Rapid substrate circulation mechanism for board-level packaging process

Abstract

The utility model, which belongs to the technical field of semiconductor wafer packaging, discloses a board-level packaging technology substrate rapid circulation mechanism comprising a pedestal provided with a first roller conveying mechanism. A jacking assembly is arranged on the base, a second rolling wheel conveying mechanism is arranged at the output end of the jacking assembly, the axis of second rolling wheels on the second rolling wheel conveying mechanism is perpendicular to the axis of first rolling wheels on the first rolling wheel conveying mechanism, and the multiple second rolling wheels on each column are located between the multiple first rolling wheels on the two adjacent columns; first leaning plates are arranged on the two sides of the multiple rows of second rollers correspondingly, and a distance adjusting assembly is arranged on the jacking assembly and used for adjusting the distance between the two first leaning plates; and the jacking assembly drives the top of the second roller and the top of the first leaning plate to protrude out of or be lower than the top of the first roller. According to the utility model, the circulation and automatic steering of the substrate can be smoothly realized, the circulation efficiency is improved, and the conveying position precision of the substrate can be improved through the two first leaning plates.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor wafer packaging, in particular to a substrate rapid circulation mechanism for a board-level packaging process. Background Art

[0002] The circulation of existing board-level packaging process substrates (hereinafter referred to as "substrates") is generally carried out with the help of FOUP, manual carts or OHT. The circulation efficiency of the above methods is low. Some existing technologies use rollers on the conveyor line for transmission, but the transmission method is single and the position accuracy is easily lost during the transmission process.

[0003] Therefore, a rapid transfer mechanism for substrates in a board-level packaging process is proposed. Utility Model Content

[0004] The purpose of the utility model is to provide a rapid substrate transfer mechanism for a board-level packaging process, aiming to solve or improve at least one of the above-mentioned technical problems.

[0005] To achieve the above-mentioned object, the present invention provides the following solution: The present invention provides a rapid substrate transfer mechanism for a board-level packaging process, comprising a base, wherein a first roller transfer mechanism is provided on the base;

[0006] A lifting assembly is provided on the base, and the lifting assembly is located below the transmission end of the first roller conveyor mechanism. A second roller conveyor mechanism is provided at the output end of the lifting assembly. The axis of the second roller on the second roller conveyor mechanism is perpendicular to the axis of the first roller on the first roller conveyor mechanism. The plurality of second rollers on each column are located between the plurality of first rollers on two adjacent columns.

[0007] A first supporting plate is respectively provided on both sides of the multiple rows of the second rollers, and a spacing adjustment component is provided on the jacking component, and the spacing adjustment component is used to adjust the spacing between the two first supporting plates; the jacking component drives the top of the second roller and the top of the first supporting plate to protrude or be lower than the top of the first roller.

[0008] Preferably, the first roller transmission mechanism includes a plurality of first transmission shafts arranged in parallel, the first transmission shafts are rotatably connected to the base, a plurality of the first rollers are fixedly connected to the first transmission shafts, and a first drive assembly is provided on the base that is transmission-connected to the plurality of the first transmission shafts.

[0009] Preferably, the jacking assembly includes a first jacking cylinder fixedly connected to the base, a first support plate is fixedly connected to the piston rod of the first jacking cylinder, and the first support plate is located below the first transmission shaft; the spacing adjustment assembly includes two first positioning cylinders fixedly connected to the first support plate, the piston rods of the two first positioning cylinders are respectively fixed to the two first positioning plates, and the second roller transmission mechanism is arranged on the first support plate.

[0010] Preferably, the second roller conveying mechanism includes a plurality of second conveying shafts arranged side by side, the second conveying shafts are rotatably connected to the first support plate, a plurality of second rollers are fixedly connected to the second conveying shafts, and a second drive assembly is provided on the first support plate that is transmission-connected to the plurality of second conveying shafts.

[0011] Preferably, the first drive assembly and the second drive assembly respectively include a motor, the two motors are respectively fixed to the base and the first support plate, a first pulley is fixed to the output shaft of the motor, a driving shaft is respectively rotatably connected to the base and the first support plate, a second pulley is fixed to the driving shaft, the first pulley and the second pulley are connected by a synchronous belt transmission, and the two driving shafts are respectively connected to the multiple first transmission shafts and the multiple second transmission shafts.

