Board-level packaging process substrate caching mechanism with clamping function
By designing a board-level packaging process substrate buffer mechanism with clamping function, the precise positioning and clamping of the substrate is achieved by using stepper motors and synchronous belt drive systems, the problem of unfixed substrate position in the prior art is solved, and the efficiency and accuracy of semiconductor wafer production are improved.
Patent Information
- Application Number
- CN202422453313.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-10-11
- Publication Date
- 2025-08-29
- Estimated Expiration
- 2034-10-11
AI Technical Summary
In the production of semiconductor wafers, the existing multi-layer loading layer devices have unfixed substrate positions, resulting in re-alignment and correction required for each pick-up and placement, increasing time cost and reducing working efficiency.
A plate-level packaging process substrate buffer mechanism with clamping function is designed, and an adjustment mechanism driven by stepper motor and a synchronous belt transmission system is used to realize precise positioning and clamping of the substrate. Through the combined action of the first clamping part and the second clamping part, the accuracy of the substrate position is ensured.
It realizes fast and accurate positioning and clamping of the substrate, shortens working hours, improves production efficiency, and ensures that the position deviation of each substrate is within ±0.1mm.
Smart Images
Figure CN223284936U_ABST
Abstract
Description
Technical Field
[0001] The utility model belongs to the technical field of semiconductor wafer packaging, and in particular relates to a substrate buffer mechanism of a board-level packaging process with a clamping function. Background Art
[0002] During the semiconductor wafer manufacturing process, when an abnormal situation occurs on the production line, temporary buffering is required. In the existing multi-layer loading layer device, the position of the substrate is different each time it is taken and placed, and realignment is required, which increases time costs and low work efficiency. Utility Model Content
[0003] The purpose of the utility model is to provide a substrate buffer mechanism for a board-level packaging process with a clamping function, so as to solve the problems existing in the above-mentioned prior art.
[0004] To achieve the above-mentioned purpose, the present invention provides the following solution: The present invention provides a board-level packaging process substrate cache mechanism with a clamping function, comprising a second frame, a first frame being fixedly connected to one side of the second frame, a bottom plate and a tooth fork fixing plate being fixedly connected to the second frame, a plurality of tooth forks being fixedly connected to the tooth fork fixing plate at equal intervals, a stepper motor being fixedly connected to the bottom surface of the bottom plate close to the side of the first frame, the stepper motor being respectively connected in a transmission manner to a first adjustment mechanism and a second adjustment mechanism, the first adjustment mechanism and the second adjustment mechanism being respectively located at the top of the bottom plate, the first adjustment mechanism comprising a plurality of first adjustment parts fixed to the bottom plate, the first adjustment parts being respectively located on both sides of the bottom plate and on the side of the bottom plate close to the first frame, one of the first adjustment parts being transmission-connected to the stepper motor, the second adjustment mechanism comprising a second adjustment part symmetrically arranged on the bottom plate, the plurality of first adjustment parts and the second adjustment parts being transmission-connected by a first synchronous belt, the first adjustment part being transmission-connected to a first clamping part, and the second adjustment part being transmission-connected to a second clamping part.
[0005] Preferably, the first adjusting part includes a first extended shaft synchronous pulley installed on the top surface of the base plate, the stepping motor and the first extended shaft synchronous pulley adjacent thereto are fixedly connected, the first extended shaft synchronous pulley is transmission-connected to the first synchronous belt, the first synchronous belt is symmetrically transmission-connected with a first phase-changing idler pulley on one side away from the extended shaft synchronous pulley, a first large-tooth-number synchronous pulley is fixed on the top of the first extended shaft synchronous pulley, the first large-tooth-number synchronous pulley is transmission-connected to the first synchronous belt, the first clamping part is provided between the first extended shaft synchronous pulley and the first phase-changing idler pulley, and the first clamping part is fixed to the first synchronous belt.
