Double-sided electroplating hanger for square substrate

Abstract

The utility model provides a double-sided electroplating hanger for a square substrate. The double-sided electroplating hanger comprises a main plate body, a concentric-square-shaped cover plate and a flexible wiring board, a first square opening is formed in a substrate carrying part of the main board body; a first concentric-square-shaped sealing ring, a positioning bulge, a first conducting strip and an outer concentric-square-shaped sealing ring are arranged at the peripheral edge part of the first square opening; the concentric-square-shaped cover plate is provided with a second square opening, and a second concentric-square-shaped sealing ring and a second conducting strip are arranged on the peripheral edge of the second square opening; the flexible flat cable board is used for conductive transmission between the main board body and the concentric-square-shaped cover plate. According to the hanger, the square opening suitable for the square substrate is adopted, so that the available area ratio of the square substrate is increased; the two surfaces of the square substrate are directly connected with a cathode plug through a direct contact type peripheral conducting strip via a lead, so that the conducting reliability is improved, and the current stability in the electroplating process is ensured; the wire of the main board body is electrically connected to the concentric-square-shaped cover plate through the flexible wiring board, reliable electric conduction is achieved, meanwhile, separation resistance generated when the concentric-square-shaped cover plate is opened is reduced, the service life of the hanger is prolonged, and reliability of the hanger is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor packaging wet process, in particular to a double-sided electroplating hanger for a square substrate. Background Art

[0002] Current chips are usually cut into multiple pieces after being electroplated and packaged on wafers. Since chips are usually square, a certain area of ​​the curved edge of the wafer becomes a waste area.

[0003] With the development of semiconductor packaging technology, glass substrates are expected to replace silicon interposers and carriers due to their low power consumption and excellent heat dissipation performance. Glass substrates can be directly designed into a square shape, which will significantly improve the utilization rate of square substrates. At the same time, in order to produce high-precision metal circuits on glass substrates to achieve high-density interconnection, double-sided electroplating technology will be used. As the area increases, the electroplating current intensity will increase significantly. The contact or shrapnel-type conductive method used in existing wafer double-sided electroplating hangers will be unreliable. Utility Model Content

[0004] In order to overcome the above-mentioned deficiencies in the prior art, the purpose of the present invention is to provide a double-sided electroplating rack for square substrates.

[0005] To achieve the above-mentioned purpose, the technical solution adopted by the present invention to solve the technical problem is: a square substrate double-sided electroplating rack, comprising:

[0006] The main board body includes a hanger holding part located at the upper part and a substrate carrying part located below the hanger holding part; the hanger hanging part is provided with a cathode plug for connecting to a power socket; the substrate carrying part is provided with a first square opening, the substrate carrying part is provided with a first round-shaped sealing groove at the outer edge of the first square opening, the first round-shaped sealing groove is embedded with a first round-shaped sealing ring, a plurality of positioning protrusions arranged at intervals are provided at the periphery of the first round-shaped sealing groove, the plurality of positioning protrusions are used to position the outer contour of the square substrate, a first conductive sheet is respectively provided on each side length of the periphery of the first round-shaped sealing ring, the surface edge of the first conductive sheet is in contact with a surface edge of the square substrate, each first conductive sheet is respectively connected to the cathode plug via a wire, and the substrate carrying part is further provided with an outer round-shaped sealing groove at the periphery of the first conductive sheet, the outer round-shaped sealing groove is embedded with an outer round-shaped sealing ring;

[0007] A circular cover plate is provided with a second square opening, a second circular sealing groove is provided on the outer edge of the second square opening, a second circular sealing ring is embedded in the second circular sealing groove, a second conductive sheet is provided on each side of the outer periphery of the second circular sealing ring, the surface edge of the second conductive sheet is in contact with the edge of the other surface of the square substrate, and a plurality of cover wires are further provided in the circular cover plate, one end of each cover wire is connected to the second conductive sheet;

[0008] The flexible cable board includes a plurality of flat thin conductive sheets and insulating films covering both surfaces of the thin conductive sheets. Adjacent thin conductive sheets are arranged in parallel and spaced apart. One end of each thin conductive sheet is welded to a cover plate wire, and the other end of each thin conductive sheet is welded to a wire on the main board body. The wire on the main board body is connected to the cathode plug.

