Protective assembly of chamfering equipment for silicon wafer processing

Abstract

The utility model relates to the technical field of silicon wafer processing, and discloses a protection assembly of silicon wafer processing chamfering equipment, which comprises a chamfering machine and a protection assembly, and the chamfering machine comprises a machine body, a controller, a rotating assembly, a silicon wafer, an angle grinder and a water outlet pipe. By arranging the chamfering machine, the machine body, the controller, the rotating assembly, the silicon wafer and other structural components, the edge of the silicon wafer can be chamfered through the chamfering machine, the silicon wafer machining process can be prevented from being affected through the protection assembly, and the fixing block and the inserting block can be fixedly connected through the positioning assembly; the movable frame is fixed after moving leftwards, the fixed block and the inserting block can be separated from each other through the movable assembly, so that the movable frame can move rightwards, the effect of preventing the silicon wafer machining process from being affected is achieved, and the problem that the silicon wafer chamfering machine is not provided with a protection structure for protecting the silicon wafer is solved. And the processing process is easily influenced by the outside.

Description

Technical Field

[0001] The utility model belongs to the technical field of silicon wafer processing, and in particular relates to a protective component of silicon wafer processing chamfering equipment. Background Art

[0002] Silicon wafers are uniform thin slices made of silicon. Their surface can be processed to form electronic components. They are one of the indispensable materials in the electronics industry and an important basis for the production of integrated circuits and other semiconductor devices.

[0003] In order to improve chip reliability, reduce corner defects, enhance edge error resistance, improve mechanical strength, improve packaging effects and accurately control dimensions, it is necessary to chamfer the silicon wafer. The chamfered silicon wafer edge has stronger error resistance. During the use of the silicon wafer chamfering machine, the silicon wafer is often exposed to the outside for processing, and there is no protective structure, which makes the silicon wafer susceptible to external influences and causes processing dislocation, and the use effect is not good enough. The problem with the above technology is that the silicon wafer chamfering machine does not have a protective structure to protect the silicon wafer, and the processing process is susceptible to external influences. Utility Model Content

[0004] In view of the problems existing in the prior art, the present invention provides a protective component for silicon wafer processing chamfering equipment that can overcome the above problems or at least partially solve the above problems.

[0005] The utility model is implemented as follows: a protective assembly of a silicon wafer processing chamfering equipment comprises a chamfering machine and a protective assembly, wherein the chamfering machine comprises a body, a controller, a rotating assembly, a silicon wafer, an angle grinder and a water outlet pipe, wherein the controller is mounted on the left side of the top of the body, the rotating assembly and the water outlet pipe are both mounted on the bottom of the right side of the body and can be extended left and right, the silicon wafer is mounted on the top of the rotating assembly, the right side of the angle grinder is fixedly connected to the right side of the inside of the body, the protective assembly is located on the right side of the top of the body, the protective assembly comprises a movable frame, a plurality of transparent plates and two limit blocks, the opposite ends of the two limit blocks are respectively fixedly connected to the right sides of the front and rear sides of the body, the bottoms of the front and rear sides of the movable frame are respectively slidably connected to the opposite ends of the two limit blocks, and the plurality of transparent plates are respectively mounted on the front and rear sides and the top of the movable frame;

[0006] The chamfering machine is used for chamfering the edges of silicon wafers;

[0007] The protective component is used to prevent the silicon wafer processing process from being affected.

[0008] In order to enable the movable frame to be fixed after moving to the left and to be able to move to the right to open, preferably, the left side of the front side of the limit block on the front side is fixedly connected with a fixed block, and the left side of the bottom of the front side of the movable frame is fixedly connected with a plug-in block, and the bottom of the plug-in block can be slidably connected to the top of the front limit block, and a cavity is opened inside the fixed block, and a positioning assembly and a moving assembly are respectively provided inside the cavity. A lighting lamp is installed on the right side of the inside of the body, and the water outlet pipe is located on the top of the silicon wafer. Through the positioning assembly, the movable frame can be fixed after moving to the left, thereby avoiding affecting the silicon wafer processing process. Through the moving assembly, the movable frame can be moved to the right, so that the silicon wafer can be replaced.

