Cross-chamber feeding device for vacuum coating

Abstract

The utility model relates to a cross-chamber feeding device for vacuum coating, which comprises a chamber A, a chamber B, a carrier, a transfer device and a transfer adjusting mechanism, a transfer channel for transferring workpieces is arranged between the chamber A and the chamber B, and an opening and closing component for adjusting the communication state of the transfer channel is arranged at the transfer channel. A guiding and conveying assembly A used for supporting the transfer device is arranged in the cavity A, a guiding and conveying assembly B used for supporting the transfer device is arranged in the cavity B, the guiding and conveying assembly A and the guiding and conveying assembly B are arranged at intervals, the transfer device, the guiding and conveying assembly A and the guiding and conveying assembly B are in movable guiding fit in the direction A, and the direction A is the length direction of the guiding and conveying assembly A and the guiding and conveying assembly B; the transfer device and the carrier are detachably matched in an inserted mode in the A direction, and a carrying mechanism used for enabling the carrier to stay in the A cavity is arranged on the A cavity. According to the scheme provided by the utility model, the feeding requirement of heavy workpieces can be met, and the stability of workpiece feeding is improved.

Description

Technical Field

[0001] The utility model relates to the field of vacuum coating, in particular to a cross-chamber feeding device for vacuum coating. Background Art

[0002] In vacuum coating equipment, dual chambers are used to separate the process chamber from the discharge chamber. Current cross-chamber systems utilize magnetic arms or electromagnets for loading and unloading. These magnetic or electromagnetic connections have limited torque and cannot withstand high temperatures. For heavy workpieces, such as tungsten steel die stamping dies, these connecting rods can easily deform or become detached, impacting the stability of cross-chamber material transport. Summary of the Invention

[0003] The purpose of the utility model is to provide a cross-chamber feeding device for vacuum coating, which can realize the transfer of workpieces with relatively large mass between chambers.

[0004] In order to achieve the above-mentioned purpose, the present invention is implemented according to the technical solution described below.

[0005] A cross-chamber feeding device for vacuum coating, characterized in that it includes: a chamber A providing a place for vacuum coating treatment of workpieces, a chamber B providing a place for loading and unloading workpieces, a carrier for supporting the workpieces, a transfer device for transferring the carrier, and a transfer adjustment mechanism for adjusting the movement of the transfer device. A transfer channel for workpiece transfer is provided between chamber A and chamber B, and an opening and closing component for adjusting the connectivity of the transfer channel is provided at the transfer channel. An A guide component for supporting the transfer device is provided in chamber A, and a B guide component for supporting the transfer device is provided in chamber B. The A guide component and the B guide component are arranged in a sequential manner, and the transfer device and the A guide component and the B guide component form a movable guiding fit along direction A, and direction A is the length direction of the A guide component and the B guide component. The transfer device and the carrier form a detachable plug-in fit along direction A, and a supporting mechanism for allowing the carrier to stay in chamber A is provided on chamber A.

[0006] A further solution is: the transfer device includes a transfer trolley and an A plug-in portion provided on the transfer trolley, and the carrier has a B plug-in portion, and the A plug-in portion and the B plug-in portion form a detachable plug-in fit.

[0007] The A guide assembly is composed of a horizontally arranged A guide assembly, and the B guide assembly is composed of a horizontally arranged B guide assembly. The transfer trolley and the A guide assembly and the B guide assembly are assembled in a rolling or sliding manner.

[0008] The structures of the A guiding component and the B guiding component are the same. The A guiding component has an A guiding channel in the shape of a closing groove. The transfer trolley is constrained to move within the A guiding channel, and the A plug-in part is located outside the A guiding channel.

[0009] The transfer trolley is provided with A1 roller and A2 roller for rolling assembly with the A guide component. The center line of the A1 roller is arranged horizontally, and the center line of the A2 roller is arranged vertically. A3 rollers are arranged at intervals along the A direction at the bottom of the A guide channel. The center line of the A3 roller is arranged horizontally. The transfer trolley and the A guide component are connected by a rolling assembly through the A1 roller, A2 roller and A3 rollers.

