Plasma etching machine convenient to adjust

Abstract

The utility model discloses a plasma etching machine convenient to adjust, and relates to the technical field of plasma etching machines, the plasma etching machine comprises an etching machine body, a moving mechanism is installed in the etching machine body, in the plasma etching machine, a second electric push rod works to drive a first moving block to move and a rotating plate to rotate, and the inclination angle of a fixed seat is driven to change; a driving motor works to drive a rotating sleeve to rotate, a connecting rod and a moving frame rotate along with the rotating sleeve, the positions of a rotating plate and a second moving block are driven to be changed, the inclination angles of different positions of a workpiece are adjusted, and the etching requirements of various different angles are met; a third electric push rod works to push a moving rod to move, a rotating disc and a rotating rod are driven to rotate, the protruding position of the rotating disc makes contact with a protruding block, two clamping blocks are pushed to the middle, the end of a workpiece is clamped and fixed, the workpiece is prevented from deviating in the etching process in the etching machine body, and the etching effect is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of plasma etching machines, in particular to a plasma etching machine which is easy to adjust. Background Art

[0002] Plasma etcher, also known as plasma etcher, plasma plane etcher, plasma etcher, plasma surface treatment instrument, plasma cleaning system, etc., plasma etching is the most common form of dry etching.

[0003] For example, publication number CN221201078U discloses a plasma etcher that is easy to adjust, including a control box and an etching chamber. The top of the control box is fixedly connected to a conveyor platform, and an etching chamber is provided on the top of the conveyor platform. The bottom opening of the etching chamber is communicated with the top of the conveyor platform. Two material racks are provided on the conveyor platform, and both ends of the material racks are fixedly connected to telescopic columns. A spring is provided on the outer side of the telescopic column. The end of the telescopic column close to the center of the material rack is fixedly connected to an inclined block, and the opposite surfaces of the two inclined blocks are inclined structures.

[0004] In the prior art, when using a plasma etcher to process a workpiece, the incident angle between the plasma and the sample surface needs to be changed according to different processing requirements. However, it is inconvenient to adjust the angle of the workpiece, and it is impossible to adjust the inclination angle and inclination direction of the workpiece at the same time, which is not convenient for improving the verticality of the side wall and the flatness of the bottom. Utility Model Content

[0005] The purpose of the utility model is to solve the problem in the prior art that it is inconvenient to adjust the angle of the workpiece and it is impossible to adjust the inclination angle and inclination direction of the workpiece at the same time, and to propose a plasma etching machine that is easy to adjust.

[0006] In order to achieve the above-mentioned purpose, the present invention adopts the following technical solutions: a plasma etcher that is easy to adjust, comprising an etcher body, a moving mechanism installed inside the etcher body, an adjustment mechanism installed at one end of the moving mechanism, the adjustment mechanism comprising a fixed box, the inner side of the fixed box is fixedly connected to a support frame, one side of the support frame is fixedly connected to a support rod, a fixing mechanism is installed at one end of the support rod, the outside of the support frame is rotatably connected to a rotating sleeve, one end of the rotating sleeve is fixedly connected to a connecting rod, one end of the connecting rod is fixedly connected to a moving frame, a second electric push rod is fixedly connected to the inside of the moving frame, one end of the second electric push rod is fixedly connected to a first moving block, one end of the first moving block is rotatably connected to a rotating plate, and one end of the rotating plate is rotatably connected to the second moving block.

[0007] Preferably, one side of the movable frame is slidably connected to an annular slide groove, and one side of the annular slide groove is fixedly connected to the inner side of the fixed box.

[0008] Preferably, a drive motor is fixedly connected to one side of the support frame, an output end of the drive motor passes through one side of the support frame, and a belt assembly is installed between the output end of the drive motor and the rotating sleeve.

[0009] Preferably, one side of the fixed box is fixedly connected to a first electric push rod, one side of the first electric push rod is fixedly connected to the inner side of the etcher body, and one side of the fixed box is fixedly connected to a telescopic rod, one end of the telescopic rod is fixedly connected to the inner side of the etcher body.