[0012] Preferably, one end of the first transmission shaft and the second transmission shaft is respectively fixed with a first magnetic gear, a plurality of second magnetic gears are fixed to the driving shaft, and the plurality of first magnetic gears and the plurality of second magnetic gears are arranged in a one-to-one correspondence.

[0013] Preferably, a second lifting cylinder is also fixed to the base, and a second support plate located below the first conveying shaft is fixed to the piston rod of the second lifting cylinder, and a plurality of support rods are fixed to the second support plate, and the support rods are located between two adjacent first conveying shafts, and a positioning assembly is provided on the second support plate.

[0014] Preferably, the positioning assembly includes four second positioning cylinders fixedly connected to the second support plate, and a second positioning plate is fixedly connected to the piston rod of the second positioning cylinder. When the substrate is placed on multiple first rollers located at the starting end of the transmission, the four second positioning plates are respectively located around the substrate, and the second positioning cylinder drives the second positioning plates to approach or move away from the substrate.

[0015] The utility model discloses the following technical effects: the substrate is conveyed and circulated on the first roller conveyor mechanism, and stops when it reaches the end. The second roller conveyor mechanism and the first supporting plate are driven to rise by the lifting component, so that the top of the second roller and the top of the first supporting plate protrude from the top of the first roller. At this time, the substrate falls on multiple second rollers, and the first supporting plates are located on both sides of the substrate. The two first supporting plates are driven close to the two sides of the substrate by the spacing adjustment component to position the substrate, and then the substrate is conveyed by the second roller conveyor mechanism. By arranging the lifting component and the second roller conveyor mechanism at the conveying end of the first roller conveyor mechanism, the present application can smoothly realize the circulation and automatic steering of the substrate, improve the circulation efficiency, and improve the conveying position accuracy of the substrate by the two first supporting plates. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The accompanying drawings, which constitute part of this application, are intended to provide a further understanding of this application. The exemplary embodiments and descriptions of this application are intended to explain this application and do not constitute an improper limitation on this application. In the accompanying drawings:

[0017] Figure 1 It is a structural diagram of the utility model;

[0018] Figure 2 This is a schematic structural diagram of the leaning assembly and the support rod in the utility model;

[0019] Figure 3 It is a structural schematic diagram of the second roller transmission mechanism in the present utility model.

[0020] In the figure: 1. first transmission shaft; 2. bearing; 3. vertical plate; 4. bushing; 5. clamp; 6. first roller; 7. first magnetic gear; 8. driving shaft; 9. second magnetic gear; 10. second pulley; 11. motor; 12. synchronous belt; 13. support rod; 14. aluminum plate; 15. linear bearing; 16. guide shaft; 17. second support plate; 18. floating joint; 19. crossbeam; 20. limit bolt; 21. hydraulic buffer; 22. mounting seat; 23. aluminum plate; 24. second positioning cylinder; 25. first positioning cylinder; 26. end limit mechanism; 27. second transmission shaft; 28. presence sensor; 29. ​​second roller. DETAILED DESCRIPTION

[0021] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0022] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the present invention is further described in detail below with reference to the accompanying drawings and specific implementation methods.

[0023] Reference Figure 1-Figure 3 , the utility model provides a rapid transfer mechanism for substrates in a board-level packaging process, comprising a base, on which a first roller conveying mechanism is provided;

[0024] A lifting assembly is provided on the base, and the lifting assembly is located below the transmission end of the first roller conveyor mechanism. A second roller conveyor mechanism is provided at the output end of the lifting assembly. The axis of the second roller 29 on the second roller conveyor mechanism is perpendicular to the axis of the first roller 6 on the first roller conveyor mechanism. The multiple second rollers 29 on each column are located between the multiple first rollers 6 on two adjacent columns.

[0025] A first support plate is provided on both sides of the multiple rows of second rollers 29, and a spacing adjustment assembly is provided on the lifting assembly. The spacing adjustment assembly is used to adjust the spacing between the two first support plates. The lifting assembly drives the top of the second rollers 29 and the top of the first support plate to protrude or be lower than the top of the first roller 6. The first support plate is located between the first rollers 6 on two adjacent rows.

