Film thickness measuring device and automatic production line
By introducing a translation mechanism and an automatic production line into the film thickness measurement device, non-destructive film thickness measurement and real-time parameter adjustment are achieved, and the problems of slow measurement speed and high defective yield in the prior art are solved, which improves production efficiency and reduces costs.
Patent Information
- Application Number
- CN202422570251.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-10-23
- Publication Date
- 2025-09-02
- Estimated Expiration
- 2034-10-23
AI Technical Summary
In the prior art, the film thickness measurement method is slow, and the process parameters of the coating machine cannot be adjusted in real time, resulting in a large number of defective products in production and increased waste of test pieces, and the coating film needs to be destroyed for testing.
Design a film thickness measurement device, using the translation mechanism to drive the film thickness measuring instrument to translate relative to the vehicle, quickly obtain the film thickness data of multiple positions of the coating sheet without destroying the coating sheet, and combine it with the automatic production line to achieve real-time adjustment of the coating parameters.
It realizes the rapid acquisition of film thickness data at multiple location points of the coating sheet, improves the feedback rate and processing efficiency of the production line, and reduces the defective yield and manufacturing costs.
Smart Images
Figure CN223295394U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to a film thickness measuring device and an automatic production line. Background Art
[0002] In the manufacturing process of solar cells, cadmium telluride or cadmium selenide needs to be plated on the substrate through a coating machine. During the production process, the thickness and uniformity of the film layer need to be monitored in real time, and the process parameters of the coating machine need to be continuously adjusted. The current film thickness measurement method is to cut the coated substrate into multiple small substrates, measure the film thickness of each small substrate, and manually calculate the uniformity of the film layer based on the thickness of the film layer. This testing method is very slow. It takes about 2 hours from the completion of the measurement to the calculation of the film thickness and uniformity data. The process parameters of the coating machine cannot be adjusted in real time. Once the coating machine is started, it cannot be stopped midway until the end of production, resulting in a large number of defective products in production. In addition, the coated sheet will be destroyed during the test process, and many test sheets will be wasted during the entire production cycle, increasing the manufacturing cost of the product. Utility Model Content
[0003] This utility model aims to solve at least one of the technical problems existing in the prior art. To this end, one of the objectives of this utility model is to provide a film thickness measurement device that can quickly measure film thickness at multiple points without damaging the workpiece. A second objective is to provide an automated production line that utilizes this film thickness measurement device to quickly and in real time adjust coating parameters.
[0004] According to an embodiment of the first aspect of the present invention, a film thickness measuring device includes: a body; a carrier, which is provided on the body and has a positioning component for positioning a coated sheet; a film thickness measuring instrument, which is provided on the body and located above the carrier, and is used to measure the coating thickness of the coated sheet on the carrier; a translation mechanism, which is connected to the carrier or the film thickness measuring instrument and is used to drive the carrier and the film thickness measuring instrument to translate relative to each other, so as to determine the film thickness data of multiple points on the coated sheet.
[0005] A film thickness measuring device according to an embodiment of the first aspect of the present invention has at least the following beneficial effects:
[0006] The film thickness measuring device with the above structure uses a translation mechanism to drive the film thickness measuring instrument to translate relative to the carrier, so that multiple position points of the coated sheet on the carrier are aligned with the measuring end of the film thickness measuring instrument. The film thickness data of multiple position points of the coated sheet can be quickly obtained without destroying the coated sheet, thereby improving the efficiency of measuring the average film thickness of the coated sheet, and then improving the rate of feedback to the production line, so as to quickly adjust the process parameters of the coating and improve production and processing efficiency.
[0007] In some embodiments of the present invention, the carrier includes a flat plate adapted to the size of the coating sheet, and the positioning assembly includes a plurality of quick clamps capable of fixing the coating sheet on the flat plate.
[0008] In some embodiments of the present invention, the flat plate is a rectangular plate, and the positioning assembly further includes a first positioning bar provided at both ends of a long side of the rectangular plate and a second positioning bar provided at both ends of a wide side of the rectangular plate, at least one of the quick clamps acts on the side wall of the coated sheet to press the coated sheet against the first positioning bar, and at least one of the quick clamps acts on the side wall of the coated sheet to press the coated sheet against the second positioning bar.
[0009] In some embodiments of the present invention, a right-angle positioning piece is provided at one corner of the rectangular plate, and the right-angle positioning piece is composed of the intersection of a first positioning strip and a second positioning strip, and the first positioning strip and / or the second positioning strip are both provided with a positioning stop strip that abuts against the outer side wall of the rectangular plate.
