Boat piece and boat

By designing multiple columns and rows of load-bearing areas on the boat and setting up airflow blocking and guide structures, the problem of traditional boat wafer floating is solved, and the stability of the coating process and the improvement of silicon wafer quality are achieved.

CN223308960UActive Publication Date: 2025-09-05LAPLACE RENEWABLE ENERGY TECH CO LTD
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Patent Information

Application Number
CN202422651924.X
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-10-30
Publication Date
2025-09-05
Estimated Expiration
2034-10-30

AI Technical Summary

Technical Problem

When traditional wafer boats are not equipped with card points or card slots, wafer floating is prone to occur, affecting the coating uniformity and the performance of the silicon wafer.

Method used

Multiple bearing areas are designed to be arranged into multiple columns along the first horizontal direction and into multiple rows in the second horizontal direction, and a first strip protrusion is set between the bearing areas of adjacent rows to block the airflow. The airflow is guided by the first guide structure, and the second strip protrusion extends between adjacent columns to further stabilize the airflow.

Benefits of technology

It effectively reduces the floating phenomenon, ensures the stability of the coating process and the quality of the silicon wafer, simplifies the processing technology and reduces costs.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model relates to a boat piece and a boat, in particular to the technical field of semiconductor and solar cell piece production equipment, and solves the problem that a traditional boat piece is prone to floating when not provided with clamping points or clamping grooves. The boat piece provided by the embodiment of the utility model comprises a boat piece body, the boat piece body extends along a first horizontal direction, the upper surface of the boat piece body is provided with a plurality of bearing areas, the plurality of bearing areas are arranged into a plurality of columns along the first horizontal direction and are arranged into a plurality of rows along a second horizontal direction, and the second horizontal direction is crossed with the first horizontal direction; the first strip-shaped protrusions are arranged between the bearing areas of the adjacent rows and are configured to block part of airflow among the multiple rows of bearing areas. According to the boat piece provided by the embodiment of the invention, the first strip-shaped bulges are arranged between the adjacent rows of bearing areas and are used for blocking part of airflow among the multiple rows of bearing areas, so that the impact of the airflow on the bearing areas is reduced, and the aim of reducing floating pieces is fulfilled.
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Description

Technical Field

[0001] The present application relates to the technical field of semiconductor and solar cell production equipment, and in particular to a wafer boat and a boat. Background Art

[0002] Coating equipment often requires coordination in semiconductor and solar cell manufacturing. During the coating process, silicon wafers are typically placed between the boats and wafers of a graphite boat and secured with clips or slots. The graphite boat is then placed in the coating equipment, where deposition completes the coating process.

[0003] However, with technological advancements, thinner silicon wafers are becoming more susceptible to uneven coating, or white or blue edges from the markings of the markings or slots, which can take up usable area. Without the use of markings or slots, wafer fixation is less effective, especially during vacuuming, which can easily cause wafer drift. This can lead to uneven coating or burn marks, impacting wafer performance.

[0004] Therefore, there is an urgent need for a boat piece to solve the problem that the traditional boat piece is prone to floating when no card points or card slots are set. Utility Model Content

[0005] In view of this, the embodiments of the present application provide a boat piece and a boat, which solve the problem that the traditional boat piece is prone to floating when no card points or card slots are set.

[0006] In the first aspect, an embodiment of the present application provides a boat piece, including a boat piece body extending along a first horizontal direction, the upper surface of the boat piece body having a plurality of bearing areas, the plurality of bearing areas being arranged into a plurality of columns along the first horizontal direction and arranged into a plurality of rows along a second horizontal direction, the second horizontal direction intersecting the first horizontal direction; a first strip-shaped protrusion being arranged between the bearing areas of adjacent rows, and being configured to block part of the airflow between the plurality of rows of bearing areas.

[0007] In one embodiment, the first strip-shaped protrusion includes a first flow-guiding structure, which penetrates the first strip-shaped protrusion in the second horizontal direction and is configured to guide airflow through the first strip-shaped protrusion.

[0008] In one embodiment, the first flow guiding structure includes a through hole or a groove.