[0010] Preferably, the fixing mechanism includes a fixing seat, one side of the fixing seat is rotatably connected to one end of the support rod, one end of the second movable block is slidably connected to one side of the fixing seat, and both ends of the fixing seat are rotatably connected to the rotating rod.

[0011] Preferably, one end of the rotating rod is fixedly connected to a rotating disk, the outer surface of the rotating disk is fixedly connected to a fixed rod, one end of the fixed rod is fixedly connected to a moving rod, the middle part of the moving rod is rotatably connected to a third electric push rod, and one end of the third electric push rod is rotatably connected to one side of the fixed seat.

[0012] Preferably, both ends of the fixing seat are rotatably connected with a clamping block, the middle portion of the clamping block is arranged outside the rotating rod, and one side of the clamping block is fixedly connected with a protrusion.

[0013] Compared with the prior art, the advantages and positive effects of the present invention are:

[0014] 1. In the utility model, the second electric push rod drives the first moving block to move, the rotating plate rotates, and the inclination angle of the fixed seat changes. The driving motor drives the rotating sleeve to rotate, and the connecting rod and the moving frame rotate accordingly, driving the position of the rotating plate and the second moving block to change, pushing different parts of the fixed seat to tilt, and adjusting the inclination angle of different parts of the workpiece to meet the etching requirements of various angles.

[0015] 2. In the utility model, the third electric push rod is used to push the moving rod to move, driving the rotating disk and the rotating rod to rotate. The raised part of the rotating disk contacts the protrusion, pushing the two clamping blocks toward the middle, so that one end of the two clamping blocks cooperates to clamp and fix the end of the workpiece. By positioning the workpiece, the workpiece is prevented from shifting during the etching process when it is sent into the etching machine body, thereby improving the etching effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 The utility model provides a schematic diagram of the three-dimensional structure of a plasma etching machine that is easy to adjust;

[0017] Figure 2The utility model provides a schematic diagram of the connection structure of the moving mechanism and the adjusting mechanism of a plasma etching machine that is easy to adjust;

[0018] Figure 3 The utility model provides a schematic diagram of the disassembled structure of an adjustment mechanism and a fixing mechanism of a plasma etching machine that is easy to adjust;

[0019] Figure 4 The utility model provides a schematic diagram of the connection structure of a disassembly mechanism of a plasma etching machine which is easy to adjust.

[0020] Legend: 1. Etching machine body; 2. Moving mechanism; 21. Telescopic rod; 22. First electric push rod; 3. Adjusting mechanism; 31. Fixed box; 32. Moving frame; 33. First moving block; 34. Second electric push rod; 35. Rotating plate; 36. Support rod; 37. Drive motor; 38. Belt assembly; 39. Support frame; 310. Rotating sleeve; 311. Annular slide; 312. Connecting rod; 313. Second moving block; 4. Fixing mechanism; 41. Fixed seat; 42. Moving rod; 43. Third electric push rod; 44. Fixed rod; 45. Rotating rod; 46. Bump; 47. Rotating disk; 48. Clamping block. DETAILED DESCRIPTION

[0021] In order to more clearly understand the above-mentioned purpose, features and advantages of the present invention, the present invention is further described below with reference to the accompanying drawings and embodiments. It should be noted that the embodiments of the present application and the features therein can be combined with each other without conflict.

[0022] In the following description, many specific details are set forth to facilitate a full understanding of the present invention. However, the present invention may also be implemented in other ways than those described herein. Therefore, the present invention is not limited to the specific embodiments disclosed in the following specification.

