Frequency crack trimming device suitable for hemispherical harmonic oscillator

Abstract

The frequency crack trimming device comprises a quartz cone cylinder, a clamping mechanism, a grating net and a diaphragm sheet, the clamping mechanism is arranged on one side of the small-diameter end of the quartz cone cylinder and used for installing the hemispherical harmonic oscillator to be trimmed, the two ends of the quartz cone cylinder are open, the grating net is fixed to the large-diameter end of the quartz cone cylinder, and the diaphragm sheet is arranged on the grating net. The quartz cone cylinder is used for dispersing ion beams entering the quartz cone cylinder, so that ions bombard the inner wall of the quartz cone cylinder until quartz particles are stripped, the diaphragm sheet is detachably installed at the small-diameter end of the quartz cone cylinder, a diaphragm hole is formed in the diaphragm sheet, and the stripped quartz particles can pass through the diaphragm sheet to be deposited at the position, right opposite to the diaphragm hole, of the hemispherical harmonic oscillator. According to the utility model, the frequency crack trimming of the hemispherical harmonic oscillator is realized in a mass adding manner, and the device has the advantages of simple and convenient operation and capability of rapidly realizing the quality trimming of the hemispherical harmonic oscillator.

Description

Technical Field

[0001] The utility model relates to the technical field of hemispherical resonator gyroscope preparation, in particular to a frequency crack adjustment device suitable for a hemispherical resonator. Background Art

[0002] The hemispherical resonator gyroscope (HRG) is a high-precision inertial sensor. Compared to existing laser gyros and fiber-optic gyros, it has fewer components, longer continuous operation time, better stability, and superior radiation resistance, making it one of the most promising devices for next-generation inertial navigation equipment. However, due to errors in the actual manufacturing process, the uneven circumferential mass distribution of the HRG causes the resonator to form two inherent rigid axes, resulting in a divergence in the vibration frequencies between the two inherent axes. This difference in vibration frequencies is called frequency splitting, and the presence of frequency splitting is a key factor affecting the accuracy of HRGs.

[0003] To reduce the frequency splitting of hemispherical resonators and thus improve gyroscope accuracy, relevant mass and frequency splitting adjustment methods are gradually being applied to the processed resonators. The main methods for hemispherical resonator adjustment include chemical leveling, laser leveling, and ion beam leveling. Laser leveling has higher accuracy, but the thermal effects generated during the laser ablation process can damage the resonator surface. Chemical leveling has high efficiency, but the reaction rate differences under different surface conditions and the strict control methods required limit the accuracy of frequency splitting adjustment. Therefore, the industry currently generally uses ion beam etching to remove mass to perform frequency splitting adjustment. Currently, there are no reports on hemispherical resonator frequency splitting adjustment by adding high-frequency axis mass. Utility Model Content

[0004] In response to the problems in the background technology, the present invention proposes a frequency split adjustment device suitable for a hemispherical resonator, which realizes the frequency split adjustment of the hemispherical resonator by adding mass.

[0005] The utility model adopts the following technical solutions:

[0006] A frequency cracking adjustment device suitable for a hemispherical resonator comprises a quartz cone, a clamping mechanism, a grating mesh and an aperture piece. The clamping mechanism is arranged on one side of the small-diameter end of the quartz cone and is used to mount the hemispherical resonator to be adjusted. Both ends of the quartz cone are open. The grating mesh is fixed to the large-diameter end of the quartz cone and is used to disperse the ion beam entering the quartz cone so that the ions bombard the inner wall of the quartz cone until the quartz particles are peeled off. The aperture piece is detachably mounted on the small-diameter end of the quartz cone and is provided with an aperture hole for allowing the peeled quartz particles to pass through and be deposited on the position of the hemispherical resonator opposite the aperture hole.

[0007] As a further improvement of the above technical solution:

[0008] The center portion of the grating mesh is recessed toward the inside of the quartz cone, so that the grating mesh forms a curved surface structure.

[0009] The aperture piece is rotatably mounted on the quartz cone, and a plurality of aperture holes are provided on the aperture piece. The plurality of aperture holes are distributed at intervals around the rotation center of the aperture piece. The center of the end face of the small diameter end of the quartz cone is on the circle formed by the center line of each aperture hole.

[0010] External teeth are provided on the circumferential wall of the aperture piece, and the external teeth are engaged with a transmission gear. The transmission gear is connected to a motor for driving the transmission gear to rotate, thereby driving the aperture piece to rotate.

[0011] The utility model also comprises a base, on which the quartz cone, the clamping mechanism and the motor are detachably mounted.

[0012] The clamping mechanism includes a support platform and a chuck. The support platform is installed on the base, and a groove is provided on its top surface. The lower part of the chuck is stuck in the groove. The top surface of the chuck is provided with a mounting hole that cooperates with the anchor column in the hemispherical resonator.

[0013] The device also includes an ion source, which is arranged on one side of the large-diameter end of the quartz cone and is used for emitting an ion beam into the quartz cone.