[0026] The top of the first positioning plate is rotatably connected to a positioning roller. The lifting assembly drives the positioning roller to protrude upward from the top of the first roller 6. The spacing adjustment assembly drives the positioning roller to contact the side wall of the substrate, thereby positioning the substrate.

[0027] The substrate is conveyed and circulated on the first roller conveyor mechanism, and stops when it reaches the end. The second roller conveyor mechanism and the first support plate are driven upward by the lifting assembly, so that the top of the second roller 29 and the top of the first support plate protrude from the top of the first roller 6. At this time, the substrate falls on multiple second rollers 29 and is located between the two first support plates. The spacing adjustment assembly drives the two first support plates close to the two sides of the substrate to position the substrate. After positioning, the first support plate releases the substrate, and then it is conveyed by the second roller 29 on the second roller conveyor mechanism. By providing a lifting assembly and a second roller conveyor mechanism at the conveying end of the first roller conveyor mechanism, the present application can smoothly realize the circulation and automatic steering of the substrate, improve the circulation efficiency, and improve the conveying position accuracy of the substrate by using the two first support plates.

[0028] Further optimized, the first roller transmission mechanism includes a plurality of first transmission shafts 1 arranged in parallel, the first transmission shafts 1 are rotatably connected to the base, a plurality of first rollers 6 are fixedly connected to the first transmission shafts 1, and a first driving assembly is provided on the base that is transmission-connected to the plurality of first transmission shafts 1;

[0029] A vertical plate 3 is fixed on the base, and a plurality of bearings 2 are fixed on the vertical plate 3. The first transmission shaft 1 passes through the inner ring of the bearing 2 and is fixed by a shaft sleeve 4 and a clamp 5.

[0030] Further optimized, the lifting assembly includes a first lifting cylinder fixed to the base, the piston rod of the first lifting cylinder is fixed to the first support plate, and the first support plate is located below the first transmission shaft 1; the spacing adjustment assembly includes two first positioning cylinders 25 fixed to the first support plate, the piston rods of the two first positioning cylinders 25 are respectively fixed to the two first positioning plates, and the second roller transmission mechanism is provided on the first support plate;

[0031] The two first positioning cylinders 25 are arranged along the conveying direction of the first roller 6. At the same time, a seat sensor 28 and an end limit mechanism 26 are fixed to the first support plate. When the end limit mechanism 26 is installed, it should protrude from the positioning roller on the first positioning plate by at least 2-3 mm to prevent the substrate from passing through and being unable to be clamped in an abnormal situation.

[0032] To further optimize the solution, the second roller transmission mechanism includes a plurality of second transmission shafts 27 arranged side by side, the second transmission shafts 27 are rotatably connected to the first support plate, a plurality of second rollers 29 are fixedly connected to the second transmission shafts 27, and a second drive assembly is provided on the first support plate that is transmission-connected to the plurality of second transmission shafts 27.

[0033] To further optimize the solution, the first drive assembly and the second drive assembly respectively include a motor 11, the two motors 11 are respectively fixed to the base and the first support plate, the output shaft of the motor 11 is fixed with a first pulley, the base and the first support plate are respectively rotatably connected with a driving shaft 8, the driving shaft 8 is fixed with a second pulley 10, the first pulley and the second pulley 10 are connected by a synchronous belt 12, and the two driving shafts 8 are respectively connected to multiple first transmission shafts 1 and multiple second transmission shafts 27.

[0034] In a further optimized solution, one end of the first transmission shaft 1 and the second transmission shaft 27 are respectively fixedly connected to a first magnetic gear 7, and a plurality of second magnetic gears 9 are fixedly connected to the driving shaft 8. The plurality of first magnetic gears 7 are arranged in a one-to-one correspondence with the plurality of second magnetic gears 9; the axes of the first magnetic gears 7 and the second magnetic gears 9 are perpendicular;

