Electronic-grade xenon purification device

By designing a xenon gas purification device that is easy to replace filter cotton and dissipate heat, the problems of difficult replacement of filling materials and purification agents and poor heat dissipation performance in existing devices are solved, and the efficiency and safety of xenon gas purification are improved.

CN223324054UActive Publication Date: 2025-09-12HEFEI XIANWEI SEMICON MATERIAL CO LTD
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Patent Information

Application Number
CN202422598669.7
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-10-28
Publication Date
2025-09-12
Estimated Expiration
2034-10-28

AI Technical Summary

Technical Problem

Existing xenon purification devices are not convenient for replacing filling materials and purifying agents, and have poor heat dissipation performance, making it impossible to effectively discharge heat during the purification process.

Method used

An electronic-grade xenon gas purification device was designed. The combined structure of the outer tank and semicircular connector facilitates the replacement of filter cotton, and the fan and heat dissipation hole system achieves effective heat dissipation. The inner tank and layer plate structure facilitate the replacement and addition of purification agents.

Benefits of technology

The convenient replacement of filter cotton and the effective discharge of heat are realized, thereby improving the purification efficiency of xenon gas and the safety of the device.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model discloses an electronic grade xenon purification device, which relates to the technical field of purification devices and comprises a cabinet body, the left end of the top side in the cabinet body is fixedly connected with a rectifying tower, the bottom end of the rectifying tower is connected with a semicircular connecting piece I through a gas guide pipeline, and the right side of the semicircular connecting piece I is provided with an outer tank. The xenon filtering device has the advantages that due to the combined arrangement of the outer tank, the first semicircular connecting piece and the second semicircular connecting piece, the filter cotton filled among the outer tank, the first semicircular connecting piece and the second semicircular connecting piece can physically filter xenon and adsorb and remove moisture at the same time, and the xenon filtering device is simple in structure, convenient to use and high in practicability. The upper inner tank and the lower inner tank are arranged in the sliding grooves and are matched with the purifying agent arranged between the upper inner tank and the lower inner tank, xenon is further purified, the upper inner tank and the lower inner tank can be separated from the outer tank through movement of the sliding strips in the sliding grooves, and the purifying agent on the inner layer plates is replaced.
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Description

Technical Field

[0001] The utility model relates to the technical field of purification devices, in particular to an electronic-grade xenon purification device. Background Art

[0002] Xenon, chemical symbol Xe, is a rare gas, an element in Group 18 of the periodic table, with atomic number 54. It is colorless, odorless, tasteless, and chemically inactive. It is present in air (0.0087 mL of xenon per 100 mL of air) and in the gases of hot springs. It is separated from liquid air along with krypton. Xenon has extremely high luminous intensity and is used in lighting technology to charge phototubes, flash lamps, and xenon high-pressure lamps. In addition, xenon is used as a deep anesthetic, medical ultraviolet light, lasers, welding, refractory metal cutting, calibration gases, and specialty gas mixtures. Xenon has a wide range of applications.

[0003] During the production process, xenon gas needs to be purified by a purification device to remove impurities contained in the xenon gas. Xenon gas purification cabinets are currently widely used xenon gas purification devices. During use, existing xenon gas purification cabinets pass crude xenon gas with impurities through a distillation tower for distillation and purification, and then fill it. However, existing xenon gas purification devices are not convenient for replacing the filling material that plays a filtering role in the purifier. In addition, it is not convenient to add the purifying agent placed on the shelf. At the same time, the heat dissipation performance of the purification cabinet is poor, and the heat generated during the purification process cannot be discharged from the cabinet in a timely and effective manner. To this end, we propose an electronic-grade xenon gas purification device. Utility Model Content

[0004] The purpose of the utility model is to provide an electronic grade xenon gas purification device.