[0006] Preferably, the first clamping portion includes a first guide rail symmetrically fixed to the base plate, the first guide rail is located on both sides of the first synchronous belt, a first connecting plate is slidably connected to the first guide rail, a first connecting seat is symmetrically fixed to the first connecting plate, and a plurality of first clamping members are fixed to the first connecting seat at equal intervals.
[0007] Preferably, the first clamping member includes a first core shaft fixedly connected to the first connecting seat, a first clamping hoop is provided between the first core shaft and the first connecting seat, and a plurality of clamping rollers are rotatably connected to the first core shaft at equal intervals.
[0008] Preferably, the second adjustment part includes a second extended shaft synchronous pulley installed on the top surface of the base plate, the second extended shaft synchronous pulley is connected to the first synchronous belt transmission, a second disguised idler pulley is symmetrically connected between the two second extended shaft synchronous pulleys, a second large tooth number synchronous pulley is fixed to the top of the second extended shaft synchronous pulley, the second large tooth number synchronous pulley is connected to the first synchronous belt transmission, and the bottom of the second extended shaft synchronous pulley is connected to the second clamping part through a second synchronous belt.
[0009] Preferably, the second clamping portion includes a second small-tooth-number synchronous pulley installed on the bottom surface of the base plate, the second small-tooth-number synchronous pulley is located on the side away from the second extended shaft synchronous pulley, the second extended shaft synchronous pulley and the second small-tooth-number synchronous pulley are transmission-connected by the second synchronous belt, the second synchronous belt is transmission-connected to the second clamping member, and the second clamping member is located on the top of the base plate.
[0010] Preferably, the second clamping member includes a second connecting seat fixedly connected to the second synchronous belt, a slide groove is provided on the bottom plate, a second guide rail is fixedly connected to the top surface of the bottom plate, the second connecting seat passes through the slide groove and is slidingly connected to the second guide rail, the top surface of the second connecting seat is rotatably connected to the second core shaft, and a plurality of the clamping rollers are rotatably connected to the second core shaft at equal intervals.
[0011] Preferably, a clean air blower is fixedly connected to the outer side of the first frame.
[0012] Preferably, a seat presence sensor is provided on the tine.
[0013] The utility model discloses the following technical effects: when in use, the level of the base plate is first adjusted by adjusting the feet, and then the verticality of the tooth fork fixing plate and the base plate is adjusted by using a jig; the first clamping part and the second clamping part are in an open state, and the robot fork places the glass substrate on the tooth fork from the front. After the robot fork withdraws, the first adjustment part and the second adjustment part are driven by the stepper motor to drive the first clamping part and the second clamping part to position and clamp the glass substrate. The first synchronous belt is arranged in a five-pointed surround on the front of the base plate and is connected to the stepper motor through a coupling to directly drive the first adjustment part in the three directions of the left, right and back and the second drive part arranged obliquely at a certain angle. The utility model clamps each layer of substrate in a position so that the cached product can enter the next process at any time, shortening the working time. BRIEF DESCRIPTION OF THE DRAWINGS
[0014] The accompanying drawings, which constitute part of this application, are intended to provide a further understanding of this application. The exemplary embodiments and descriptions of this application are intended to explain this application and do not constitute an improper limitation on this application. In the accompanying drawings:
[0015] Figure 1 This is a top view of the substrate buffer mechanism of the board-level packaging process with a clamping function of the utility model;
[0016] Figure 2 This is a bottom view of the bottom plate of the utility model;
[0017] Figure 3 This is a structural schematic diagram of a substrate cache mechanism with a clamping function for a board-level packaging process according to the present invention.
[0018] In the figure: 1. Clean air blower; 2. First frame; 3. Second frame; 4. Presence sensor; 5. Bottom plate; 6. Large-tooth synchronous pulley; 7. Tooth fork fixing plate; 8. First synchronous belt; 9. Reversing idler pulley; 10. Second extended shaft synchronous pulley; 11. Second synchronous belt; 12. Second small-tooth synchronous pulley; 13. Stepper motor; 14. Clamping roller; 15. Second clamp; 16. Second guide rail. DETAILED DESCRIPTION
[0019] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.
