Special gas pipeline and diffusion furnace

Abstract

The utility model provides a special gas pipeline and a diffusion furnace. The special gas pipeline comprises a gas inlet pipe joint; two ends of the transfer pipe are respectively a first transfer end and a second transfer end, and one end of the air inlet pipe joint is connected with the first transfer end; the connecting sleeve is detachably arranged at the second transfer end in a sleeving manner; the spraying pipe is detachably arranged at the end, away from the transfer pipe, of the connecting sleeve in a sleeving mode. The special gas pipeline solves the problem that in the prior art, a special gas pipeline is poor in use performance.

Description

Technical Field

[0001] The utility model relates to the field of battery production equipment, and in particular to a special gas pipeline and a diffusion furnace. Background Art

[0002] During the solar cell manufacturing process, silicon wafers are diffused through a diffusion furnace to form a PN junction on the wafer. During this diffusion process, special gases, such as silane, are transported into the furnace through special gas tubes. Silane decomposes due to the heat inside the furnace, forming deposits. Some of this deposits deposit on the surface of the special gas tubes, forming impurities. Due to the high temperature inside the diffusion furnace, the temperature drops when the furnace door is opened or ventilation is performed, while the temperature rises during operation. Under the influence of these different temperatures, the special gas tubes expand and contract, causing impurities on the tube surface to fall onto the silicon wafers, contaminating the wafers and affecting product quality.

[0003] At the same time, metal pipes used as specialty gas pipes in diffusion furnaces (or deposition furnaces, etc.) are consumables and require frequent replacement. However, only the spray pipe section needs to be replaced, while the rest of the pipe section does not need to be replaced. Furthermore, since the spray pipe section is welded to the other parts, replacement requires either discarding the other parts or cutting them off and welding them to a new spray pipe, which is very wasteful and inconvenient.

[0004] Therefore, there is a problem in the prior art that the special gas pipeline has poor performance. Utility Model Content

[0005] The main purpose of the utility model is to provide a special gas pipeline and a diffusion furnace to solve the problem of poor performance of the special gas pipeline in the prior art.

[0006] In order to achieve the above-mentioned purpose, according to one aspect of the utility model, a special gas pipeline is provided, including: an air inlet pipe joint; a transfer pipe, the two ends of the transfer pipe are respectively a first transfer end and a second transfer end, and one end of the air inlet pipe joint is connected to the first transfer end; a connecting sleeve, the connecting sleeve is detachably mounted on the second transfer end; and a spray pipe, the spray pipe is detachably mounted on the end of the connecting sleeve away from the transfer pipe.

[0007] Furthermore, the transfer pipe includes a first connecting section, a second connecting section and a third connecting section connected in sequence, the end of the first connecting section away from the second connecting section is a first transfer end, the end of the third connecting section away from the second connecting section is a second transfer end, the diameter of the first connecting section and the diameter of the third connecting section are both smaller than the diameter of the second connecting section, and one end of the first connecting section and the second connecting section has a first step surface, and one end of the second connecting section and the third connecting section has a second step surface.

[0008] Furthermore, the connecting sleeve abuts against the second step surface.

[0009] Furthermore, a pagoda head structure that cooperates with each other is provided between the third connecting section and the connecting sleeve.

[0010] Furthermore, the second step surface has at least one anti-rotation protrusion extending toward the connecting sleeve, and the connecting sleeve has at least one anti-rotation notch cooperating with the anti-rotation protrusion.

[0011] Furthermore, the connecting sleeve has at least one first matching hole at one end close to the spray pipe, and the spray pipe is provided with at least one second matching hole corresponding to the first matching hole. The special gas pipeline also includes at least one fixing part, which passes through the second matching hole and the first matching hole in sequence.

[0012] Furthermore, the air intake pipe joint is made of stainless steel.

[0013] Furthermore, the air intake pipe joint is welded to the first transfer end.

[0014] Furthermore, the connecting sleeve is made of rubber material.

[0015] Furthermore, the spray pipe is made of at least one of metal materials, quartz, and silicon carbide.