[0010] The A plug-in portion includes a connecting fork with a U-shaped fork opening. The connecting fork is composed of a plate member, and the plate member is arranged vertically in the thickness direction. The plate thickness at both ends of the fork opening gradually increases along the reverse direction of A, and the spacing between the two ends of the fork opening gradually decreases along the reverse direction of A. The connecting fork is assembled and connected to the middle part of the transfer trolley through a connecting piece. The reverse direction A is the direction in which the mobile trolley moves from chamber A to chamber B.

[0011] The B chamber is provided with an assembly cavity arranged along the A direction. The transfer adjustment mechanism includes an electric push rod arranged in the assembly cavity. The electric push rod is connected to the A connector through a universal connector.

[0012] An A1 detection sensor and an A2 detection sensor are installed in chamber A or chamber B. The A1 detection sensor and the A2 detection sensor are respectively used to detect and determine whether the transfer vehicle has reached the starting and ending positions of the moving path. An A3 detection sensor is provided on the A plug-in part to detect the positional relationship between the carrier and the connecting fork. The A1 detection sensor, the A2 detection sensor, and the A3 detection sensor transmit the detection signals to the control device for analysis and processing. The control device adjusts the operating status of each device according to the results of the analysis and processing.

[0013] The carrier is provided with plug-in positioning holes arranged in the vertical direction, and the supporting mechanism includes a rotating lifting platform, which is rotatably and liftingly installed in chamber A. The rotating lifting platform is connected to a lifting and rotating adjustment mechanism for adjusting its rotation and lifting. A plug-in positioning pin for detachable assembly connection with the plug-in positioning hole is provided in the middle of the rotating platform; a heating device for heating the workpiece is also provided in chamber A, and the heating component includes an annular heating component, which is located on the outside of the rotating lifting platform and the two are concentrically arranged. The annular heating component is lifted and installed in chamber A, and the annular heating component is connected to the heating and lifting adjustment mechanism for adjusting its lifting and lowering.

[0014] The utility model also provides a cross-chamber feeding method for vacuum coating, which includes the following operations.

[0015] S1: Adjust the transfer trolley to be located in chamber B. The A1 detection sensor detects that the transfer trolley is in the initial position. The A3 detection sensor detects that the carrier is in the fork of the connecting fork. The connecting fork lifts the carrier and places the workpiece to be processed on the carrier. Adjust the internal environment of chambers A and B to meet the requirements. Adjust the transfer channel to be in a connected state. Start the electric push rod to push the transfer trolley into chamber A. When the A2 detection sensor detects that the transfer trolley has moved to the end position, the electric push rod stops pushing and adjusts the rotary lifting platform to lift it. The rotary lifting platform lifts the carrier and the electric push rod pulls the transfer trolley back to chamber A. The A3 detection sensor detects that the carrier and the connecting fork are separated until the A1 detection sensor detects that the transfer trolley has moved back to the initial position and adjusts the transfer channel to be closed.

[0016] S2: Adjust the annular heating component in chamber A to rise and arrange it corresponding to the carrier, and perform process processing on the workpiece according to the preset. After the process processing is completed, adjust the annular heating component to return to the initial position, adjust the transfer channel to be in a connected state, start the electric push rod to push the transfer trolley to move into chamber A, and when the A2 detection sensor detects that the transfer trolley has moved to the end position, the electric push rod stops pushing, and the A3 detection sensor detects that the carrier is located in the fork of the connecting fork, adjusts the rotary lifting platform to descend, and the carrier is lifted by the connecting fork. When the rotary lifting platform descends to the initial position, the electric push rod pulls the transfer trolley back to chamber B until the A1 detection sensor detects that the transfer trolley has returned to the initial position, and then adjusts the transfer channel to be in a closed state to take the workpiece out of chamber B.

[0017] The above-mentioned solution provided by the present invention supports the transfer device by setting the A guide component and the B guide component to avoid the carrier from being in an overhanging state for transfer, thereby meeting the feeding needs of large-weight workpieces and improving the stability of workpiece feeding. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a structural diagram of the feeding device.

[0019] Figure 2 for Figure 1 main view.

[0020] Figure 3 This is a schematic diagram of the assembly of the transfer device on the A guide component.

[0021] Figure 4 Schematic diagram of the structure of the transfer device.

[0022] Figure 5 A cross-sectional view of the vehicle.