[0010] In some embodiments of the present invention, the first positioning bar and the second positioning bar are both detachably mounted on the surface of the rectangular plate by fastening bolts.
[0011] In some embodiments of the present invention, the flat plate is a rectangular plate, and the rectangular plate has multiple rows and columns of universal balls arranged along its length, and the universal balls protrude from the upper surface of the rectangular plate.
[0012] In some embodiments of the present invention, the translation mechanism includes a first linear drive provided on the body and a second linear drive orthogonal to the output end of the first linear drive, and the carrier is installed on the output end of the second linear drive.
[0013] In some embodiments of the present invention, the first linear drive and the second linear drive are motor-screw mechanisms.
[0014] An automated production line according to an embodiment of the second aspect of the present invention includes a film thickness measurement device according to any of the above technical solutions. The automated production line employing the above film thickness measurement device can rapidly acquire film thickness data at multiple locations on a coated sheet without destroying the sheet, thereby improving the efficiency of measuring the average film thickness of the sheet and, in turn, increasing the rate of feedback to the production line, thereby facilitating rapid adjustment of coating process parameters and improving production and processing efficiency.
[0015] In some embodiments of the present invention, the automatic production line also includes an execution unit and a control module. The execution unit and the film thickness measuring device are electrically connected to the control module. The control module can obtain the average value of multiple sets of data measured by the film thickness measuring device and correct the operating parameters of the execution unit in real time.
[0016] Additional aspects and advantages of the present invention will be given in part in the following description and will become apparent from the following description or learned through practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS
[0017] The above and / or additional aspects and advantages of the present invention will become apparent and readily understood from the description of the embodiments in conjunction with the following drawings, in which:
[0018] Figure 1 This is a structural schematic diagram of an embodiment of a film thickness measuring device of the present utility model;
[0019] Figure 2 for Figure 1 A schematic diagram of the structural decomposition of an embodiment;
[0020] Figure 3 for Figure 1 Schematic diagram of the combination of a carrier, a positioning assembly, and a universal ball according to an embodiment.
[0021] Reference numerals:
[0022] Coating sheet 10; machine body 100; carrier 200; positioning assembly 300; quick clamp 310; first positioning bar 320; second positioning bar 330; positioning stop bar 340; film thickness measuring instrument 400; translation mechanism 500; first linear drive 510; second linear drive 520; universal ball 600. DETAILED DESCRIPTION
[0023] The following describes embodiments of the present invention in detail. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended only to explain the present invention and are not to be construed as limiting the present invention.
[0024] In the description of the present invention, it should be understood that descriptions involving orientation, such as the orientations or positional relationships indicated by terms such as "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", and "outside", are based on the orientations or positional relationships shown in the accompanying drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, they cannot be understood as limitations on the present invention.
[0025] In the description of this utility model, "several" means one or more, "many" means more than two, "greater than," "less than," and "exceed" are understood to exclude the number itself, while "above," "below," and "within" are understood to include the number itself. The use of "first" and "second" in the description is solely for the purpose of distinguishing technical features and is not to be construed as indicating or implying relative importance, implicitly specifying the number of the indicated technical features, or implicitly specifying the order of the indicated technical features.
[0026] In the description of this utility model, it should be noted that, unless otherwise specified or limited, the terms "installed," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; they can refer to mechanical connections or electrical connections; they can refer to direct connections or indirect connections through an intermediate medium; and they can refer to internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on the specific circumstances.
[0027] See also Figures 1 to 3 The present invention provides a film thickness measuring device, comprising: a body 100; a carrier 200, which is provided on the body 100, and the carrier 200 is provided with a positioning component 300 for positioning a coated sheet 10; a film thickness measuring instrument 400, which is provided on the body 100 and located above the carrier 200, and is used to measure the coating thickness of the coated sheet 10 on the carrier 200; a translation mechanism 500, which is connected to the carrier 200 or the film thickness measuring instrument 400, and is used to drive the carrier 200 and the film thickness measuring instrument 400 to translate relative to each other, so as to measure the film thickness data of multiple points on the coated sheet 10.