[0014] Compared with the prior art, the advantages of the present invention are:

[0015] Based on the principle of sputtering coating, this utility model designs a frequency splitting adjustment device comprising a quartz cone, a clamping mechanism, a grating, and an aperture. The grating disperses the ion beam, allowing it to bombard the inner surface of the sputtering quartz cone over a large area, until quartz particles are peeled off. The target atoms then pass through an aperture of a specific size and are deposited on the high-frequency axis of the hemispherical resonator, thereby achieving mass adjustment of the hemispherical resonator. This utility model has the advantages of simple and convenient operation, easy assembly and disassembly, and can quickly achieve mass adjustment of the hemispherical resonator. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to make the present invention more easily understood, the present invention will be described in more detail with reference to the specific embodiments shown in the accompanying drawings. These drawings only depict typical embodiments of the present invention and should not be considered as limiting the scope of protection of the present invention.

[0017] Figure 1 This is a schematic diagram of the three-dimensional structure of a frequency crack adjustment device for a hemispherical resonator according to an embodiment of the present utility model.

[0018] Figure 2 This is a schematic diagram of the three-dimensional structure of the frequency split adjustment device for a hemispherical resonator from another perspective according to an embodiment of the utility model.

[0019] Figure 3This is a schematic cross-sectional structural diagram of a frequency crack adjustment device for a hemispherical resonator according to an embodiment of the present utility model.

[0020] Figure 4 This is a schematic diagram of the three-dimensional structure of a frequency split adjustment device for a hemispherical resonator according to an embodiment of the utility model (the clamping mechanism is not shown).

[0021] Figure 5 This is a schematic diagram of the working state of the frequency split adjustment device for a hemispherical resonator according to an embodiment of the utility model.

[0022] Reference numerals:

[0023] 1. Grating; 2. Quartz cone; 21. End face center; 3. Base; 4. Hemispherical resonator; 5. Chuck; 51. Mounting hole; 6. Support platform; 61. Groove; 7. Aperture plate; 71. Aperture hole; 72. Rotation center; 73. External gear; 8. Transmission gear; 9. Motor; 10. Ion source. DETAILED DESCRIPTION

[0024] The following describes the implementation methods of the present invention with reference to the accompanying drawings so that those skilled in the art can better understand the present invention and implement it. However, the enumerated embodiments are not intended to limit the present invention. Unless there is a conflict, the following embodiments and the technical features in the embodiments can be combined with each other, and the same components are represented by the same figure marks.

[0025] like Figure 1-Figure 5 As shown, the frequency cracking adjustment device for a hemispherical resonator of this embodiment includes a base 3, a quartz cone 2, a clamping mechanism, a grating mesh 1, an aperture plate 7 and an ion source 10. The quartz cone 2 and the clamping mechanism are fixed to the base 3, and the clamping mechanism is provided on one side of the small diameter end of the quartz cone 2 for mounting the hemispherical resonator 4 to be adjusted. The quartz cone 2 has openings at both ends, and the ion source 10 is provided on one side of the large diameter end of the quartz cone 2 for emitting an ion beam into the quartz cone 2. The grating mesh 1 is fixed on the large diameter end of the quartz cone 2, and the central part of the grating mesh 1 is recessed toward the inside of the quartz cone 2, so that the grating mesh 1 forms a curved surface structure, which is used to disperse the ion beam entering the quartz cone 2, so that the ions bombard the inner wall of the quartz cone 2 until the quartz particles are peeled off. The aperture piece 7 is detachably mounted on the small diameter end of the quartz cone 2, and an aperture hole 71 is opened on it for the peeled quartz particles to pass through and be deposited on the position of the hemispherical resonator 4 facing the aperture hole 71.

[0026] like Figure 5As shown, by placing the device in a specific position so that the large diameter side of the quartz cone 2 is aligned with the direction of ion beam incidence, after the ion beam irradiates the inner wall of the quartz cone 2, the inner surface of the quartz is bombarded and stripped into atomic or molecular clusters such as Si and SiO2. These atoms or molecules are then guided by the Ar ion beam and pass through the aperture 71. Under the constraint of the aperture 71, they are deposited on the outer sphere of the hemispherical resonator 4 in a certain size, thereby adding mass to the high-frequency axis of the oscillator and achieving the purpose of frequency adjustment. To increase the sputtering and deposition rate, a grid that is concave inward toward the small diameter is designed on the large diameter side of the cone. After passing through this concave grid, the parallel Ar ion beam will produce an outward expansion effect, increasing the ion beam flow bombarding the inner wall of the cone, thereby improving the efficiency of quartz particle stripping and deposition. At the same time, the device is relatively convenient and easy to assemble and disassemble. It is applicable to equipment with an ion source and can improve the flexibility of equipment use.

[0027] The concave grating mesh 1 is matched and fixed to the quartz cone 2 through its skirt, and the outer cone surface of the quartz cone 2 is matched with the base 3 and fastened to the base by screws.

[0028] In this embodiment, the aperture plate 7 is rotatably mounted on the quartz cone 2. A plurality of aperture holes 71 are provided on the aperture plate 7. The plurality of aperture holes 71 are distributed at intervals around the rotation center 72 of the aperture plate 7. The end face center 21 of the small diameter end of the quartz cone 2 is on the circle formed by the center line connecting the aperture holes 71.

