Gripper capable of rapidly replacing and grabbing clamping plug
By designing a gripper that can quickly replace the jam, the combination of finger cylinders, slide rails and movable brackets can achieve quick replacement and clamping of jams, solving the problems of low cleaning efficiency and dirty caused by different jam sizes, and improving the cleaning effect.
Patent Information
- Application Number
- CN202422468049.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-10-12
- Publication Date
- 2025-09-05
- Estimated Expiration
- 2034-10-12
AI Technical Summary
During the cleaning process of existing gallium arsenide wafers, the different sizes of the jams lead to cumbersome replacement, which affects the cleaning efficiency, and the jam contamination leads to dirt on the edges of the wafers.
Design a gripper that can quickly replace the grab jam, using finger cylinders, slide rails, movable brackets and replaceable positioning frames to quickly replace and clamp the jam through the U-shaped slot to avoid disassembly of screws.
Improves the adaptation rate and cleaning efficiency of the jam, reduces replacement time, ensures the cleanliness of the jam, and prevents dirty edges of the wafer.
Smart Images
Figure CN223301706U_ABST
Abstract
Description
Technical Field
[0001] The utility model belongs to the field of gallium arsenide cleaning, and in particular relates to a gripper capable of quickly replacing a stuck plug. Background Art
[0002] In recent years, with the rapid development of the LED downstream application market, gallium arsenide has become one of the most mature second-generation semiconductor materials. The production model of gallium arsenide wafers has become increasingly tense, but customers have higher and higher demands on wafer quality, especially for cleaning dirty residues.
[0003] The plug is an indispensable production transmission tool in the gallium arsenide cleaning process. During the wafer cleaning process, residual particles, metal ions, chemical solutions, etc. are easily retained in the plug gap, causing the plug to be contaminated, and thus the edge of the wafer after cleaning will have edge dirt problems caused by particle accumulation.
[0004] The cleanliness of the stopper is essential for ensuring effective GaAs wafer cleaning, and ensuring cleanliness is a prerequisite for addressing GaAs wafer edge contamination. During manual cleaning, a robotic arm secures the stopper before performing the cleaning operation. Due to varying wafer diameters, stopper sizes also vary, requiring a matching set of stopper grippers. This is not only cumbersome to replace, but also requires repositioning the gripper after each replacement, impacting cleaning efficiency. Therefore, developing a gripper that can quickly replace a stopper has become a challenge for those skilled in the art. Utility Model Content
[0005] In view of this, the utility model provides a gripper that can be quickly replaced to grab the jam. The utility model uses the design of a replaceable positioning frame. When the jam is cleaned, the jam can be quickly clamped by quickly replacing different replaceable positioning frames without removing screws.
[0006] In order to achieve the above purpose, the utility model adopts the following technical solutions:
[0007] A gripper that can be quickly replaced to grab a stuck plug, comprising a finger cylinder, a slide rail, a movable bracket and a replaceable positioning bracket. The finger cylinder is arranged at the end of a robotic arm, the slide rail is installed at the bottom of the finger cylinder, the slide rail is provided with a long through hole for moving the finger cylinder clamp, the movable bracket is slidably installed in the slide rail, the movable bracket is fixedly connected to the clamp of the finger cylinder, a U-shaped slot is provided on the outer side of the movable bracket, and the replaceable bracket is inserted into the U-shaped slot.
[0008] Furthermore, the movable bracket includes a left movable bracket and a right movable bracket.
[0009] Furthermore, the movable bracket is L-shaped, the U-shaped slot is arranged at the front and rear ends of the side panel of the movable bracket, and the replaceable bracket is T-shaped, including a horizontal plate and a splint, and the horizontal plate is clamped in the U-shaped slot, and the positioning size of the bottom of the splint is consistent with the size of the plug positioning notch.