[0035] A retaining spring is installed on the driving shaft 8, which can accurately position the second magnetic gear 9. The gap between the first magnetic gear 7 and the second magnetic gear 9 is 0.5 mm, which is a right-angled magnetic gear. In this embodiment, one driving shaft 8 drives seven first transmission shafts 1. When the number of first transmission shafts 1 is large, multiple sets of driving shafts 8 and motors 11 can be used for driving; the motor 11 drives the synchronous belt 12 to rotate, driving the driving shaft 8 to rotate, so that the second magnetic gear 9 rotates. Under the action of the magnetic field, the first magnetic gear 7 rotates, and the first magnetic gear 7 and the second magnetic gear 9 realize contactless power transmission (the specific one is the existing technology, which will not be repeated here), thereby realizing the transmission of the substrate; through the transmission of the magnetic wheel, less dust pollution and noise are generated.

[0036] To further optimize the solution, a second lifting cylinder is fixed to the base, and a second support plate 17 located below the first transmission shaft 1 is fixed to the piston rod of the second lifting cylinder. A plurality of support rods 13 are fixed to the second support plate 17, and the support rods 13 are located between two adjacent first transmission shafts 1. A positioning assembly is provided on the second support plate 17;

[0037] An aluminum plate 14 is fixed to the base, and the second lifting cylinder is fixed to the aluminum plate 14. Linear bearings 15 are installed at the four corners of the aluminum plate 14. A guide shaft 16 passes through the linear bearings 15 and is fixed to the lifting second support plate 17. The second support plate 17 is fixed to the piston shaft of the second lifting cylinder via a floating joint 18. A crossbeam 19 is fixed to the bottom of the guide shaft 16. A hydraulic buffer 21 and polyurethane limit bolts 20 are installed on the crossbeam 19 to reduce impact force and noise during lifting.

[0038] The top of the support rod 13 that contacts the base plate is made of PEEK, and the body is made of stainless steel. It is fixed to the second support plate 17 through a mounting seat 22 ; an aluminum plate 23 is fixed to the second support plate 17 , and a second positioning cylinder 24 is fixed to the aluminum plate 23 .

[0039] In a further optimized solution, the positioning assembly includes four second positioning cylinders 24 fixed to the second support plate 17. The piston rods of the second positioning cylinders 24 are fixed to second positioning plates. When the substrate is placed on the multiple first rollers 6 located at the starting end of the conveyor, the four second positioning plates are respectively located around the substrate, and the second positioning cylinders 24 drive the second positioning plates to move closer to or away from the substrate.

[0040] In this embodiment, a feed sensor, a deceleration sensor, and a stop sensor are fixed on the base, and a seat Changan device is fixed on the first support plate to monitor the position of the substrate and provide feedback to each actuator;

[0041] When the utility model is in use, the second lifting cylinder drives the support rods 13 on the second support plate 17 to rise, and the substrate is placed on the multiple support rods 13 and located between the four second leaning plates. The second leaning cylinder 24 drives the leaning rollers on the second leaning plates to approach the four sides of the substrate to position the substrate; the second leaning plates release the substrate, and then the second lifting cylinder drives the substrate to descend, so that the substrate is supported on the first roller 6, completing the substrate handover, and the support rods 13 descend below the first roller 6;

[0042] Start the motor 11 on the base, the first roller 6 rolls to transport the substrate, decelerates when it reaches the deceleration sensor position, and stops when it reaches the stop sensor position. The second roller 29 is driven up by the first lifting cylinder to lift the substrate, and the first positioning cylinder 25 drives the positioning roller on the first positioning substrate to position close to the side of the substrate, and then releases the substrate, starts the motor 11 on the first support plate, and makes the second roller 29 rotate to transport the substrate, thereby completing a 90° turn of the substrate, making it easier for the substrate to flow into the process equipment; by setting the positioning cylinder, the accuracy of each handover is ensured to be ±0.1mm.

[0043] In the description of the present invention, it should be understood that the terms "longitudinal", "transverse", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the accompanying drawings, and are only for the convenience of describing the present invention, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, they should not be understood as limitations on the present invention.

[0044] The embodiments described above are merely preferred embodiments of the present invention and are not intended to limit the scope of the present invention. Without departing from the spirit of the present invention, various modifications and improvements to the technical solutions of the present invention made by ordinary technicians in this field should fall within the scope of protection determined by the claims of the present invention.

