Flatness control device for probe

Abstract

The utility model discloses a flatness control device for a probe in the field of semiconductors, which comprises a horizontally arranged fixed base, the left side and the right side of the fixed base are respectively and vertically provided with a left stand column and a right stand column, the upper ends of the left stand column and the right stand column are fixed with a horizontal upper cross beam, and the upper cross beam is vertically provided with an air cylinder. A cylinder body of the air cylinder is fixed with the upper cross beam, an extending end of a piston rod of the air cylinder penetrates through the upper cross beam and extends downwards, a plane pressing head is arranged at the extending end of the piston rod of the air cylinder, a probe assembly to be pressed is placed on the fixed base, and a pneumatic assembly is arranged corresponding to the air cylinder. According to the utility model, the problem of abnormal product flatness caused by manual operation in the current manufacturing process can be solved, and the product yield and the processing stability are improved.

Description

Technical Field

[0001] The utility model belongs to the field of semiconductors, and in particular relates to a flatness control device for a probe. Background Art

[0002] Probes are a hot topic in wafer testing research. With the advancement of semiconductor technology and the increasing integration of wafers, the quality requirements for probes are becoming increasingly stringent. Probes must maintain high positioning accuracy, sensitivity, and stability to ensure accurate alignment and testing between the probe and the chip.

[0003] In order to cope with probes of different specifications, the raw materials need to be flattened before molding so that the flatness and surface quality of the raw materials meet the requirements of the subsequent processes.

[0004] Probe quality demands high precision, and raw materials require high precision. Controlling the flatness of the product before molding and stabilizing the product's TTV are crucial. Ensuring the flatness of the raw material on the jig before processing is crucial for product yield. Therefore, it is necessary to provide a flatness control device to address the existing problem of insufficient flatness of the raw material on the jig before processing. Utility Model Content

[0005] The purpose of the utility model is to provide a flatness control device for a probe, which can solve the problem of abnormal product flatness caused by human operation in the current process and improve product yield and processing stability.

[0006] The purpose of the utility model is achieved as follows: a flatness control device for a probe, comprising a horizontally arranged fixed base, a left column and a right column are vertically provided on the left and right sides of the fixed base respectively, the upper ends of the left column and the right column are fixed to the horizontal upper crossbeam, a cylinder is vertically provided on the upper crossbeam, the cylinder body of the cylinder is fixed to the upper crossbeam, the protruding end of the piston rod of the cylinder passes through the upper crossbeam and extends downward, the protruding end of the piston rod of the cylinder is provided with a flat pressure head, a probe assembly to be pressed is placed on the fixed base, and a pneumatic assembly is provided corresponding to the cylinder.

[0007] Compared with existing technologies, the present invention offers significant advantages: it comprises a flat fixed base, left and right column assemblies, an upper crossbeam assembly, a cylinder block, and a flat pressure head. A reversing air pressure valve controls the rise and fall of the flat pressure head by changing the direction of airflow, while the air pressure valve regulates the pressure to control the pressure of the pressure head, achieving product flattening. The high-precision fixed base and pressure head enhance product flatness, while the pneumatic drive provides stable pressure, high precision, and easy operation and maintenance, meeting product flatness requirements and ensuring stability.

[0008] As a further improvement of the present invention, the fixed base is rectangular, and the left column and the right column are arranged correspondingly.

[0009] As a further improvement to the present invention, the probe assembly to be pressed includes a fixture to which a plurality of probes arranged in a rectangular array are fixed by adhesive; each probe is arranged corresponding to a flat indenter. The fixture is used to fix the product during processing; the adhesive serves as an adhesive medium for affixing the probe product to the fixture; the probe product adheres to the fixture and is the subject of processing. The probe assembly is composed of a large number of probes arranged in a rectangular shape. Because the probes are small in size, they form a rectangular shape when arranged in large numbers.

[0010] As a further improvement of the present invention, the pneumatic component includes an air pressure valve installed on the top of the cylinder body of the cylinder, an air inlet is provided on one side of the air pressure valve, and an air outlet on the other side of the air pressure valve is connected to the four-position five-way reversing air pressure valve through a pipe. The four-position five-way reversing air pressure valve is installed on the upper crossbeam, and the cylinder body of the cylinder is respectively provided with an upper pneumatic joint and a lower pneumatic interface corresponding to the rodless cavity and the rod cavity. The four-position five-way reversing air pressure valve is also connected to the upper pneumatic joint and the lower pneumatic interface through two pipes.

