Sealing device of vacuum coating equipment

Abstract

The utility model discloses a sealing device for vacuum coating equipment, which comprises a sealing mechanism with a spring sealing ring, a filling cavity formed among a flange shell, a transmission shaft and two vacuum bearings, and a first channel and a second channel arranged on the flange shell, the N2 filling device is connected with one end, far away from the transmission shaft, of the first channel; the N2 pressure detection sensor is connected with one end, far away from the transmission shaft, of the second channel; the special gas leakage condition can be detected, and the gas pressure in the filling cavity is maintained; compared with the prior art, whether gas leakage occurs or not can be detected, meanwhile, the gas leakage condition is remedied, and leakage of special gas is delayed or reduced; the spring seal sealing ring, the sealing ring pressing ring and the end face sealing ring are sequentially arranged in the axial direction of the transmission shaft. Compared with the prior art, the cost can be reduced, and the installation difficulty is also reduced.

Description

Technical Field

[0001] The utility model relates to a sealing device for vacuum coating equipment, in particular to a sealing device for vacuum coating equipment. Background Art

[0002] Heterojunction solar cells are the third-generation technology, following the PERC and TOPCON process paths. Current mass-produced efficiencies exceed 25.5%, and they offer advantages such as a simple process flow, low light attenuation, and high power generation yields. Plasma-enhanced chemical vapor deposition (PECVD) is responsible for depositing the passivation and doping layers in heterojunction solar cell manufacturing. In the heterojunction process, PECVD performs sequential coating according to the I+IN+P process flow. The main process chambers of PECVD vacuum coating equipment are divided into four categories: loading chamber, heating chamber, process chamber, and unloading chamber. Each chamber requires maintaining a certain vacuum level during the coating process. The carrier carrying the silicon wafer passes through each of these chambers in sequence under the control of a transport system. After preheating in the heating chamber, it enters the process chamber for coating. Special gases involved in the coating process, such as SiH₄, B₂H₆, and PH₃, can pose serious health hazards and explosion risks if released into the air. At present, the transmission system mainly uses magnetic fluid sealing devices as the transmission bearing mechanism. Under the action of the servo motor, multiple magnetic fluids are driven to rotate through gear transmission or belt transmission. The carrier plate passes through the transmission rollers of each cavity in turn, thereby realizing online transmission of the entire line.

[0003] Currently, transmission systems often use magnetic fluid sealing devices (hereinafter referred to as magnetic fluid) as the carrier for carrier transport. Multiple pairs of symmetrically arranged magnetic fluids are installed in the cavity to ensure smooth carrier transport. The magnetic fluid consists of a non-magnetic base, bearings, magnetic poles, permanent magnets, a magnetic shaft, and magnetic fluid. Under the influence of a uniform and stable magnetic field, the magnetic fluid fills the specified space, establishing a multi-stage "O-ring seal" to achieve a sealing effect.

[0004] However, existing magnetic fluid sealing devices have high requirements on the processing accuracy of the flange shell and high cost of structural parts. At the same time, magnetic fluid has no detection function and cannot detect gas leakage. Utility Model Content

[0005] The utility model overcomes the shortcomings of the prior art and provides a sealing device for vacuum coating equipment.

[0006] To achieve the above-mentioned purpose, the technical solution adopted in the present invention is as follows: a sealing device for vacuum coating equipment, comprising: a flange housing, two vacuum bearings mounted on the inner wall of the flange housing, a transmission shaft sleeved on the inner wall of the vacuum bearing, two sealing mechanisms centrally symmetrically arranged between the flange housing and the transmission shaft, and a detection mechanism arranged on the flange housing;

[0007] The detection mechanism includes: a filling cavity formed between the flange housing, the transmission shaft, and the two vacuum bearings; a first channel and a second channel provided in the flange housing; an N2 charging device connected to an end of the first channel away from the transmission shaft; and an N2 pressure detection sensor connected to an end of the second channel away from the transmission shaft; the first channel and the second channel are in communication with the filling cavity;

[0008] In the stable state, the N2 pressure detection sensor is used to detect the initial air pressure, and the N2 charging device is used to charge N2; in the leakage state, the N2 pressure detection sensor is used to detect the initial air pressure, send startup information and output leakage information, and the N2 charging device is used to receive the startup information and charge N2.

[0009] In a preferred embodiment of the present invention, the initial air pressure is 0.5 MPa.

[0010] In a preferred embodiment of the present invention, the stable state is a state in which the initial air pressure is 0.5 MPa, and the leakage state is a state in which the initial air pressure drops by 50% within 1 second.

[0011] In a preferred embodiment of the present invention, the N2 pressure detection sensor includes: an N2 pressure sensor and an alarm module connected to the N2 pressure sensor; the alarm module is used to send startup information and output leakage information.

[0012] In a preferred embodiment of the present invention, the N2 charging device includes: an air pump, a control module connected to the air pump; the control module is connected to the warning module; the control module is used to receive startup information and start the air pump.