Claims

1. A rapid substrate transfer mechanism for a board-level packaging process, characterized by: It comprises a base, on which a first roller transmission mechanism is provided; A lifting assembly is provided on the base, and the lifting assembly is located below the transmission end of the first roller transmission mechanism. A second roller transmission mechanism is provided at the output end of the lifting assembly, and the axis of the second roller (29) on the second roller transmission mechanism is perpendicular to the axis of the first roller (6) on the first roller transmission mechanism. The plurality of second rollers (29) on each column are located between the plurality of first rollers (6) on two adjacent columns. A first supporting plate is respectively provided on both sides of the multiple rows of the second rollers (29), and a spacing adjustment component is provided on the jacking component, and the spacing adjustment component is used to adjust the spacing between the two first supporting plates; the jacking component drives the top of the second roller (29) and the top of the first supporting plate to protrude or be lower than the top of the first roller (6).

2. The rapid substrate transfer mechanism for board-level packaging process according to claim 1, characterized in that: The first roller transmission mechanism comprises a plurality of first transmission shafts (1) arranged in parallel, the first transmission shafts (1) being rotatably connected to the base, a plurality of first rollers (6) being fixedly connected to the first transmission shafts (1), and a first driving assembly being provided on the base and being transmission-connected to the plurality of first transmission shafts (1).

3. The rapid substrate transfer mechanism for board-level packaging process according to claim 2, characterized in that: The lifting assembly includes a first lifting cylinder fixedly connected to the base, a first support plate fixedly connected to the piston rod of the first lifting cylinder, and the first support plate is located below the first transmission shaft (1); the spacing adjustment assembly includes two first positioning cylinders (25) fixedly connected to the first support plate, the piston rods of the two first positioning cylinders (25) are respectively fixedly connected to the two first positioning plates, and the second roller transmission mechanism is arranged on the first support plate.

4. The rapid substrate transfer mechanism for board-level packaging process according to claim 3, characterized in that: The second roller conveying mechanism includes a plurality of second conveying shafts (27) arranged side by side, the second conveying shafts (27) are rotatably connected to the first support plate, a plurality of second rollers (29) are fixedly connected to the second conveying shafts (27), and a second driving assembly is provided on the first support plate and is transmission-connected to the plurality of second conveying shafts (27).

5. The rapid substrate transfer mechanism for board-level packaging process according to claim 4, characterized in that: The first drive assembly and the second drive assembly respectively include a motor (11), the two motors (11) are respectively fixed to the base and the first support plate, a first pulley is fixed to the output shaft of the motor (11), a driving shaft (8) is rotatably connected to the base and the first support plate, a second pulley (10) is fixed to the driving shaft (8), the first pulley and the second pulley (10) are connected by a synchronous belt (12), and the two driving shafts (8) are respectively connected by a plurality of the first transmission shafts (1) and a plurality of the second transmission shafts (27).

6. The rapid substrate transfer mechanism for board-level packaging process according to claim 5, characterized in that: One end of the first transmission shaft (1) and the second transmission shaft (27) are respectively fixedly connected to a first magnetic gear (7), and a plurality of second magnetic gears (9) are fixedly connected to the driving shaft (8), and the plurality of first magnetic gears (7) and the plurality of second magnetic gears (9) are arranged in a one-to-one correspondence.

7. The rapid substrate transfer mechanism for board-level packaging process according to claim 2, characterized in that: A second lifting cylinder is also fixedly connected to the base, and a second support plate (17) located below the first transmission shaft (1) is fixedly connected to the piston rod of the second lifting cylinder. A plurality of support rods (13) are fixedly connected to the second support plate (17), and the support rods (13) are located between two adjacent first transmission shafts (1). A positioning component is provided on the second support plate (17).

8. The rapid substrate transfer mechanism for board-level packaging process according to claim 7, characterized in that: The positioning assembly includes four second positioning cylinders (24) fixedly connected to the second support plate (17), and a second positioning plate is fixedly connected to the piston rod of the second positioning cylinder (24). When the substrate is placed on the plurality of first rollers (6) located at the starting end of the transmission, the four second positioning plates are respectively located around the substrate, and the second positioning cylinder (24) drives the second positioning plates to approach or move away from the substrate.

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