Split type active shock absorber and shock absorption device

Abstract

According to the split type active shock absorber and the shock absorption device, a spring mechanism is arranged between a top plate and a bottom plate, an actuator mechanism is arranged between the top plate and the bottom plate, a sensor mechanism is arranged on the bottom plate, the bottom plate is provided with a communication connector, and a control box is connected with the communication connector. A force relative to the bottom surface is output on a top plate of the actuator mechanism, so that the vibration reduction effect is realized; split type active shock absorbers are arranged on four supporting legs arranged on a support, each split type active shock absorber is provided with a sensor mechanism, the four sensor mechanisms are fixedly connected with a top plate to detect speed signals of load equipment at the position respectively, and then the speed signals are transmitted to a control box through a communication connector. And the control box gives out a control signal according to an analysis result and generates a force opposite to the vibration, so that the vibration is reduced or eliminated, multi-degree-of-freedom vibration active control can be realized through mutual cooperation of the four actuator mechanisms, and a good full-band vibration reduction effect is realized on a load above the vibration absorber.

Description

Technical Field

[0001] The utility model relates to the technical field of field emission scanning electron microscope vibration dampers, in particular to a split type active vibration damper and a vibration damping device. Background Art

[0002] The field emission scanning electron microscope (FESEM) is a type of electron microscope. This instrument boasts ultra-high resolution and is capable of observing and processing the surface morphology of various solid samples using secondary electron and reflected electron images. Utilizing the principle of secondary electron imaging, the instrument observes biological samples such as tissues, cells, microorganisms, and biomacromolecules at the nanoscale, with or without coating, at low voltages. This provides faithful, three-dimensional, and accurate information on the surface's ultra-microscopic structure. Equipped with a high-performance X-ray spectrometer, it can simultaneously perform qualitative, semi-quantitative, and quantitative analysis of point, line, and surface elements at microscales on the sample's surface, enabling comprehensive analysis of morphology and chemical composition. In many operating environments, nanoscale analytical instruments such as FESEMs fail to perform at their optimal performance due to both environmental vibration and the instrument's own internal influences. Traditional electron microscopes typically incorporate passive air springs to provide basic vibration isolation. However, this passive vibration isolation exhibits resonance zones, making it counterproductive to low-frequency vibration interference. Utility Model Content

[0003] Based on this, it is necessary to provide a split active vibration absorber and vibration reduction device to address the problem that traditional electron microscope equipment usually has built-in passive air springs to provide basic vibration isolation, but the passive vibration isolation used has a resonance zone and has a counter-effect on low-frequency vibration interference.

[0004] A split active shock absorber includes a top plate, a bottom plate, an actuator mechanism, a sensor mechanism, a spring mechanism, and a control box. The spring mechanism is arranged between the top plate and the bottom plate, the actuator mechanism is arranged between the top plate and the bottom plate, the sensor mechanism is arranged on the bottom plate, the bottom plate is provided with a communication connector, and the control box is connected to the communication connector.

[0005] In one embodiment, the actuator mechanism includes a vertical actuator and a horizontal actuator, the vertical actuator and the horizontal actuator are respectively arranged between the top plate and the bottom plate, and the vertical actuator and the horizontal actuator are located on both sides of the spring mechanism.

[0006] In one embodiment, the vertical actuator includes a first motor mover module and a first motor stator module, the first motor mover module is arranged on the side of the top plate facing the bottom plate, and the first motor stator module is arranged on the side of the bottom plate facing the top plate, and the first motor mover module and the first motor stator module are clearance-fitted.

[0007] In one embodiment, the first motor mover module includes a first magnet backplate, a second magnet backplate and a first magnet, the first magnet backplate is L-shaped, the second magnet backplate is a rectangular backplate vertically arranged on the first magnet backplate, the first magnet backplate and the second magnet backplate are connected to form a first concave groove, the first motor stator module includes a first coil bracket, a first stator fixing block and a first coil, the first stator fixing block is arranged on the base plate, the first coil bracket is vertically arranged on the first stator fixing block, a first mounting groove is arranged in the first coil bracket, the first coil is arranged in the first mounting groove, and the first coil bracket extends into the first concave groove at one end away from the first stator fixing block and is gap-matched with the concave groove.

