Evaporation equipment anti-corrosion cold shield for preparing perovskite material by full-dry method

Abstract

The utility model belongs to the technical field of photovoltaic power generation, and discloses an anti-corrosion cold shield of evaporation equipment for preparing perovskite materials by a full-dry method, the evaporation equipment comprises an evaporation source, and perovskite material molecules are evaporated by the evaporation source. The anti-corrosion cold shield comprises a vacuum cavity, a cold shield plate, a cold shield plate fixing column, a vapor chamber, a low-temperature pump, a refrigerant pipe, a vapor chamber fixing column and a cold trap. The cold shield plate comprises a plate main body, the edge of the cold plate main body is provided with a bending part, and the bending part is bent towards the low-temperature pump. The low-temperature pump is protected through the anti-corrosion cold shield plate, maintenance of the low-temperature pump is reduced, cost is saved, and efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of photovoltaic power generation, in particular to an anti-corrosion cold screen for preparing perovskite material evaporation equipment by a full dry method. Background Art

[0002] With the global push for carbon neutrality and the energy revolution underway, photovoltaic power generation, widely recognized as the only clean energy technology suitable for widespread deployment in the 21st century, has once again been thrust into the spotlight. Within the photovoltaic sector, the development of perovskite technology is accelerating. Due to its high conversion efficiency, low cost, and ease of preparation, perovskite is considered one of the most commercially promising next-generation photovoltaic technologies.

[0003] Perovskite cells, a type of solar cell that uses perovskite-type organic metal halide semiconductors as light-absorbing materials, belong to the third generation of solar cells and have the advantages of high light absorption capacity, low cost and easy preparation, good low-light effect, strong light transmittance and flexibility. Perovskite technology routes mainly include crystalline silicon / perovskite tandem cells, all-perovskite tandem cells, thin-film cells (such as copper indium gallium selenide) / perovskite tandem cells, etc. There are various technical routes for perovskite solar cells, and each route has its own unique advantages and challenges. The crystalline silicon / perovskite tandem cell technology route stacks a perovskite layer on top of a traditional crystalline silicon solar cell to form a "tandem" cell that can absorb a wider solar spectrum. The conversion efficiency of this technology has reached 33.2%, showing its great potential in improving photoelectric conversion efficiency.

[0004] Crystalline silicon / perovskite tandem cells are fabricated using a fully dry process. This process utilizes vacuum deposition, offering the advantages of better control over thickness and uniformity over large areas, while requiring less flatness. As a new thin-film solar technology, perovskite is still in the process of moving beyond the laboratory and into industrialization, and the equipment for mass production processes is still immature. The aforementioned vacuum evaporation process equipment is particularly immature.

[0005] In the fully dry process for fabricating perovskite solar cells, a common practice on evaporation equipment is to use a cryopump as the high-vacuum component of the pumping system. Through their unique low-temperature condensation and adsorption mechanisms, cryopumps play an indispensable role in vacuum systems, whether in environments requiring high-purity vacuum or for the control and analysis of specific gases.

[0006] Although an anti-fouling plate is installed inside the vacuum chamber for protection, some perovskite materials will still enter the cryopump, which may cause the cryopump's pumping capacity to decrease at the very least, or even be directly damaged at worst.

[0007] Because perovskite materials are corrosive, any perovskite adsorbed into the cryopump will corrode its components and even the pump body, reducing the cryopump's pumping capacity. This, in turn, affects the vacuum level of the entire vacuum coating system. This reduced vacuum level affects the uniformity of film formation and shortens device life. Furthermore, this issue leads to frequent maintenance and even replacement of the cryopump, increasing equipment maintenance costs and overall machine operating efficiency. The current approach is to install a filter at the pump port to reduce the amount of perovskite material entering the pump body and extend maintenance time. However, this affects the cryopump's pumping efficiency and does not fundamentally eliminate corrosion of the material on the cryopump, leaving the problem unresolved. Utility Model Content

[0008] The purpose of the utility model is to provide an anti-corrosion cold shield for a fully dry method of preparing a perovskite material evaporation device, so as to solve the problem that a cryopump is easily corroded by the perovskite material.

[0009] The purpose of the utility model can be achieved by the following technical solutions: an anti-corrosion cold screen for perovskite evaporation equipment, the evaporation equipment includes an evaporation source, the evaporation source evaporates perovskite material molecules, the anti-corrosion cold screen includes a vacuum cavity, a cold screen plate, a cold screen plate fixing column, a heat sink, a cryogenic pump, a refrigerant pipe, a heat sink fixing column and a cold trap;

[0010] The evaporation source is arranged in the vacuum chamber, the vacuum chamber is connected to the cryopump, the cryopump is used to provide a vacuum environment for the vacuum chamber, the cold shield plate is arranged at the connection between the cryopump and the vacuum chamber, the cold shield plate is mounted inside the vacuum chamber through the cold shield plate fixing column, the heat spreader is mounted inside the vacuum chamber through the heat spreader fixing column, the heat spreader is located on the side of the cold shield plate facing the cryopump, the refrigerant pipe is arranged on the heat spreader, and the refrigerant pipe is connected to the cold trap.

[0011] Preferably, the cold shield plate comprises a plate body, an edge of the cold plate body is provided with a bent portion, and the bent portion is bent toward the cryopump.