[0023] Example 1: Figure 1-4As shown, the utility model provides a plasma etcher that is easy to adjust, including an etcher body 1, a moving mechanism 2 is installed inside the etcher body 1, an adjusting mechanism 3 is installed at one end of the moving mechanism 2, the adjusting mechanism 3 includes a fixed box 31, the inner side of the fixed box 31 is fixedly connected to a support frame 39, one side of the support frame 39 is fixedly connected to a support rod 36, one end of the support rod 36 is installed with a fixing mechanism 4, the outer side of the support frame 39 is rotatably connected to a rotating sleeve 310, one end of the rotating sleeve 310 is fixedly connected to a connecting rod 312, one end of the connecting rod 312 is fixedly connected to a moving frame 32, the interior of the moving frame 32 is fixedly connected to a second electric push rod 34, one end of the second electric push rod 34 is fixedly connected to a first moving block 33, the first One end of a moving block 33 is rotatably connected to a rotating plate 35, and one end of the rotating plate 35 is rotatably connected to a second moving block 313; one side of the moving frame 32 is slidably connected to an annular slide groove 311, and one side of the annular slide groove 311 is fixedly connected to the inner side of the fixed box 31; one side of the support frame 39 is fixedly connected to a driving motor 37, and the output end of the driving motor 37 passes through one side of the support frame 39, and a belt assembly 38 is installed between the output end of the driving motor 37 and the rotating sleeve 310; one side of the fixed box 31 is fixedly connected to a first electric push rod 22, and one side of the first electric push rod 22 is fixedly connected to the inner side of the etching machine body 1; one side of the fixed box 31 is fixedly connected to a telescopic rod 21, and one end of the telescopic rod 21 is fixedly connected to the inner side of the etching machine body 1.

[0024] The first electric push rod 22 drives the fixed box 31 to move, and the telescopic rod 21 extends or contracts, so that the fixed box 31 moves linearly. The movement of the fixed box 31 drives the position of the workpiece to move. When the workpiece is subjected to plasma etching, the fixed seat 41 is rotatably connected to the support rod 36. The fixed seat 41 can rotate 360 ​​degrees with the support rod 36 as the fulcrum. The second electric push rod 34 drives the first moving block 33 to move, and the rotating plate 35 rotates, driving the angle of the fixed seat 41 to change. The support frame 39 is used to position and support the drive motor 37 and the support rod 36. The belt assembly 38 is composed of two pulleys and a transmission belt. The driving motor 37 drives the rotating sleeve 310 to rotate, and the connecting rod 312 and the moving frame 32 rotate accordingly. The moving frame 32 slides inside the annular slide groove 311 to fix the movement path of the moving frame 32. The movement of the moving frame 32 drives the position of the rotating plate 35 and the second moving block 313 to change. The second moving block 313 slides on one side of the fixed seat 41, thereby pushing different parts of the fixed seat 41 to tilt, and adjusting the inclination angle of different parts of the workpiece to meet the etching requirements of various angles.

[0025] Example 2: Figure 1 and Figure 2As shown, the fixing mechanism 4 includes a fixed seat 41, one side of the fixed seat 41 is rotatably connected to one end of the support rod 36, one end of the second movable block 313 is slidably connected to one side of the fixed seat 41, and both ends of the fixed seat 41 are rotatably connected to the rotating rod 45; one end of the rotating rod 45 is fixedly connected to the rotating disk 47, the outer surface of the rotating disk 47 is fixedly connected to the fixed rod 44, one end of the fixed rod 44 is fixedly connected to the moving rod 42, the middle part of the moving rod 42 is rotatably connected to the third electric push rod 43, and one end of the third electric push rod 43 is rotatably connected to one side of the fixed seat 41; both ends of the fixed seat 41 are rotatably connected to the clamping block 48, the middle part of the clamping block 48 is arranged on the outside of the rotating rod 45, and one side of the clamping block 48 is fixedly connected to the protrusion 46.

[0026] The effect achieved by the entire embodiment is that the workpiece is placed on the fixed seat 41, and the moving rod 42 is pushed to move by the third electric push rod 43. The moving rod 42 moves in an arc, and the third electric push rod 43 rotates on one side of the fixed seat 41. The connection between the third electric push rod 43 and the moving rod 42 rotates, driving the rotating disk 47 and the rotating rod 45 to rotate. A protrusion is provided on one side of the rotating disk 47. When the protrusion of the rotating disk 47 moves to contact the protrusion 46, the two clamping blocks 48 are pushed toward the middle, and one end of the clamping block 48 rotates on the fixed seat 41, so that one end of the two clamping blocks 48 cooperates to clamp and fix the end of the workpiece. By positioning the workpiece, the workpiece is prevented from being offset during the etching process when it is sent into the interior of the etching machine body 1, thereby improving the etching effect.

