper surface of the carrier body, and the annular concave portion is located between the annular positioning groove and the plug-in positioning hole.

[0015] The above solution provided by the utility model can meet the demand for transferring and transporting heavy workpieces and improve the stability of the workpiece transfer and transport. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a structural diagram of the feeding device.

[0017] Figure 2 for Figure 1 main view.

[0018] Figure 3 This is a schematic diagram of the assembly of the transfer device on the A guide component.

[0019] Figure 4 Schematic diagram of the structure of the transfer device.

[0020] Figure 5 A cross-sectional view of the vehicle.

[0021] Figure 6 Schematic diagram of the structure of the connecting fork.

[0022] Explanation of drawing numbers: 00 - workpiece, 01 -A chamber, 02 -B chamber, 03 - rotary lifting platform, 04 - plug-in positioning pin, 05 - annular heating component, 06 - lifting and rotating adjustment mechanism, 07 - heating lifting and adjusting mechanism, 08 - transfer channel, 09 - assembly cavity, 10 - carrier, 11 -A1 body, 12 -A2 body, 13 - annular mounting groove, 14 - annular plug-in groove, 15 - heat conduction hole, 16 - plug-in positioning hole, 17 - annular recess, 20 - transfer trolley, 21 - connecting fork, 22 -A3 detection sensor, 23 -A1 roller, 24 -A2 roller, 25 - universal connector, 26 - connecting piece, 27 -A guide component, 28 -A3 roller, 29 -B guide component, 31 -A1 detection sensor, 32 -A2 detection sensor. DETAILED DESCRIPTION

[0023] In order to make the purpose and advantages of the present invention more clearly understood, the present invention is described in detail below with reference to the following embodiments. It should be understood that the following text is only used to describe one or several specific embodiments of the present invention and does not strictly limit the scope of protection of the present invention.

[0024] As used herein, the terms "parallel," "perpendicular," and the like are not limited to their strict geometric definitions, but include allowances for reasonable and inconsistent machining or human errors.

[0025] like Figures 1 to 3 As shown, a cross-chamber feeding device for vacuum coating includes a chamber A 01 for providing a place for vacuum coating treatment of a workpiece 00, a chamber B 02 for providing a place for loading and unloading the workpiece 00, a carrier 10 for carrying the workpiece 00, a transfer device for transferring the carrier 10, and a transfer adjustment mechanism for adjusting the movement of the transfer device. A transfer channel 08 for transferring the workpiece 00 is provided between chamber A 01 and chamber B 02, and an opening and closing component for adjusting the connection state of the transfer channel 08 is provided at the transfer channel 08. Chamber A A guide assembly 27 for supporting the transfer device is provided in chamber 01, and a guide assembly 29 for supporting the transfer device is provided in chamber B 02. The guide assembly 27 and the guide assembly 29 are arranged in a sequential manner. The transfer device and the guide assembly 27 and the guide assembly 29 form a movable guide fit along the A direction. The A direction is the length direction of the guide assembly 27 and the guide assembly 29. The transfer device and the carrier 10 form a detachable plug-in fit along the A direction. A supporting mechanism for allowing the carrier 10 to stay in chamber A 01 is provided on chamber A 01. The opening and closing assembly can be specifically constituted by a gate valve provided on the transfer channel 08. The transfer device is supported by the guide assembly 27 and the guide assembly 29 provided to prevent the carrier 10 from being in an overhanging state for transfer, thereby meeting the feeding requirements for heavy workpieces 00.

[0026] The structure of the carrier 10 is as follows Figure 5 As shown, the carrier 10 includes a main body, which is provided with an A1 plug-in portion, an A2 plug-in portion, and a supporting portion. The supporting portion is used to support the workpiece 00. The A1 plug-in portion is used to form a detachable plug-in connection with the transfer device. The transfer device is used to transport the carrier 10 along the A direction, which is the horizontal direction. The A2 plug-in portion is used to form a detachable plug-in connection with the supporting mechanism along the B direction, which is arranged in a direction intersecting with the A direction. The supporting assembly is used to support the carrier 10 transported by the transfer device. By providing two plug-in structures in different directions, the transfer requirements of the carrier 10 can be well met, and the transfer operation is simple, which can meet the assembly requirements of the coating environment.

