Optical element coating device

Abstract

The utility model discloses an optical element coating device, relates to the technical field of optical element processing, solves the technical problems that a coating frame in the prior art is single in function and cannot meet various use requirements, and comprises a coating device shell, an evaporation source and a coating bearing device, the coating film bearing device comprises a coating film bearing base and a coating film bearing frame; the film coating bearing frame is rotationally connected with the film coating bearing base, the film coating bearing frame rotates through a rotating transmission mechanism, and the film coating bearing frame turns over through an overturning mechanism; according to the utility model, rotation and turn-over coating of the optical substrate can be realized at the same time, manual taking-out and turn-over are not needed, manual operation is reduced, stability of vacuum parameters in the coating chamber can be ensured, uniformity of double-sided coating is improved, and product quality is ensured.

Description

Technical Field

[0001] The utility model relates to the technical field of optical element processing, in particular to an optical element coating device. Background Art

[0002] Optical thin films are generally deposited using evaporation, ion-assisted plating, or ion sputtering. Typically, to ensure high purity of the film, the coating process must be completed in a vacuum environment, and existing technologies often use vacuum coating machines. During the film coating process, a coating stand is typically used to support the coating component. The component to be coated is placed on the coating stand, with the surface to be coated facing the target material located below the coating stand. The target material is flushed to the coating stand through evaporation or ion bombardment, and adheres to the surface to be coated to form a coating layer.

[0003] However, the existing vacuum coating equipment can only coat one side of the optical substrate at a time. If double-sided coating is to be performed, the vacuum needs to be broken, the substrate needs to be turned over after cooling, and then placed back into the coating umbrella frame. At this time, it needs to be reheated and vacuumed, which increases the coating cycle. In addition, the vacuum parameters of the vacuum chamber cannot be kept consistent during double-sided coating, which will make the film characteristics of the double-sided coating layers of the optical substrate inconsistent.

[0004] Existing technologies such as CN209836297U disclose an automatic flipping vacuum coating tray, comprising: a lens tray, which is a flat circular disc, and the lens tray is horizontally arranged at the upper part of the inner cavity of the vacuum coating equipment, with multiple lens holes arranged in the lens tray, and a circular ring fixedly installed in the lens hole, the circular ring comprising a circular ring base and a circular ring cover, and a circular ring hinge and a circular ring buckle are arranged between the circular ring cover and the circular ring base; a prism short axis, at the two end points where the edge of the lens tray intersects with a diameter, a prism rotating shaft is arranged along the axial direction, the grooves of the two prism short axis are inserted into the edge of the lens tray and welded to the lens tray; a cassette short axis, which is matched with the prism short axis, a prism groove is arranged at one end of the cassette short axis, the prism short axis is placed in the prism groove, and a cylindrical rotating shaft is arranged at the other end of the cassette short axis, and a driven bevel gear is sleeved on the right cylindrical rotating shaft, and the active bevel gear on the output shaft of the synchronous motor is vertically meshed with the driven bevel gear and drives the lens tray to flip.

[0005] Although the above technology can realize the flipping of the lens tray, it has a single function and cannot be rotated. It cannot be rotated to maintain the uniformity of the coating during the coating process. Utility Model Content

[0006] The utility model is designed to solve the technical problem that the coating rack in the prior art has a single function and cannot meet various usage requirements. The purpose is to provide an optical element coating device that can simultaneously realize the rotation and flip coating of the optical substrate, without the need for manual removal and flipping, reducing manpower operation, ensuring the stability of the vacuum parameters in the coating chamber, improving the uniformity of double-sided coating, and ensuring product quality.

[0007] The utility model is achieved through the following technical solutions:

[0008] An optical element coating device comprises a coating device housing, an evaporation source and a coating carrying device;

[0009] The coating carrying device includes a coating carrying base and a coating carrying frame;

[0010] The coating carrier is rotatably connected to the coating carrier base, the coating carrier is rotated by a rotation transmission mechanism, and the coating carrier is turned over by a turning mechanism.

[0011] Furthermore, it also includes a gear ring, the outer periphery of which is meshed with the rotary transmission mechanism, and the coating carrier is connected to the inside of the gear ring through a rotating shaft.