[0016] According to another aspect of the present invention, a diffusion furnace is provided, comprising the above-mentioned special gas pipeline.

[0017] Applying the technical solution of the present utility model, the special gas pipeline in this application includes an air inlet pipe joint, a transfer pipe, a connecting sleeve, and a spray pipe. The transfer pipe has a first transfer end and a second transfer end, with one end of the air inlet pipe joint connected to the first transfer end; the connecting sleeve is detachably mounted on the second transfer end; and the spray pipe is detachably mounted on the end of the connecting sleeve away from the transfer pipe.

[0018] When using the specialty gas pipeline of the present application, since the connecting sleeve is detachably mounted on the second transfer end, when the specialty gas pipeline needs to be maintained or replaced, only the spray pipe or the spray pipe and the connecting sleeve need to be replaced, thereby effectively saving consumable costs. Therefore, the specialty gas pipeline of the present application effectively solves the problem of poor performance of specialty gas pipelines in the prior art. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The drawings constituting part of this application are provided to provide a further understanding of the present invention. The exemplary embodiments of the present invention and their descriptions are provided to explain the present invention and do not constitute an improper limitation of the present invention. In the drawings:

[0020] Figure 1 A schematic structural diagram of a special gas pipeline according to a specific embodiment of the present utility model is shown;

[0021] Figure 2 Shown Figure 1 Schematic diagram of the structure of the transfer pipe of the special gas pipeline;

[0022] Figure 3 Shown Figure 1 Schematic diagram of the structure of the connecting sleeve of the special gas pipeline.

[0023] The above drawings include the following reference numerals:

[0024] 10. Inlet pipe joint; 20. Transfer pipe; 21. First connecting section; 22. Second connecting section; 23. Third connecting section; 24. First step surface; 25. Second step surface; 26. Anti-rotation protrusion; 30. Connecting sleeve; 31. Anti-rotation notch; 32. First matching hole; 40. Spray pipe; 41. Second matching hole. DETAILED DESCRIPTION

[0025] It should be noted that, in the absence of conflict, the embodiments and features of the embodiments in this application can be combined with each other. The present invention will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0026] It should be noted that, unless otherwise specified, all technical and scientific terms used in this application have the same meaning as commonly understood by ordinary technicians in the technical field to which this application belongs.

[0027] In the present invention, unless otherwise specified, directional words such as "up, down, top, bottom" are usually used with reference to the directions shown in the drawings, or with reference to the components themselves in the vertical, perpendicular or gravity direction; similarly, for ease of understanding and description, "inside and outside" refer to the inside and outside relative to the outline of each component itself, but the above directional words are not used to limit the present invention.

[0028] In order to solve the problem of poor performance of special gas pipelines in the prior art, the present application provides a special gas pipeline and a diffusion furnace.

[0029] Furthermore, the diffusion furnace in the present application includes the following special gas pipelines.

[0030] like Figures 1 to 3 As shown, the specialty gas pipeline in this application includes an air inlet pipe joint 10, a transfer pipe 20, a connecting sleeve 30, and a spray pipe 40. The two ends of the transfer pipe 20 are respectively a first transfer end and a second transfer end, with one end of the air inlet pipe joint 10 connected to the first transfer end; the connecting sleeve 30 is detachably mounted on the second transfer end; and the spray pipe 40 is detachably mounted on the end of the connecting sleeve 30 away from the transfer pipe 20.

[0031] When using the specialty gas pipeline of the present application, since the connecting sleeve 30 is detachably mounted on the second transfer end, when the specialty gas pipeline needs to be maintained or replaced, only the spray pipe 40 or the spray pipe 40 and the connecting sleeve 30 need to be replaced, thereby effectively saving consumable costs. Therefore, the specialty gas pipeline of the present application effectively solves the problem of poor performance of specialty gas pipelines in the prior art.