[0005] To achieve the above-mentioned object, the present invention provides the following technical solution: an electronic-grade xenon gas purification device, comprising a cabinet, a distillation tower fixedly connected to the left end of the top side of the cabinet, a semicircular connector 1 connected to the bottom end of the distillation tower via an air guide pipe, an outer tank provided on the right side of the semicircular connector 1, and a semicircular connector 2 provided on the right side of the outer tank, flange 2 fixedly connected to both sides of the outer wall of the outer tank, flange 1 fixedly connected to the outer wall of the semicircular connector 1 and the semicircular connector 2 on the side close to the outer tank, bolts threadedly connected to the outer sides of flange 1 and flange 2, one end of the bolt passes through one side of flange 1 and flange 2 and is threadedly connected to a nut, slide grooves are provided on the front and rear sides of the inner part of the outer tank, and slide bars are slidably connected to the interior of the slide grooves, an upper inner tank is fixedly connected between the two upper slide bars, and a lower inner tank is fixedly connected between the two lower slide bars, a plurality of partition cottons are provided between the upper inner tank and the lower inner tank, and a plurality of layer plates are provided between adjacent two of the partition cottons.

[0006] As a further solution of the present invention: a connection box is fixedly connected to the middle of the rear side of the cabinet, a fan is fixedly connected to the interior of the connection box, a cavity is opened inside the cabinet, and the cavity is communicated with the connection box.

[0007] As a further solution of the present invention: a plurality of circulation holes are opened around the interior of the cabinet, and a plurality of heat dissipation holes are opened on the left and right sides of the outer wall of the cabinet, and the plurality of heat dissipation holes and the plurality of circulation holes are all connected to the cavity.

[0008] As a further solution of the present invention: the right side of the second semicircular connector is connected to a freezing bottle through an air guide pipe, the bottom end of the freezing bottle is connected to a buffer tank through a connecting pipe, the bottom end of the buffer tank is connected to a filling bottle through a filling pipe, and a vacuum pump is provided between the buffer tank and the filling bottle and on the filling pipe.

[0009] As a further solution of the present invention: the top of the distillation tower is fixedly connected with an air inlet pipe, and the top of the air inlet pipe passes through the top left end of the cabinet.

[0010] As a further solution of the present invention: a filter is provided at the bottom of the heat dissipation hole away from the cabinet, and a limiting ring is fixedly connected to the inner wall of the semicircular connector 1 and the semicircular connector 2 on the side close to the outer tank.

[0011] By adopting the above technical solution, compared with the prior art, the beneficial effects of the present invention are:

[0012] 1. The utility model utilizes a combination of an outer tank, a first semicircular connector, and a second semicircular connector to allow the filter cotton filled therebetween to physically filter xenon gas while simultaneously removing moisture through adsorption. This combination, combined with the purifying agent disposed between the upper and lower inner tanks, further purifies the xenon gas. The upper and lower inner tanks can be separated from the outer tank by sliding a slider in a chute, allowing the purifying agent on the internal layer to be replaced. By removing bolts and nuts to detach the first and second flanges, the filter cotton filled within the first and second semicircular connectors can be replaced, thus resolving the inconvenience of replacing filling materials.

[0013] 2. The utility model generates wind by starting the fan, which drives the air inside and outside the cabinet to alternate through the cavity, heat dissipation holes and circulation holes, thereby discharging the heat generated in the cabinet during the purification process, avoiding damage due to excessive heat during use.

[0014] Other advantages, objectives and features of the present invention will be described in part in the following description and will be apparent to those skilled in the art based on an examination of the following or may be learned from the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 This is an overall schematic diagram of an embodiment of the present utility model;

[0016] Figure 2 This is a schematic diagram of the position of the flange in the embodiment of the present utility model;

[0017] Figure 3 This is a schematic diagram of the position of the slider in the embodiment of the present utility model;

[0018] Figure 4 This is a schematic diagram of the position of the layer board in the embodiment of the present utility model;

[0019] Figure 5 This is a schematic diagram of the fan position in an embodiment of the present utility model.

