High-speed optical rotation module

Abstract

The utility model relates to a high-speed optical rotation module. The high-speed optical rotation module comprises a substrate and a rotating mirror assembly installed on the substrate. The driving end of the front end of the servo motor is connected with a second synchronous wheel installed at the front end of the rotating shaft through a first synchronous wheel and a synchronous belt in sequence, a first lens is installed on the inner side of the rear end of the first lens fixing block, a middle block is installed at the rear end of the first lens fixing block, and a second lens is installed on the inner side of the rear end of the second lens fixing block. Compared with a traditional machining mode, the machining device can machine more materials in the semiconductor industry, such as high-strength metal, glass, ceramics, crystals and some high-brittleness materials, and high-precision micropores, taper holes and the like can be machined more easily.

Description

Technical Field

[0001] The utility model relates to the technical field related to laser processing, and in particular to a high-speed optical rotation module. Background Art

[0002] With the rapid development of industrial technology, high-precision micro-holes are used in various industries. The development trend is small aperture, large depth, high accuracy, and a wide range of application materials (such as high-strength, high-hardness, high-toughness, high-melting-point metals, ceramics, glass, polymer materials, crystals, etc.). Traditional micro-hole processing technologies mainly include mechanical processing, electric spark, chemical corrosion, ultrasonic drilling and other technologies. These technologies have their own characteristics, but they can no longer meet the higher requirements of micro-hole processing. For example, mechanical processing is very inefficient for high-hardness and high-brittleness materials, and it is difficult to process holes smaller than 0.2mm; electric spark can only process metal materials. Laser drilling has the advantages of high efficiency, small maximum aperture, high accuracy, low cost, and almost no material selectivity. It has now become one of the mainstream technologies for micro-hole processing.

[0003] Currently, the most common laser drilling method is galvanometer scanning, which can be performed layer by layer in a circular or spiral manner. However, a drawback of galvanometer scanning is that it cannot avoid taper. During the hole-making process, due to the divergence and multiple reflections of the focused laser beam, the material ablation rate decreases sharply with increasing hole depth. Therefore, creating microholes with a large aspect ratio in thicker materials is more difficult.

[0004] In view of the above-mentioned defects, the designers have actively carried out research and innovation in order to create a high-speed optical rotation module to make it more valuable for industrial use. Utility Model Content

[0005] In order to solve any of the above technical problems, the purpose of the present invention is to provide a high-speed optical rotation module.

[0006] In order to achieve the above purpose, the present invention adopts the following technical solutions:

[0007] A high-speed optical rotation module includes a substrate and a rotating mirror assembly mounted on the substrate;

[0008] A servo motor is mounted on a base plate on the right side of the rotating mirror assembly via a motor fixing plate. The rotating mirror assembly includes a rotating shaft, a first lens fixing block and a second lens fixing block.

[0009] The driving end of the front end of the servo motor is connected to the second synchronous wheel installed at the front end of the rotating shaft through the first synchronous wheel and the synchronous belt in sequence. The rear end of the rotating shaft is connected to the front end of the first lens fixing block. The first lens is installed on the inner side of the rear end of the first lens fixing block, and the middle block is installed on the rear end of the first lens fixing block. The front end of the second lens fixing block is rotatably installed on the rear end of the middle block, and the second lens is installed on the inner side of the rear end of the second lens fixing block.

[0010] As a further improvement of the present invention, a shock-absorbing plate is installed at the bottom of the base plate.

[0011] As a further improvement of the present invention, the shock absorbing plate is a high-strength rubber block.

[0012] As a further improvement of the present invention, the second synchronous wheel is located between the two bearing seats, the two bearing seats are both mounted on the base plate, and the rotating shaft is mounted on the two bearing seats through the first bearings on both sides along the front-to-back direction.

[0013] As a further improvement of the present invention, spacer rings are installed on the rotating shafts between the second synchronous wheel and the two bearing seats.

[0014] As a further improvement of the present invention, the front end of the first lens fixing block is mounted on the rotating shaft via a nut locking block.

[0015] As a further improvement of the present invention, the second lens fixing block is mounted on the intermediate block via at least one second bearing.