[0011] As a further improvement of the present invention, a valve pressure gauge is provided on the top of the pressure valve, a pressure regulating knob is provided on the front side of the pressure valve, and the four-position five-way reversing pressure valve is also provided with two silencer exhaust ports. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 It is a three-dimensional structural diagram of the utility model.

[0013] Figure 2 A top view of the probe on the fixed fixture.

[0014] Figure 3 This is the main view of the probe on the fixed fixture.

[0015] Among them, 1. Fixed base, 2. Right column, 3. Four-position five-way reversing air pressure valve, 4. Left column, 5. Flat pressure head, 6. Upper crossbeam, 7. Cylinder, 8. Air pressure valve, 9. Air inlet, 10. Air pressure adjustment knob, 11. Air valve pressure gauge, 12. Upper pneumatic interface, 13. Lower pneumatic interface, 14. Silencer exhaust port, 15. Fixing fixture, 16. Adhesive, 17. Probe. DETAILED DESCRIPTION

[0016] like Figure 1-3As shown, a flatness control device for a probe comprises a horizontally arranged fixed base 1, with a left column 4 and a right column 2 vertically provided on the left and right sides of the fixed base 1 respectively. The fixed base 1 is rectangular, and the left column 4 and the right column 2 are arranged correspondingly; the upper ends of the left column 4 and the right column 2 are fixed to a horizontal upper crossbeam 6, and a cylinder 7 is vertically provided on the upper crossbeam 6. The cylinder body of the cylinder 7 is fixed to the upper crossbeam 6, and the protruding end of the piston rod of the cylinder 7 passes through the upper crossbeam 6 and extends downward. The protruding end of the piston rod of the cylinder 7 is provided with a flat pressure head 5, a probe assembly to be pressed is placed on the fixed base 1, and a pneumatic assembly is provided corresponding to the cylinder 7.

[0017] The probe assembly to be pressed consists of a fixture 15, to which are fixed several probes 17 arranged in a rectangular array via adhesive 16. Each probe 17 is positioned corresponding to the flat indenter 5. The fixture 15 is used to secure the product during processing. The adhesive 16 serves as a bonding medium, securing the probes 17 to the fixture. The probes 17 adhere to the fixture and are the workpieces. The probe assembly is composed of a large number of probes 17 arranged in a rectangular pattern. Due to their small size, the large number of probes 17 formed in this arrangement form a rectangular shape.

[0018] The pneumatic assembly includes an air pressure valve 8 mounted on the top of the cylinder body of the air cylinder 7. An air inlet 9 is provided on one side of the air pressure valve 8, and an air outlet on the other side of the air pressure valve 8 is connected to the four-position five-way reversing air pressure valve 3 via a pipe. The four-position five-way reversing air pressure valve 3 is mounted on the upper crossbeam 6. An upper pneumatic joint and a lower pneumatic interface 13 are provided on the cylinder body of the cylinder 7 corresponding to the rodless cavity and the rod cavity, respectively. The four-position five-way reversing air pressure valve 3 is also connected to the upper pneumatic joint and the lower pneumatic interface 13 via two pipes. A valve pressure gauge 11 is provided on the top of the air pressure valve 8, and an air pressure adjustment knob 10 is provided on the front side of the air pressure valve 8. The four-position five-way reversing air pressure valve 3 is also provided with two silencer exhaust ports 14.

[0019] This utility model comprises a flat fixed base 1, an assembly of left and right columns 2, an upper crossbeam 6, a cylinder 7, and a flat pressure head 5. A reversing air pressure valve 8 controls the rise and fall of the flat pressure head 5 by changing the airflow direction. The pressure of the pressure head is also controlled by regulating the air pressure through the air pressure valve 8, achieving product flattening. The high-precision fixed base 1 and pressure head enhance product flatness. The pressure head is driven by air pressure, resulting in stable pressure, high precision, and easy operation and maintenance, meeting product flatness requirements and ensuring stability.