[0027] Specifically: Direction B is the direction of vertical arrangement. Setting direction B to be arranged vertically allows the existing support platform in the coating chamber to be used for improvement and assembly, thus simplifying the equipment cost and simplifying the structure of the coating equipment. A heat conducting part is also provided on the carrier 10 body, and the heat conducting part is used to conduct heat to heat the workpiece 00 on the carrier 10 body. The setting of the heat conducting part is mainly to improve the heating effect of the workpiece 00 and improve the efficiency of the coating treatment of the workpiece 00. The supporting part is composed of an annular mounting groove 13 provided on the upper surface of the carrier 10 body. The notch of the annular mounting groove 13 is arranged upward, and the groove width of the annular mounting groove 13 matches the size of the workpiece 00. By setting the annular groove, the assembly requirements of the workpiece 00 such as tungsten steel die can be well met. The assembly operation of the workpiece 00 is simple, and multiple workpieces 00 can be assembled to ensure stable rotation in the coating chamber. The A1 plug-in part is composed of an annular support provided at the lower part of the carrier 10 body. Preferably, the carrier 10 body is a cylindrical structure, and the A1 plug-in portion is composed of an annular plug-in groove 14 provided on the side wall of the carrier 10 body. The annular plug-in groove 14 and the carrier 10 body are arranged concentrically, and the notch of the annular plug-in groove 14 points in the same radial direction as the carrier 10 body.

[0028] A more detailed solution is: the heat-conducting part is composed of heat-conducting holes 15 arranged on the bottom of the annular receiving groove 13, and the heat-conducting holes 15 are arranged at intervals along the circumference of the carrier 10 body. This embodiment can improve the heat conduction effect and reduce the weight of the carrier 10. The carrier 10 body is composed of an A1 body 11 and an A2 body 12 arranged upper and lower. The outer diameter of the A1 body 11 is larger than the outer diameter of the A2 body 12. The annular receiving groove 13 is arranged on the upper surface of the A1 body 11, and the annular plug-in groove 14 is arranged on the side wall of the A2 body 12 and adjacent to the A2 body 12. The heat-conducting holes 15 are located on the outside of the A2 body 12. The groove width of the annular plug-in groove 14 is greater than the thickness of the plate body inserted into the annular plug-in groove 14 on the connecting fork 21. This ensures the reliability of the transfer of the carrier 10. The A2 plug-in part is composed of a plug-in positioning hole 16 set in the middle of the carrier 10 body. The length direction of the plug-in positioning hole 16 is consistent with the height direction of the carrier 10 body. The insertion and positioning hole 16 is concentrically arranged with the carrier body 10. The lower end of the insertion and positioning hole 16 is configured as a flared hole. An annular recess 17 is also provided on the upper surface of the carrier body 10, located between the annular receiving groove 13 and the insertion and positioning hole 16. The provision of the annular recess 17 can reduce the weight of the carrier 10 and increase its strength. The lower end of the insertion and positioning hole 16 is configured as a flared hole to facilitate the assembly connection between the insertion and positioning pin 04 and the insertion and positioning hole 16. Correspondingly, the upper end of the insertion and positioning pin 04 can also be configured as a pointed cone.