[0020] In the figure: 1. Cabinet; 2. Distillation tower; 3. Semicircular connector 1; 4. Outer tank; 5. Semicircular connector 2; 6. Flange 1; 7. Flange 2; 8. Bolt; 9. Nut; 10. Slide; 11. Slide bar; 12. Upper inner tank; 13. Lower inner tank; 14. Partition cotton; 15. Shelf; 16. Connecting box; 17. Fan; 18. Cavity; 19. Circulation hole; 20. Cryo bottle; 21. Buffer tank; 22. Vacuum pump; 23. Filling bottle; 24. Heat dissipation hole. DETAILED DESCRIPTION

[0021] The specific embodiments of the present invention will be further described below in conjunction with the accompanying drawings. It should be noted that the description of these embodiments is used to help understand the present invention, but does not constitute a limitation of the present invention.

[0022] In addition, the technical features involved in the various embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0023] Please see the attached Figure 1 -Attached Figure 5The utility model is an electronic grade xenon gas purification device, comprising a cabinet 1, a distillation tower 2 is fixedly connected to the left end of the top side of the cabinet 1, the bottom end of the distillation tower 2 is connected to a semicircular connector 3 through an air guide pipe, an outer tank 4 is provided on the right side of the semicircular connector 3, a semicircular connector 2 5 is provided on the right side of the outer tank 4, both sides of the outer wall of the outer tank 4 are fixedly connected to a flange 2 7, the outer wall of the semicircular connector 3 and the semicircular connector 2 5 on the side close to the outer tank 4 are fixedly connected to a flange 1 6, the flange 1 6 and the flange 2 Bolts 8 are threadedly connected all around the outer side of 7, one end of the bolt 8 passes through flange 1 6 and one side of flange 2 7 and is threadedly connected to a nut 9, a slide groove 10 is provided on both the front and rear sides of the inner part of the outer tank 4, a slide bar 11 is slidably connected inside the slide groove 10, an upper inner tank 12 is fixedly connected between the two upper slide bars 11, and a lower inner tank 13 is fixedly connected between the two lower slide bars 11, a plurality of partition cottons 14 are arranged between the upper inner tank 12 and the lower inner tank 13, and a plurality of layer plates 15 are arranged between two adjacent partition cottons 14.

[0024] Specifically, by rotating the nut 9 to disengage it from the bolt 8, and then rotating the bolt 8 to disengage it from the flange 1 6 and the flange 2 7, the semicircular connector 1 3, the outer tank 4 and the semicircular connector 2 5 are separated, and the filter cotton filled inside can be replaced. On this basis, the slide 11 is pulled to one side to disengage it from the slide groove 10 on the outer tank 4, so that the upper inner tank 12 and the lower inner tank 13 are separated from the outer tank 4. Subsequently, because the slide 11 is no longer limited by the slide groove 10, the upper inner tank 12 and the lower inner tank 13 can be opened, so that the purification agent inside them can be operated.

[0025] In the first embodiment, a connection box 16 is fixedly connected to the middle portion of the rear side of the cabinet 1, a fan 17 is fixedly connected to the interior of the connection box 16, a cavity 18 is defined within the cabinet 1, the cavity 18 is communicated with the connection box 16, a plurality of circulation holes 19 are defined around the interior of the cabinet 1, and a plurality of heat dissipation holes 24 are defined on the left and right sides of the outer wall of the cabinet 1, the plurality of heat dissipation holes 24 and the plurality of circulation holes 19 are communicated with the cavity 18;

[0026] Specifically, by starting the fan 17 to generate wind, the interior of the cabinet 1 is cooled through the cavity 18 and the circulation hole 19, and cooperates with the heat dissipation hole 24 to drive the alternation of the air inside and outside the cabinet 1, thereby discharging the heat generated during the purification process inside the cabinet 1 out of the cabinet 1 and lowering its temperature.

