Annular double-layer gas distribution structure

Abstract

The utility model provides an annular double-layer gas distribution structure, and belongs to the technical field of semiconductor coating equipment, the annular double-layer gas distribution structure comprises a cavity, a cavity is arranged in the cavity, the cavity is provided with an annular gas channel around the circumferential direction of the cavity, and the annular gas channel is provided with a plurality of gas outlets communicated with the cavity in the circumferential direction of the cavity; and the shielding part is provided with an extending part, and the extending part covers the air outlet. When the process gas is fed, the process gas is firstly distributed to the periphery of the cavity through the annular gas channel and then is conveyed inwards through the gas outlet, and when the process gas is conveyed inwards, a gas uniformizing gap is formed between the shielding part and the inner side wall of the cavity, and the process gas is uniformized again in the gas uniformizing gap and then enters the cavity by bypassing the shielding part. And the air inlet uniformity can be effectively ensured. And moreover, the extension part covers the air outlet, so that the air outlet can be effectively prevented from being blocked by a coating film, and the blocking problem is solved.

Description

Technical Field

[0001] The present application belongs to the technical field of semiconductor coating equipment, and specifically relates to an annular double-layer gas distribution structure. Background Art

[0002] The working principle of magnetron sputtering is that electrons, under the action of an electric field, collide with argon atoms in the process of flying toward the substrate, causing them to ionize and produce Ar positive ions and new electrons; the new electrons fly toward the substrate, and the Ar ions are accelerated toward the cathode target under the action of the electric field, and bombard the target surface with high energy, causing the target material to be sputtered. Among the sputtered particles, neutral target atoms or molecules are deposited on the substrate to form a thin film.

[0003] In magnetron sputtering equipment, the uniformity of process gas when it is introduced into the vacuum chamber has an important impact on the film quality. Currently, in the relevant existing technologies, there are two main ways to introduce process gas: one is that the process gas is directly introduced into the chamber through a single air inlet, resulting in the process gas inside the process chamber of the magnetron sputtering equipment not being evenly introduced, and the coating quality deteriorates; the second is that multiple gas distribution pipes are provided at the bottom of the target material, and air holes are provided on the gas distribution pipes, so that the process gas can be more evenly introduced into the process chamber of the magnetron sputtering equipment. However, after continuous coating, the air holes on the gas distribution pipes are easily coated with a thin film, resulting in clogging problems, causing the gas outlet uniformity to become worse and worse over time, and the small holes cannot be used after being coated with a film, and can only be replaced with new workpieces, increasing equipment maintenance costs. Utility Model Content

[0004] The present application aims to solve at least one of the above-mentioned technical problems existing in the prior art. To this end, the present application provides an annular double-layer air distribution structure that can simultaneously solve the problem of blocked air holes and the problem of poor air intake uniformity.

[0005] The annular double-layer air distribution structure according to an embodiment of the present application includes:

[0006] A cavity body, wherein a chamber is provided inside the cavity body, an annular air channel is provided around the circumference of the chamber, and the annular air channel is provided with a plurality of air outlets communicating with the chamber along the circumference of the chamber;

[0007] The shielding part is arranged in the chamber, and the shielding part is provided with an extension part. There is a distance between the extension part and the inner wall of the chamber, and the extension part covers the air outlet.

[0008] The annular double-layer gas distribution structure of the present application has at least the following beneficial effects: When process gas is introduced, it is first distributed around the chamber through the annular gas channel before being transported inward through the gas outlet. During this inward transport, a uniform gas gap is formed between the shielding portion and the inner wall of the chamber. After the process gas is uniformly distributed within this gap, it bypasses the shielding portion and enters the chamber, effectively ensuring uniform gas intake. Furthermore, because the extension covers the gas outlet, it effectively prevents clogging of the gas outlet caused by the coating, thus resolving the clogging issue.

[0009] According to some embodiments of the present application, the cavity is provided with an air distribution plate, which is arranged on the inner side wall of the chamber along the circumference of the chamber, and the annular air channel and the air outlet are arranged in the air distribution plate.