[0009] By adopting the technical solution of the utility model, the hanger adopts a square opening suitable for the square substrate, which increases the available area ratio of the square substrate; both sides of the square substrate are directly connected to the cathode plug through direct-contact conductive sheets around the perimeter via wires, which improves the conductivity reliability and ensures the current stability of the electroplating process; the wires of the main board are electrically connected to the circular cover through the flexible cable board, which achieves reliable conductivity while reducing the separation resistance when the circular cover is opened, thereby improving the service life and reliability of the hanger.

[0010] Furthermore, the cathode plug includes a left plug-in portion located at the left end of the hanger holding portion and a right plug-in portion located at the right end of the hanger holding portion. The cathode plug is provided with a total of 8 plug-ins, and the front and back sides of the left plug-in portion and the front and back sides of the right plug-in portion are each provided with two parallel and spaced plug-ins; 4 of the plug-ins are respectively connected to a first wire, each first wire first extends on the back side of the main board body, then passes through the thickness direction of the main board body to the front side of the main board body, and finally extends along the length direction of a first conductive sheet and is pressed against the bottom of the first conductive sheet; the other 4 plug-ins are respectively connected to a second wire, and the flexible cable board includes 4 thin conductive sheets, and each second wire extends from the front side of the main board body and is welded to a thin conductive sheet of the flexible cable board.

[0011] Furthermore, there are four cover plate wires, each of which extends from the welding point with the thin conductive sheet on the front side of the circular cover plate, then passes through the thickness direction of the circular cover plate to the back side of the circular cover plate, and finally extends along the length direction of a second conductive sheet and is pressed against the bottom of the second conductive sheet.

[0012] This preferred solution ensures that both sides of the square substrate are electrically connected to the power supply cathode via independent conductive pads and wires, ensuring consistent electrical potential around the square substrate. Each pad can be individually tested for electrical connectivity with the substrate, ensuring reliable current transmission during the electroplating process.

[0013] Furthermore, the left plug-in portion is mirror-symmetrical to the right plug-in portion, and the plugs installed on the left plug-in portion and the right plug-in portion include a first L-shaped plug-in, a second L-shaped plug-in, a third L-shaped plug-in and a fourth L-shaped plug-in. The first L-shaped plug-in, the second L-shaped plug-in, the third L-shaped plug-in and the fourth L-shaped plug-in all include a transverse connecting portion for connecting to a wire and a longitudinal plug-in portion for mating with a power socket. The lengths of the longitudinal plug-in portions of the first L-shaped plug-in, the second L-shaped plug-in, the third L-shaped plug-in and the fourth L-shaped plug-in are successively longer; the left plug-in portion and the right plug-in portion both include a middle spacer portion in the middle position in the thickness direction, and upper and lower spacers are provided on the back side of the middle spacer portion in parallel. A first transverse groove and a third transverse groove are provided, and a second transverse groove and a fourth transverse groove are provided on the front side of the middle spacer, which are arranged in parallel with each other at upper and lower intervals. The transverse connecting portion of the first L-shaped plug is located in the first transverse groove, the transverse connecting portion of the second L-shaped plug is located in the second transverse groove, the transverse connecting portion of the third L-shaped plug is located in the third transverse groove, and the transverse connecting portion of the fourth L-shaped plug is located in the fourth transverse groove; the longitudinal plug-in portions of the first L-shaped plug, the second L-shaped plug, the third L-shaped plug and the fourth L-shaped plug are isolated from each other, and the bottom of each longitudinal plug-in portion has an inclined portion that gradually shrinks downward, and the bottom end surfaces of each inclined portion are flush.

[0014] By adopting the above preferred solution, the compactness of the cathode plug structure layout is improved, the arrangement of the wires in the hanger is facilitated, the structural stability is high, and the service life of the hanger and the reliability of current transmission are improved.

[0015] Furthermore, a plurality of first pressing blocks are arranged at intervals on top of each first conductive sheet via screws, and a plurality of second pressing blocks are arranged at intervals on top of each second conductive sheet via screws.

[0016] By adopting the above preferred solution, the flatness of the conductive sheet is ensured, and sufficient contact with the edge of the square substrate is ensured.

[0017] Furthermore, the first pressing blocks and the second pressing blocks are staggered at installation positions along the length direction of the conductive sheet.

[0018] The above preferred solution is adopted to improve the compactness of the structure.

[0019] Furthermore, the circular cover is provided with a plurality of spaced-apart paving grooves on the periphery of the second circular sealing groove, and the positions of the paving grooves match the positioning protrusions.