[0023] Figure 6 Schematic diagram of the structure of the connecting fork.

[0024] Explanation of the drawing numbers: 00-workpiece, 01-A chamber, 02-B chamber, 03-rotating lifting platform, 04-plug-in positioning pin, 05-annular heating component, 06-lifting and rotating adjustment mechanism, 07-heating lifting and adjusting mechanism, 08-transfer channel, 09-assembly cavity, 10-carrier, 11-A1 body, 12-A2 body, 13-annular mounting groove, 14-annular plug-in groove, 15-heat conduction hole, 16-plug-in positioning hole, 17-annular recess, 20-transfer trolley, 21-connecting fork, 22-A3 detection sensor, 23-A1 roller, 24-A2 roller, 25-universal connector, 26-connector, 27-A guide component, 28-A3 roller, 29-B guide component, 31-A1 detection sensor, 32-A2 detection sensor. DETAILED DESCRIPTION

[0025] In order to make the purpose and advantages of the present invention more clearly understood, the present invention is described in detail below with reference to the following embodiments. It should be understood that the following text is only used to describe one or several specific embodiments of the present invention and does not strictly limit the scope of protection of the present invention.

[0026] As used herein, the terms "parallel," "perpendicular," and the like are not limited to their strict geometric definitions, but include allowances for reasonable and inconsistent machining or human errors.

[0027] like Figures 1 to 3 As shown, a cross-chamber feeding device for vacuum coating includes a chamber A 01 for providing a place for vacuum coating treatment of a workpiece 00, a chamber B 02 for providing a place for loading and unloading the workpiece 00, a carrier 10 for carrying the workpiece 00, a transfer device for transferring the carrier 10, and a transfer adjustment mechanism for adjusting the movement of the transfer device. A transfer channel 08 for transferring the workpiece 00 is provided between chamber A 01 and chamber B 02, and an opening and closing component for adjusting the connection state of the transfer channel 08 is provided at the transfer channel 08. Chamber A A guide assembly 27 for supporting the transfer device is provided in chamber 01, and a guide assembly 29 for supporting the transfer device is provided in chamber B 02. The guide assembly 27 and the guide assembly 29 are arranged in a sequential manner. The transfer device and the guide assembly 27 and the guide assembly 29 form a movable guide fit along the A direction. The A direction is the length direction of the guide assembly 27 and the guide assembly 29. The transfer device and the carrier 10 form a detachable plug-in fit along the A direction. A supporting mechanism for allowing the carrier 10 to stay in chamber A 01 is provided on chamber A 01. The opening and closing assembly can be specifically constituted by a gate valve provided on the transfer channel 08. The transfer device is supported by the guide assembly 27 and the guide assembly 29 provided to prevent the carrier 10 from being in an overhanging state for transfer, thereby meeting the feeding requirements for heavy workpieces 00.

[0028] The structure of the carrier 10 is as follows Figure 5 As shown, the carrier 10 includes a main body, which is provided with an A1 plug-in portion, an A2 plug-in portion, and a supporting portion. The supporting portion is used to support the workpiece 00. The A1 plug-in portion is used to form a detachable plug-in connection with the transfer device. The transfer device is used to transport the carrier 10 along the A direction, which is the horizontal direction. The A2 plug-in portion is used to form a detachable plug-in connection with the supporting mechanism along the B direction, which is arranged in a direction intersecting with the A direction. The supporting assembly is used to support the carrier 10 transported by the transfer device. By providing two plug-in structures in different directions, the transfer requirements of the carrier 10 can be well met, and the transfer operation is simple, which can meet the assembly requirements of the coating environment.