[0009] In one embodiment, the first strip-shaped protrusion includes: a plurality of first sub-strip-shaped protrusions arranged at intervals along the first horizontal direction, and the first guide structure is arranged between adjacent first sub-strip protrusions; the orthographic projection of the first sub-strip protrusion on the plane perpendicular to the second horizontal direction covers the orthographic projection of the bearing area on the plane perpendicular to the second horizontal direction.

[0010] In one embodiment, the first sub-strip-shaped protrusion also has a first flow-guiding structure.

[0011] In one embodiment, the boat further includes: at least one second strip-shaped protrusion, disposed between adjacent rows of bearing areas, the second strip-shaped protrusion extending along a second horizontal direction.

[0012] In one embodiment, the second strip-shaped protrusion includes a second flow-guiding structure, and the second flow-guiding structure is configured to guide airflow through the second strip-shaped protrusion.

[0013] In one embodiment, the number of the second strip-shaped protrusion is one, and the plurality of bearing areas are symmetrical with respect to the second strip-shaped protrusion.

[0014] In a second aspect, an embodiment of the present application provides a boat, comprising: the boat pieces mentioned in the first aspect above, wherein a plurality of boat pieces are arranged at intervals along the vertical direction; and a connecting member connecting the plurality of boat pieces.

[0015] In combination with the second aspect, in one embodiment, the connecting member includes a groove; and the first strip-shaped protrusion of the boat piece is engaged with the groove.

[0016] The inventors discovered that conventional horizontal boats without latching points or slots are prone to flake drift because, when the airflow generated by the deposition equipment during vacuuming passes through the sheet material's support area, it tends to flow between the multiple rows of support areas and toward the sides, causing severe flake drift. Therefore, the present invention provides a boat with multiple support areas arranged in multiple columns along a first horizontal direction and multiple rows along a second horizontal direction. By providing first strip-shaped protrusions between adjacent rows of support areas, this partially blocks the airflow between the multiple rows of support areas, reducing the impact of the airflow on the support areas and thus achieving the goal of reducing flake drift. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The above and other purposes, features, and advantages of the present application will become more apparent through a more detailed description of the embodiments of the present application in conjunction with the accompanying drawings. The accompanying drawings are used to provide a further understanding of the embodiments of the present application and constitute a part of the specification. Together with the embodiments of the present application, they are used to explain the present application and do not constitute a limitation of the present application.

[0018] Figure 1 Shown is a top view of a boat provided in one embodiment of the present application.

[0019] Figure 2 Shown is a side view of a first strip-shaped protrusion provided in one embodiment of the present application.

[0020] Figure 3 Shown is a side view of another first strip-shaped protrusion provided in another embodiment of the present application.

[0021] Figure 4Shown is a top view of another boat provided in another embodiment of the present application.

[0022] Figure 5 Shown is a side view of a first sub-strip-shaped protrusion provided in one embodiment of the present application.

[0023] Figure 6 FIG. 1 is a top view of another boat according to another embodiment of the present application.

[0024] Figure 7 FIG. 1 is a top view of another boat according to another embodiment of the present application.

[0025] Figure 8 Shown is a side view of a second strip-shaped protrusion provided in one embodiment of the present application.

[0026] Figure 9 Shown is a schematic structural diagram of a boat provided in another embodiment of the present application.

[0027] Figure 10 Shown is a schematic structural diagram of a boat provided in one embodiment of the present application.

[0028] Reference numerals:

[0029] 100. Boat piece; 110. Boat piece body; 120. Load-bearing area; 130. First strip-shaped protrusion; 131. First flow-guiding structure; 1311. Through hole; 1312. Groove; 132. First sub-strip-shaped protrusion; 140. Second strip-shaped protrusion; 141. Second flow-guiding structure; 200. Boat; 210. Connector. DETAILED DESCRIPTION

[0030] The following will be combined with the accompanying drawings in the embodiments of this application to clearly and completely describe the technical solutions in the embodiments of this application. Obviously, the embodiments described are only part of the embodiments of this application, not all of them. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without making any creative efforts are within the scope of protection of this application.