[0010] According to some embodiments of the present application, an air inlet is provided at one end of the air distribution plate close to the inner wall of the chamber, the air inlet is connected to the annular air duct, an air inlet port is provided on the outside of the cavity, an air inlet flow duct connecting the air inlet and the air inlet port is provided inside the cavity, and a sealing ring assembly is provided between the air inlet and the air inlet flow duct.

[0011] According to some embodiments of the present application, the sealing ring assembly protrudes from the inner wall of the chamber.

[0012] According to some embodiments of the present application, the shielding portion is connected to an end of the gas distribution plate facing away from the inner side wall of the chamber.

[0013] According to some embodiments of the present application, the annular double-layer air distribution structure includes a plurality of the shielding parts, which are distributed along the length direction of the annular air duct, and the shielding parts are detachably connected to the air distribution plate.

[0014] According to some embodiments of the present application, a protrusion is provided at one end of the shielding portion close to the air distribution plate, a threaded hole is provided on the protrusion, the air distribution plate is provided with a mounting hole for the protrusion to be fitted into, and the air distribution plate is provided with a mounting screw passing through the mounting hole and connected to the threaded hole.

[0015] According to some embodiments of the present application, the annular double-layer air distribution structure further includes:

[0016] a target material, the target material being disposed at the upper end of the cavity;

[0017] a first insulating portion, the first insulating portion being disposed between the target and the cavity, and having a protruding portion protruding from an inner sidewall of the chamber;

[0018] a second insulating portion, the second insulating portion being disposed on an inner wall of the chamber;

[0019] an anti-seizure plate connected to the lower end of the second insulating portion;

[0020] a substrate stage, the substrate stage being movably disposed in the chamber;

[0021] The upper and lower ends of the air distribution plate are respectively in contact with the protruding portion and the second insulating portion.

[0022] According to some embodiments of the present application, a cross-sectional dimension of the air outlet is smaller than a cross-sectional dimension of the annular air channel.

[0023] According to some embodiments of the present application, the cavity is provided with a plurality of air inlets surrounding the chamber, and the air inlets are connected to the annular air channel.

[0024] Additional aspects and advantages of the present application will be given in part in the following description, and some additional aspects and advantages will become obvious from the following description, or will be learned through practice of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] The present application is further described below with reference to the accompanying drawings and embodiments, wherein:

[0026] Figure 1 A schematic diagram of the distribution of the annular airway in this application;

[0027] Figure 2 This is a schematic diagram of an installation of the air distribution plate in this application;

[0028] Figure 3 A schematic diagram of the structure of the annular airway in this application;

[0029] Figure 4 This is a structural schematic diagram of the air distribution plate in this application;

[0030] Figure 5 This is a schematic diagram of the overall structure of this application. DETAILED DESCRIPTION

[0031] The following describes in detail embodiments of the present application. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present application and are not to be construed as limiting the present application.

[0032] In the description of this application, it should be understood that descriptions involving orientations, such as up, down, front, back, left, right, etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, they cannot be understood as limitations on this application.

[0033] In the description of this application, "several" means more than one, "plurality" means more than two, "greater than," "less than," and "exceed" are understood to exclude the number itself, while "above," "below," and "within" are understood to include the number itself. The use of "first" and "second" in the description is solely for the purpose of distinguishing technical features and should not be construed as indicating or implying relative importance, implicitly specifying the number of the indicated technical features, or implicitly specifying the order of the indicated technical features.

[0034] In the description of this application, unless otherwise clearly defined, terms such as setting, installing, and connecting should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in this application based on the specific content of the technical solution.

[0035] In the description of this application, reference to the terms "one embodiment," "some embodiments," "illustrative embodiments," "examples," "specific examples," or "some examples" means that the specific features, structures, materials, or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of this application. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described can be combined in any appropriate manner in any one or more embodiments or examples.

[0036] Reference Figures 1 to 5 , the embodiment of the present application proposes an annular double-layer air distribution structure, comprising:

[0037] The cavity 100 has a chamber 101 disposed therein. The cavity 100 has an annular air passage 200 disposed around the circumference of the chamber 101. The annular air passage 200 has a plurality of air outlets 201 disposed along the circumference of the chamber 101 and connected to the chamber 101.