[0029] Specifically: Direction B is the direction of vertical arrangement. Setting direction B to be arranged vertically allows the existing support platform in the coating chamber to be used for improvement and assembly, thus simplifying the equipment cost and simplifying the structure of the coating equipment. A heat conducting part is also provided on the carrier 10 body, and the heat conducting part is used to conduct heat to heat the workpiece 00 on the carrier 10 body. The setting of the heat conducting part is mainly to improve the heating effect of the workpiece 00 and improve the efficiency of the coating treatment of the workpiece 00. The supporting part is composed of an annular mounting groove 13 provided on the upper surface of the carrier 10 body. The notch of the annular mounting groove 13 is arranged upward, and the groove width of the annular mounting groove 13 matches the size of the workpiece 00. By setting the annular groove, the assembly requirements of the workpiece 00 such as tungsten steel die can be well met. The assembly operation of the workpiece 00 is simple, and multiple workpieces 00 can be assembled to ensure stable rotation in the coating chamber. The A1 plug-in part is composed of an annular support provided at the lower part of the carrier 10 body. Preferably, the carrier 10 body is a cylindrical structure, and the A1 plug-in portion is composed of an annular plug-in groove 14 provided on the side wall of the carrier 10 body. The annular plug-in groove 14 and the carrier 10 body are arranged concentrically, and the notch of the annular plug-in groove 14 points in the same radial direction as the carrier 10 body.

[0030] A more detailed solution is: the heat-conducting part is composed of heat-conducting holes 15 arranged on the bottom of the annular receiving groove 13, and the heat-conducting holes 15 are arranged at intervals along the circumference of the carrier 10 body. This embodiment can improve the heat conduction effect and reduce the weight of the carrier 10. The carrier 10 body is composed of an A1 body 11 and an A2 body 12 arranged upper and lower. The outer diameter of the A1 body 11 is larger than the outer diameter of the A2 body 12. The annular receiving groove 13 is arranged on the upper surface of the A1 body 11, and the annular plug-in groove 14 is arranged on the side wall of the A2 body 12 and adjacent to the A2 body 12. The heat-conducting holes 15 are located on the outside of the A2 body 12. The groove width of the annular plug-in groove 14 is greater than the thickness of the plate body inserted into the annular plug-in groove 14 on the connecting fork 21. This ensures the reliability of the transfer of the carrier 10. The A2 plug-in part is composed of a plug-in positioning hole 16 set in the middle of the carrier 10 body. The length direction of the plug-in positioning hole 16 is consistent with the height direction of the carrier 10 body. The insertion and positioning hole 16 is concentrically arranged with the carrier body 10. The lower end of the insertion and positioning hole 16 is configured as a flared hole. An annular recess 17 is also provided on the upper surface of the carrier body 10, located between the annular receiving groove 13 and the insertion and positioning hole 16. The provision of the annular recess 17 can reduce the weight of the carrier 10 and increase its strength. The lower end of the insertion and positioning hole 16 is configured as a flared hole to facilitate the assembly connection between the insertion and positioning pin 04 and the insertion and positioning hole 16. Correspondingly, the upper end of the insertion and positioning pin 04 can also be configured as a pointed cone.

[0031] like Figure 1 、 3As shown: the transfer device includes a transfer trolley 20 and an A plug-in portion provided on the transfer trolley 20, and a B plug-in portion is provided on the carrier 10, and the A plug-in portion and the B plug-in portion form a detachable plug-in fit. Through the detachable plug-in fit, the carrier 10 and the transfer trolley 20 can be quickly and conveniently assembled and separated to meet the operational requirements of the coating environment. The A guide component 27 is composed of a horizontally arranged A guide component 27, and the B guide component 29 is composed of a horizontally arranged B guide component 29. The transfer trolley 20 and the A guide component 27 and the B guide component 29 are assembled by rolling or sliding. The A guide component 27 and the B guide component 29 have the same structure. The A guide component 27 has an A guide channel in the shape of a closing groove. The transfer trolley 20 is constrained to move in the A guide channel, and the A plug-in portion is located outside the A guide channel. Specifically: The transfer trolley 20 is provided with A1 rollers 23 and A2 rollers 24 for rolling assembly with the A guide assembly 27. The center line of the A1 roller 23 is arranged horizontally, and the center line of the A2 roller 24 is arranged vertically. A3 rollers 28 are arranged at intervals along the A direction at the bottom of the A guide channel. The center lines of the A3 rollers 28 are arranged horizontally. The transfer trolley 20 and the A guide assembly 27 are connected by the A1 rollers 23, A2 rollers 24, and A3 rollers 28 to form a rolling assembly. In detail, the A guide assembly 27 can be composed of two L-shaped A guide rails arranged opposite to each other at intervals. The bottom vacant area between the two A guide rails is used to install the A3 roller 28. A strips are respectively provided on the upper part of the A guide rails. The two A strips and the two A guide rails enclose a closed groove-shaped A guide channel. The transfer trolley 20 can be specifically composed of a plate. The A guide assembly 27 and the B guide assembly 29 of the above-described structure can effectively meet the mobile guidance requirements of the transfer device and provide reliable support for the connecting fork 21, enabling the connecting fork 21 to lift heavy loads. The A1 roller 23 and the A2 roller 24 are respectively rotatably assembled with the horizontal guide surface and the vertical guide surface of the L-shaped A guide rail.