[0031] Figure 1 The figure shows a schematic diagram of the structure of the boat provided by one embodiment of the present application. Figure 1 As shown, the surface of the boat body 110 provided in the embodiment of the present application has a plurality of bearing areas 120 and a first strip-shaped protrusion 130. Figure 1 As shown, the boat body 110 is arranged along a first horizontal direction (eg Figure 1 The upper surface of the boat body 110 has a plurality of bearing areas 120, and the plurality of bearing areas 120 are arranged in a plurality of rows along the first horizontal direction and arranged in a plurality of rows along the second horizontal direction (as shown in FIG. Figure 1The first strip-shaped protrusions 130 are arranged between the supporting areas 120 of adjacent rows and are configured to block part of the airflow between the supporting areas 120 of the multiple rows.

[0032] For example, the support area 120 on the surface of the boat body 110 is used to place sheet materials. In this embodiment, the sheet materials can be silicon wafers. In actual applications, to improve the effect of preventing wafer drift, a shallow groove for placing the silicon wafer can be provided in the support area on the surface of the boat body 110. The depth of the shallow groove is less than the thickness of the silicon wafer. It should be understood that the support area 120 can refer to the area for placing sheet materials, and there is no corresponding shallow groove on the surface. This embodiment of the application does not further limit the specific structure of the support area.

[0033] For example, the wafer boat body 110 has multiple supporting areas on its upper surface. The supporting areas are arranged in multiple columns along a first horizontal direction, with the spacing between the supporting areas set based on process requirements. In the embodiment of the present application, the supporting areas are arranged in three columns along the first horizontal direction and in three rows along the second horizontal direction, allowing more silicon wafers to be processed at a time and improving production efficiency. The number of rows and columns of the supporting areas along the first horizontal direction and the second horizontal direction can be selected based on the processing requirements of the silicon wafers and the size of the processing furnace.

[0034] In one embodiment of the present application, the boat sheet, through the first protrusions disposed between adjacent rows of load-bearing areas, can partially block the airflow between the multiple rows of load-bearing areas. Because the first protrusions block the airflow between the multiple rows of load-bearing areas, the airflow in the load-bearing areas is stable, thereby reducing the occurrence of flakes of sheet material in the load-bearing areas.

[0035] Figure 2 FIG. 1 is a side view of a first strip-shaped protrusion provided in one embodiment of the present application. Figure 2 As shown, the first strip-shaped protrusion 130 includes a first air guiding structure 131 . The first air guiding structure 131 penetrates the first strip-shaped protrusion 130 in the second horizontal direction and is configured to guide airflow through the first strip-shaped protrusion 130 .

[0036] In the embodiment of the present application, the first strip protrusion 130 is provided with a first guide structure 131 that passes through the first strip protrusion 130 in the first horizontal direction. This allows the airflow to pass through the first strip protrusion 130 and flow smoothly to the supporting area of ​​the sheet material when the deposition equipment is evacuated. This further ensures the stability of the airflow and the stability of the boat-sheet structure while avoiding flake drift. In addition, during the processing process, the processing gas can pass through the first guide structure 131 and through the sheet material, further ensuring the stability of the deposition process. It should be understood that in actual application, there is a certain gap between the multiple boat-sheet bodies without the first guide structure, which can enable the passage of the processing gas and realize the processing technology of the sheet material.

[0037] Figure 3 Shown is a side view of another first strip-shaped protrusion provided by another embodiment of the present application. Figure 2 Based on the embodiment shown Figure 3 The embodiment shown is described below in detail. Figure 3 The embodiment shown is Figure 2 The differences and similarities between the illustrated embodiments are not described in detail.

[0038] The first flow guiding structure 131 includes a through hole 1311 (such as Figure 2 as shown) or groove 1312 (as shown) Figure 3 In some embodiments, the groove 1312 passes through the first strip-shaped protrusion 130 in the vertical direction, and the first strip-shaped protrusion 130 is formed with a plurality of strip-shaped protrusions spaced apart, as shown in FIG. Figure 4 The embodiments shown are not described here in detail. Figure 2 The through hole 1311 is square in shape, and Figure 3 The shape of the groove 1312 shown is also square. In actual application, the shapes of the through hole 1311 and the groove 1312 can be selected according to needs. The embodiment of the present application does not further limit the shapes of the through hole 1311 and the groove 1312.