[0038] The shielding portion 300 is disposed in the chamber 101 . The shielding portion 300 is provided with an extension portion 301 . There is a distance between the extension portion 301 and the inner wall of the chamber 101 and the extension portion 301 covers the air outlet 201 .

[0039] It will be appreciated that multiple air outlets 201 are distributed along the length of the annular air channel 200, and therefore the shielding portion 300 is also disposed on the inner wall of the chamber 101 along the length of the annular air channel 200. The extension portion 301 covers the air outlets 201, that is, the vertical projection of the extension portion 301 on the adjacent inner wall of the chamber 101 completely covers the air outlet 201. Due to the spacing between the extension portion 301 and the adjacent inner wall of the chamber 101, an air-distributing gap 3011 is formed between the shielding portion 300 and the inner wall of the chamber 101.

[0040] The annular double-layer gas distribution structure of this embodiment allows process gas to be introduced first through annular gas passage 200 and distributed around chamber 101 before being transported inward through gas outlet 201. During this inward transport, the process gas is evenly distributed within gas-uniform gap 3011 before bypassing shielding portion 300 and entering chamber 101, effectively ensuring uniform gas intake. Furthermore, because extension portion 301 covers gas outlet 201, it effectively prevents clogging of gas outlet 201 caused by coating, thus resolving the clogging issue.

[0041] Reference Figure 2 In some embodiments of the present application, the chamber 100 is provided with an air distribution plate 400 within the chamber 101. The air distribution plate 400 is disposed on the inner sidewall of the chamber 101 along the circumference of the chamber 101, and the annular air channel 200 and the air outlet 201 are disposed within the air distribution plate 400. The air distribution plate 400 is disposed along the circumference of the chamber 101, i.e., the air distribution plate 400 is an annular structure that matches the inner sidewall of the chamber 101, and is thus installed within the chamber 101 in a state close to the inner sidewall of the chamber 101.

[0042] It is understood that, by disposing the annular air channel 200 and the air outlet 201 in the air distribution plate 400, this embodiment provides greater design flexibility, is more convenient for maintenance and cleaning, and is less difficult to manufacture, compared to forming them in the side wall of the cavity 100.

[0043] Reference Figure 2 In some embodiments of the present application, an air inlet 202 is provided at one end of the air distribution plate 400 near the inner sidewall of the chamber 101. The air inlet 202 is connected to the annular air channel 200. An air inlet 204 is provided on the outside of the chamber 100, and an air inlet channel 203 is provided inside the chamber 100, connecting the air inlet 202 and the air inlet 204. This allows the air inlet 204 to be connected to a process gas supply device to deliver the process gas. A sealing ring assembly 500 is provided between the air inlet 202 and the air inlet channel 203 in the chamber 100 to ensure a tight seal between the two and prevent process gas from leaking through the gap between the air distribution plate 400 and the inner sidewall of the chamber 101.

[0044] Reference Figure 2In some embodiments of the present application, the sealing ring assembly 500 protrudes from the inner wall of the chamber 101. Specifically, the sealing ring assembly 500 includes a connector 501 and an O-ring 502. One end of the connector 501 is inserted into the inlet flow channel 203, and the other end protrudes from the inner wall of the chamber 101. The O-ring 502 is mounted on the protruding end of the connector 501. The air inlet hole 202 of the air distribution plate 400 is aligned with the connector 501, and the air distribution plate 400 and the inner wall of the chamber 101 jointly clamp the O-ring 502.

[0045] It is understandable that because the air distribution plate 400 is an annular structure distributed along the circumference of the chamber 101, ensuring that the air distribution plate 400 completely conforms to the inner wall of the chamber 101 requires significantly increased machining precision. This embodiment, by providing a protruding seal ring assembly 500, ensures the sealability of the air inlet 202 while eliminating the need to ensure that the air distribution plate 400 completely conforms to the inner wall of the chamber 101. This reduces machining precision, thereby increasing the difficulty of manufacturing the device and reducing production costs.