[0027] In the second embodiment, the right side of the semicircular connector 2 5 is connected to a frozen bottle 20 through an air guide pipe, the bottom end of the frozen bottle 20 is connected to a buffer tank 21 through a connecting pipe, the bottom end of the buffer tank 21 is connected to a filling bottle 23 through a filling pipe, a vacuum pump 22 is provided between the buffer tank 21 and the filling bottle 23 and on the filling pipe, a filter is provided at the bottom of the heat dissipation hole 24 away from the side of the cabinet 1, and a limiting ring is fixedly connected to the inner wall of the semicircular connector 1 3 and the semicircular connector 2 5 on the side close to the outer tank 4;

[0028] Specifically, the filling pipe and the filling bottle 23 are vacuumed by the vacuum pump 22, and the filter is set to prevent external debris from entering the cabinet 1. The limit ring is set so that when the outer tank 4 is in contact with the semicircular connector 1 3 and the semicircular connector 2 5, the upper inner tank 12 and the lower inner tank 13 inside will not be displaced.

[0029] A method for using an electronic-grade xenon gas purification device, comprising the following steps:

[0030] S1. First, the xenon gas is purified by the distillation tower 2. Then, it is purified twice by passing through the gas pipe through the outer tank 4. Then, it enters the freezing bottle 20 through the gas pipe for freezing. Finally, it enters the vacuum filling bottle 23 through the filling pipe to complete the purification operation.

[0031] S2. The fan 17 is started to generate wind, which passes through the cavity 18 and the circulation hole 19 to cool the interior of the cabinet 1. The fan 17 cooperates with the heat dissipation hole 24 to drive the air inside and outside the cabinet 1 to alternate, thereby discharging the heat generated during the purification process in the cabinet 1 from the cabinet 1, lowering its temperature and completing the cooling operation.

[0032] S3. Turn nut 9 to disengage bolt 8, and then turn bolt 8 to disengage flange 1 6 and flange 2 7, thereby separating semicircular connector 1 3, outer tank 4, and semicircular connector 2 5. The filter cotton filled inside can be replaced, completing the filter cotton replacement operation;

[0033] S4. When adding or replacing the purifying agent, based on S3, it is necessary to pull the slide bar 11 to one side to disengage it from the chute 10 on the outer tank 4, so that the upper inner tank 12 and the lower inner tank 13 are separated from the outer tank 4. Subsequently, because the slide bar 11 is no longer limited by the chute 10, the upper inner tank 12 and the lower inner tank 13 can be opened, and the purifying agent inside them can be added or replaced, completing the corresponding operation of the purifying agent.

[0034] Working principle:

[0035] First, the xenon gas is purified by the distillation tower 2 and then enters the semicircular connector 1 3 through the air guide pipe. The filter cotton filled therein can physically filter the xenon gas and remove moisture by adsorption. Then, impurities such as oxygen, nitrogen, and argon in the xenon gas are removed by various purifying agents placed on the layer plate 15, thereby improving the purity of the xenon gas. The xenon gas then flows out through the semicircular connector 2 5 and enters the freezing bottle 20 through the air guide pipe for freezing. The filling pipe and filling bottle 23 are then evacuated by the vacuum pump 22, so that the frozen xenon gas enters the vacuum filling bottle 23 through the filling pipe, completing the operation.

[0036] During the xenon gas purification process, the fan 17 is activated to generate wind, which passes through the cavity 18 and the circulation hole 19 to cool the interior of the cabinet 1. The fan cooperates with the heat dissipation hole 24 to drive the air inside and outside the cabinet 1 to alternate, thereby discharging the heat generated during the purification process from the cabinet 1 and lowering its temperature.

[0037] When the filter cotton needs to be replaced, the nut 9 is turned to disengage it from the bolt 8, and then the bolt 8 is turned to disengage the flange 1 6 and the flange 2 7, thereby separating the semicircular connector 1 3, the outer tank 4 and the semicircular connector 2 5, and the filter cotton filled inside can be replaced;

[0038] When it is necessary to add or replace the purifying agent, on the basis of replacing the filter cotton, pull the slide bar 11 to one side to disengage it from the slide groove 10 on the outer tank 4, so that the upper inner tank 12 and the lower inner tank 13 are separated from the outer tank 4. Then, because the slide bar 11 is no longer limited by the slide groove 10, the upper inner tank 12 and the lower inner tank 13 can be opened, so that the purifying agent inside can be operated. At this point, the entire workflow is completed.