[0039] In some embodiments, when the first flow-guiding structure 131 is a groove structure vertically extending through the first strip-shaped protrusion 130, insulating members, such as ceramic sleeves, may be provided between the multiple spaces formed by the first strip-shaped protrusion 130 as required. The provision of insulating members not only prevents arcing or short circuits during the electrochemical deposition process but also limits the distance between adjacent boats when multiple boats are stacked vertically. In the embodiment of the present application, the insulating member is a ceramic sleeve; different insulating materials may be selected as needed, provided they provide sufficient insulation.

[0040] The flow-guiding structure of the first strip-shaped protrusion 130 provided in the embodiment of the present application includes a through hole 1311 or a groove 1312. The design of the through hole or the groove reduces the difficulty of the process and reduces the manufacturing cost of the boat.

[0041] Figure 4 The figure shows a top view of another boat provided by another embodiment of the present application. Figure 1 Based on the embodiment shown Figure 4 The embodiment shown is described below in detail. Figure 4 The embodiment shown is Figure 1 The differences and similarities between the illustrated embodiments are not described in detail.

[0042] like Figure 4 As shown, the first strip-shaped protrusion 130 includes: a plurality of first sub-strip-shaped protrusions 132 spaced apart along the first horizontal direction, and a first guide structure 131 is arranged between adjacent first sub-strip-shaped protrusions 132; the orthographic projection of the first sub-strip-shaped protrusion 132 on a plane perpendicular to the second horizontal direction covers the orthographic projection of the supporting area 120 on a plane perpendicular to the second horizontal direction.

[0043] Illustratively, the first air guide structure 131 is a groove structure that vertically penetrates the first strip-shaped protrusion, thereby forming a plurality of first sub-strip-shaped protrusions 132. The orthographic projections of the first sub-strip-shaped protrusions 132 on a plane perpendicular to the second horizontal direction overlap the orthographic projections of the support area 120 on a plane perpendicular to the second horizontal direction. Therefore, the length of the first sub-strip-shaped protrusions 132 is greater than the length of the support area 120, thereby ensuring that the airflow in the support area 120 is partially blocked, thereby preventing the sheet material carried by the support area 120 from fluttering.

[0044] The first strip protrusion 130 provided in the embodiment of the present application has multiple first sub-strip protrusions 132 arranged at intervals along the first horizontal direction, and the orthographic projection of the first sub-strip protrusion 132 on the plane perpendicular to the second horizontal direction covers the orthographic projection of the supporting area 120 on the plane perpendicular to the second horizontal direction, thereby blocking the airflow in part of the supporting area 120 and achieving the purpose of reducing the floating of sheet materials.

[0045] Figure 5 FIG. 1 is a side view of a first sub-strip protrusion provided by an embodiment of the present application. Figure 5As shown, the first sub-strip protrusion 132 provided in the embodiment of the present application also has a first guide structure 131. In the embodiment of the present application, the first guide structure 131 on the first strip sub-protrusion is a through hole 1311. It should be understood that the first guide structure 131 on the first sub-strip protrusion 132 can also be a groove 1312. In the embodiment of the present application, the through hole 1311 is circular in shape. In actual application, the shape of the through hole can be selected according to the requirements of the processing technology and the length requirements of the first sub-strip protrusion 132. In addition, one or more first guide structures 131 can be set on each first sub-strip protrusion 132 as needed. The embodiment of the present application does not further limit the number of first guide structures 131 set on the first sub-strip protrusion 132.

[0046] The first sub-strip protrusion 132 provided in the embodiment of the present application also has a first guide structure 131. The first guide structure 131 of the first sub-strip protrusion 132 makes the airflow smoother and makes the process gas flow more evenly to the bearing area 120, which can prevent flakes from floating while improving the processing effect.

[0047] Figure 6 The figure shows a top view of another boat according to an embodiment of the present application. Figure 1 Based on the embodiment shown Figure 6 The embodiment shown is described below in detail. Figure 6 The embodiment shown is Figure 1 The differences and similarities between the illustrated embodiments are not described in detail.

[0048] like Figure 6 As shown, the load-bearing areas 120 are arranged in two rows, and the two rows of load-bearing areas 120 are symmetrical with respect to the first strip-shaped protrusions 130. Conventional process equipment and processes correspond to the two rows of load-bearing areas 120. The boat provided by the embodiment of the present application is compatible with conventional process equipment and processes, reducing the need for new equipment or processes and saving processing costs. Furthermore, the boat provided by the embodiment of the present application has two rows of load-bearing areas 120, and the two rows of load-bearing areas 120 are symmetrical with respect to the first strip-shaped protrusions 130. This makes it easier to implement automated processing, such as automatic loading and unloading, in actual applications, thereby meeting a wider range of application scenarios and needs.