[0029] In this embodiment, external teeth 73 are provided on the circumferential wall of the aperture plate 7, and the external teeth 73 are engaged with a transmission gear 8. The transmission gear 8 is connected to a motor 9 for transmission. The motor 9 is detachably mounted on the base 3, and the motor 9 is used to drive the transmission gear 8 to rotate, thereby driving the aperture plate 7 to rotate.

[0030] In order to adapt to the adjustment of different deposition sizes on the hemisphere, the above-mentioned eccentric rotating aperture piece is designed. One aperture piece has multiple apertures of different sizes. Combined with the stepper motor drive and control, real-time adjustment of the deposition area and size on the hemisphere can be achieved, avoiding the need to repeatedly close and open the vacuum when manually switching the aperture piece, thereby improving efficiency.

[0031] Among them, the aperture piece is respectively provided with holes with diameters of 2.0 to 4.0 mm. The centers of the multiple holes are evenly distributed on the concentric circles of the center of the tapered tube on the aperture piece. Therefore, by rotating the circular aperture piece to a specific position, aperture holes of different sizes can be brought to a working position concentric with the tapered tube. At the same time, a gear is machined on the outer diameter of the aperture hole and cooperates with the rotating shaft of the motor 9 fixed to the base through the transmission gear 8. By rotating the motor 9, aperture holes 71 of different sizes on the eccentric aperture piece can be switched to the working position, thereby achieving the purpose of real-time regulation of the aperture hole position to obtain deposition layers of different sizes. Its detailed structural state is shown in FIG. Figure 4 shown.

[0032] In this embodiment, the clamping mechanism includes a support platform 6 and a chuck 5. The support platform 6 is installed on the base 3, and a groove 61 is provided on its top surface. The lower part of the chuck 5 is inserted into the groove 61, and the top surface of the chuck 5 is provided with a mounting hole 51 that cooperates with the anchor column in the hemispherical resonator.

[0033] The embodiments described above are merely preferred embodiments of the present invention. The phrases "in one embodiment," "in another embodiment," "in yet another embodiment," or "in other embodiments" used in this specification may refer to one or more of the same or different embodiments of the present disclosure. Any common changes and substitutions made by those skilled in the art within the scope of the present invention are intended to be encompassed within the scope of protection of the present invention.

Claims

1. A frequency cracking adjustment device for a hemispherical resonator, characterized in that: The invention comprises a quartz cone (2), a clamping mechanism, a grating mesh (1) and an aperture piece (7). The clamping mechanism is arranged on one side of the small-diameter end of the quartz cone (2) and is used to install a hemispherical resonator (4) to be adjusted. The quartz cone (2) has openings at both ends. The grating mesh (1) is fixed to the large-diameter end of the quartz cone (2) and is used to disperse the ion beam entering the quartz cone (2) so that the ions bombard the inner wall of the quartz cone (2) until the quartz particles are peeled off. The aperture piece (7) is detachably mounted on the small-diameter end of the quartz cone (2) and is provided with an aperture hole (71) for allowing the peeled quartz particles to pass through and deposit on a position of the hemispherical resonator (4) facing the aperture hole (71).

2. The frequency cracking adjustment device for a hemispherical resonator according to claim 1, characterized in that: The central portion of the grating mesh (1) is recessed toward the inside of the quartz cone (2), so that the grating mesh (1) forms a curved surface structure.

3. The frequency cracking adjustment device for a hemispherical resonator according to claim 1, characterized in that: The aperture piece (7) is rotatably mounted on the quartz cone (2). The aperture piece (7) is provided with a plurality of aperture holes (71). The plurality of aperture holes (71) are circumferentially spaced around a rotation center (72) of the aperture piece (7). The center (21) of the end face of the small diameter end of the quartz cone (2) is on a circle formed by a line connecting the centers of the aperture holes (71).

4. The frequency split adjustment device for a hemispherical resonator according to claim 3, characterized in that: An external tooth (73) is provided on the circumferential wall of the aperture plate (7), and the external tooth (73) is engaged with a transmission gear (8). The transmission gear (8) is connected to a motor (9) for driving the transmission gear (8) to rotate, thereby driving the aperture plate (7) to rotate.

5. The frequency split adjustment device for a hemispherical resonator according to claim 4, characterized in that: It also includes a base (3), on which the quartz cone (2), the clamping mechanism and the motor (9) are detachably mounted.

6. The frequency split adjustment device for a hemispherical resonator according to any one of claims 1 to 5, characterized in that: The clamping mechanism comprises a support platform (6) and a clamping head (5). The support platform (6) is mounted on a base (3), a top surface of which is provided with a groove (61), a lower portion of the clamping head (5) is clamped into the groove (61), and a top surface of the clamping head (5) is provided with a mounting hole (51) that cooperates with an anchor column in a hemispherical resonator.

7. The frequency crack adjustment device for a hemispherical resonator according to any one of claims 1 to 5, characterized in that: It also includes an ion source (10), which is arranged on one side of the large-diameter end of the quartz cone (2) and is used for emitting an ion beam into the quartz cone (2).

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