[0016] As a further improvement of the present invention, the second bearing is mounted on the intermediate block via a locking ring.

[0017] By means of the above solution, the present invention has at least the following advantages:

[0018] Compared with traditional processing methods, the utility model can process more semiconductor industry materials, such as high-strength metals, glass, ceramics, crystals and some highly brittle materials, and can more easily process high-precision microholes, tapered holes, etc.

[0019] The utility model has higher processing efficiency and lower NG rate.

[0020] The above description is only an overview of the technical solution of the present invention. In order to more clearly understand the technical means of the present invention and to implement it according to the contents of the specification, the following is a detailed description of the preferred embodiments of the present invention in conjunction with the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following is a brief introduction to the drawings required for use in the embodiments. It should be understood that the following drawings only illustrate certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying any creative work.

[0022] Figure 1 This is a structural diagram of a high-speed optical rotation module of the utility model;

[0023] Figure 2 yes Figure 1 Schematic diagram of the internal structure of the transfer mirror assembly.

[0024] The meanings of the reference numerals in the figures are as follows.

[0025] Base plate 1, shock-absorbing plate 2, servo motor 3, motor fixing plate 4, first synchronous wheel 5, synchronous belt 6, bearing seat 7, second synchronous wheel 8, rotating shaft 9, rotating mirror assembly 10, first bearing 11, spacer ring 12, nut locking block 13, first lens fixing block 14, intermediate block 15, second lens fixing block 16, first lens 17, second lens 18, second bearing 19, locking ring 20. DETAILED DESCRIPTION

[0026] The following embodiments are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0027] In order to enable those skilled in the art to better understand the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all of the embodiments. The components of the embodiments of the present invention generally described and shown in the drawings here can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the present invention provided in the drawings is not intended to limit the scope of the utility model for which protection is sought, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without making creative work are within the scope of protection of the present invention.

[0028] like Figures 1 and 2 As shown, a high-speed optical rotation module includes a substrate 1 and a rotating mirror assembly 10 installed on the substrate 1. A servo motor 3 is installed on the substrate 1 on the right side of the rotating mirror assembly 10 through a motor fixing plate 4. The rotating mirror assembly 10 includes a rotating shaft 9, a first lens fixing block 14 and a second lens fixing block 16.

[0029] The driving end of the front end of the servo motor 3 is connected to the second synchronous wheel 8 installed at the front end of the rotating shaft 9 through the first synchronous wheel 5 and the synchronous belt 6 in sequence. The rear end of the rotating shaft 9 is connected to the front end of the first lens fixing block 14. The first lens 17 is installed on the inner side of the rear end of the first lens fixing block 14, and the intermediate block 15 is installed on the rear end of the first lens fixing block 14. The front end of the second lens fixing block 16 is rotatably installed on the rear end of the intermediate block 15, and the second lens 18 is installed on the inner side of the rear end of the second lens fixing block 16.

[0030] A shock-absorbing plate 2 is installed at the bottom of the base plate 1, and the shock-absorbing plate 2 is a rubber block.

[0031] The second synchronous wheel 8 is located between the two bearing seats 7, both bearing seats 7 are installed on the base plate 1, and the rotating shaft 9 is installed on the two bearing seats 7 on both sides along the front and rear directions through the first bearings 11 respectively. Spacer rings 12 are installed on the rotating shaft 9 between the second synchronous wheel 8 and the two bearing seats 7.

[0032] The front end of the first lens fixing block 14 is mounted on the rotating shaft 9 through the nut locking block 13, and the second lens fixing block 16 is mounted on the intermediate block 15 through at least one second bearing 19, and the second bearing 19 is mounted on the intermediate block 15 through a locking ring 20.