[0020] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the present invention is further described in detail below with reference to the accompanying drawings and specific implementation methods.
[0021] Reference Figure 1-Figure 3 As shown, this embodiment provides a board-level packaging process substrate cache mechanism with a clamping function, including a second frame 3, a first frame 2 is fixed to one side of the second frame 3, a base plate 5 and a tooth fork fixing plate 7 are fixed to the second frame 3, a plurality of tooth forks are fixed to the tooth fork fixing plate 7 at equal intervals, a stepper motor 13 is fixed to the bottom surface of the base plate 5 close to the side of the first frame 2, the stepper motor 13 is respectively connected to the first adjustment mechanism and the second adjustment mechanism, the first adjustment mechanism and the second adjustment mechanism are respectively located on the top of the base plate 5, the first adjustment mechanism includes a plurality of first adjustment parts fixed to the base plate 5, the first adjustment parts are respectively located on both sides of the base plate 5 and on the side of the base plate 5 close to the first frame 2, one of the first adjustment parts is connected to the stepper motor 13, the second adjustment mechanism includes a second adjustment part symmetrically arranged on the base plate 5, the plurality of first adjustment parts and the second adjustment parts are connected through a first synchronous belt 8, the first adjustment part is connected to the first clamping part, and the second adjustment part is connected to the second clamping part.
[0022] During use, the base plate 5 is first adjusted horizontally by adjusting the feet, and then the verticality of the fork fixing plate 7 and the base plate 5 is adjusted using a jig. The first and second clamping parts are in an open state, and the robot fork places the glass substrate on the fork from the front. After the robot fork withdraws, the first and second adjustment parts are driven by the stepper motor 13 to drive the first and second adjustment parts to position and clamp the glass substrate. The first synchronous belt 8 is arranged in a pentagonal loop on the front of the base plate 5 and is connected to the stepper motor 13 through a coupling to directly drive the first adjustment parts in the left, right, and rear directions and the second drive part arranged at a certain angle.
[0023] Further optimization scheme, the first adjustment part includes a first extended shaft synchronous pulley installed on the top surface of the base plate 5, the stepping motor 13 is fixedly connected to the first extended shaft synchronous pulley adjacent to it, the first extended shaft synchronous pulley is transmission connected to the first synchronous belt 8, the first synchronous belt 8 is symmetrically transmission connected with the first phase-changing idler pulley on the side away from the extended shaft synchronous pulley, the top of the first extended shaft synchronous pulley is fixed with a first large tooth number synchronous pulley 6, the first large tooth number synchronous pulley 6 is transmission connected to the first synchronous belt 8, a first clamping part is provided between the first extended shaft synchronous pulley and the first phase-changing idler pulley, and the first clamping part is fixed to the first synchronous belt 8.
[0024] A further optimized solution is that the first clamping part includes a first guide rail symmetrically fixed on the base plate 5, the first guide rail is located on both sides of the first synchronous belt 8, a first connecting plate is slidingly connected to the first guide rail, a first connecting seat is symmetrically fixed on the first connecting plate, and a plurality of first clamping members are fixed at equal intervals on the first connecting seat.
[0025] According to a further optimized solution, the first clamping member includes a first core shaft fixedly connected to the first connecting seat, a first clamping hoop is provided between the first core shaft and the first connecting seat, and a plurality of clamping rollers 14 are rotatably connected to the first core shaft at equal intervals.
[0026] By adding an idler wheel to change the direction of the synchronous belt, the roller clamping in the four directions of front, back, left and right is driven at the same time. Because the fork of the robot needs to be avoided in the forward direction, the roller travel is farther than the other three directions to leave enough safety margin.
[0027] Further optimization scheme, the second adjustment part includes a second extended shaft synchronous pulley 10 installed on the top surface of the base plate 5, the second extended shaft synchronous pulley 10 is connected to the first synchronous belt 8, and the two second extended shaft synchronous pulleys 10 are symmetrically connected with a second disguised idler pulley, the top of the second extended shaft synchronous pulley 10 is fixed with a second large tooth number synchronous pulley 6, the second large tooth number synchronous pulley 6 is connected to the first synchronous belt 8, and the bottom of the second extended shaft synchronous pulley 10 is connected to the second clamping part through the second synchronous belt 11.