[0032] Furthermore, the specialty gas pipeline in this application can be used in a diffusion furnace or a deposition furnace, with the spray pipe 40 extending into the diffusion furnace or deposition furnace. The air inlet pipe connector 10 and part or all of the transfer pipe 20 are located outside the diffusion furnace or deposition furnace, and the connecting sleeve 30 is located at the installation hole of the specialty gas pipeline in the diffusion furnace or deposition furnace, thereby sealing the diffusion furnace or deposition furnace to prevent gas leakage. Furthermore, in this application, the end of the air inlet pipe connector 10 away from the transfer pipe 20 is connected to the gas source air inlet pipe.

[0033] Optionally, the transfer tube 20 includes a first connecting section 21, a second connecting section 22 and a third connecting section 23 connected in sequence, the end of the first connecting section 21 away from the second connecting section 22 is a first transfer end, the end of the third connecting section 23 away from the second connecting section 22 is a second transfer end, the diameter of the first connecting section 21 and the diameter of the third connecting section 23 are both smaller than the diameter of the second connecting section 22, and one end of the first connecting section 21 and the second connecting section 22 has a first step surface 24, and one end of the second connecting section 22 and the third connecting section 23 has a second step surface 25.

[0034] Preferably, the connecting sleeve 30 abuts against the second step surface 25 .

[0035] The provision of the first step surface 24 enables the intake pipe joint 10 to be welded to the transfer pipe 20 more easily, and the provision of the second step surface 25 enables the operator to more easily determine whether the transfer pipe 20 and the connecting sleeve 30 are properly installed.

[0036] That is, during the process of assembling the connecting sleeve 30 and the transfer pipe 20 , when the connecting sleeve 30 abuts against the second step surface 25 , the operator can confirm that the connecting sleeve 30 and the transfer pipe 20 are assembled in place.

[0037] Optionally, a pagoda head structure that cooperates with each other is provided between the third connecting section 23 and the connecting sleeve 30. This arrangement not only facilitates the assembly of the third connecting section 23 and the connecting sleeve 30, but also prevents the connecting sleeve 30 from falling off, thereby ensuring the performance of the special gas pipeline.

[0038] Optionally, the second stepped surface 25 has at least one anti-rotation protrusion 26 extending toward the connecting sleeve 30, and the connecting sleeve 30 has at least one anti-rotation notch 31 that cooperates with the anti-rotation protrusion 26. This arrangement further effectively ensures the stability between the transfer tube 20 and the connecting sleeve 30, thereby preventing the connecting sleeve 30 from rotating relative to the transfer tube 20, thereby ensuring the sealing effect of the connecting sleeve 30 on the diffusion furnace or deposition furnace.

[0039] Optionally, the connecting sleeve 30 has at least one first mating hole 32 at one end near the spray pipe 40, and the spray pipe 40 has at least one second mating hole 41 corresponding to the first mating hole 32. The specialty gas pipeline further includes at least one fixing member, which sequentially passes through the second mating hole 41 and the first mating hole 32. This arrangement ensures the stability and airtightness of the connection between the connecting sleeve 30 and the spray pipe 40 through the fixing member.

[0040] Optionally, the air intake pipe joint 10 is made of stainless steel.

[0041] Optionally, the air intake pipe joint 10 is welded to the first transfer end. Since only the spray pipe 40 needs to be replaced in this application, welding can be selected between the air intake pipe joint 10 and the transfer pipe 20. Of course, other connection methods can also be selected according to actual usage.

[0042] Optionally, the connecting sleeve 30 is made of rubber. This configuration not only facilitates assembly of the connecting sleeve 30 with the transfer pipe 20 and the spray pipe 40, but also further ensures the sealing effect of the connecting sleeve 30 on the diffusion furnace or deposition furnace. Furthermore, during assembly of the specialty gas pipeline of this application with the diffusion furnace or deposition furnace, this configuration also provides a certain degree of protection for the connecting sleeve 30 and the spray pipe 40.