[0009] In order to enable the fixed block and the plug-in block to be connected and fixed, preferably, the positioning assembly includes a positioning block, a slider and two return springs, the surfaces of the positioning block and the slider are movably connected to the inside of the cavity, the bottom of the positioning block is fixedly connected to the top of the slider, the bottoms of the two return springs are fixedly connected to the left and right sides of the top of the slider respectively, and the tops of the two return springs are fixedly connected to the top of the inner wall of the cavity. Through the positioning assembly, the top of the positioning block can be moved to the inside of the plug-in block, so that the fixed block and the plug-in block are connected and fixed, and the two return springs play a fixing and rebounding role, so that the positioning block and the slider can automatically rebound to their original position after moving.

[0010] The cam is connected to the two support rods by the spring, and the two support rods are connected to the support rod by the spring.

[0011] In order to improve the use effect of the slider and the positioning block, preferably, the left and right sides of the slider are slidably connected with control grooves, and the two control grooves are respectively opened on the left and right sides of the inner wall of the cavity. Through the two control blocks, the movement range of the slider and the positioning block can be controlled, so that the slider and the positioning block can only move vertically upward or downward inside the cavity.

[0012] In order to make the two pull rods move better, preferably, the bottom of the two pull rods are slidably connected with a long rod, and the left and right sides of the long rod are fixedly connected to the bottom of the left and right sides of the inner wall of the cavity respectively. The long rod plays a limiting and supporting role, so that the two pull rods can only move horizontally to the left or right inside the cavity.

[0013] In order to avoid collision between the mobile frame and the body when closing, preferably, a first shock-absorbing pad is fixedly connected to the top of the right side of the body, and a second shock-absorbing pad is fixedly connected to the left side of the mobile frame. The first shock-absorbing pad and the second shock-absorbing pad play a protective role and can reduce the impact force generated by the collision between the left side of the mobile frame and the right side of the body.

[0014] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0015] The utility model is provided with structural components such as a chamfering machine, a machine body, a controller, a rotating component, a silicon wafer, a grinder and a water outlet pipe. The chamfering machine can be used to chamfer the edge of the silicon wafer, the protective component can be used to prevent the silicon wafer processing process from being affected, the positioning component can enable the fixed block and the plug-in block to be connected and fixed, so that the movable frame can be moved to the left and then fixed, and the movable component can enable the fixed block and the plug-in block to be disengaged, so that the movable frame can be moved to the right, thereby achieving the effect of preventing the silicon wafer processing process from being affected. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 This is a schematic diagram of the three-dimensional structure provided by an embodiment of the utility model;

[0017] Figure 2 This is a front perspective structural diagram of a chamfering machine provided by an embodiment of the utility model;

[0018] Figure 3 This is a three-dimensional structural diagram of a protective assembly provided by an embodiment of the present utility model;

[0019] Figure 4 This is an exploded view of the structure of the protection assembly provided by the embodiment of the utility model;

[0020] Figure 5 The embodiment of the present utility model provides Figure 4 Enlarged view of point A in the middle;

[0021] Figure 6 It is a detailed three-dimensional diagram of the local structure provided by an embodiment of the present utility model.

[0022] In the figure: 1. Chamfering machine; 101. Machine body; 102. Controller; 103. Rotating assembly; 104. Silicon wafer; 105. Angle grinder; 106. Water outlet pipe; 2. Protective assembly; 201. Moving frame; 202. Transparent plate; 203. Limit block; 3. Fixed block; 4. Plug-in block; 5. Cavity; 6. Positioning assembly; 601. Positioning block; 602. Slider; 603. Return spring; 7. Moving assembly; 701. Pull rod; 702. Tension spring; 703. Short rod; 704. Transmission rod; 705. Support block; 8. Lighting lamp; 9. Control slot; 10. Long rod; 11. First shock-absorbing pad; 12. Second shock-absorbing pad. DETAILED DESCRIPTION

[0023] In order to further understand the content, features and effects of the present invention, the following embodiments are given as examples and described in detail with reference to the accompanying drawings.