[0012] The working principle of the utility model is to deposit the perovskite material onto the cold shield cover plate through the cooperation of components such as the refrigerant tube, the heat spreader and the cold shield plate under the condition of continuous production, thereby preventing the perovskite material from entering the cryopump, thereby achieving the ultimate goal of protecting the cryopump from being corroded by the perovskite material.

[0013] The beneficial effects of the utility model are:

[0014] 1. The utility model can prevent the perovskite material from corroding the cryogenic pump;

[0015] Second, the utility model can reduce maintenance costs and improve efficiency;

[0016] 3. The preparation cost of the utility model is low. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram of the present utility model.

[0018] In the figure, 1. vacuum chamber; 2. cold shield plate; 3. cold shield plate fixing column; 4. heat spreader; 5. cryopump; 6. refrigerant pipe; 7. heat spreader fixing column; 8. cold trap; 9. evaporation source; 10. perovskite material. DETAILED DESCRIPTION

[0019] The following are specific embodiments of the present invention and the accompanying drawings to further describe the technical solution of the present invention, but the present invention is not limited to these embodiments.

[0020] like Figure 1 As shown, the utility model is a fully dry method for preparing an anti-corrosion cold shield for a perovskite material evaporation device. The evaporation device includes an evaporation source 9. The perovskite material 10 molecules evaporated from the evaporation source 9 splash onto the substrate material. The anti-corrosion cold shield includes a vacuum chamber 1, a cold shield plate 2, a cold shield plate fixing column 3, a heat sink 4, a cryopump 5, a refrigerant pipe 6, a heat sink fixing column 7 and a cold trap 8.

[0021] The evaporation source is arranged in the vacuum chamber 1, and the vacuum chamber 1 is connected to the cryopump 5. The cryopump 5 is used to provide a vacuum environment for the vacuum chamber 1. The cold shield plate 2 is arranged at the connection between the cryopump 5 and the vacuum chamber 1. The cold shield plate 2 is mounted inside the vacuum chamber 1 through the cold shield plate fixing column 3. The heat spreader 4 is mounted inside the vacuum chamber 1 through the heat spreader fixing column 7. The heat spreader 4 is located on the side of the cold shield plate 2 facing the cryopump 5. The refrigerant pipe 6 is arranged on the heat spreader 4, and the refrigerant pipe 6 is connected to the cold trap 8.

[0022] The cold shield plate comprises a plate body, an edge of the cold plate body is provided with a bent portion, and the bent portion is bent toward the cryopump.

[0023] The working principle of the utility model is to deposit the perovskite material onto the cold shield cover plate through the cooperation of components such as the refrigerant tube, the heat spreader and the cold shield plate under the condition of continuous production, thereby preventing the perovskite material from entering the cryopump, thereby achieving the ultimate goal of protecting the cryopump from being corroded by the perovskite material.

[0024] In the present invention, the temperature of the cold trap of the vacuum chamber should be reduced to -20 to -25°C from the start of pre-evacuation to the point where the evaporation vacuum is reached; during continuous evaporation, the temperature should be maintained at -20 to -25°C for normal operation. The cold trap transports the refrigerant to the top of the cryopump through a refrigerant pipe, and the cold energy is evenly distributed on the heat spreader through the heat spreader. The cold energy on the heat spreader is transferred to the cold shield plate by radiation, and its temperature is reduced, forming a low-temperature environment around it. When the perovskite material is evaporated, the perovskite material evaporated from the evaporation source will be captured by the cold shield plate when passing through the cold shield plate above the cryopump, and will be deposited on the surface of the cold shield plate and will not enter the cryopump, thus protecting the cryopump from corrosion.

[0025] The innovation of this utility model lies primarily in its use of a cold shield structure, which prevents the perovskite material from being deposited and corroding the cryopump without affecting its pumping efficiency. This design addresses the issue of material corrosion on the cryopump in existing all-dry perovskite evaporation equipment.

[0026] The cryogenic pump is protected by the anti-corrosion cold shield plate, which reduces the maintenance of the cryogenic pump, saves costs and improves efficiency.

[0027] The advantages of the anti-corrosion cold shield design for all-dry perovskite evaporation equipment include: preventing perovskite material from entering and corroding the cryopump, thereby protecting the cryopump. This reduces maintenance costs, improves equipment operating efficiency, and ensures coating uniformity.

Claims

1. A fully dry method for preparing a corrosion-resistant cold shield for a perovskite material evaporation device, wherein the evaporation device includes an evaporation source, which evaporates perovskite material molecules, characterized in that: The anti-corrosion cold shield includes a vacuum chamber, a cold shield plate, a cold shield plate fixing column, a heat sink, a cryogenic pump, a refrigerant pipe, a heat sink fixing column and a cold trap; The evaporation source is arranged in the vacuum chamber, the vacuum chamber is connected to the cryopump, the cryopump is used to provide a vacuum environment for the vacuum chamber, the cold shield plate is arranged at the connection between the cryopump and the vacuum chamber, the cold shield plate is mounted inside the vacuum chamber through the cold shield plate fixing column, the heat spreader is mounted inside the vacuum chamber through the heat spreader fixing column, the heat spreader is located on the side of the cold shield plate facing the cryopump, the refrigerant pipe is arranged on the heat spreader, and the refrigerant pipe is connected to the cold trap.

2. The anti-corrosion cold shield for the all-dry process for preparing perovskite material evaporation equipment according to claim 1, characterized in that: The cold shield plate comprises a plate body, an edge of which is provided with a bent portion, and the bent portion is bent toward the cryopump.

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