[0033] Brief description of the installation structure of this utility model:

[0034] The servo motor 3 is installed on the base plate 1 through the motor fixing plate 4. The large-diameter first synchronous wheel 5 is directly put on the motor shaft and locked with a top screw. The synchronous belt 6 is put on the first synchronous wheel 5 and the small-diameter second synchronous wheel 8. The two deep groove ball bearings (first bearing 11) are fixed on the two bearing seats 7 and fixed with a retaining spring. The second synchronous wheel 8 is placed between the two bearings, and the rotating shaft 9 is inserted into the two deep groove ball bearings. The first lens fixing block 14 is fixed on the rotating shaft 9. The first lens 17 is installed on the first lens fixing block 14 with screws. The two thrust needle roller bearings (second bearing 19) are installed in the middle block 15. 12

[0035] The second lens 18 is installed in the second lens fixing block 16 .

[0036] The working principle of this utility model:

[0037] After the equipment is powered on, the PLC controls servo motor 3 at 1200 rpm, driving the first synchronous pulley 5. The second synchronous pulley 8 is driven by a timing belt 6. With a ratio of 2.5:1 between the large and small synchronous pulleys, the second synchronous pulley 8 rotates at 3000 rpm. The laser beam enters this optical tube, passing first through the first lens 17 and then through the second lens 18. The lenses are driven by the motor synchronous pulley at 3000 rpm, achieving the desired optical rotation cutting effect.

[0038] This utility model can process more semiconductor industry materials, such as high-strength metals, glass, ceramics, crystals and some highly brittle materials, and is more likely to process high-precision micro-holes, tapered holes, etc. The processing efficiency is higher and the NG rate is lower.

[0039] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implying the number of technical features indicated. Therefore, features defined as "first", "second", etc. may explicitly or implicitly include one or more of such features. In the description of the present invention, unless otherwise specified, "multiple" means two or more.

[0040] In the description of this utility model, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they may refer to fixed connections, detachable connections, or integral connections; mechanical connections, electrical connections, direct connections, indirect connections through an intermediate medium, and internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on specific circumstances.

[0041] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. It should be pointed out that ordinary technicians in this technical field can make several improvements and modifications without departing from the technical principles of the present invention. These improvements and modifications should also be regarded as within the scope of protection of the present invention.

Claims

1. A high-speed optical rotation module, comprising a substrate (1) and a rotating mirror assembly (10) mounted on the substrate (1); characterized in that: A servo motor (3) is mounted on a base plate (1) on the right side of the rotating mirror assembly (10) via a motor fixing plate (4); the rotating mirror assembly (10) comprises a rotating shaft (9), a first lens fixing block (14), and a second lens fixing block (16); The driving end of the front end of the servo motor (3) is connected to the second synchronous wheel (8) installed at the front end of the rotating shaft (9) in sequence through the first synchronous wheel (5) and the synchronous belt (6); the rear end of the rotating shaft (9) is connected to the front end of the first lens fixing block (14); a first lens (17) is installed on the inner side of the rear end of the first lens fixing block (14); an intermediate block (15) is installed on the rear end of the first lens fixing block (14); the front end of the second lens fixing block (16) is rotatably installed on the rear end of the intermediate block (15); and a second lens (18) is installed on the inner side of the rear end of the second lens fixing block (16).

2. The high-speed optical rotation module according to claim 1, wherein: A shock-absorbing plate (2) is installed at the bottom of the base plate (1).

3. The high-speed optical rotation module according to claim 2, wherein: The shock-absorbing plate (2) is a rubber block.

4. The high-speed optical rotation module according to claim 1, wherein: The second synchronous wheel (8) is located between two bearing seats (7), and the two bearing seats (7) are both mounted on the base plate (1). The rotating shaft (9) is mounted on the two bearing seats (7) along both sides of the front-back direction through the first bearings (11).

5. The high-speed optical rotation module according to claim 4, characterized in that: A spacer ring (12) is installed on the rotating shaft (9) between the second synchronous wheel (8) and the two bearing seats (7).

6. The high-speed optical rotation module according to claim 1, characterized in that: The front end of the first lens fixing block (14) is mounted on the rotating shaft (9) via a nut locking block (13).

7. The high-speed optical rotation module according to claim 1, characterized in that: The second lens fixing block (16) is mounted on the intermediate block (15) via at least one second bearing (19).

8. The high-speed optical rotation module according to claim 7, characterized in that: The second bearing (19) is mounted on the intermediate block (15) via a locking ring (20).

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