[0012] Furthermore, the rotating transmission mechanism includes a motor 1, a transmission shaft 1 and a transmission gear. The motor 1 is fixed on the top of the coating supporting base, the transmission shaft 1 is connected to the output end of the motor 1, the center of the transmission gear is connected to the transmission shaft 1, and the transmission gear is meshed with the gear ring.

[0013] Furthermore, a pulley is provided at the bottom of the gear ring, a sliding groove is provided on the inner wall of the coating bearing base, and the pulley cooperates with the sliding groove.

[0014] Furthermore, the flipping mechanism is connected to a rotating shaft, and the coating carrier is fixed on the rotating shaft.

[0015] Furthermore, the flipping mechanism includes a driven gear, a driving gear, a second transmission shaft and a second motor, the driven gear is arranged on the rotating shaft, the second motor is fixed on the gear ring, the second transmission shaft is connected to the output end of the second motor, the second transmission shaft is connected to the driving gear, and the driving gear is meshed with the driven gear.

[0016] Furthermore, the coating supporting base is fixed on the upper part of the coating device shell.

[0017] Furthermore, the coating supporting base is connected to the top of the coating device shell through a telescopic device.

[0018] Furthermore, the telescopic device is an electric telescopic device, a hydraulic telescopic device or a pneumatic telescopic device.

[0019] Furthermore, the evaporation source is arranged at the bottom of the coating device shell.

[0020] Compared with the prior art, the present invention has the following advantages and beneficial effects:

[0021] The utility model realizes the rotation of the optical substrate during the coating process by arranging a rotatable coating carrier, so that the coating is uniform. The coating carrier is turned over by arranging a flipping mechanism. When the coating on one side is completed, the coating carrier is driven to turn 180 degrees by the flipping mechanism to carry out the coating on the other side. There is no need to cool down or break the vacuum, and there is no need to manually take out and turn it, which reduces the number of heating and vacuuming times and manual operation, and can ensure the stability of the vacuum parameters in the coating chamber, improve the uniformity of double-sided coating, and ensure product quality. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] The accompanying drawings described herein are used to provide a further understanding of the embodiments of the present invention, constitute a part of this application, and do not constitute a limitation of the embodiments of the present invention. In the accompanying drawings:

[0023] Figure 1 It is a structural diagram of the utility model;

[0024] Figure 2 It is a schematic diagram of the connection structure between the coating support base and the coating support frame;

[0025] Figure 3 for Figure 2 Enlarged view of part A in the middle;

[0026] Figure 4 It is a top view of the connection structure between the coating support base and the coating support frame.

[0027] Markings and corresponding parts names in the accompanying drawings:

[0028] 1-coating device housing, 2-evaporation source, 3-telescopic device, 4-coating carrier, 401-optical substrate fixing hole, 5-coating carrier base, 501-installation inner cavity, 502-slide groove, 6-gear ring, 7-rotation transmission mechanism, 701-motor 1, 702-transmission shaft 1, 703-transmission gear, 8-rotating shaft, 9-flipping mechanism, 901-driven gear, 902-driving gear, 903-transmission shaft 2, 904-motor 2, 10-pulley. DETAILED DESCRIPTION

[0029] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with embodiments and drawings. The schematic implementation methods of the present invention and their descriptions are only used to explain the present invention and are not intended to limit the present invention.

[0030] In the following description, numerous specific details are set forth to provide a thorough understanding of the present invention. However, it will be apparent to one skilled in the art that these specific details are not necessarily required to practice the present invention. In other embodiments, well-known structures, circuits, materials, or methods are not described in detail to avoid obscuring the present invention.

[0031] Throughout this specification, references to "one embodiment," "an embodiment," "an example," or "an example" mean that a particular feature, structure, or characteristic described in conjunction with the embodiment or example is included in at least one embodiment of the present invention. Therefore, the phrases "one embodiment," "an embodiment," "an example," or "an example" appearing in various places throughout this specification do not necessarily refer to the same embodiment or example. In addition, the particular features, structures, or characteristics may be combined in one or more embodiments or examples in any suitable combination and / or subcombination. Furthermore, it will be understood by those of ordinary skill in the art that the figures provided herein are for illustrative purposes only and are not necessarily drawn to scale. As used herein, the term "and / or" includes any and all combinations of one or more of the associated listed items.