[0049] In the embodiment of the present application, a first flow-guiding structure 131 is provided on the first strip-shaped protrusion 130 and is a groove structure that vertically extends through the first strip-shaped protrusion 130. In actual applications, the first flow-guiding structure 131 may have other structures, and the embodiment of the present application does not further limit the specific structure of the first flow-guiding structure 131. It should be understood that the first flow-guiding structure 131 may be omitted from the first strip-shaped protrusion 130 as needed, thereby simplifying the process and reducing the production cost of the boat.

[0050] The boat piece 100 provided in the embodiment of the present application has two rows of bearing areas 120, and the two rows of bearing areas 120 are symmetrical with respect to the first strip-shaped protrusion 130, which can adapt to more application scenarios, is compatible with existing process equipment and processes, reduces the need for new equipment or processes, and thus reduces the production cost of the boat piece.

[0051] Figure 7 FIG. 1 is a top view of another boat according to another embodiment of the present application. Figure 6 Based on the embodiment shown Figure 7 The embodiment shown is described below in detail. Figure 7 The embodiment shown is Figure 6 The differences and similarities between the illustrated embodiments are not described in detail.

[0052] like Figure 7 As shown, another boat sheet 100 provided in another embodiment of the present application further includes: at least one second strip-shaped protrusion 140, which is arranged between the supporting areas 120 of adjacent columns, and the second strip-shaped protrusion 140 extends along the second horizontal direction. In the embodiment of the present application, there are two second strip-shaped protrusions 140, which are respectively arranged between the supporting areas 120 of adjacent columns. In actual application, the airflow during vacuuming has an uneven flow along the first horizontal direction, which may cause the sheet material to float. The provision of the second strip-shaped protrusion 140 can block part of the airflow in the first horizontal direction, avoid uneven airflow, thereby reducing the occurrence of sheet material floating during processing, and ensuring the quality of the processed silicon wafer.

[0053] For example, the height of the second strip protrusion 140 is greater than the height of the sheet material. The second strip protrusion 140 having a height greater than the height of the sheet material can ensure that the airflow received by the sheet area is blocked, thereby improving the effect of preventing flakes from floating.

[0054] In some embodiments, the second strip protrusion 140 and the first strip protrusion 130 have an intersection area. The second strip protrusion 140 and the first strip protrusion 130 in the intersection area may intersect, and the second strip protrusion 140 intersects with the first strip protrusion 130 through a strip-shaped gap. The second strip protrusion 140 can also intersect with the first strip protrusion 130 in other ways, such as in the form of a slot. It should be understood that the first strip protrusion 130 can also intersect with the second strip protrusion 140 through a strip-shaped gap or a slot. The second strip protrusion 140 and the first strip protrusion 130 can both have a strip-shaped gap or a slot to make the airflow in the intersection area more stable, thereby further improving the effect of preventing flakes from floating.

[0055] The embodiment of the present application blocks part of the airflow flowing in the first direction by providing the second strip protrusion 140 , thereby avoiding the possibility of the sheet material being affected by the airflow in the first horizontal direction and causing it to flake, thereby further improving the effect of preventing flake flakes.

[0056] Figure 8 FIG. 1 is a side view of a second strip-shaped protrusion provided in one embodiment of the present application. Figure 8 As shown, the second strip-shaped protrusion 140 includes a second guide structure 141, which is configured to guide airflow through the second strip-shaped protrusion. This guide structure 141 guides airflow through the second strip-shaped protrusion 140, ensuring convection in the first horizontal direction and ensuring efficient vacuuming. Furthermore, the inclusion of the second guide structure 141 on the second strip-shaped protrusion 140 ensures a stable flow of process gas during processing, further improving processing efficiency.