[0028] The film thickness measuring device of the above structure uses a translation mechanism 500 to drive the film thickness measuring instrument 400 to translate relative to the carrier 200, so that multiple position points of the coating sheet 10 on the carrier 200 are aligned with the measuring end of the film thickness measuring instrument 400, and the film thickness data of multiple position points of the coating sheet 10 can be quickly obtained without destroying the coating sheet 10, thereby improving the efficiency of measuring the average film thickness of the coating sheet 10, and further improving the rate of feedback to the production line, so as to quickly adjust the process parameters of the coating and improve production efficiency. By controlling the moving path of the translation mechanism 500, the position of the coating sheet 10 to be measured can be located. After all the measurement data are obtained, the average film thickness of the coating sheet 10 can be obtained by manual calculation or program calculation, and then the processing parameters of the coating process can be adjusted manually or by servo adjustment. Among them, the film thickness measuring instrument 400 uses the principle of optical interference to determine the thickness of the coating layer by analyzing the spectrum reflected back from the surface or interface of the coating layer, without direct contact with the coating layer.
[0029] See also Figure 2 and Figure 3 In some embodiments of the present invention, the carrier 200 includes a flat plate that matches the size of the coating sheet 10, and the positioning assembly 300 includes a plurality of quick clamps 310 that can secure the coating sheet 10 to the flat plate. It is understood that the coating sheet 10 is placed on the flat plate and then positioned and secured using the quick clamps 310 to prevent relative movement of the coating sheet 10 that could affect the accuracy of the coating thickness measurement. Furthermore, the quick clamps 310 can quickly secure and release the coating sheet 10, making operation convenient.
[0030] See also Figure 2 and Figure 3 In some embodiments of the present invention, the flat plate is a rectangular plate, and the positioning assembly 300 further includes a first positioning bar 320 provided at both ends of a long side of the rectangular plate and a second positioning bar 330 provided at both ends of a wide side of the rectangular plate. At least one of the quick clamps 310 acts on the side wall of the coated sheet 10 to tighten the coated sheet 10 against the first positioning bar 320, and at least one of the quick clamps 310 acts on the side wall of the coated sheet 10 to tighten the coated sheet 10 against the second positioning bar 330. It is understood that multiple quick clamps 310 press the side edges of the coated sheet 10 against the first positioning bar 320 and the second positioning bar 330, thereby further accelerating the rate of clamping and positioning the coated sheet 10.
[0031] See also Figure 3In some embodiments of the present invention, a right-angle positioning piece is provided at one corner of the rectangular plate, and the right-angle positioning piece is composed of a first positioning bar 320 and a second positioning bar 330 intersecting each other, which is beneficial to reducing the number of first positioning bars 320 and second positioning bars 330 required to be installed. In order to limit the deflection of the first positioning bar 320 and the second positioning bar 330 relative to the flat plate, the first positioning bar 320 and / or the second positioning bar 330 are both provided with a positioning stop bar 340 that abuts against the outer wall of the rectangular plate.
[0032] See also Figure 2 In some embodiments of the present invention, the first and second positioning bars 320 and 330 are removably mounted on the surface of the rectangular plate via fastening bolts. It will be appreciated that using fastening bolts to install the first and second positioning bars 320 and 330 is very convenient and inexpensive. Furthermore, the installation positions of the first and second positioning bars 320 and 330 can be replaced or adjusted based on the size of the coating sheet 10 to be positioned and secured.
[0033] See also Figure 2 and Figure 3 In some embodiments of the present invention, the flat plate is a rectangular plate. To prevent scratches on the substrate of the coating sheet 10 and thus affect surface smoothness, the rectangular plate is arranged with multiple rows and columns of universal balls 600 along its length. The universal balls 600 protrude from the upper surface of the rectangular plate. It is important to note that the height of each universal ball 600 protruding from the rectangular plate should be consistent to ensure that the coating sheet 10 can be placed horizontally, which also facilitates accurate film thickness measurement.
[0034] See also Figure 1 In some embodiments of the present invention, the translation mechanism 500 includes a first linear actuator 510 provided on the body 100 and a second linear actuator 520 perpendicular to the output end of the first linear actuator 510. The carrier 200 is mounted on the output end of the second linear actuator 520. The first linear actuator 510 and the second linear actuator 520 cooperate to move the various planar positions of the coating sheet 10 to align with the detection end of the film thickness measuring instrument 400.
[0035] In some embodiments of the present invention, to improve the accuracy of the movement of the coating sheet 10 and ensure that the preset coordinate position is aligned with the detection end of the film thickness measuring instrument 400, the first linear actuator 510 and the second linear actuator 520 are motor-screw mechanisms. Of course, in other embodiments, the first linear actuator 510 and the second linear actuator 520 can also be replaced by electric push rods, electric gear rack mechanisms, etc.