[0032] In the description of the present invention, the indicated orientation or position relationship is based on the orientation or position relationship shown in the accompanying drawings, or is the orientation or position relationship in which the product of the application is usually placed when in use, or is the orientation or position relationship commonly understood by those skilled in the art. It is only for the convenience of describing the present application and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application.

[0033] At the same time, the terms "dispose," "assemble," "connect," and "connect" should be interpreted broadly. For example, they can refer to fixed connections, detachable connections, or integral connections; they can refer to direct connections, indirect connections through an intermediary, or internal connections between two components. Those skilled in the art will understand the specific meanings of these terms in this utility model based on specific circumstances.

[0034] Example

[0035] This embodiment provides an optical element coating device, such as Figures 1-4As shown, it includes a coating device shell 1, an evaporation source 2 and a coating carrier; the evaporation source 2 can adopt any achievable structure in the prior art, such as the coating source disclosed in CN101750639B, and the coating carrier is provided with an optical substrate fixing hole 401, and the optical substrate to be coated is fixed in the optical substrate fixing hole 401. The specific fixing method is a mature prior art and will not be elaborated herein in the present utility model. For example, the structure disclosed in CN209836297U can be used to fix the optical substrate.

[0036] The coating carrying device includes a coating carrying base 5 and a coating carrying frame 4;

[0037] The coating carrier 4 is rotatably connected to the coating carrier base 5 . The coating carrier 4 is rotated by a rotation transmission mechanism 7 , and is turned over by a turning mechanism 9 .

[0038] The utility model realizes the rotation of the optical substrate during the coating process by providing a rotatable coating carrier 4, so that the coating is uniform. The coating carrier 4 is turned over by providing a flipping mechanism 9. When the coating on one side is completed, the coating carrier 4 is driven to turn over 180 degrees by the flipping mechanism 9, so as to carry out the coating on the other side. There is no need to cool down or break the vacuum, and there is no need to manually take out and turn it, which reduces the number of heating and vacuuming times and manual operations, and can ensure the stability of the vacuum parameters in the coating chamber, improve the uniformity of double-sided coating, and ensure product quality.

[0039] See also Figure 1 The coating support base 5 is fixed to the upper portion of the coating device housing 1, and the evaporation source 2 is provided at the bottom of the coating device housing 1. The coating support base 5 is connected to the top of the coating device housing 1 via a telescopic device 3. Specifically, the telescopic device 3 is an electric telescopic device 3, a hydraulic telescopic device 3, or a pneumatic telescopic device 3.

[0040] In one or more specific examples of the present invention, the coating device further includes a gear ring 6, the outer periphery of which is meshedly connected to a rotary transmission mechanism 7, and the coating carrier 4 is connected to the interior of the gear ring 6 via a rotating shaft 8. The provision of the gear ring 6 facilitates the rotational connection of the coating carrier 4 and facilitates the connection with the rotary transmission mechanism 7 for rotation, thereby enabling the coating device of the present invention to simultaneously rotate and flip.

[0041] See also Figure 2The rotating transmission mechanism 7 includes a motor 701, a transmission shaft 702 and a transmission gear 703. The motor 701 is fixed on the top of the coating supporting base 5. The transmission shaft 702 is connected to the output end of the motor 701. The center of the transmission gear 703 is connected to the transmission shaft 702. The transmission gear 703 is meshed with the gear ring 6.

[0042] During rotation, motor 1 701 transmits power to transmission gear 703 through transmission shaft 1 702, and then transmits power to gear ring 6 through transmission gear 703, so that gear ring 6 rotates during the coating process, thereby driving the optical substrate on the coating carrier 4 to rotate, ensuring the uniformity of the coating.

[0043] See also Figure 3 The bottom of the gear ring 6 is provided with a pulley 10, and the inner wall of the coating support base 5 is provided with a slide groove 502, and the pulley 10 cooperates with the slide groove 502. By slidingly connecting the gear ring 6 and the coating support base 5, the cooperation between the pulley 10 and the slide groove 502 can improve the rotation stability of the gear ring 6.