[0043] Optionally, the spray pipe 40 is made of at least one of a metal material, quartz, and silicon carbide. In the present application, when the spray pipe 40 is made of quartz or silicon carbide, because the thermal expansion coefficient of the material is small compared to that of the silicon deposited on the pipe surface, the silicon deposited on the pipe surface is less likely to fall off due to thermal expansion and contraction, thereby extending the service life of the spray pipe 40 and further reducing costs. In other words, by selecting quartz or silicon carbide as the manufacturing material for the spray pipe 40, it is possible to effectively solve the problem in the prior art that the special gas pipe will expand and contract due to thermal expansion and contraction, causing impurities on the surface of the special gas pipe to fall off onto the silicon wafer, resulting in silicon wafer contamination and affecting product quality.

[0044] From the above description, it can be seen that the above embodiments of the present invention achieve the following technical effects:

[0045] 1. Effectively solve the problem of poor performance of special gas pipelines in existing technologies;

[0046] 2. Simple structure and stable performance.

[0047] Obviously, the embodiments described above are only part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present invention.

[0048] It should be noted that the terms used herein are only for describing specific embodiments and are not intended to limit the exemplary embodiments according to the present application. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "comprise" and / or "include" are used in this specification, they indicate the presence of features, steps, tasks, devices, components and / or combinations thereof.

[0049] It should be noted that the terms "first," "second," and the like in the specification and claims of this application and the accompanying drawings are used to distinguish similar objects and are not necessarily used to describe a specific order or precedence. It should be understood that the terms used in this manner are interchangeable where appropriate, so that the embodiments of the present application described herein can be implemented in an order other than that illustrated or described herein.

[0050] The above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention. Those skilled in the art will readily appreciate that the present invention is susceptible to various modifications and variations. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of the present invention shall be included within the scope of protection of the present invention.

Claims

1. A special gas pipeline, characterized in that: include: Inlet pipe connector (10); A transfer pipe (20), wherein both ends of the transfer pipe (20) are respectively a first transfer end and a second transfer end, and one end of the air inlet pipe joint (10) is connected to the first transfer end; a connecting sleeve (30), the connecting sleeve (30) being detachably sleeved on the second transfer end; A spray pipe (40) is detachably sleeved on an end of the connecting sleeve (30) away from the transfer pipe (20).

2. The special gas pipeline according to claim 1, characterized in that: The transfer pipe (20) comprises a first connecting section (21), a second connecting section (22) and a third connecting section (23) connected in sequence, wherein the end of the first connecting section (21) away from the second connecting section (22) is the first transfer end, and the end of the third connecting section (23) away from the second connecting section (22) is the second transfer end. The diameter of the first connecting section (21) and the diameter of the third connecting section (23) are both smaller than the diameter of the second connecting section (22), and one end of the first connecting section (21) and the second connecting section (22) has a first step surface (24), and one end of the second connecting section (22) and the third connecting section (23) has a second step surface (25).

3. The special gas pipeline according to claim 2, characterized in that: The connecting sleeve (30) abuts against the second step surface (25).

4. The special gas pipeline according to claim 2, characterized in that: There is a pagoda head structure that cooperates with each other between the third connecting section (23) and the connecting sleeve (30).

5. The special gas pipeline according to claim 2, characterized in that: The second step surface (25) has at least one anti-rotation protrusion (26) extending toward the connecting sleeve (30), and the connecting sleeve (30) has at least one anti-rotation notch (31) cooperating with the anti-rotation protrusion (26).

6. The specialty gas pipeline according to claim 1, characterized in that: The connecting sleeve (30) has at least one first matching hole (32) at one end close to the spray pipe (40), and the spray pipe (40) is provided with at least one second matching hole (41) corresponding to the first matching hole (32). The special gas pipeline further includes at least one fixing member, and the fixing member passes through the second matching hole (41) and the first matching hole (32) in sequence.

7. The specialty gas pipeline according to any one of claims 1 to 6, characterized in that: The air intake pipe joint (10) is made of stainless steel.

8. The special gas pipeline according to claim 7, characterized in that: The air intake pipe joint (10) is welded to the first transfer end.

9. The specialty gas pipeline according to any one of claims 1 to 6, characterized in that: The connecting sleeve (30) is made of rubber material.

10. A diffusion furnace, characterized in that: A special gas pipeline comprising any one of claims 1 to 9.

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