[0032] like Figure 6 As shown: the A plug-in portion includes a connecting fork 21, which has a U-shaped fork. The connecting fork 21 is composed of a plate, and the plate thickness direction is arranged vertically. The plate thickness at both ends of the fork gradually increases along the reverse direction of A, and the distance between the two ends of the fork gradually decreases along the reverse direction of A. The connecting fork 21 is assembled and connected to the middle part of the transfer trolley 20 through the connecting member 26. The reverse direction A is the direction in which the mobile trolley moves from chamber A 01 to chamber B 02.

[0033] like Figure 1 、 2 As shown, the B chamber 02 is provided with an assembly cavity 09 arranged along the A direction. The transport adjustment mechanism includes an electric push rod provided in the assembly cavity 09. The electric push rod is connected to the A connector 26 via a universal connector 25. The electric push rod can also be an electric cylinder or other components with the same function. Figure 3 、 4 As shown, an A1 detection sensor 31 and an A2 detection sensor 32 are provided in the A chamber 01 or the B chamber 02. The A1 detection sensor 31 and the A2 detection sensor 32 are used to detect and determine whether the transfer vehicle 20 has reached the starting and ending positions of the moving path, respectively. An A3 detection sensor 22 is provided on the A plug-in portion to detect the positional relationship between the carrier 10 and the connecting fork 21. The A1 detection sensor 31, the A2 detection sensor 32, and the A3 detection sensor 22 transmit the detection signals to the control device for analysis and processing. The control device adjusts the operating status of each device based on the results of the analysis and processing. The A1 detection sensor 31 and the A2 detection sensor 32 can be specifically provided in the B chamber 02, specifically at both ends of the A guide assembly 27. The A1 detection sensor 31 and the A2 detection sensor 32 are provided in the B chamber 02, and will not be affected by the high temperature heat radiation of the A chamber 01, making the control process more reliable. The A3 detection sensor 22 can be specifically set on the connecting fork 21. When the carrier 10 moves into the fork of the connecting fork 21, the A3 detection sensor 22 will be triggered to detect a signal. By setting up various sensors and control devices, automatic and reliable regulation of the movement of the transfer device can be achieved. The position of the transfer trolley 20 is determined by the electric push rod in conjunction with each sensor, eliminating the need for a vacuum servo cylinder and saving costs. The electric push rod and the transfer trolley 20 are connected using a universal joint 25. When the transfer trolley 20 is spatially displaced, the electric push rod can be protected from deformation.

[0034] The carrier 10 is provided with vertically arranged insertion and positioning holes 16. The supporting mechanism includes a rotating lifting platform 03, which is installed in a rotating and lifting manner within chamber A 01. The rotating lifting platform 03 is connected to a lifting and rotating adjustment mechanism 06 that adjusts its rotation and elevation. A plug-in positioning pin 04 is provided in the middle of the rotating platform for removable assembly with the insertion and positioning hole 16. Chamber A 01 also contains a heating device for heating the workpiece 00. The heating assembly includes an annular heating assembly 05, which is located outside the rotating lifting platform 03 and arranged concentrically with the rotating lifting platform 03. The annular heating assembly 05 is installed in a lifting manner within chamber A 01 and is connected to a heating and lifting adjustment mechanism 07 that adjusts its elevation. Specifically, the rotating lifting platform 03 and the annular heating assembly 05 are located outside the end of the guide assembly B 29 away from the guide assembly A 27. The rotating lifting platform 03 receives the delivered carrier 10, ensuring reliable transfer of the carrier 10. The heating device is mainly used to achieve heating treatment of the workpiece 00 and improve heating efficiency. The lifting and rotating adjustment mechanism 06 can be implemented according to the existing coating equipment, that is, it is composed of an A1 lifting adjustment cylinder and an A rotation adjustment motor located outside the A chamber 01. The A1 lifting adjustment cylinder and the A rotation adjustment motor are connected to the rotating lifting shaft installed on the lower side of the rotary lifting platform 03 through a transmission mechanism. The heating lifting adjustment mechanism 07 is composed of two heating lifting adjustment units. The two heating lifting adjustment units are placed on both sides of the lifting and rotating adjustment mechanism 06. The two heating lifting adjustment units are respectively composed of a heating lifting cylinder located on the lower side of the A chamber 01. The annular heating component 05 is installed on the heating bracket, and the piston rod of each heating lifting cylinder is connected to the heating lifting bracket. By adjusting the lifting and lowering movement of the rotary lifting platform 03 and the annular heating component 05, the entry and exit of the carrier 10 are facilitated.