[0046] Reference Figure 3 and Figure 4 In some embodiments of the present application, the shielding portion 300 is connected to the end of the air distribution plate 400 that faces away from the inner wall of the chamber 101. By placing the shielding portion 300 on the side of the air distribution plate 400 that is closer to the center of the chamber 101, it is easier to control the dimensional accuracy of the outer periphery of the air distribution plate 400, ensuring close contact between the air distribution plate 400 and the inner wall of the chamber 101, thereby ensuring airtightness at the location of the air inlet 202.

[0047] Reference Figure 1 In some embodiments of the present application, the annular double-layer air distribution structure includes multiple shielding portions 300 distributed along the length of the annular air duct 200. The shielding portions 300 are detachably connected to the air distribution plate 400. It will be appreciated that, because the air distribution plate 400 is annular in structure, the air outlets 201 are distributed circumferentially along the length of the air distribution plate 400.

[0048] In this embodiment, multiple shielding portions 300 are provided to shield the air outlet 201 , and it is sufficient to ensure that each air outlet 201 is shielded. The dimensional accuracy requirement is low, and assembly and disassembly are convenient. Furthermore, compared with an annular structure, the production cost is lower.

[0049] Reference Figure 4In some embodiments of the present application, a plurality of protrusions 302 are provided at one end of the shielding portion 300 near the air distribution plate 400, and each shielding portion 300 is provided with threaded holes on at least two protrusions 302. The air distribution plate 400 is provided with mounting holes for the protrusions 302 to fit into, and the air distribution plate 400 is provided with mounting screws 401 that pass through the mounting holes and connect to the threaded holes. With the structural arrangement of this embodiment, the shielding portion 300 is fitted into the mounting hole via the protrusions 302 and then tightened with the mounting screws 401, which can effectively ensure the installation strength and structural strength. In addition, the mounting screws 401 will not be exposed at the joint between the shielding portion 300 and the air distribution plate 400, and the structural design is reliable.

[0050] Reference Figure 5 In some embodiments of the present application, the annular double-layer air distribution structure further includes:

[0051] The target 102 is disposed at the upper end of the chamber 100;

[0052] A first insulating portion 103 is provided between the target 102 and the chamber 100 , and has a protruding portion protruding from the inner wall of the chamber 101 ;

[0053] A second insulating portion 104 , the second insulating portion 104 being disposed on an inner wall of the chamber 101 ;

[0054] an anti-adhesion plate 105 connected to the lower end of the second insulating portion 104;

[0055] The substrate stage 106 is disposed in the chamber 101 in a manner that allows the substrate to be raised and lowered;

[0056] The upper and lower ends of the air distribution plate 400 abut against the protruding portion and the second insulating portion 104 respectively.

[0057] It is understood that the substrate stage 106 moves up and down through the anti-fouling plate 105 to control the substrate to move upward toward the target 102. In this embodiment, the gas distribution plate 400 is clamped and fixed by the first insulating portion 103 and the second insulating portion 104, eliminating the need for screws 401 between the chamber 100 and the gas distribution plate 400. This helps reduce the volume of the gas distribution plate 400 and ensures the airtightness of the chamber 100.

[0058] In some embodiments of the present application, the cross-sectional dimension of the gas outlet 201 is smaller than the cross-sectional dimension of the annular gas channel 200 , so as to ensure that the process gas is first distributed along the annular gas channel 200 to the periphery of the chamber 101 and then discharged through the gas outlet 201 .

[0059] In some embodiments of the present application, the chamber body 100 is provided with a plurality of gas inlets 204 around the chamber 101 to improve the efficiency of introducing the process gas and to improve the distribution uniformity of the process gas in the annular gas channel 200 .