[0008] In one embodiment, the horizontal actuator includes a second motor mover module and a second motor stator module, the second motor mover module is arranged on the two sides of the top plate facing the bottom plate, the second motor stator module is arranged on the side of the bottom plate facing the top plate, and the second motor mover module and the second motor stator module are clearance-fitted.

[0009] In one embodiment, the second motor mover module includes a third magnet backplate, a fourth magnet backplate and a second magnet, the third magnet backplate is L-shaped, the fourth magnet backplate is a rectangular backplate vertically arranged on the third magnet backplate, the third magnet backplate and the fourth magnet backplate are connected to form a second concave groove, the second motor stator module includes a second coil bracket, a second stator fixing block and a second coil, the second stator fixing block is arranged on the base plate, the second coil bracket is vertically arranged on the second stator fixing block, a second mounting groove is arranged in the second coil bracket, the second coil is arranged in the second mounting groove, and the second coil bracket extends into the second concave groove at one end away from the second stator fixing block and is gap-matched with the concave groove.

[0010] In one embodiment, the sensor mechanism includes a vertical velocity sensor and a horizontal velocity sensor, and the vertical velocity sensor and the horizontal velocity sensor are respectively arranged on the top plate.

[0011] In one embodiment, the spring mechanism includes an adjusting nut, a spring seat, a spring, a spring cover and a screw rod. The base plate is provided with a first center hole, one end of the screw rod is embedded in the first center hole, the adjusting nut and the spring seat are sequentially sleeved on the other end of the screw rod, the spring is provided at the end of the spring seat away from the adjusting nut, and the spring cover is provided at the end of the spring away from the spring seat.

[0012] In one embodiment, the spring seat is provided with a second center hole, the screw rod passes through the second center hole, and the second center hole is clearance-fitted with the screw rod.

[0013] A split-type active vibration reduction device comprises any one of the split-type active vibration reducers in the above embodiments and a bracket, wherein the bracket is provided with four supporting legs, and each supporting leg is provided with the split-type active vibration reducer.

[0014] The above-mentioned split active vibration absorber and vibration reduction device include a top plate, a bottom plate, an actuator mechanism, a sensor mechanism, a spring mechanism and a control box. The spring mechanism is arranged between the top plate and the bottom plate, the actuator mechanism is arranged between the top plate and the bottom plate, the sensor mechanism is arranged on the bottom plate, the bottom plate is provided with a communication connector, and the control box is connected to the communication connector. Through the spring mechanism arranged between the top plate and the bottom plate, the actuator mechanism is arranged between the top plate and the bottom plate, the sensor mechanism is arranged on the bottom plate, and the control box is connected to the communication connector, the actuator mechanism outputs a force relative to the bottom surface on the top plate, thereby achieving a vibration reduction effect. By arranging the split active vibration absorber on four supporting feet provided on the bracket, each split active vibration absorber is equipped with a sensor mechanism. The four sensor mechanisms are fixedly connected to the top plate and respectively detect the speed of the load device at that position. The speed is then transmitted to the control box through the communication connector. The control box controls the actuator mechanism to generate a force opposite to the vibration, thereby reducing or eliminating the vibration. Through the mutual cooperation of the four actuator mechanisms, multi-degree-of-freedom active vibration control can be realized, thereby achieving a good vibration reduction effect in the full frequency band for the load above the vibration absorber. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 A schematic structural diagram of a split-type active vibration absorber according to one embodiment;

[0016] Figure 2 A schematic structural diagram of a split-type active vibration absorber according to one embodiment;

[0017] Figure 3 A schematic structural diagram of a split-type active vibration absorber according to one embodiment from another perspective;