[0020] The above preferred solution is adopted to ensure that the positioning protrusion has high strength, improve position stability, and achieve precise positioning of the square substrate.

[0021] Furthermore, the flexible cable board is bent in a U-shape, and both ends of the flexible cable board can move up and down.

[0022] The above preferred solution facilitates the automated cover opening mechanism to lift the circular cover to a set height, thereby facilitating the robot to load and unload the square substrate from the side of the space.

[0023] Furthermore, the main body is also provided with an air passage for air tightness testing, an air nozzle is provided at the outer end of the air passage, and the end of the air passage is connected to the space between the first circular sealing ring and the outer circular sealing ring.

[0024] By adopting the above preferred solution, the installation sealing of the square substrate on the hanger can be tested through the air path to ensure that the cavity is in a completely sealed state and prevent the electroplating solution from penetrating into the interior of the hanger. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0026] Figure 1 It is a structural diagram of an embodiment of the present invention.

[0027] Figure 2 It is a cross-sectional view of an embodiment of the present invention.

[0028] Figure 3 yes Figure 2 A partial enlarged view of point A in the middle.

[0029] Figure 4 It is a schematic diagram of the utility model in the open state of the circular cover.

[0030] Figure 5 It is a schematic diagram of the front structure of the main board.

[0031] Figure 6 yes Figure 5 A partial enlarged view of point B in the middle.

[0032] Figure 7 yes Figure 5 A partial enlarged view of point C in the middle.

[0033] Figure 8 It is a schematic diagram of the back structure of the main board.

[0034] Figure 9 yes Figure 8 A partial enlarged view of point D in the middle.

[0035] Figure 10 It is a partial cross-sectional view of the gas path on the main board.

[0036] Figure 11 It is a schematic diagram of the back structure of the circular cover.

[0037] Figure 12 yes Figure 11 A partial enlarged view of point E in the middle.

[0038] Figure 13 It is a schematic diagram of the front structure of the circular cover.

[0039] The numbers and letters in the figure represent the names of the corresponding parts:

[0040] 10- Main body; 11- Hanging portion; 12- Cathode plug; 121- Left plug-in portion; 1211- Middle spacer; 1212- First transverse slot; 1213- Second transverse slot; 1214- Third transverse slot; 1215- Fourth transverse slot; 122- Right plug-in portion; 131- First L-shaped insert; 1311- Transverse connecting portion; 1312- Longitudinal plug-in portion; 132- Second L-shaped insert; 133- Third L-shaped insert; 134- Fourth L-shaped insert; 14- First conductor; 15- Second conductor; 21-substrate holding portion; 22-first square opening; 23-first circular sealing ring; 24-positioning protrusion; 25-first conductive sheet; 26-outer circular sealing ring; 27-first pressure block; 28-air path; 29-air nozzle; 30-circular cover; 31-second square opening; 32-second circular sealing ring; 33-second conductive sheet; 34-cover conductor; 35-second pressure block; 36-clearance groove; 50-flexible cable board; 51-thin conductive sheet; 52-insulating film; 60-square substrate. DETAILED DESCRIPTION

[0041] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0042] like Figure 1-13 As shown, one embodiment of the present invention is: a square substrate double-sided electroplating rack, comprising:

[0043] The main body 10 includes a hanger holding portion 11 located at the upper portion and a substrate carrying portion 21 located below the hanger holding portion; the hanger holding portion 11 is provided with a cathode plug 12 for connecting to a power socket; the substrate carrying portion 21 is provided with a first square opening 22, and a first round-shaped sealing groove is provided on the substrate carrying portion 21 at the outer edge of the first square opening 22, and a first round-shaped sealing ring 23 is embedded in the first round-shaped sealing groove. A plurality of positioning protrusions 24 are provided at intervals on the periphery of the first round-shaped sealing groove, and the plurality of positioning protrusions 24 position the outer contour of the square substrate 60. A first conductive sheet 25 is provided on each side length of the periphery of the first round-shaped sealing ring 23, and the surface edge of the first conductive sheet 25 is in contact with a surface edge of the square substrate 60. Each first conductive sheet 25 is connected to the cathode plug 12 via a wire. An outer round-shaped sealing groove is also provided on the substrate carrying portion 21 at the periphery of the first conductive sheet 25, and an outer round-shaped sealing ring 26 is embedded in the outer round-shaped sealing groove;

[0044] The circular cover 30 has a second square opening 31. A second circular sealing groove is provided on the outer edge of the second square opening 31. A second circular sealing ring 32 is embedded in the second circular sealing groove. A second conductive sheet 33 is provided on each side of the outer periphery of the second circular sealing ring 32. The surface edge of the second conductive sheet 33 is in contact with the edge of the other surface of the square substrate 60. A plurality of cover wires 34 are also provided in the circular cover 30. One end of the cover wire 34 is connected to the second conductive sheet 33.