[0039] The above-mentioned front, back, left, right, up and down are all based on the Figure 1 As a benchmark, according to the person's observation perspective, the side of the device facing the observer is defined as the front, the left side of the observer is defined as the left, and so on.

[0040] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the scope of protection of the present invention.

[0041] The embodiments of the present invention are described in detail above with reference to the accompanying drawings, but the present invention is not limited to the described embodiments.

[0042] For those skilled in the art, it is possible to make various changes, modifications, substitutions and variations to these embodiments without departing from the principles and spirit of the present invention, and they still fall within the scope of protection of the present invention.

Claims

1. An electronic grade xenon gas purification device, comprising a cabinet (1), characterized in that: The left end of the top side of the cabinet (1) is fixedly connected to a distillation tower (2), the bottom end of the distillation tower (2) is connected to a semicircular connector (3) through an air guide pipe, an outer tank (4) is provided on the right side of the semicircular connector (3), a semicircular connector (5) is provided on the right side of the outer tank (4), and flange (7) is fixedly connected to both sides of the outer wall of the outer tank (4), and flange (6) is fixedly connected to the outer wall of the semicircular connector (3) and the semicircular connector (5) on the side close to the outer tank (4), and bolts are threadedly connected to the outer sides of flange (6) and flange (7). (8), one end of the bolt (8) passes through the flange one (6) and the flange two (7) and is threadedly connected to a nut (9), the inner front and rear sides of the outer tank (4) are provided with a slide groove (10), the inner side of the slide groove (10) is slidably connected with a slide bar (11), the upper inner tank (12) is fixedly connected between the two upper slide bars (11), and the lower inner tank (13) is fixedly connected between the two lower slide bars (11), a plurality of partition cottons (14) are arranged between the upper inner tank (12) and the lower inner tank (13), and a plurality of layer plates (15) are arranged between two adjacent partition cottons (14).

2. The electronic-grade xenon gas purification device according to claim 1, characterized in that: A connection box (16) is fixedly connected to the middle of the rear side of the cabinet (1), a fan (17) is fixedly connected inside the connection box (16), a cavity (18) is provided inside the cabinet (1), and the cavity (18) is communicated with the connection box (16).

3. The electronic grade xenon gas purification device according to claim 1, characterized in that: A plurality of circulation holes (19) are provided around the interior of the cabinet (1), and a plurality of heat dissipation holes (24) are provided on the left and right sides of the outer wall of the cabinet (1). The plurality of heat dissipation holes (24) and the plurality of circulation holes (19) are all in communication with the cavity (18).

4. The electronic grade xenon gas purification device according to claim 1, characterized in that: The right side of the semicircular connector 2 (5) is connected to a freezing bottle (20) through an air guide pipe, the bottom end of the freezing bottle (20) is connected to a buffer tank (21) through a connecting pipe, the bottom end of the buffer tank (21) is connected to a filling bottle (23) through a filling pipe, and a vacuum pump (22) is provided between the buffer tank (21) and the filling bottle (23) and on the filling pipe.

5. The electronic-grade xenon gas purification device according to claim 1, characterized in that: The top end of the distillation tower (2) is fixedly connected to an air inlet pipe, and the top end of the air inlet pipe passes through the top left end of the cabinet (1).

6. The electronic grade xenon gas purification device according to claim 3, characterized in that: A filter screen is provided at the bottom of the side of the heat dissipation hole (24) away from the cabinet (1), and a limiting ring is fixedly connected to the inner wall of the side of the semicircular connector (3) and the semicircular connector (5) close to the outer tank (4).