[0029] like Figure 1 、 3As shown: the transfer device includes a transfer trolley 20 and an A plug-in portion provided on the transfer trolley 20, and a B plug-in portion is provided on the carrier 10, and the A plug-in portion and the B plug-in portion form a detachable plug-in fit. Through the detachable plug-in fit, the carrier 10 and the transfer trolley 20 can be quickly and conveniently assembled and separated to meet the operational requirements of the coating environment. The A guide component 27 is composed of a horizontally arranged A guide component 27, and the B guide component 29 is composed of a horizontally arranged B guide component 29. The transfer trolley 20 and the A guide component 27 and the B guide component 29 are assembled by rolling or sliding. The A guide component 27 and the B guide component 29 have the same structure. The A guide component 27 has an A guide channel in the shape of a closing groove. The transfer trolley 20 is constrained to move in the A guide channel, and the A plug-in portion is located outside the A guide channel. Specifically: The transfer trolley 20 is provided with A1 rollers 23 and A2 rollers 24 for rolling assembly with the A guide assembly 27. The center line of the A1 roller 23 is arranged horizontally, and the center line of the A2 roller 24 is arranged vertically. A3 rollers 28 are arranged at intervals along the A direction at the bottom of the A guide channel. The center lines of the A3 rollers 28 are arranged horizontally. The transfer trolley 20 and the A guide assembly 27 are connected by the A1 rollers 23, A2 rollers 24, and A3 rollers 28 to form a rolling assembly. In detail, the A guide assembly 27 can be composed of two L-shaped A guide rails arranged opposite to each other at intervals. The bottom vacant area between the two A guide rails is used to install the A3 roller 28. A strips are respectively provided on the upper part of the A guide rails. The two A strips and the two A guide rails enclose a closed groove-shaped A guide channel. The transfer trolley 20 can be specifically composed of a plate. The A guide assembly 27 and the B guide assembly 29 of the above-described structure can effectively meet the mobile guidance requirements of the transfer device and provide reliable support for the connecting fork 21, enabling the connecting fork 21 to lift heavy loads. The A1 roller 23 and the A2 roller 24 are respectively rotatably assembled with the horizontal guide surface and the vertical guide surface of the L-shaped A guide rail.

[0030] like Figure 4 、 6 As shown: the A plug-in portion includes a connecting fork 21, which has a U-shaped fork. The connecting fork 21 is composed of a plate, and the plate thickness direction is arranged vertically. The plate thickness at both ends of the fork gradually increases along the reverse direction of A, and the distance between the two ends of the fork gradually decreases along the reverse direction of A. The connecting fork 21 is assembled and connected to the middle part of the transfer trolley 20 through the connecting member 26. The reverse direction A is the direction in which the mobile trolley moves from chamber A 01 to chamber B 02.

[0031] like Figure 1 、 2As shown, the B chamber 02 is provided with an assembly cavity 09 arranged along the A direction. The transport adjustment mechanism includes an electric push rod provided in the assembly cavity 09. The electric push rod is connected to the A connector 26 via a universal connector 25. The electric push rod can also be an electric cylinder or other components with the same function. Figure 3 、 4 As shown, an A1 detection sensor 31 and an A2 detection sensor 32 are provided in the A chamber 01 or the B chamber 02. The A1 detection sensor 31 and the A2 detection sensor 32 are used to detect and determine whether the transfer vehicle 20 has reached the starting and ending positions of the moving path, respectively. An A3 detection sensor 22 is provided on the A plug-in portion to detect the positional relationship between the carrier 10 and the connecting fork 21. The A1 detection sensor 31, the A2 detection sensor 32, and the A3 detection sensor 22 transmit the detection signals to the control device for analysis and processing. The control device adjusts the operating status of each device based on the results of the analysis and processing. The A1 detection sensor 31 and the A2 detection sensor 32 can be specifically provided in the B chamber 02, specifically at both ends of the A guide assembly 27. The A1 detection sensor 31 and the A2 detection sensor 32 are provided in the B chamber 02, and will not be affected by the high temperature heat radiation of the A chamber 01, making the control process more reliable. The A3 detection sensor 22 can be specifically set on the connecting fork 21. When the carrier 10 moves into the fork of the connecting fork 21, the A3 detection sensor 22 will be triggered to detect a signal. By setting various sensors and control devices, automatic and reliable regulation of the movement of the transfer device is achieved. The position of the transfer trolley 20 is determined by the electric push rod in conjunction with each sensor, without the need for a vacuum servo cylinder, saving costs. The electric push rod and the transfer trolley 20 are connected using a universal connector 25. When the transfer trolley 20 is spatially displaced, the electric push rod can be protected from deformation.