[0024] The structure of the present utility model is described in detail below with reference to the accompanying drawings.

[0025] like Figures 1 to 6As shown, a protective component of a silicon wafer processing chamfering device provided by an embodiment of the present invention includes a chamfering machine 1 and a protective component 2. The chamfering machine 1 includes a body 101, a controller 102, a rotating component 103, a silicon wafer 104, an angle grinder 105 and a water outlet pipe 106. The controller 102 is installed on the left side of the top of the body 101. The rotating component 103 and the water outlet pipe 106 are both installed at the bottom of the right side of the body 101 and can be extended left and right. The silicon wafer 104 is installed on the top of the rotating component 103. The right side of the angle grinder 105 is fixedly connected to the right side inside the body 101. The protective component 2 is located on the right side of the top of the body 101. The protective component 2 includes a movable frame 201, multiple transparent plates 202 and two limit blocks 203. The two The opposite ends of the limit blocks 203 are fixedly connected to the right sides of the front and rear sides of the body 101 respectively, and the bottoms of the front and rear sides of the mobile frame 201 are slidably connected to the opposite ends of the two limit blocks 203 respectively, and multiple transparent plates 202 are respectively installed on the front and rear sides and the top of the mobile frame 201; the chamfering machine 1 is used to chamfer the edges of the silicon wafer 104; the protective component 2 is used to prevent the silicon wafer 104 from being affected during the processing. In order to allow the mobile frame 201 to be fixed after moving to the left and to be able to move to the right and open, the left side of the front side of the front limit block 203 is fixedly connected to the fixed block 3, and the left side of the front bottom of the mobile frame 201 is fixedly connected to the plug-in block 4. The bottom of the plug-in block 4 can be slidably connected to the top of the front limit block 203, and the inner of the fixed block 3 A cavity 5 is provided in the body 101, and a positioning component 6 and a moving component 7 are respectively provided inside the cavity 5. A lighting lamp 8 is installed on the right side of the body 101, and the water outlet pipe 106 is located on the top of the silicon wafer 104. Through the positioning component 6, the moving frame 201 can be moved to the left and then fixed, thereby avoiding affecting the processing of the silicon wafer 104. Through the moving component 7, the moving frame 201 can be moved to the right, so that the silicon wafer 104 can be replaced. In order to enable the fixed block 3 and the plug-in block 4 to be connected and fixed, the positioning component 6 includes a positioning block 601, a slider 602 and two return springs 603. The surfaces of the positioning block 601 and the slider 602 are movably connected to the inside of the cavity 5, and the bottom of the positioning block 601 is fixed to the top of the slider 602 The bottoms of the two return springs 603 are fixedly connected to the left and right sides of the top of the slider 602 respectively, and the tops of the two return springs 603 are fixedly connected to the top of the inner wall of the cavity 5. Through the positioning component 6, the top of the positioning block 601 can be moved to the inside of the plug-in block 4, so that the fixed block 3 is connected and fixed with the plug-in block 4. The two return springs 603 play a fixing and rebounding role, so that the positioning block 601 and the slider 602 can automatically rebound to their original position after moving. In order to make the fixed block 3 and the plug-in block 4 disengage, the moving component 7 includes two pull rods 701, a tension spring 702, two short rods 703, two transmission rods 704 and two support blocks 705. The surfaces of the two pull rods 701 are movably connected to the inside of the cavity 5.The opposite ends of the two pull rods 701 are fixedly connected to the opposite sides of the tension spring 702, the opposite ends of the two short rods 703 are movably connected to the top of the front sides of the two pull rods 701, the opposite sides of the two short rods 703 are movably connected to the bottom of the front sides of the two transmission rods 704, the opposite sides of the two transmission rods 704 are movably connected to the front sides of the two support blocks 705, the opposite sides of the two support blocks 705 are fixedly connected to the left and right sides of the inner wall of the cavity 5, and the two transmission rods 704 are movably connected to the front sides of the two support blocks 705. The top of the front side is movably connected to the interior of the slider 602. By moving the assembly 7, the positioning block 601 can be moved out from the interior of the plug-in block 4, so that the movable frame 201 can drive the plug-in block 4 to move to the right, thereby causing the plug-in block 4 to break contact with the fixed block 3. The use of the tension spring 702 plays a fixing and rebound role, so that the two pull rods 701, the two short rods 703 and the two transmission rods 704 automatically rebound to their original positions after moving. In order to improve the use effect of the slider 602 and the positioning block 601, the left and right sides of the slider 602 are Both sides are slidably connected with control grooves 9, and the two control grooves 9 are respectively opened on the left and right sides of the inner wall of the cavity 5. The moving range of the slider 602 and the positioning block 601 can be controlled by the two control blocks, so that the slider 602 and the positioning block 601 can only move vertically upward or downward inside the cavity 5. In order to make the two pull rods 701 move better, the bottom of the two pull rods 701 is slidably connected with a long rod 10. The left and right sides of the long rod 10 are respectively fixedly connected to the bottom of the left and right sides of the inner wall of the cavity 5. Rod 10 acts as a limiter and support, allowing the two pull rods 701 to move horizontally only to the left or right within cavity 5. To prevent collision between the mobile frame 201 and the body 101 when closing, a first shock-absorbing pad 11 is fixedly connected to the top of the right side of the body 101, and a second shock-absorbing pad 12 is fixedly connected to the left side of the mobile frame 201. These first and second shock-absorbing pads 11 and 12 provide protection, reducing the impact force generated by a collision between the left side of the mobile frame 201 and the right side of the body 101.