[0028] A further optimized solution is provided, in which the second clamping part includes a second small-tooth-number synchronous pulley 12 installed on the bottom surface of the base plate 5, the second small-tooth-number synchronous pulley 12 is located on the side away from the second extended shaft synchronous pulley 10, and a second synchronous belt 11 is transmission-connected between the second extended shaft synchronous pulley 10 and the second small-tooth-number synchronous pulley 12, the second synchronous belt 11 is transmission-connected to a second clamping member, and the second clamping member is located at the top of the base plate 5.
[0029] A further optimized solution includes a second clamping member comprising a second connecting seat fixedly connected to the second synchronous belt 11, a slide groove provided on the bottom plate 5, a second guide rail 16 fixedly connected to the top surface of the bottom plate 5, the second connecting seat passing through the slide groove and slidingly connected to the second guide rail 16, and a second core shaft rotatably connected to the top surface of the second connecting seat, to which multiple clamping rollers 14 are rotatably connected at equal intervals. This ensures that the second synchronous belt 11 can move a greater distance in the same linear motion within the same time.
[0030] The clamping roller 14 consists of a specially treated mandrel, several bearings, and a plastic steel outer ring. Upon contact with the glass substrate, it rotates a certain angle, dissipating some of the impact force and protecting the product. The addition of a second clamp 15 increases the rigidity of the overall structure. Furthermore, the pitch angle of the mandrel of the clamping roller 14 can be fine-tuned using a pin jig to adjust the second clamp 15. A 0.05mm feeler gauge can then be used to test the tightness of the top and bottom layers. Once properly adjusted, the screws are tightened.
[0031] To further optimize the solution, a clean air blower 1 is fixedly connected to the outer side of the first frame 2 .
[0032] To further optimize the solution, a seat presence sensor 4 is provided on the tine.
[0033] A glass substrate can be placed on any layer of the fork, and the roller transfer plate can be fixed one by one based on the clamping position. The stepper motor 13 can drive the first synchronous belt 8 to drive five groups of rollers to perform a clamping action on all buffer layers, ensuring that the position deviation of each layer of glass substrate is within ±0.1mm.
[0034] In the description of the present invention, it should be understood that the terms "longitudinal", "transverse", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the accompanying drawings, and are only for the convenience of describing the present invention, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, they should not be understood as limitations on the present invention.
[0035] The embodiments described above are merely preferred embodiments of the present invention and are not intended to limit the scope of the present invention. Without departing from the spirit of the present invention, various modifications and improvements to the technical solutions of the present invention made by ordinary technicians in this field should fall within the scope of protection determined by the claims of the present invention.
Claims
1. A substrate caching mechanism for a board-level packaging process with a clamping function, characterized in that: The invention comprises a second frame (3), one side of the second frame (3) is fixedly connected to the first frame (2), a bottom plate (5) and a tooth fork fixing plate (7) are fixedly connected in the second frame (3), a plurality of tooth forks are fixedly connected at equal intervals on the tooth fork fixing plate (7), a stepper motor (13) is fixedly connected to the bottom surface of the bottom plate (5) close to the side of the first frame (2), the stepper motor (13) is respectively connected to a first adjustment mechanism and a second adjustment mechanism, the first adjustment mechanism and the second adjustment mechanism are respectively located on the top of the bottom plate (5), and the first adjustment mechanism The invention comprises a plurality of first adjusting parts fixedly connected to the base plate (5), wherein the first adjusting parts are respectively located on both sides of the base plate (5) and on a side of the base plate (5) close to the first frame (2), wherein one of the first adjusting parts is connected in transmission with the stepping motor (13), and the second adjusting mechanism comprises a second adjusting part symmetrically arranged on the base plate (5), wherein the plurality of the first adjusting parts and the second adjusting parts are connected in transmission via a first synchronous belt (8), wherein the first adjusting part is connected in transmission with a first clamping part, and the second adjusting part is connected in transmission with a second clamping part.