[0032] The carrier 10 is provided with vertically arranged insertion and positioning holes 16. The supporting mechanism includes a rotating lifting platform 03, which is installed in a rotating and lifting manner within chamber A 01. The rotating lifting platform 03 is connected to a lifting and rotating adjustment mechanism 06 that adjusts its rotation and elevation. A plug-in positioning pin 04 is provided in the middle of the rotating platform for removable assembly with the insertion and positioning hole 16. Chamber A 01 also contains a heating device for heating the workpiece 00. The heating assembly includes an annular heating assembly 05, which is located outside the rotating lifting platform 03 and arranged concentrically with the rotating lifting platform 03. The annular heating assembly 05 is installed in a lifting manner within chamber A 01 and is connected to a heating and lifting adjustment mechanism 07 that adjusts its elevation. Specifically, the rotating lifting platform 03 and the annular heating assembly 05 are located outside the end of the guide assembly B 29 away from the guide assembly A 27. The rotating lifting platform 03 receives the delivered carrier 10, ensuring reliable transfer of the carrier 10. The heating device is mainly used to achieve heating treatment of the workpiece 00 and improve heating efficiency. The lifting and rotating adjustment mechanism 06 can be implemented according to the existing coating equipment, that is, it is composed of an A1 lifting adjustment cylinder and an A rotation adjustment motor located outside the A chamber 01. The A1 lifting adjustment cylinder and the A rotation adjustment motor are connected to the rotating lifting shaft installed on the lower side of the rotary lifting platform 03 through a transmission mechanism. The heating lifting adjustment mechanism 07 is composed of two heating lifting adjustment units. The two heating lifting adjustment units are placed on both sides of the lifting and rotating adjustment mechanism 06. The two heating lifting adjustment units are respectively composed of a heating lifting cylinder located on the lower side of the A chamber 01. The annular heating component 05 is installed on the heating bracket, and the piston rod of each heating lifting cylinder is connected to the heating lifting bracket. By adjusting the lifting and lowering movement of the rotary lifting platform 03 and the annular heating component 05, the entry and exit of the carrier 10 are facilitated.

[0033] The utility model also provides a cross-chamber feeding method for vacuum coating, which includes the following operations.

[0034] S1: Adjust the transfer trolley 20 to be located in chamber B 02, the A1 detection sensor 31 detects that the transfer trolley 20 is in the initial position, the A3 detection sensor 22 detects that the carrier 10 is located in the fork of the connecting fork 21, the connecting fork 21 lifts the carrier 10, and places the workpiece 00 to be processed on the carrier 10, adjusts the internal environment of chamber A 01 and chamber B 02 to meet the requirements, adjusts the transfer channel 08 to be in a connected state, starts the electric push rod to push the transfer trolley 20 into chamber A 01, and when the A2 detection sensor 32 detects that the transfer trolley 20 moves to the end position, the electric push rod stops pushing, adjusts the rotary lifting platform 03 to lift, and the rotary lifting platform 03 lifts the carrier 10. The electric push rod pulls the transfer trolley 20 back to chamber A 01, and the A3 detection sensor 22 detects that the carrier 10 and the connecting fork 21 are separated, until the A1 detection sensor 31 detects that the transfer trolley 20 moves back to the initial position, and adjusts the transfer channel 08 to be in a closed state.