[0010] The beneficial effects of the utility model are as follows: the utility model provides a U-shaped slot on the outer side of the movable bracket, and different replaceable positioning frames can be replaced according to the size of the plug. When replacing, it is only necessary to insert the replaceable positioning frame from above the U-shaped slot without removing the screws, thereby improving the adaptability of the gripper to the plug, shortening the replacement time, and not affecting the cleaning of the plug. BRIEF DESCRIPTION OF THE DRAWINGS
[0011] Figure 1 This is a schematic diagram of the structure of the utility model.
[0012] In the picture:
[0013] 1. Finger cylinder; 2. Slide rail; 3. Left movable bracket; 4. Right movable bracket; 5. Replaceable positioning bracket; 6. U-shaped slot; 7. Block. DETAILED DESCRIPTION
[0014] The technical solutions in the embodiments of the present invention will be described clearly and completely below with reference to the accompanying drawings in the embodiments of the present invention.
[0015] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "horizontal", "inner", "outer", "one side", etc., indicating directions or positional relationships, are based on the directions or positional relationships shown in the accompanying drawings and are only for the convenience of describing the present invention and simplifying the description. They do not indicate or imply that the devices or components referred to must have a specific direction, be constructed and operate in a specific direction. Therefore, they should not be understood as limiting the present invention. The terms "first", "second", and "third" are used for descriptive purposes only and should not be understood as indicating or implying relative importance. In addition, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense. For example, they can be fixed connections, detachable connections, or integral connections; they can be mechanical connections or circuit connections; they can be direct connections, indirect connections through an intermediate medium, or internal connections between two components. For those skilled in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.
[0016] Example 1
[0017] like Figure 1As shown, this embodiment discloses a gripper that can be quickly replaced to grab a jammer, comprising a finger cylinder 1, a slide rail 2, a movable bracket, and a replaceable positioning bracket 5. The finger cylinder 1 is arranged at the end of the robotic arm, and the slide rail 2 is mounted at the bottom of the finger cylinder 1. The slide rail 2 is provided with a long through hole for the movement of the gripper of the finger cylinder 1. The movable bracket is slidably mounted in the slide rail 2. The movable bracket is fixedly connected to the gripper of the finger cylinder 1. By obtaining the finger cylinder 1, the movable bracket can be driven to move in the slide rail 2. Specifically, the movable bracket includes a left movable bracket 3 and a right movable bracket 4, both of which are L-shaped. U-shaped slots 6 are arranged at the front and rear ends of the side panels of the movable bracket. The replaceable bracket is T-shaped and comprises a cross plate and a clamping plate. The replaceable bracket is inserted into the U-shaped slot 6 from top to bottom through the cross plate. The positioning size of the bottom of the clamping plate is consistent with the size of the positioning notch of the jammer 7, and can clamp the jammer 7.
[0018] Although the above description of the specific implementation methods of the present invention is combined with the accompanying drawings, it does not limit the scope of protection of the present invention. Technical personnel in the relevant field should understand that on the basis of the technical solution of the present invention, various modifications or deformations that can be made by technical personnel in this field without creative work are still within the scope of protection of the present invention.
Claims
1. A gripper that can be quickly replaced to grab a stuck plug, characterized in that: It includes a finger cylinder, a slide rail, a movable bracket and a replaceable positioning bracket. The finger cylinder is arranged at the end of the robotic arm, the slide rail is installed at the bottom of the finger cylinder, the slide rail is provided with a long through hole for the movement of the finger cylinder clamp, the movable bracket is slidably installed in the slide rail, the movable bracket is fixedly connected to the clamp of the finger cylinder, a U-shaped slot is provided on the outside of the movable bracket, and the replaceable positioning bracket is inserted into the U-shaped slot.
2. A quickly replaceable gripper for grabbing a stuck plug according to claim 1, characterized in that: The movable bracket includes a left movable bracket and a right movable bracket.
3. The gripper capable of quickly replacing a stuck plug according to claim 1, characterized in that: The movable bracket is L-shaped, and the U-shaped slot is arranged at the front and rear ends of the side plate of the movable bracket. The replaceable positioning frame is T-shaped, including a horizontal plate and a clamping plate. The horizontal plate is clamped in the U-shaped slot, and the positioning size of the bottom of the clamping plate is consistent with the size of the plug positioning notch.