[0045] The flexible cable board 50 includes a plurality of flat thin conductive sheets 51 and an insulating film 52 covering both surfaces of the thin conductive sheets 51. Adjacent thin conductive sheets 51 are arranged in parallel and spaced apart. One end of each thin conductive sheet 51 is welded to a cover plate wire 34, and the other end of each thin conductive sheet 51 is welded to a wire on the main board body 10. The wire on the main board body 10 is connected to the cathode plug 12.

[0046] The beneficial effects of adopting the above technical solution are: the hanger adopts a square opening suitable for square substrates, which increases the available area ratio of the square substrates; both sides of the square substrates are directly connected to the cathode plug through direct contact conductive sheets around them via wires, which improves the conductivity reliability and ensures the current stability of the electroplating process; the wires of the main board are electrically connected to the circular cover through a flexible cable board, achieving reliable conductivity while reducing the separation resistance when the circular cover is opened, thereby improving the service life and reliability of the hanger.

[0047] like Figure 1-13As shown, in other embodiments of the present invention, the cathode plug 12 includes a left plug-in portion 121 located at the left end of the hanger holding portion and a right plug-in portion 122 located at the right end of the hanger holding portion. The cathode plug 12 is provided with a total of 8 plug-ins, and the front and back of the left plug-in portion 121 and the front and back of the right plug-in portion 122 are each provided with two parallel and spaced plug-ins; four of the plug-ins are respectively connected to a first wire 14, each first wire 14 first extends on the back of the main board body, then passes through the thickness direction of the main board body to the front side of the main board body, and finally extends along the length direction of a first conductive sheet 25 and is pressed against the bottom of the first conductive sheet 25; the other four plug-ins are respectively connected to a second wire 15, and the flexible cable board 50 includes four thin conductive sheets 51, and each second wire 15 extends from the front of the main board body and is welded to a thin conductive sheet 51 of the flexible cable board 50. There are four cover plate conductors 34. Each cover plate conductor 34 extends from the weld point with the thin conductive sheet 51 on the front of the circular cover plate 30, then passes through the thickness of the circular cover plate to the side of the back of the circular cover plate, and finally extends along the length of a second conductive sheet 33 and presses against the bottom of the second conductive sheet 33. The beneficial effect of adopting this technical solution is to ensure that both sides of the square substrate are electrically connected to the power supply cathode through independent conductive sheets and conductors, ensuring the consistency of the electrical potential around the square substrate.

[0048] like Figure 7 、 9As shown, in other embodiments of the present invention, the left plug-in portion 121 and the right plug-in portion 122 are mirror-symmetrical, and the plugs installed on the left plug-in portion 121 and the right plug-in portion 122 include a first L-shaped plug-in portion 131, a second L-shaped plug-in portion 132, a third L-shaped plug-in portion 133 and a fourth L-shaped plug-in portion 134. The first L-shaped plug-in portion 131, the second L-shaped plug-in portion 132, the third L-shaped plug-in portion 133 and the fourth L-shaped plug-in portion 134 all include a transverse connecting portion 1311 for connecting to a wire and a longitudinal plug-in portion 1312 for mating with a power socket. The lengths of the longitudinal plug-in portions 1312 of the first L-shaped plug-in portion 131, the second L-shaped plug-in portion 132, the third L-shaped plug-in portion 133 and the fourth L-shaped plug-in portion 134 are successively longer; the left plug-in portion 121 and the right plug-in portion 122 both include a middle spacer portion 1211 located in the middle in the thickness direction. A first transverse groove 1212 and a third transverse groove 1214 are provided on the back side of 211, and a second transverse groove 1213 and a fourth transverse groove 1215 are provided on the front side of the middle spacer 1211, which are arranged in parallel with each other at upper and lower intervals. The transverse connecting portion of the first L-shaped plug 131 is located in the first transverse groove 1212, the transverse connecting portion of the second L-shaped plug 132 is located in the second transverse groove 1213, the transverse connecting portion of the third L-shaped plug 133 is located in the third transverse groove 1214, and the transverse connecting portion of the fourth L-shaped plug 134 is located in the fourth transverse groove 1215; the longitudinal plug-in portions 1312 of the first L-shaped plug 131, the second L-shaped plug 132, the third L-shaped plug 133 and the fourth L-shaped plug 134 are isolated from each other, and the bottom of each longitudinal plug-in portion has an inclined portion that gradually shrinks downward, and the bottom end surfaces of each inclined portion are flush. The beneficial effects of adopting the above technical solution are: improving the compactness of the cathode plug structure layout, facilitating the wiring of the wires in the hanger, high structural stability, and improving the service life of the hanger and the reliability of current transmission.