2. The substrate buffer mechanism for board-level packaging process with a clamping function according to claim 1, characterized in that: The first adjusting portion includes a first extended shaft synchronous pulley mounted on the top surface of the base plate (5), the stepping motor (13) is fixedly connected to the first extended shaft synchronous pulley adjacent thereto, the first extended shaft synchronous pulley is transmission-connected to the first synchronous belt (8), the first synchronous belt (8) is symmetrically transmission-connected to a first phase-changing idler pulley on a side away from the extended shaft synchronous pulley, a first large-toothed synchronous pulley (6) is fixedly connected to the top of the first extended shaft synchronous pulley, the first large-toothed synchronous pulley (6) is transmission-connected to the first synchronous belt (8), a first clamping portion is provided between the first extended shaft synchronous pulley and the first phase-changing idler pulley, and the first clamping portion is fixedly connected to the first synchronous belt (8).
3. The substrate buffer mechanism for board-level packaging process with a clamping function according to claim 2, characterized in that: The first clamping portion comprises a first guide rail symmetrically fixed to the base plate (5), the first guide rail being located on both sides of the first synchronous belt (8), a first connecting plate being slidably connected to the first guide rail, a first connecting seat being symmetrically fixed to the first connecting plate, and a plurality of first clamping members being fixed to the first connecting seat at equal intervals.
4. The substrate buffer mechanism with clamping function for board-level packaging process according to claim 3, characterized in that: The first clamping member comprises a first core shaft fixedly connected to the first connecting seat, a first clamping hoop is provided between the first core shaft and the first connecting seat, and a plurality of clamping rollers (14) are rotatably connected to the first core shaft at equal intervals.
5. The substrate buffer mechanism with clamping function for board-level packaging process according to claim 4, characterized in that: The second adjustment portion includes a second extended shaft synchronous pulley (10) mounted on the top surface of the base plate (5), the second extended shaft synchronous pulley (10) is connected to the first synchronous belt (8) by transmission, a second phase-changing idler wheel is symmetrically connected between the two second extended shaft synchronous pulleys (10), a second large-toothed synchronous pulley is fixed to the top of the second extended shaft synchronous pulley (10), the second large-toothed synchronous pulley is connected to the first synchronous belt (8), and the bottom of the second extended shaft synchronous pulley (10) is connected to the second clamping portion by transmission via a second synchronous belt (11).
6. The substrate buffer mechanism with clamping function for board-level packaging process according to claim 5, characterized in that: The second clamping portion comprises a second small-tooth synchronous pulley (12) mounted on the bottom surface of the base plate (5), the second small-tooth synchronous pulley (12) being located on a side away from the second extended shaft synchronous pulley (10), the second synchronous belt (11) being transmission-connected between the second extended shaft synchronous pulley (10) and the second small-tooth synchronous pulley (12), the second synchronous belt (11) being transmission-connected to a second clamping member, and the second clamping member being located on the top of the base plate (5).
7. The substrate buffer mechanism with clamping function for board-level packaging process according to claim 6, characterized in that: The second clamping member includes a second connecting seat fixedly connected to the second synchronous belt (11), a slide groove is provided on the bottom plate (5), a second guide rail (16) is fixedly connected to the top surface of the bottom plate (5), the second connecting seat passes through the slide groove and is slidably connected to the second guide rail (16), the top surface of the second connecting seat is rotatably connected to a second core shaft, and a plurality of the clamping rollers (14) are rotatably connected to the second core shaft at equal intervals.
8. The substrate buffer mechanism with clamping function for board-level packaging process according to claim 1, characterized in that: A clean air blower (1) is fixedly connected to the outer side of the first frame (2).
9. The substrate buffer mechanism with clamping function for board-level packaging process according to claim 1, characterized in that: A seat presence sensor (4) is provided on the tine.