[0035] The utility model also provides a cross-chamber feeding method for vacuum coating, which includes the following operations.

[0036] S1: Adjust the transfer trolley 20 to be located in chamber B 02, the A1 detection sensor 31 detects that the transfer trolley 20 is in the initial position, the A3 detection sensor 22 detects that the carrier 10 is located in the fork of the connecting fork 21, the connecting fork 21 lifts the carrier 10, and places the workpiece 00 to be processed on the carrier 10, adjusts the internal environment of chamber A 01 and chamber B 02 to meet the requirements, adjusts the transfer channel 08 to be in a connected state, starts the electric push rod to push the transfer trolley 20 into chamber A 01, and when the A2 detection sensor 32 detects that the transfer trolley 20 moves to the end position, the electric push rod stops pushing, adjusts the rotary lifting platform 03 to lift, and the rotary lifting platform 03 lifts the carrier 10. The electric push rod pulls the transfer trolley 20 back to chamber A 01, and the A3 detection sensor 22 detects that the carrier 10 and the connecting fork 21 are separated, until the A1 detection sensor 31 detects that the transfer trolley 20 moves back to the initial position, and adjusts the transfer channel 08 to be in a closed state.

[0037] S2: Adjust the annular heating component 05 in the A chamber 01 to rise and arrange it corresponding to the carrier 10, and perform process processing on the workpiece 00 according to the preset. After the process processing is completed, adjust the annular heating component 05 to return to the initial position, adjust the transfer channel 08 to be in a connected state, start the electric push rod to push the transfer trolley 20 to move into the A chamber, and when the A2 detection sensor 32 detects that the transfer trolley 20 moves to the end position, the electric push rod stops pushing, and the A3 detection sensor 22 detects that the carrier 10 is located in the fork of the connecting fork 21, adjust the rotary lifting platform 03 to descend, and the carrier 10 is supported by the connecting fork 21. When the rotary lifting platform 03 descends to the initial position, the electric push rod pulls the transfer trolley 20 back to the B chamber 02 until the A1 detection sensor 31 detects that the transfer trolley 20 returns to the initial position, and then adjusts the transfer channel 08 to be in a closed state, and takes the workpiece 00 out of the B chamber 02.

[0038] In summary, the above-mentioned solution provided by the present invention can effectively improve the feeding stability of the workpiece 00 and meet the feeding requirements for heavy workpieces 00.

[0039] The above description is merely a preferred embodiment of the present invention. It should be noted that those skilled in the art may make various improvements and modifications without departing from the principles of the present invention, and such improvements and modifications should be considered within the scope of protection of the present invention. Structures, devices, and operating methods not specifically described or explained in this invention shall, unless otherwise specified or limited, be implemented in accordance with conventional means in the art.

Claims

1. A cross-chamber feeding device for vacuum coating, characterized in that: It includes chamber A which provides a place for vacuum coating treatment of workpieces, chamber B which provides a place for loading and unloading workpieces, a carrier for supporting workpieces, a transfer device for transferring the carrier, and a transfer adjustment mechanism for adjusting the movement of the transfer device. A transfer channel for transferring workpieces is provided between chamber A and chamber B, and an opening and closing component for adjusting the connectivity of the transfer channel is provided at the transfer channel. Chamber A is provided with an A guide component for supporting the transfer device, and chamber B is provided with a B guide component for supporting the transfer device. The A guide component and the B guide component are arranged in a sequential manner, and the transfer device and the A guide component and the B guide component form a movable guiding fit along direction A, and direction A is the length direction of the A guide component and the B guide component. The transfer device and the carrier form a detachable plug-in fit along direction A, and chamber A is provided with a supporting mechanism for allowing the carrier to stay in chamber A.