[0018] Figure 4 A schematic structural diagram of a limit rod and a limit block of a split-type active shock absorber according to one embodiment;

[0019] Figure 5 A schematic structural diagram of a vertical actuator of a split-type active vibration absorber according to one embodiment;

[0020] Figure 6 This is a schematic structural diagram of a first motor mover module of a split-type active vibration absorber according to one embodiment;

[0021] Figure 7A schematic structural diagram of a horizontal actuator of a split-type active shock absorber according to one embodiment;

[0022] Figure 8 A schematic structural diagram of a spring mechanism of a split-type active shock absorber according to one embodiment;

[0023] Figure 9 A schematic structural diagram of a spring mechanism of a split-type active shock absorber according to one embodiment;

[0024] Figure 10 The figure is a schematic structural diagram of a split-type active vibration damping device of a split-type active vibration damper according to one embodiment. DETAILED DESCRIPTION

[0025] To make the above-mentioned objects, features, and advantages of the present invention more clearly understood, the following detailed description of specific embodiments of the present invention is provided in conjunction with the accompanying drawings. The following description sets forth many specific details to facilitate a full understanding of the present invention. However, the present invention can be implemented in many other ways than those described herein, and those skilled in the art may make similar modifications without departing from the scope of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0026] like Figures 1-4 As shown, a split-type active vibration absorber includes a top plate 10, a bottom plate 20, an actuator mechanism 30, a sensor mechanism 40, a spring mechanism 50, and a control box (not shown). The spring mechanism 50 is disposed between the top plate 10 and the bottom plate 20, the actuator mechanism 30 is disposed between the top plate 10 and the bottom plate 20, the sensor mechanism 40 is disposed on the bottom plate 20, the bottom plate 20 is provided with a communication connector 210, and the control box is connected to the communication connector 210. For example, the top plate 10 and the bottom plate 20 are rectangular parallelepiped plates with the same horizontal cross-section size, the spring mechanism 50 is disposed at the center of the top plate 10 and the bottom plate 20 at both ends, and a working panel 70 is provided on the side of the top plate 10 facing away from the bottom plate 20. The working panel 70 is used to carry a detection load device.

[0027] like Figure 5-Figure 7 As shown, in one embodiment, the actuator mechanism 30 includes a vertical actuator 310 and a horizontal actuator 320. The vertical actuator 310 and the horizontal actuator 320 are respectively disposed between the top plate 10 and the bottom plate 20, and the vertical actuator 310 and the horizontal actuator 320 are located on both sides of the spring mechanism 50. For example, the vertical actuator 310 and the horizontal actuator 320 are respectively disposed on both sides of the spring mechanism 50, and are located near the edges of the top plate 10 and the bottom plate 20, so as to facilitate balanced force application to the top plate 10.

[0028] In one embodiment, the vertical actuator 310 includes a first motor mover module 311 and a first motor stator module 312. The first motor mover module 311 is arranged on the side of the top plate 10 facing the bottom plate 20, and the first motor stator module 312 is arranged on the side of the bottom plate 20 facing the top plate 10. The first motor mover module 311 and the first motor stator module 312 are clearance-fitted. For example, a limiting rod 110 and a limiting block 120 are further provided between the top plate 10 and the bottom plate 20. The limiting rod 110 is fixedly connected to the bottom plate 20, and the limiting block 120 is fixedly connected to the top plate 10. A vertical gap and a horizontal gap are provided between the limiting rod 110 and the limiting block 120. The vertical gap and the horizontal gap between the limiting rod 110 and the limiting block 120 are smaller than the gap value between the first motor mover module 311 and the first motor stator module 312 of the vertical actuator 310, which can protect the actuator and prevent the first motor mover module 311 and the first motor stator module 312 from being damaged by collision when the load equipment is subjected to excessive external force.