[0060] Reference Figures 1 to 5 In some embodiments of the present application, a chamber 101 with a roughly rectangular cross-section is disposed within the cavity 100. An air distribution plate 400 is disposed on the inner wall of the chamber 101. The air distribution plate 400 is an annular structure that conforms to the contour of the inner wall of the chamber 101. An annular air duct 200 is disposed within the air distribution ring. Four straight segments of the annular air duct 200 form air outlets 201. Four baffles are disposed on the inner side of the air distribution plate 400 (i.e., the side facing the center of the chamber 101). The upper ends of the baffles are connected and secured by screws 401 inserted through the end of the air distribution plate 400 near the inner wall of the chamber 101. The lower ends of the baffles extend downward to cover the air outlets 201. A distance is maintained between the extended ends of the baffles and the inner wall of the chamber 101. An air inlet 202 is disposed on the end of the annular air duct 200 facing the inner wall of the chamber 101. An inlet flow channel 203 communicating with the air inlet hole 202 is provided inside the cavity 100 . The inlet flow channel 203 has an air inlet port 204 exposed to the outside, and an air inlet connector is provided at the air inlet port 204 .

[0061] It can be understood that the annular double-layer air distribution structure of this embodiment can not only ensure the uniformity of air intake, but also prevent the air intake structure from being blocked by the coating, thereby solving the shortcomings of the traditional structure.

[0062] The embodiments of the present application have been described in detail above with reference to the accompanying drawings. However, the present application is not limited to the above embodiments. Various modifications can be made within the scope of knowledge possessed by ordinary technicians in the relevant technical field without departing from the purpose of the present application. In addition, the embodiments of the present application and the features of the embodiments can be combined with each other unless there is a conflict.

Claims

1. An annular double-layer air distribution structure, characterized in that: include: A cavity body, wherein a chamber is provided inside the cavity body, an annular air channel is provided around the circumference of the chamber, and the annular air channel is provided with a plurality of air outlets communicating with the chamber along the circumference of the chamber; The shielding part is arranged in the chamber, and the shielding part is provided with an extension part. There is a distance between the extension part and the inner wall of the chamber, and the extension part covers the air outlet.

2. The annular double-layer air distribution structure according to claim 1, characterized in that: The cavity is provided with an air distribution plate, which is arranged on the inner side wall of the cavity along the circumference of the cavity, and the annular air channel and the air outlet are arranged in the air distribution plate.

3. The annular double-layer air distribution structure according to claim 2, characterized in that: An air inlet hole is provided at one end of the air distribution plate close to the inner wall of the chamber, and the air inlet hole is connected to the annular air duct. An air inlet port is provided on the outside of the cavity, and an air inlet flow duct connecting the air inlet hole and the air inlet port is provided inside the cavity. In addition, a sealing ring assembly is provided between the air inlet hole and the air inlet flow duct.

4. The annular double-layer air distribution structure according to claim 3, characterized in that: The sealing ring assembly protrudes from the inner wall of the chamber.

5. The annular double-layer air distribution structure according to claim 2, characterized in that: The shielding portion is connected to one end of the air distribution plate facing away from the inner side wall of the chamber.

6. The annular double-layer air distribution structure according to claim 5, characterized in that: The annular double-layer air distribution structure includes a plurality of shielding parts, which are distributed along the length direction of the annular air passage, and the shielding parts are detachably connected to the air distribution plate.

7. The annular double-layer air distribution structure according to claim 6, characterized in that: The shielding portion is provided with a convex portion at one end close to the air distribution plate, the convex portion is provided with a threaded hole, the air distribution plate is provided with a mounting hole for the convex portion to be fitted into, and the air distribution plate is provided with a mounting screw passing through the mounting hole and connected to the threaded hole.

8. The annular double-layer air distribution structure according to claim 2, characterized in that: The annular double-layer air distribution structure further includes: a target material, the target material being disposed at the upper end of the cavity; a first insulating portion, the first insulating portion being disposed between the target and the cavity, and having a protruding portion protruding from an inner sidewall of the chamber; a second insulating portion, the second insulating portion being disposed on an inner wall of the chamber; an anti-seizure plate connected to the lower end of the second insulating portion; a substrate stage, the substrate stage being movably disposed in the chamber; The upper and lower ends of the air distribution plate are respectively in contact with the protruding portion and the second insulating portion.

9. The annular double-layer air distribution structure according to claim 1, characterized in that: The cross-sectional dimension of the air outlet is smaller than the cross-sectional dimension of the annular air passage.

10. The annular double-layer air distribution structure according to claim 1, characterized in that: The cavity is provided with a plurality of air inlets surrounding the chamber, and the air inlets are connected to the annular air channel.

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