[0035] S2: Adjust the annular heating component 05 in the A chamber 01 to rise and arrange it corresponding to the carrier 10, and perform process processing on the workpiece 00 according to the preset. After the process processing is completed, adjust the annular heating component 05 to return to the initial position, adjust the transfer channel 08 to be in a connected state, start the electric push rod to push the transfer trolley 20 to move into the A chamber, and when the A2 detection sensor 32 detects that the transfer trolley 20 moves to the end position, the electric push rod stops pushing, and the A3 detection sensor 22 detects that the carrier 10 is located in the fork of the connecting fork 21, adjust the rotary lifting platform 03 to descend, and the carrier 10 is supported by the connecting fork 21. When the rotary lifting platform 03 descends to the initial position, the electric push rod pulls the transfer trolley 20 back to the B chamber 02 until the A1 detection sensor 31 detects that the transfer trolley 20 returns to the initial position, and then adjusts the transfer channel 08 to be in a closed state, and takes the workpiece 00 out of the B chamber 02.

[0036] In summary, the above-mentioned solution provided by the present invention can effectively improve the feeding stability of the workpiece 00 and meet the feeding requirements for heavy workpieces 00.

[0037] The above description is merely a preferred embodiment of the present invention. It should be noted that those skilled in the art may make various improvements and modifications without departing from the principles of the present invention, and such improvements and modifications should be considered within the scope of protection of the present invention. Structures, devices, and operating methods not specifically described or explained in this invention shall, unless otherwise specified or limited, be implemented in accordance with conventional means in the art.

Claims

1. A carrier for vacuum coating, characterized in that: It includes a carrier body, on which an A1 plug-in part, an A2 plug-in part and a supporting part are provided. The supporting part is used to support the workpiece. The A1 plug-in part is used to form a detachable plug-in fit with the transfer device. The transfer device is used to transport the carrier along direction A, and direction A is a horizontal direction. The A2 plug-in part is used to form a detachable plug-in fit with the supporting mechanism along direction B. The supporting assembly is used to support the carrier transported by the transfer device, and direction B is a direction arranged crosswise with direction A.

2. The vacuum coating carrier according to claim 1, wherein: Direction B is the direction of vertical arrangement.

3. The vacuum coating carrier according to claim 2, wherein: The carrier body is also provided with a heat conducting portion, which is used to conduct heat to heat the workpiece on the carrier body.

4. The vacuum deposition carrier according to claim 2 or 3, wherein: The supporting part is composed of an annular placement groove arranged on the upper surface of the carrier body, the notch of the annular placement groove is arranged upward, and the groove width of the annular placement groove matches the size of the workpiece.

5. The vacuum coating carrier according to claim 4, wherein: The A1 plug-in part is composed of a ring-shaped support provided at the lower part of the carrier body.

6. The vacuum coating carrier according to claim 4, wherein: The carrier body is a cylindrical structure, and the A1 plug-in portion is composed of an annular plug-in groove provided on the side wall of the carrier body. The annular plug-in groove and the carrier body are arranged concentrically, and the notch of the annular plug-in groove points in the same radial direction as the carrier body.

7. The vacuum deposition carrier according to claim 4, wherein: The heat conducting portion is composed of heat conducting holes arranged on the bottom of the annular receiving groove, and the heat conducting holes are arranged at intervals along the circumference of the carrier body.

8. The vacuum deposition carrier according to claim 7, wherein: The carrier body consists of an A1 body and an A2 body arranged upper and lower. The outer diameter of the A1 body is larger than the outer diameter of the A2 body. The annular mounting groove is set on the upper surface of the A1 body, the annular plug-in groove is set on the side wall of the A2 body and is adjacent to the A2 body. The heat conduction hole is located on the outside of the A2 body.

9. The vacuum deposition carrier according to claim 4, wherein: The A2 plug-in portion is composed of a plug-in positioning hole provided in the middle of the carrier body, and the length direction of the plug-in positioning hole is consistent with the height direction of the carrier body.

10. The vacuum deposition carrier according to claim 9, wherein: The plug-in positioning hole and the carrier body are arranged concentrically, the lower end of the plug-in positioning hole is set to be an expanded hole shape, and an annular concave portion is also set on the upper surface of the carrier body, and the annular concave portion is located between the annular positioning groove and the plug-in positioning hole.

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