[0044] See also Figure 4 The flip mechanism 9 is connected to the rotating shaft 8, the coating carrier 4 is fixed on the rotating shaft 8, and both ends of the rotating shaft 8 are rotatably connected to the inner wall of the gear ring 6 through bearings.

[0045] The flipping mechanism 9 includes a driven gear 901, a driving gear 902, a second transmission shaft 903 and a second motor 904. The driven gear 901 is arranged on the rotating shaft 8, the second motor 904 is fixed on the gear ring 6, the second transmission shaft 903 is connected to the output end of the second motor 904, the second transmission shaft 903 is connected to the driving gear 902, and the driving gear 902 is meshed with the driven gear 901.

[0046] When flipping is required, the motor 2 904 transmits power to the driving gear 902 through the transmission shaft 2 903, and the driving gear 902 transmits power to the driven gear 901. Since the center of the driven gear 901 is fixed on the rotating shaft 8, the driven gear 901 can transmit power to the rotating shaft 8, thereby driving the coating carrier 4 to flip 180° through the rotation of the rotating shaft 8, thereby realizing the flip-over coating of the optical substrate.

[0047] Finally, it should be noted that the above specific embodiments are only used to explain in detail the purpose, technical solutions and beneficial effects of the present invention. It should be understood that the above is only a specific implementation method of the present invention and is not used to limit the scope of protection of the present invention. Although the present invention has been described in detail with reference to the above specific embodiments, ordinary technicians in this field should understand that it is still possible to modify the technical solutions recorded in the above embodiments, or to replace or improve some or all of the technical features therein. These modifications, equivalent replacements, and improvements do not deviate the essence of the corresponding technical solutions from the scope of the technical solutions of the embodiments of the present invention, and they should all be included in the scope of the claims and description of the present invention.

Claims

1. An optical element coating device, characterized in that: It comprises a coating device housing (1), a vapor deposition source (2) and a coating carrying device; The coating carrying device comprises a coating carrying base (5) and a coating carrying frame (4); The coating carrier (4) is rotatably connected to the coating carrier base (5); the coating carrier (4) is rotated by a rotary transmission mechanism (7); and the coating carrier (4) is turned over by a turning mechanism (9).

2. The optical element coating device according to claim 1, characterized in that: It also includes a gear ring (6), the outer periphery of which is meshedly connected to a rotary transmission mechanism (7), and the coating carrier (4) is connected to the inside of the gear ring (6) via a rotating shaft (8).

3. The optical element coating device according to claim 2, characterized in that: The rotating transmission mechanism (7) includes a motor (701), a transmission shaft (702) and a transmission gear (703), wherein the motor (701) is fixed on the top of the coating support base (5), the transmission shaft (702) is connected to the output end of the motor (701), the center of the transmission gear (703) is connected to the transmission shaft (702), and the transmission gear (703) is meshed with the gear ring (6).

4. The optical element coating device according to claim 2, characterized in that: A pulley (10) is provided at the bottom of the gear ring (6), a slide groove (502) is provided on the inner wall of the coating support base (5), and the pulley (10) cooperates with the slide groove (502).

5. The optical element coating device according to claim 2, characterized in that: The turnover mechanism (9) is connected to the rotating shaft (8), and the coating carrier (4) is fixed on the rotating shaft (8).

6. The optical element coating device according to claim 5, characterized in that: The turning mechanism (9) comprises a driven gear (901), a driving gear (902), a second transmission shaft (903) and a second motor (904); the driven gear (901) is arranged on a rotating shaft (8); the second motor (904) is fixed on a gear ring (6); the second transmission shaft (903) is connected to an output end of the second motor (904); the second transmission shaft (903) is connected to the driving gear (902); and the driving gear (902) is meshed with the driven gear (901).

7. The optical element coating device according to claim 1, characterized in that: The coating support base (5) is fixed on the upper part of the coating device housing (1).

8. The optical element coating device according to claim 7, characterized in that: The coating support base (5) is connected to the top of the coating device housing (1) via a telescopic device (3).

9. The optical element coating device according to claim 8, characterized in that: The telescopic device (3) is an electric telescopic device (3), a hydraulic telescopic device (3), or a pneumatic telescopic device (3).

10. The optical element coating device according to any one of claims 1 to 9, characterized in that: The evaporation source (2) is arranged at the bottom of the coating device housing (1).

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