[0027] The usage and working principle of this device are as follows: the workpiece is placed on the fixed seat 41, the third electric push rod 43 works to push the moving rod 42 to move, drive the rotating disk 47 and the rotating rod 45 to rotate, and push the two clamping blocks 48 toward the middle, so that one end of the two clamping blocks 48 cooperates to clamp and fix the end of the workpiece, and the first electric push rod 22 works to drive the fixed box 31 to move, drive the position of the workpiece to move, and send the workpiece to the inside of the etcher body 1, the second electric push rod 34 works to drive the first moving block 33 to move, and the rotating plate 35 rotates, driving the angle of the fixed seat 41 to change, the drive motor 37 works to drive the rotating sleeve 310 to rotate, and the connecting rod 312 and the moving frame 32 rotate accordingly, pushing different parts of the fixed seat 41 to tilt, and etching the workpiece at different angles.

[0028] The above description is only a preferred embodiment of the present invention and does not limit the present invention in any other form. Any technician familiar with the profession may use the technical content disclosed above to change or modify it into an equivalent embodiment with equivalent changes for application in other fields. However, any simple modification, equivalent change and modification of the above embodiment made according to the technical essence of the present invention without departing from the content of the technical solution of the present invention shall still fall within the scope of protection of the technical solution of the present invention.

Claims

1. A plasma etcher that is easy to adjust, comprising an etcher body (1), characterized in that: A moving mechanism (2) is installed inside the etching machine body (1), and an adjustment mechanism (3) is installed at one end of the moving mechanism (2). The adjustment mechanism (3) includes a fixed box (31), the inner side of the fixed box (31) is fixedly connected to a support frame (39), one side of the support frame (39) is fixedly connected to a support rod (36), one end of the support rod (36) is installed with a fixing mechanism (4), the outside of the support frame (39) is rotatably connected to a rotating sleeve (310), one end of the rotating sleeve (310) is fixedly connected to a connecting rod (312), one end of the connecting rod (312) is fixedly connected to a moving frame (32), the inside of the moving frame (32) is fixedly connected to a second electric push rod (34), one end of the second electric push rod (34) is fixedly connected to a first moving block (33), one end of the first moving block (33) is rotatably connected to a rotating plate (35), and one end of the rotating plate (35) is rotatably connected to the second moving block (313).

2. The easily adjustable plasma etcher according to claim 1, characterized in that: One side of the movable frame (32) is slidably connected to an annular sliding groove (311), and one side of the annular sliding groove (311) is fixedly connected to the inner side of the fixed box (31).

3. The easily adjustable plasma etching machine according to claim 1, characterized in that: A drive motor (37) is fixedly connected to one side of the support frame (39), an output end of the drive motor (37) passes through one side of the support frame (39), and a belt assembly (38) is installed between the output end of the drive motor (37) and the rotating sleeve (310).

4. The easily adjustable plasma etching machine according to claim 1, characterized in that: One side of the fixed box (31) is fixedly connected to a first electric push rod (22), one side of the first electric push rod (22) is fixedly connected to the inner side of the etching machine body (1), and one side of the fixed box (31) is fixedly connected to a telescopic rod (21), one end of the telescopic rod (21) is fixedly connected to the inner side of the etching machine body (1).

5. The easily adjustable plasma etching machine according to claim 1, characterized in that: The fixing mechanism (4) comprises a fixing seat (41), one side of the fixing seat (41) is rotatably connected to one end of the support rod (36), one end of the second moving block (313) is slidably connected to one side of the fixing seat (41), and both ends of the fixing seat (41) are rotatably connected to a rotating rod (45).

6. The easily adjustable plasma etching machine according to claim 5, characterized in that: One end of the rotating rod (45) is fixedly connected to a rotating disk (47), the outer surface of the rotating disk (47) is fixedly connected to a fixed rod (44), one end of the fixed rod (44) is fixedly connected to a moving rod (42), the middle part of the moving rod (42) is rotatably connected to a third electric push rod (43), and one end of the third electric push rod (43) is rotatably connected to one side of the fixed seat (41).

7. The easily adjustable plasma etching machine according to claim 5, characterized in that: Both ends of the fixing seat (41) are rotatably connected to a clamping block (48), the middle portion of the clamping block (48) is arranged outside the rotating rod (45), and one side of the clamping block (48) is fixedly connected to a protrusion (46).

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