[0029] In one embodiment, the first motor mover module 311 includes a first magnet back plate 3111, a second magnet back plate 3112 and a first magnet 3113, the first magnet 3113 back plate 3111 is L-shaped, the second magnet back plate 3112 is a rectangular back plate vertically arranged on the first magnet 3113 back plate 3111, the first magnet 3113 back plate 3111 and the second magnet back plate 3112 are connected to form a first concave groove 3114, the first motor stator module 312 includes a first coil bracket 3121, a second coil bracket 3122 and a second coil bracket 3123. A stator fixing block 3122 and a first coil 3123, the first stator fixing block 3122 is set on the base plate 20, the first coil 3123 bracket 3121 is vertically set on the first stator fixing block 3122, the first coil 3123 bracket 3121 is provided with a first mounting groove 3124, the first coil 3123 is set in the first mounting groove 3124, and the first coil 3123 bracket 3121 away from the first stator fixing block 3122 One end extends into the first concave groove 3114 and is gap-matched with the concave groove.

[0030] In one embodiment, the horizontal actuator 320 includes a second motor mover module 321 and a second motor stator module 322. The second motor mover module 321 is arranged on the side of the top plate 10 facing the bottom plate 20, and the second motor stator module 322 is arranged on the side of the bottom plate 20 facing the top plate. The second motor mover module 321 and the second motor stator module 322 are clearance-fitted.

[0031] In one embodiment, the second motor mover module 321 includes a third magnet back plate 3211, a fourth magnet back plate 3212 and a second magnet 3213. The third magnet back plate 3211 is L-shaped, and the fourth magnet back plate 3212 is a rectangular back plate vertically arranged on the third magnet back plate 3211. The third magnet back plate 3211 and the fourth magnet back plate 3212 are connected to form a second concave groove 3214. The second motor stator module 322 includes a second coil bracket 3221, a second stator fixing block 3222 and a second coil 3223. The second stator fixing block 3222 is arranged on the base plate 20, the second coil bracket 3221 is vertically arranged on the second stator fixing block 3222, a second mounting groove is provided in the second coil bracket 3221, the second coil 3223 is arranged in the second mounting groove, and the second coil bracket 3221 extends into the second concave groove 3214 at one end away from the second stator fixing block 3222 and fits with the concave groove gap.

[0032] In one embodiment, the sensor mechanism 40 includes a vertical velocity sensor 410 and a horizontal velocity sensor 420, and the vertical velocity sensor 410 and the horizontal velocity sensor 420 are respectively disposed on the top plate 10. For example, the vertical velocity sensor 410 and the horizontal velocity sensor 420 are respectively fixed to the diagonal positions of the top plate 10 by screws. By fixing the vertical velocity sensor 410 and the horizontal velocity sensor 420 to the diagonal positions of the top plate 10, it is convenient to detect the velocity value of the load device at the diagonal position.

[0033] like Figure 8-Figure 9As shown, in one embodiment, the spring mechanism 50 includes an adjusting nut 510, a spring seat 520, a spring 530, a spring cover 540, and a screw 550. The base plate 20 is provided with a first center hole 220. One end of the screw 550 is inserted into the first center hole 220. The adjusting nut 510 and the spring seat 520 are sequentially sleeved on the other end of the screw 550. The spring 530 is provided at the end of the spring seat 520 away from the adjusting nut 510. The spring cover 540 is provided at the end of the spring 530 away from the spring seat 520. The spring seat 520 is provided with a second center hole 521. The screw 550 passes through the second center hole 521, and the second center hole 521 and the screw 550 are loosely matched. For example, the top plate 10 is provided with a circular limiting groove (not shown in the figure), the horizontal cross-section of the spring cover 540 is circular, the size of the spring cover 540 is adapted to the circular limiting groove, the spring cover 540 is arranged in the circular limiting groove, the spring cover 540 is provided with a limiting nut 541, and the top plate 10 is provided with a limiting hole 120 at the center of the limiting groove, the limiting nut 541 is arranged in the limiting hole 120 away from the end of the spring cover 540, and the spring cover 540 is provided with a cylindrical limiting protrusion 542 at the end facing the spring 530, and the cylindrical limiting protrusion 542 is just stuck in the inner hole of the spring 530, and then through the cooperation of the spring 530 and the cylindrical limiting protrusion 542, the limiting nut 541 is arranged in the limiting hole 120 of the top plate 10, and one end of the screw rod 550 is embedded in the first center hole 220, thereby preventing the spring 530 from shaking. The position of the adjusting nut 510 can also be rotated to cooperate with the thread of the screw rod 550, so that the adjusting nut 510 can move up and down along the axis of the screw rod 550. The adjusting nut 510 pushes the spring seat 520, and then pushes the lower end surface of the spring 530, that is, the compression amount of the spring 530 is adjusted, so that the shock absorber can be maintained at the set working height under different loads.