[0036] The present invention further discloses an automatic production line comprising a film thickness measurement device according to any of the above technical solutions. The automatic production line employing the above film thickness measurement device can rapidly obtain film thickness data at multiple locations on a coated wafer 10 without destroying the coated wafer 10, thereby improving the efficiency of measuring the average film thickness of the coated wafer 10 and thereby increasing the rate of feedback to the production line, thereby facilitating rapid adjustment of coating process parameters and improving production efficiency.
[0037] In some embodiments of the present invention, the automatic production line further includes an execution unit and a control module, wherein the execution unit and the film thickness measuring device are electrically connected to the control module, and the control module is capable of obtaining the average value of multiple sets of data measured by the film thickness measuring device and correcting the operating parameters of the execution unit in real time. It should be noted that the execution unit coats the coating sheet 10 in the previous process to form a coating layer of a certain thickness, while the film thickness measuring device of the present invention measures multiple position points of the coated film 10 online to obtain the average value of multiple sets of film thickness data. If the average value exceeds the preset range, it is fed back to the control module, which adjusts the coating parameters of the execution unit so that the film thickness becomes within the preset range, greatly shortening the time for adjusting the process parameters of the coating machine, improving the production yield of the product, and thus reducing the manufacturing cost.
[0038] The technical features of the above embodiments can be combined arbitrarily. To make the description concise, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.
[0039] Although the embodiments of the present invention have been shown and described, those skilled in the art will appreciate that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and purpose of the present invention, and that the scope of the present invention is defined by the claims and their equivalents.
Claims
1. A film thickness measuring device, characterized in that: include: Body (100); A carrier (200) is provided on the machine body (100), and a positioning component (300) for positioning the coating sheet (10) is provided on the carrier (200); a film thickness measuring instrument (400), provided on the machine body (100) and located above the carrier (200), for measuring the coating thickness of the coating sheet (10) on the carrier (200); The translation mechanism (500) is connected to the carrier (200) or the film thickness measuring instrument (400) and is used to drive the carrier (200) and the film thickness measuring instrument (400) to translate relative to each other, so as to measure the film thickness data of multiple points on the coating sheet (10).
2. A film thickness measuring device according to claim 1, characterized in that: The carrier (200) comprises a flat plate member that matches the size of the coating sheet (10), and the positioning assembly (300) comprises a plurality of quick clamps (310) that can fix the coating sheet (10) on the flat plate member.
3. A film thickness measuring device according to claim 2, characterized in that: The flat plate is a rectangular plate, and the positioning assembly (300) further comprises a first positioning strip (320) provided at both ends of a long side of the rectangular plate and a second positioning strip (330) provided at both ends of a wide side of the rectangular plate. At least one of the quick clamps (310) acts on the side wall of the coated sheet (10) so that the coated sheet (10) is pressed against the first positioning strip (320), and at least one of the quick clamps (310) acts on the side wall of the coated sheet (10) so that the coated sheet (10) is pressed against the second positioning strip (330).
4. A film thickness measuring device according to claim 3, characterized in that: A right-angle positioning piece is provided at one corner of the rectangular plate, and the right-angle positioning piece is composed of a first positioning strip (320) and a second positioning strip (330) intersecting each other, and the first positioning strip (320) and / or the second positioning strip (330) are both provided with a positioning stop strip (340) abutting against the outer side wall of the rectangular plate.
5. The film thickness measuring device according to claim 3, characterized in that: The first positioning bar (320) and the second positioning bar (330) are both detachably mounted on the surface of the rectangular plate by fastening bolts.
6. The film thickness measuring device according to claim 2, characterized in that: The flat plate is a rectangular plate. The rectangular plate is provided with a plurality of rows and columns of universal balls (600) along its length direction. The universal balls (600) protrude from the upper surface of the rectangular plate.
7. The film thickness measuring device according to claim 1, characterized in that: The translation mechanism (500) comprises a first linear driver (510) provided on the machine body (100) and a second linear driver (520) orthogonal to an output end of the first linear driver (510), and the carrier (200) is mounted on the output end of the second linear driver (520).
8. The film thickness measuring device according to claim 7, characterized in that: The first linear drive (510) and the second linear drive (520) are motor-screw mechanisms.
9. Automatic production line, characterized in that, include: A film thickness measuring device according to any one of claims 1 to 8.
10. The automatic production line according to claim 9, characterized in that: It also includes an execution unit and a control module. The execution unit and the film thickness measuring device are electrically connected to the control module. The control module can obtain the average value of multiple sets of data measured by the film thickness measuring device and correct the operating parameters of the execution unit in real time.