[0020] The utility model comprises a fixed base 1, a high-precision plane bottom plate, and a fixed guide column on both sides; a right column 2, connected to the fixed base 1 to support the upper crossbeam 6; a four-position five-way reversing air pressure valve 3, controlling the inflow and outflow of gas and adjusting the direction of the airflow; a left column 4, connected to the fixed base 1, supporting the upper crossbeam 6; a plane pressure head 5, a high-precision plane pressure head 5, which is controlled to rise and fall by the reversing valve, and the upper and lower tracks are controlled by the cylinder 7 in a fixed position; an upper crossbeam 6, which carries the cylinder 7, the air valve and the plane pressure head 5; a cylinder body of the cylinder 7, which has a piston rod inside, which is responsible for transmitting the force of the compressed gas to the pressure head of the load. When there is a pressure difference on both sides of the piston in the cylinder 7, the piston moves back and forth, thereby controlling the rise / fall of the plane pressure head 5 and fixing the rise / fall track of the plane pressure head 5. Gas flows into the upper cylinder and flows out of the lower cylinder, the piston moves downward, driving the pressure head to drop, and vice versa, the pressure head rises upward; air pressure valve 8, controls air flow input and air pressure regulation; air inlet 9 of air pressure valve 8, input port for air pressure valve 8 to receive compressed gas; air pressure regulating knob 10, knob for adjusting output air pressure; air valve pressure gauge 11, gauge for observing air valve pressure; upper pneumatic interface 12 of cylinder 7, port for compressed gas flowing in and out of the upper cylinder of cylinder 7; lower pneumatic interface 13 of cylinder 7, port for compressed gas flowing in and out of the lower cylinder of cylinder 7; silencer exhaust port 14, when gas flows into the upper cylinder 7, gas in the lower cylinder 7 is discharged from the exhaust port, and when gas flows into the lower cylinder 7, gas in the upper cylinder 7 is discharged from the exhaust port; fixing fixture 15, fixture for fixing product processing; adhesive medium, used to fit and fix the product on the fixture; probe 17 product, fit on the fixture, the main body to be processed.

[0021] The working steps of the utility model are as follows:

[0022] 1. Lay the product on the jig. After lamination, check to make sure there are no bubbles, dirt, or bulges.

[0023] 2. Clean the bottom plate and pressure head of the flatness control device to ensure there are no foreign objects;

[0024] 3. Place the bonded product together with the fixture on the bottom platform of the flatness control device, control the pressure of the flat press head 5 to 5-9 MPa, turn on the switch, and press the press head on the product for 15-20 minutes;

[0025] 4. After the flatness is pressed, transfer to the next process for operation.

[0026] This device significantly improves product flatness after flattening. Tests have shown that it can increase product yield by 6% and reduce the impact of manual operation on material flatness. The TTV of processed products is consistently controlled at ≤1µm.

[0027] The present invention is not limited to the above-mentioned embodiments. On the basis of the technical solutions disclosed in the present invention, technicians in this field can make some substitutions and deformations of some technical features therein according to the disclosed technical content without creative labor, and these substitutions and deformations are all within the protection scope of the present invention.

Claims

1. A probe flatness control device, characterized in that: It includes a horizontally arranged fixed base, with a left column and a right column vertically provided on the left and right sides of the fixed base respectively, the upper ends of the left column and the right column are fixed to the horizontal upper crossbeam, a cylinder is vertically arranged on the upper crossbeam, the cylinder body of the cylinder is fixed to the upper crossbeam, the protruding end of the piston rod of the cylinder passes through the upper crossbeam and extends downward, the protruding end of the piston rod of the cylinder is provided with a flat pressure head, a probe assembly to be pressed is placed on the fixed base, and a pneumatic assembly is provided corresponding to the cylinder.

2. The probe flatness control device according to claim 1, wherein: The fixed base is rectangular, and the left column and the right column are arranged correspondingly.

3. A probe flatness control device according to claim 1 or 2, characterized in that: The probe assembly to be pressed includes a fixing jig, on which a plurality of probes distributed in a rectangular array are fixed by adhesive; each probe is arranged corresponding to the plane pressing head.

4. A probe flatness control device according to claim 1 or 2, characterized in that: The pneumatic component includes an air pressure valve installed on the top of the cylinder body of the cylinder, an air inlet is provided on one side of the air pressure valve, and an air outlet on the other side of the air pressure valve is connected to a four-position five-way reversing air pressure valve via a pipe. The four-position five-way reversing air pressure valve is installed on the upper crossbeam, and an upper pneumatic joint and a lower pneumatic interface are respectively provided on the cylinder body of the cylinder corresponding to the rodless cavity and the rod cavity. The four-position five-way reversing air pressure valve is also connected to the upper pneumatic joint and the lower pneumatic interface via two pipes.

5. The probe flatness control device according to claim 4, characterized in that: The top of the air pressure valve is provided with an air valve pressure gauge, the front side of the air pressure valve is provided with an air pressure regulating knob, and the four-position five-way reversing air pressure valve is also provided with two silencer exhaust ports.

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