[0057] For example, in the embodiment of the present application, the second flow-guiding structure 141 is a through hole with a square shape. It should be understood that the second flow-guiding structure 141 can also be a groove. In some embodiments, the structure of the second flow-guiding structure 141 is the same as that of the first flow-guiding structure 131, which simplifies the processing of the strip-shaped protrusions. It should be understood that in actual applications, the structure of the second flow-guiding structure 141 can be different from that of the first flow-guiding structure 131 according to needs.

[0058] In some embodiments, the second strip-shaped protrusion 140 includes a plurality of second sub-strip-shaped protrusions, and the second guide structure 141 is disposed between adjacent second sub-strip-shaped protrusions. The orthographic projections of the second sub-strip-shaped protrusions on a plane perpendicular to the first horizontal direction overlap the orthographic projections of the bearing area 120 on a plane perpendicular to the first horizontal direction.

[0059] Exemplarily, an insulating structure may be provided between the second sub-strip protrusions, and a connecting structure corresponding to the insulating structure may be provided on adjacent second sub-strip protrusions so that two adjacent second sub-strip protrusions are connected to the insulating structure, thereby achieving the purpose of ensuring the second sub-strip protrusions.

[0060] In some embodiments, the second sub-strip protrusions also have second flow-guiding structures 141. The number of second flow-guiding structures 141 on the second sub-strip protrusions can be selected according to requirements.

[0061] The second strip-shaped protrusion 140 provided in the embodiment of the present application includes a second guide structure 141. The second guide structure 141 is configured to guide airflow through the second strip-shaped protrusion, thereby ensuring a convection effect and improving a processing effect.

[0062] Figure 9 The figure shows a schematic diagram of the structure of another boat provided by another embodiment of the present application. Figure 7 Based on the embodiment shown Figure 9 The embodiment shown is described below. Figure 9 The embodiment shown is Figure 7 The differences between the illustrated embodiments are omitted for clarity.

[0063] like Figure 9 As shown, in another boat sheet 100 provided in another embodiment of the present application, the number of the second strip-shaped protrusion 140 is one, and the plurality of bearing areas 120 are symmetrical with respect to the second strip-shaped protrusion 140. Figure 9 As shown, the plurality of supporting areas 120 are arranged in an even number of rows, and the plurality of supporting areas 120 are symmetrical with respect to the second strip-shaped protrusions 140 in the first direction.

[0064] During actual application, multiple supporting areas 120 are symmetrical with respect to the second strip protrusion 140 in the first horizontal direction. The second strip protrusion 140 can block the gas flowing along the first horizontal direction, thereby ensuring that the airflow in the supporting area 120 along the first horizontal direction is smooth, simplifying the processing technology of the boat sheet while achieving the effect of preventing the sheet from floating.

[0065] The embodiment of the present application provides one second strip protrusion 140, and the multiple bearing areas 120 are arranged in an even number. In the first direction, the multiple bearing areas 120 are symmetrical relative to the second strip protrusion 140, which can simplify the processing technology of the boat sheet while preventing the sheet from floating.

[0066] Figure 10 The structure diagram of the boat provided by one embodiment of the present application is shown as follows. Figure 10 As shown, the boat 200 provided in the embodiment of the present application includes the boat pieces 100 mentioned above and a connector 210. Specifically, a plurality of boat pieces 100 are arranged at intervals along the vertical direction; the connector 210 connects the plurality of boat pieces 100. Exemplarily, the connector is a ceramic rod.

[0067] In some embodiments, the connector 210 includes a groove; the first protrusion 130 of the boat 100 engages with the groove. The connector 210 of the boat provided in the embodiments of the present application includes a groove that engages with the first protrusion 130 of the boat 100. The first protrusion 130 and the boat 100 can be disassembled and assembled as needed, allowing the structure of the boat 200 to be adjusted and expanding the scope of application of the boat 200.

[0068] The beneficial effects of the boat provided in the embodiment of the present application are consistent with the beneficial effects of the above-mentioned boat sheet, and will not be repeated here.

[0069] References in the specification to "one embodiment," "an embodiment," and the like indicate that the described embodiment may include a particular feature, structure, or characteristic, but not every embodiment necessarily includes that particular feature, structure, or characteristic. Furthermore, such phrases do not necessarily refer to the same embodiment. Furthermore, when a particular feature, structure, or characteristic is described in conjunction with an embodiment, it is within the knowledge of those skilled in the art to implement such feature, structure, or characteristic in conjunction with other embodiments, whether explicitly described or not.