[0034] like Figure 10 As shown, a split-type active vibration reduction device includes any of the split-type active vibration reduction devices described in the above embodiments and a bracket 80. The bracket 80 is provided with four support legs 810, and each support leg 810 is provided with a split-type active vibration reduction device. For example, by providing split-type active vibration reduction devices on the four support legs 810, each split-type active vibration reduction device is provided with a vertical velocity sensor 410 and a horizontal velocity sensor 420. The split-type active vibration reduction device has a total of four vertical velocity sensors 410 and four horizontal velocity sensors 420. The four vertical velocity sensors 410 and the four horizontal velocity sensors 420 are fixedly connected to the top plate 10 and respectively detect the velocity value of the load device at that position. When the four support legs 810 are eccentric, the compression amount of the spring 530 of each split-type active vibration reduction device can be adjusted separately, so that the working panels 70 of the platform vibration reduction devices are at the same height, and the load platform surface remains horizontal.

[0035] The above-mentioned split active shock absorber and shock absorption device include a top plate 10, a bottom plate 20, an actuator mechanism 30, a sensor mechanism 40, a spring mechanism 50 and a control box. The spring mechanism 50 is arranged between the top plate 10 and the bottom plate 20, the actuator mechanism 30 is arranged between the top plate 10 and the bottom plate 20, the sensor mechanism 40 is arranged on the bottom plate 20, the bottom plate 20 is provided with a communication connector 210, the control box is connected to the communication connector 210, and the spring mechanism 50 is arranged between the top plate 10 and the bottom plate 20, the actuator mechanism 30 is arranged between the top plate 10 and the bottom plate 20, the sensor mechanism 40 is arranged on the bottom plate 20, and the control box is connected to the communication connector 210. The actuator mechanism 30 outputs a force on the top plate 10 relative to the bottom surface, thereby achieving a vibration reduction effect. Split active vibration absorbers are installed on four support legs provided on the bracket 80. Each split active vibration absorber is equipped with a sensor mechanism 40. The four sensor mechanisms 40 are fixedly connected to the top plate 10 to respectively detect the speed value of the load device at that position. The speed value is then transmitted to the control box via the communication connector 210. The control box controls the actuator mechanism 30 to generate a force opposite to the vibration, thereby reducing or eliminating the vibration. By cooperating with each other, the four actuator mechanisms 30 can realize active vibration control with multiple degrees of freedom, thereby achieving an excellent vibration reduction effect across the entire frequency range for the load above the vibration absorber. The technology of controlling the actuator mechanism 30 to generate a force opposite to the vibration through the control box is a prior art in the field of vibration reduction devices and will not be elaborated on here.

[0036] The technical features of the above-mentioned embodiments can be combined arbitrarily. In order to make the description concise, not all possible combinations of the technical features in the above-mentioned embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0037] The above-described embodiments merely represent several implementations of the present invention. While the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the utility model patent. It should be noted that a person skilled in the art would be able to make various modifications and improvements without departing from the concept of the present invention, and these modifications and improvements fall within the scope of protection of the present invention. Therefore, the scope of protection of the present utility model patent shall be determined by the appended claims.