2. The cross-chamber feeding device for vacuum coating according to claim 1, characterized in that: The transfer device includes a transfer trolley and an A plug-in portion arranged on the transfer trolley, and a B plug-in portion is provided on the carrier. The A plug-in portion and the B plug-in portion form a detachable plug-in fit.

3. The cross-chamber feeding device for vacuum coating according to claim 2, characterized in that: The A guide assembly is composed of a horizontally arranged A guide assembly, and the B guide assembly is composed of a horizontally arranged B guide assembly. The transfer trolley and the A guide assembly and the B guide assembly are assembled in a rolling or sliding manner.

4. The cross-chamber feeding device for vacuum coating according to claim 3, characterized in that: The structures of the A guiding component and the B guiding component are the same. The A guiding component has an A guiding channel in the shape of a closing groove. The transfer trolley is constrained to move within the A guiding channel, and the A plug-in part is located outside the A guiding channel.

5. The cross-chamber feeding device for vacuum coating according to claim 4, characterized in that: The transfer trolley is provided with A1 roller and A2 roller for rolling assembly with the A guide component. The center line of the A1 roller is arranged horizontally, and the center line of the A2 roller is arranged vertically. A3 rollers are arranged at intervals along the A direction at the bottom of the A guide channel. The center line of the A3 roller is arranged horizontally. The transfer trolley and the A guide component are connected by a rolling assembly through the A1 roller, A2 roller and A3 rollers.

6. The cross-chamber feeding device for vacuum coating according to claim 4, characterized in that: The A plug-in portion includes a connecting fork with a U-shaped fork opening. The connecting fork is composed of a plate member, and the plate member is arranged vertically in the thickness direction. The plate thickness at both ends of the fork opening gradually increases along the reverse direction of A, and the spacing between the two ends of the fork opening gradually decreases along the reverse direction of A. The connecting fork is assembled and connected to the middle part of the transfer trolley through a connecting piece. The reverse direction A is the direction in which the mobile trolley moves from chamber A to chamber B.

7. The cross-chamber feeding device for vacuum coating according to claim 4, characterized in that: The B chamber is provided with an assembly cavity arranged along the A direction. The transfer adjustment mechanism includes an electric push rod arranged in the assembly cavity. The electric push rod is connected to the A connector through a universal connector.

8. The cross-chamber feeding device for vacuum coating according to claim 4, characterized in that: An A1 detection sensor and an A2 detection sensor are installed in chamber A or chamber B. The A1 detection sensor and the A2 detection sensor are respectively used to detect and determine whether the transfer vehicle has reached the starting and ending positions of the moving path. An A3 detection sensor is provided on the A plug-in part to detect the positional relationship between the carrier and the connecting fork. The A1 detection sensor, the A2 detection sensor, and the A3 detection sensor transmit the detection signals to the control device for analysis and processing. The control device adjusts the operating status of each device according to the results of the analysis and processing.

9. The cross-chamber feeding device for vacuum coating according to claim 4, characterized in that: The carrier is provided with plug-in positioning holes arranged in the vertical direction. The supporting mechanism includes a rotating lifting platform, which is rotatably installed in chamber A. The rotating lifting platform is connected to a lifting and rotating adjustment mechanism for adjusting its rotation and lifting. A plug-in positioning pin is provided in the middle of the rotating platform for detachable assembly connection with the plug-in positioning hole.

10. The cross-chamber feeding device for vacuum coating according to claim 9, characterized in that: A heating device for heating the workpiece is also provided in chamber A. The heating component includes an annular heating component. The annular heating component is located on the outside of the rotary lifting platform and the two are arranged concentrically. The annular heating component is installed in a lifting manner in chamber A. The annular heating component is connected to a heating lifting adjustment mechanism that adjusts its lifting.

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