[0049] like Figure 6 、 12 As shown, in other embodiments of the present invention, a plurality of first pressing blocks 27 are screwed onto each first conductive sheet 25, and a plurality of second pressing blocks 35 are screwed onto each second conductive sheet 33. The above technical solution has the beneficial effect of ensuring the flatness of the conductive sheet and ensuring sufficient contact with the edge of the square substrate.

[0050] In some other embodiments of the present invention, the first pressing block 27 and the second pressing block 35 are staggered in the installation position along the length direction of the conductive sheet. The beneficial effect of adopting the above technical solution is: improving the compactness of the structure.

[0051] In other embodiments of the present invention, the circular cover 30 is provided with a plurality of spaced-apart recesses 36 around the periphery of the second circular sealing groove, with the recesses 36 positioned to align with the positioning protrusions 24. The above-described technical solution has the beneficial effect of ensuring that the positioning protrusions have high strength, improving position stability, and achieving precise positioning of the square substrate.

[0052] like Figure 1 、 4 As shown, in some other embodiments of the present invention, the flexible cable board 50 is bent into a U-shape. The beneficial effect of adopting the above technical solution is that it is convenient for the automated cover opening mechanism to lift the circular cover to a set height, so as to help the robot to load and unload the square substrate from the side of the space.

[0053] like Figure 10 As shown, in other embodiments of the present invention, the main body 10 is further provided with an air passage 28 for airtightness testing. An air nozzle 29 is provided at the outer end of the air passage 28. The distal end of the air passage 28 communicates with the space between the first circular seal ring 23 and the outer circular seal ring 26. The advantageous effect of this technical solution is that the air passage can be used to test the airtightness of the square substrates installed on the hanger, preventing the plating solution from seeping into the hanger.

[0054] The above embodiments are only for illustrating the technical concept and features of the present invention. Their purpose is to enable ordinary technicians in this field to understand the content of the present invention and implement it. They are not intended to limit the scope of protection of the present invention. Any equivalent changes or modifications made according to the spirit of the present invention should be included in the scope of protection of the present invention.

Claims

1. A double-sided plating rack for square substrates, characterized in that: include: The main board body includes a hanger holding part located at the upper part and a substrate carrying part located below the hanger holding part; the hanger holding part is provided with a cathode plug for connecting to a power socket; the substrate carrying part is provided with a first square opening, the substrate carrying part is provided with a first round-shaped sealing groove at the outer edge of the first square opening, the first round-shaped sealing groove is embedded with a first round-shaped sealing ring, a plurality of positioning protrusions arranged at intervals are provided at the periphery of the first round-shaped sealing groove, the plurality of positioning protrusions are used to position the outer contour of the square substrate, a first conductive sheet is respectively provided on each side length of the periphery of the first round-shaped sealing ring, the surface edge of the first conductive sheet is in contact with a surface edge of the square substrate, each first conductive sheet is respectively connected to the cathode plug via a wire, and the substrate carrying part is further provided with an outer round-shaped sealing groove at the periphery of the first conductive sheet, the outer round-shaped sealing ring is embedded in the outer round-shaped sealing groove; A circular cover plate is provided with a second square opening, a second circular sealing groove is provided on the outer edge of the second square opening, a second circular sealing ring is embedded in the second circular sealing groove, a second conductive sheet is provided on each side of the outer periphery of the second circular sealing ring, the surface edge of the second conductive sheet is in contact with the edge of the other surface of the square substrate, and a plurality of cover wires are further provided in the circular cover plate, one end of each cover wire is connected to the second conductive sheet; The flexible cable board includes a plurality of flat thin conductive sheets and insulating films covering both surfaces of the thin conductive sheets. Adjacent thin conductive sheets are arranged in parallel and spaced apart. One end of each thin conductive sheet is welded to a cover plate wire, and the other end of each thin conductive sheet is welded to a wire on the main board body. The wire on the main board body is connected to the cathode plug.