Claims

1. A split-type active shock absorber, characterized in that: It includes a top plate, a bottom plate, an actuator mechanism, a sensor mechanism, a spring mechanism and a control box, wherein the spring mechanism is arranged between the top plate and the bottom plate, the actuator mechanism is arranged between the top plate and the bottom plate, the sensor mechanism is arranged on the bottom plate, the bottom plate is provided with a communication connector, and the control box is connected to the communication connector. The actuator mechanism includes a vertical actuator and a horizontal actuator, and the vertical actuator and the horizontal actuator are respectively arranged between the top plate and the bottom plate, and the vertical actuator and the horizontal actuator are located on both sides of the spring mechanism. The sensor mechanism includes a vertical speed sensor and a horizontal speed sensor, and the vertical speed sensor and the horizontal speed sensor are respectively arranged on the top plate.

2. The split-type active vibration absorber according to claim 1, characterized in that: The vertical actuator includes a first motor mover module and a first motor stator module. The first motor mover module is arranged on the side of the top plate facing the bottom plate, and the first motor stator module is arranged on the side of the bottom plate facing the top plate. The first motor mover module and the first motor stator module are clearance-fitted.

3. The split-type active vibration absorber according to claim 2, characterized in that: The first motor mover module includes a first magnet backplate, a second magnet backplate and a first magnet, the first magnet backplate is L-shaped, the second magnet backplate is a rectangular backplate vertically arranged on the first magnet backplate, the first magnet backplate and the second magnet backplate are connected to form a first concave groove, the first motor stator module includes a first coil bracket, a first stator fixing block and a first coil, the first stator fixing block is arranged on the base plate, the first coil bracket is vertically arranged on the first stator fixing block, a first mounting groove is arranged in the first coil bracket, the first coil is arranged in the first mounting groove, and the first coil bracket extends into the first concave groove at one end away from the first stator fixing block and is gap-matched with the concave groove.

4. The split-type active vibration absorber according to claim 1, characterized in that: The horizontal actuator includes a second motor mover module and a second motor stator module. The second motor mover module is arranged on the side of the top plate facing the bottom plate, and the second motor stator module is arranged on the side of the bottom plate facing the top plate. The second motor mover module and the second motor stator module are clearance-fitted.

5. The split-type active vibration absorber according to claim 4, characterized in that: The second motor mover module includes a third magnet backplate, a fourth magnet backplate and a second magnet, the third magnet backplate is L-shaped, the fourth magnet backplate is a rectangular backplate vertically arranged on the third magnet backplate, the third magnet backplate and the fourth magnet backplate are connected to form a second concave groove, the second motor stator module includes a second coil bracket, a second stator fixing block and a second coil, the second stator fixing block is arranged on the base plate, the second coil bracket is vertically arranged on the second stator fixing block, a second mounting groove is provided in the second coil bracket, the second coil is arranged in the second mounting groove, and the second coil bracket extends into the second concave groove at one end away from the second stator fixing block and is gap-matched with the concave groove.

6. The split-type active vibration absorber according to claim 1, characterized in that: The spring mechanism includes an adjusting nut, a spring seat, a spring, a spring cover and a screw rod. The base plate is provided with a first center hole. One end of the screw rod is embedded in the first center hole. The adjusting nut and the spring seat are sequentially sleeved on the other end of the screw rod. The spring is provided at the end of the spring seat away from the adjusting nut. The spring cover is provided at the end of the spring away from the spring seat.

7. The split-type active vibration absorber according to claim 6, characterized in that: The spring seat is provided with a second center hole, the screw rod passes through the second center hole, and the second center hole is clearance-matched with the screw rod.

8. A split-type active vibration reduction device, characterized in that: It comprises the split active vibration absorber and a bracket according to any one of claims 1 to 7, wherein the bracket is provided with four supporting legs, and each of the supporting legs is provided with the split active vibration absorber.

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