[0026] The working principle of this utility model:

[0027] When the movable frame 201 needs to be opened, the two pull rods 701 are pulled in opposite directions by manpower, and the two short rods 703 are moved in opposite directions. The movement of the two short rods 703 will cause the two transmission rods 704 to rotate, so that the two transmission rods 704 will rotate with the two support blocks 705 as the center of the circle, and the tops of the two transmission rods 704 will rotate downward, so that the slider 602 can be moved downward and the positioning block 601 can be moved downward, so that the positioning block 601 is removed from the inside of the plug-in block 4. At this time, the movable frame 201 can be moved to the right, so that it can be more Replace the silicon wafer 104 for processing and move the movable frame 201 to the left. The movement of the two pull rods 701 will cause the tension spring 702 to deform. After loosening the two pull rods 701, the elastic action of the tension spring 702 causes the two pull rods 701 to drive the two short rods 703 and the two transmission rods 704 to rebound to their original positions. The movement of the slider 602 will cause the two tension springs 702 to deform. After loosening the two pull rods 701, the elastic action of the two tension springs 702 causes the slider 602 to drive the positioning block 601 to rebound to the inside of the plug-in block 4, thereby moving the movable frame 201 to the left and then fixing it.

[0028] It should be noted that, in this document, relational terms such as first and second, etc., are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the terms "comprises," "comprising," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that includes a list of elements includes not only those elements but also other elements not explicitly listed, or elements inherent to such process, method, article, or apparatus.

[0029] The above description is only a preferred embodiment of the present invention and does not constitute any form of limitation to the present invention. Although the present invention has been disclosed as a preferred embodiment as above, it is not intended to limit the present invention. Any technician familiar with this patent will not depart from the scope of the technical solution of the present invention.