2. The square substrate double-sided electroplating rack according to claim 1, characterized in that: The cathode plug includes a left plug-in portion located at the left end of the hanger holding portion and a right plug-in portion located at the right end of the hanger holding portion. The cathode plug is provided with a total of 8 plug-ins, and the front and back sides of the left plug-in portion and the front and back sides of the right plug-in portion are each provided with two parallel and spaced plug-ins; 4 of the plug-ins are respectively connected to a first wire, each first wire first extends on the back side of the main board body, then passes through the thickness direction of the main board body to the front side of the main board body, and finally extends along the length direction of a first conductive sheet and is pressed against the bottom of the first conductive sheet; the other 4 plug-ins are respectively connected to a second wire, and the flexible cable board includes 4 thin conductive sheets, and each second wire extends from the front side of the main board body and is welded to a thin conductive sheet of the flexible cable board.

3. The square substrate double-sided plating rack according to claim 2, characterized in that: There are four cover plate wires, each of which extends from the welding point with the thin conductive sheet on the front side of the circular cover plate, then passes through the thickness direction of the circular cover plate to the back side of the circular cover plate, and finally extends along the length direction of a second conductive sheet and is pressed against the bottom of the second conductive sheet.

4. The square substrate double-sided plating rack according to claim 2, characterized in that: The left plug-in portion is mirror-symmetrical to the right plug-in portion, and the plugs installed on the left plug-in portion and the right plug-in portion include a first L-shaped plug-in, a second L-shaped plug-in, a third L-shaped plug-in and a fourth L-shaped plug-in. The first L-shaped plug-in, the second L-shaped plug-in, the third L-shaped plug-in and the fourth L-shaped plug-in all include a transverse connecting portion for connecting to a wire and a longitudinal plug-in portion for mating with a power socket. The lengths of the longitudinal plug-in portions of the first L-shaped plug-in, the second L-shaped plug-in, the third L-shaped plug-in and the fourth L-shaped plug-in are successively longer; the left plug-in portion and the right plug-in portion both include a middle spacer portion in the middle position in the thickness direction, and upper and lower spacers are provided on the back side of the middle spacer portion in parallel. A first transverse groove and a third transverse groove, a second transverse groove and a fourth transverse groove arranged in parallel with each other at upper and lower intervals are provided on the front side of the middle spacer, the transverse connecting portion of the first L-shaped plug is located in the first transverse groove, the transverse connecting portion of the second L-shaped plug is located in the second transverse groove, the transverse connecting portion of the third L-shaped plug is located in the third transverse groove, and the transverse connecting portion of the fourth L-shaped plug is located in the fourth transverse groove; the longitudinal plug-in portions of the first L-shaped plug, the second L-shaped plug, the third L-shaped plug and the fourth L-shaped plug are isolated from each other, and the bottom of each longitudinal plug-in portion has an inclined portion that gradually shrinks downward, and the bottom end surfaces of each inclined portion are flush.

5. The square substrate double-sided plating rack according to claim 1, characterized in that: A plurality of first pressing blocks are arranged at intervals on the upper side of each first conductive sheet via screws, and a plurality of second pressing blocks are arranged at intervals on the upper side of each second conductive sheet via screws.

6. The square substrate double-sided electroplating rack according to claim 5, characterized in that: The first pressing blocks and the second pressing blocks are staggered at installation positions along the length direction of the conductive sheet.

7. The square substrate double-sided electroplating rack according to claim 1, characterized in that: The circular cover is provided with a plurality of spaced-apart paving grooves on the periphery of the second circular sealing groove, and the positions of the paving grooves match the positioning protrusions.

8. The square substrate double-sided electroplating rack according to claim 1, characterized in that: The flexible cable board is bent in a U shape.

9. The square substrate double-sided electroplating rack according to claim 1, characterized in that: The main body is also provided with an air passage for air tightness testing, an air nozzle is provided at the outer end of the air passage, and the end of the air passage is connected to the space between the first circular sealing ring and the outer circular sealing ring.

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