[0013] In a preferred embodiment of the present invention, the sealing mechanism includes: a pan-seal sealing ring connected to the inner wall of the flange housing, a sealing ring pressure ring connected to the inner wall of the flange housing, and an end face sealing ring connected to the end face of the flange housing.

[0014] In a preferred embodiment of the present invention, the pan-seal sealing ring, the sealing ring pressure ring and the end face sealing ring are arranged in sequence along the axial direction of the transmission shaft.

[0015] In a preferred embodiment of the present invention, the pan-seal sealing ring includes: a sealing ring and a spring embedded in the sealing ring.

[0016] In a preferred embodiment of the present invention, the flange housing is provided with a cooling mechanism.

[0017] In a preferred embodiment of the present invention, the cooling mechanism includes: a cooling cavity provided on the flange housing, a cooling water inlet and a cooling water outlet provided on the flange housing; the cooling water inlet and the cooling water outlet are in communication with the cooling cavity.

[0018] This invention solves the defects in the background technology and has the following beneficial effects:

[0019] (1) A detection mechanism is formed by setting a sealing mechanism including a pan-seal sealing ring and a filling cavity formed between the flange housing, the transmission shaft and the two vacuum bearings, opening a first channel and a second channel on the flange housing, a N2 charging device connected to the end of the first channel away from the transmission shaft, and a N2 pressure detection sensor connected to the end of the second channel away from the transmission shaft; it can detect the leakage of special gases and maintain the air pressure in the filling cavity; compared with the existing technology, it can detect whether there is a gas leakage and remedy the gas leakage at the same time, thereby delaying or reducing the leakage of special gases.

[0020] (2) A sealing mechanism is provided, including: a pan-seal sealing ring connected to the inner wall of the flange shell, a sealing ring pressure ring connected to the inner wall of the flange shell, and an end face sealing ring connected to the end face of the flange shell; the pan-seal sealing ring, the sealing ring pressure ring and the end face sealing ring are arranged in sequence along the axial direction of the transmission shaft; compared with the existing technology, the cost can be reduced and the difficulty of installation can also be reduced. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments described in the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without inventive work.

[0022] Figure 1 It is a three-dimensional structural diagram of a preferred embodiment of this utility;

[0023] Figure 2 It is a preferred embodiment of this utility;

[0024] Figure 3 It is a preferred embodiment of this utility;

[0025] In the figure: 1. Flange housing; 2. Vacuum bearing; 3. Drive shaft; 4. Sealing mechanism; 41. Pan-seal sealing ring; 42. Sealing ring pressure ring; 43. End face sealing ring; 5. Detection mechanism; 51. Filling cavity; 52. First channel; 53. Second channel; 54. N2 charging device; 55. N2 pressure detection sensor; 6. Cooling mechanism. DETAILED DESCRIPTION

[0026] The following will be combined with the drawings in the practical embodiment to clearly and completely describe the technical solutions in the practical embodiment. Obviously, the described embodiment is only a part of the embodiment of this utility, not all of the embodiments. Based on the embodiment of this utility, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of this utility.

[0027] In the following description, many specific details are set forth to facilitate a full understanding of the present invention, but the present invention may also be implemented in other ways different from those described herein. Therefore, the scope of protection of the present invention is not limited to the specific embodiments disclosed below.

[0028] In the description of the present application, it should be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the scope of protection of the present application. In addition, the terms "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, features defined as "first", "second", etc. may explicitly or implicitly include one or more of the features. In the description of the present utility model, unless otherwise specified, "multiple" means two or more.

[0029] In the description of this application, it should be noted that, unless otherwise expressly specified or limited, the terms "installed," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; they can refer to mechanical connections or electrical connections; they can refer to direct connections or indirect connections through an intermediate medium; and they can refer to internal connections between two components. Those skilled in the art will understand the specific meanings of the above terms in this application based on specific circumstances.

[0030] like Figure 1 、 Figure 2 and Figure 3 As shown, a sealing device for vacuum coating equipment includes: a flange housing 1, two vacuum bearings 2 mounted on the inner wall of the flange housing 1, a transmission shaft 3 sleeved on the inner wall of the vacuum bearing 2, two sealing mechanisms 4 centrally symmetrically arranged between the flange housing 1 and the transmission shaft 3, and a detection mechanism 5 arranged on the flange housing 1;

[0031] like Figure 1 As shown, the cross section of the flange housing 1 is T-shaped. When two flange housings 1 are symmetrically arranged on the transmission shaft 3, objects placed on the flange housing 1 can be stable.

[0032] like Figure 2 As shown, the sealing mechanism 4 includes a flooded seal ring 41 connected to the inner wall of the flange housing 1, a sealing ring pressure ring 42 connected to the inner wall of the flange housing 1, and an end face sealing ring 43 connected to the end face of the flange housing 1. The flooded seal ring 41, the sealing ring pressure ring 42, and the end face sealing ring 43 are sequentially arranged along the axial direction of the transmission shaft 3. Using a flooded PTFE seal ring instead of a magnetic fluid for axial sealing is cost-effective, requires less machining of the flange housing, and significantly reduces installation difficulty. The double-layer sealing structure also allows for rapid maintenance of the transmission device and rapid resumption of production.