[0070] It should be understood that the terms “on,” “above,” and “over” in this application should be interpreted in the broadest manner, so that “on” means not only “directly on something,” but also includes “on something” with intervening features or layers therebetween, and “above” or “over” includes not only the meaning of “above” or “over,” but also includes the meaning of “above” or “over” with no intervening features or layers therebetween (i.e., directly on something).

[0071] Additionally, spatially relative terms, such as "below," "beneath," "beneath," "above," and the like, may be used herein for ease of description to describe the relationship of one component or feature relative to other components or features as depicted in the figures. Spatially relative terms are intended to encompass different orientations of a component in use or operation in addition to the orientation depicted in the figures. The device may be otherwise oriented (rotated 90 degrees or at other orientations), and the spatially relative descriptors used herein should be interpreted accordingly.

[0072] It should be noted that, in this document, the terms "comprises," "includes," or any other variations thereof are intended to encompass non-exclusive inclusion, such that a process, method, article, or apparatus comprising a series of elements includes not only those elements but also other elements not explicitly listed, or elements inherent to such process, method, article, or apparatus. In the absence of further limitations, an element defined by the phrase "comprising a ..." does not exclude the presence of other identical elements in the process, method, article, or apparatus comprising the element.

[0073] Those skilled in the art should understand that the discussion of any of the above embodiments is merely illustrative and is not intended to imply that the scope of the present application (including the claims) is limited to these examples. Within the scope of the present application, the technical features in the above embodiments or different embodiments may be combined, the steps may be implemented in any order, and there are many other variations of the different aspects of the embodiments of the present application as described above, which are not provided in detail for the sake of simplicity.

[0074] The embodiments of the present application are intended to cover all such substitutions, modifications, and variations that fall within the broad scope of the appended claims. Therefore, any omissions, modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the embodiments of the present application should be included in the scope of protection of this application.

Claims

1. A boat, characterized in that: include: a boat body extending along a first horizontal direction, the boat body having a plurality of load-bearing areas on an upper surface thereof, the plurality of load-bearing areas being arranged in a plurality of columns along the first horizontal direction and in a plurality of rows along a second horizontal direction, the second horizontal direction intersecting the first horizontal direction; The first strip-shaped protrusions are arranged between the bearing areas in adjacent rows and are configured to block part of the airflow between the bearing areas in multiple rows.

2. The boat according to claim 1, wherein: The first strip-shaped protrusion includes a first flow-guiding structure, which penetrates the first strip-shaped protrusion in the second horizontal direction and is configured to guide the airflow to pass through the first strip-shaped protrusion.

3. The boat according to claim 2, characterized in that: The first flow-guiding structure includes a through hole or a groove.

4. The boat according to claim 3, characterized in that: The first strip-shaped protrusion includes: a plurality of first sub-strip-shaped protrusions spaced apart along the first horizontal direction, wherein the first flow guide structure is disposed between adjacent first sub-strip-shaped protrusions; An orthographic projection of the first sub-strip-shaped protrusion on a plane perpendicular to the second horizontal direction covers an orthographic projection of the bearing area on a plane perpendicular to the second horizontal direction.

5. The boat according to claim 4, characterized in that: The first sub-strip-shaped protrusion also has the first flow-guiding structure.

6. The boat according to any one of claims 1 to 5, characterized in that: Also includes: At least one second strip-shaped protrusion is disposed between the supporting areas of adjacent columns, and the second strip-shaped protrusion extends along the second horizontal direction.

7. The boat according to claim 6, characterized in that: The second strip-shaped protrusion includes a second flow-guiding structure configured to guide the airflow to pass through the second strip-shaped protrusion.

8. The boat according to claim 7, characterized in that: The number of the second strip-shaped protrusion is one, and the plurality of bearing areas are symmetrical with respect to the second strip-shaped protrusion.

9. A boat, characterized in that: include: A plurality of boat pieces according to any one of claims 1 to 8, wherein the plurality of boat pieces are spaced apart in a vertical direction; A connecting piece connects the plurality of boat pieces.

10. The boat according to claim 9, wherein: The connecting member includes a groove, and the first strip-shaped protrusion of the boat piece is engaged with the groove.