Claims

1. A protective assembly for a silicon wafer processing chamfering device, comprising a chamfering machine (1) and a protective assembly (2), characterized in that: The chamfering machine (1) comprises a machine body (101), a controller (102), a rotating assembly (103), a silicon wafer (104), an angle grinder (105) and a water outlet pipe (106), wherein the controller (102) is mounted on the left side of the top of the machine body (101), the rotating assembly (103) and the water outlet pipe (106) are both mounted on the bottom of the right side of the machine body (101) and can be extended left and right, the silicon wafer (104) is mounted on the top of the rotating assembly (103), the right side of the angle grinder (105) is fixed to the right side of the machine body (101), and the angle grinder (105) is fixed to the right side of the machine body (101). The protective assembly (2) is fixedly connected, the protective assembly (2) is located on the right side of the top of the machine body (101), the protective assembly (2) comprises a movable frame (201), a plurality of transparent plates (202) and two limit blocks (203), the opposite ends of the two limit blocks (203) are respectively fixedly connected to the right sides of the front and rear sides of the machine body (101), the bottoms of the front and rear sides of the movable frame (201) are respectively slidably connected to the opposite ends of the two limit blocks (203), and the plurality of transparent plates (202) are respectively installed on the front and rear sides and the top of the movable frame (201); The chamfering machine (1) is used for chamfering the edge of a silicon wafer (104); The protection component (2) is used to prevent the silicon wafer (104) processing process from being affected.

2. The protective assembly of a silicon wafer processing chamfering device according to claim 1, characterized in that: The left side of the front side of the limit block (203) is fixedly connected to a fixed block (3); the left side of the front bottom of the movable frame (201) is fixedly connected to a plug-in block (4); the bottom of the plug-in block (4) can be slidably connected to the top of the front side limit block (203); a cavity (5) is provided inside the fixed block (3); a positioning assembly (6) and a movable assembly (7) are respectively provided inside the cavity (5); a lighting lamp (8) is installed on the right side inside the body (101); and the water outlet pipe (106) is located on the top of the silicon chip (104).

3. The protective assembly of a silicon wafer processing chamfering device according to claim 2, characterized in that: The positioning assembly (6) comprises a positioning block (601), a slider (602) and two return springs (603); the surfaces of the positioning block (601) and the slider (602) are both movably connected to the interior of the cavity (5); the bottom of the positioning block (601) is fixedly connected to the top of the slider (602); the bottoms of the two return springs (603) are respectively fixedly connected to the left and right sides of the top of the slider (602); and the tops of the two return springs (603) are both fixedly connected to the top of the inner wall of the cavity (5).

4. The protective assembly of a silicon wafer processing chamfering device according to claim 3, characterized in that: The moving assembly (7) includes two pull rods (701), a tension spring (702), two short rods (703), two transmission rods (704) and two support blocks (705), the surfaces of the two pull rods (701) are movably connected to the inside of the cavity (5), the opposite ends of the two pull rods (701) are fixedly connected to the opposite side of the tension spring (702), the opposite ends inside the two short rods (703) are movably connected to the top of the front side of the two pull rods (701), the opposite sides inside the two short rods (703) are movably connected to the bottom of the front side of the two transmission rods (704), the opposite sides inside the two transmission rods (704) are movably connected to the front sides of the two support blocks (705), the opposite sides of the two support blocks (705) are fixedly connected to the left and right sides of the inner wall of the cavity (5), and the tops of the front sides of the two transmission rods (704) are movably connected to the inside of the slider (602).

5. The protective assembly of a silicon wafer processing chamfering device according to claim 3, characterized in that: The left and right sides of the slider (602) are both slidably connected with control grooves (9), and the two control grooves (9) are respectively opened on the left and right sides of the inner wall of the cavity (5).

6. The protective assembly of a silicon wafer processing chamfering device according to claim 4, characterized in that: The bottoms of the two pull rods (701) are slidably connected to a long rod (10), and the left and right sides of the long rod (10) are fixedly connected to the bottoms of the left and right sides of the inner wall of the cavity (5) respectively.

Images