[0033] Furthermore, the pan-seal sealing ring 41 includes a sealing ring and a spring embedded in the sealing ring.

[0034] Specifically, the sealing ring material is polytetrafluoroethylene (PTFE). As a sealing material with excellent chemical resistance and good heat resistance, PTFE can be used in most chemical fluids, solvents, hydraulic oils, lubricating oils, etc.

[0035] The spring is a stainless steel spring that provides the necessary actuation effect to overcome the slight eccentricity of the metal mating surface and the wear of the sealing lip, thereby maintaining stable sealing performance.

[0036] The detection mechanism 5 includes: a filling cavity 51 formed between the flange housing 1, the transmission shaft 3, and the two vacuum bearings 2; a first channel 52 and a second channel 53 provided on the flange housing 1; an N2 charging device 54 connected to an end of the first channel 52 away from the transmission shaft 3; and an N2 pressure detection sensor 55 connected to an end of the second channel 53 away from the transmission shaft 3; the first channel 52 and the second channel 53 are in communication with the filling cavity 51;

[0037] Specifically, the detection mechanism 5 includes a stable state and a leakage state. The stable state is a state in which the initial air pressure of the filling chamber 51 is 0.5 MPA, and the leakage state is a state in which the initial air pressure of the filling chamber 51 drops by 50% within 1 second. When in the leakage state, the N2 in the filling chamber 51 will leak out, causing the air pressure in the filling chamber 51 to drop.

[0038] Furthermore, the initial air pressure of the filling chamber 51 is 0.5 MPa. The positive pressure of the filling chamber 51 with an initial air pressure of 0.5 MPa will quickly fill the cavity under the action of the pressure difference. When the sealing mechanism fails, the N2 in the filling chamber 51 can rush out from the position of the sealing mechanism, thereby preventing the special gas from leaking from the failed sealing mechanism.

[0039] When in a stable state, the N2 pressure detection sensor 55 is used to detect the initial air pressure, and the N2 charging device 54 is used to charge N2; when in a leakage state, the N2 pressure detection sensor 55 is used to detect the initial air pressure, send startup information and output leakage information, and the N2 charging device 54 is used to receive startup information and charge N2.

[0040] Furthermore, the N2 pressure detection sensor 55 includes: an N2 pressure sensor and an alarm module connected to the N2 pressure sensor; the alarm module is used to send startup information and output leakage information; the N2 pressure sensor is used to detect the air pressure in the filling cavity 51 and determine the leakage status, and the alarm module sends startup information to fill N2 into the filling cavity 51, thereby maintaining the air pressure in the filling cavity 51, delaying the leakage of special gas into the air, and then outputting leakage information to the operator, so that the operator can quickly maintain the sealing device of the vacuum coating equipment.

[0041] Furthermore, the N2 charging device 54 includes: an air pump, a control module connected to the air pump; the control module is connected to the warning module; the control module is used to receive the start-up information and start the air pump.

[0042] It is worth mentioning that the N2 pressure detection sensor 55 is equipped with a positioning module. When outputting leakage information, maintenance personnel can quickly find the damaged sealing device of the vacuum coating equipment, reducing the searching time.

[0043] like Figure 2 As shown, further, the flange housing 1 is provided with a cooling mechanism 6 .

[0044] Furthermore, the cooling mechanism 6 includes: a cooling cavity provided on the flange housing 1 , and a cooling water inlet and a cooling water outlet provided on the flange housing 1 ; the cooling water inlet and the cooling water outlet are in communication with the cooling cavity.

[0045] Specifically, corresponding mounting holes and positioning holes are opened on the end face of the flange shell 1, and cooling water inlets and outlets are provided for the cavity that needs to be heated. The cooling water circulates inside the flange shell 1 through the internal cooling cavity, thereby cooling key components such as the sealing ring, vacuum bearing 2 and transmission shaft 3.

[0046] When the present invention is used, in a stable state, N2 is filled into the filling chamber 51 through the N2 charging device 54, and the filling chamber 51 is filled to an initial air pressure of 0.5 MPA. When a leakage state occurs, the N2 pressure detection sensor 55 detects that the air pressure in the filling chamber 51 drops by 50% within 1 second, and sends a start message to the N2 charging device 54. The N2 charging device 54 fills N2 into the filling chamber 51. At the same time, the N2 pressure detection sensor 55 outputs leakage information to the maintenance personnel to remind the maintenance personnel to perform maintenance.

[0047] The above is based on the ideal embodiment of this utility as inspiration. Through the above description, relevant personnel can make various changes and modifications without departing from the scope of this utility technology. The technical scope of this utility is not limited to the content of the specification, and the technical scope must be determined according to the scope of the claims.

Claims

1. A sealing device for vacuum coating equipment, characterized in that: include: A flange housing (1), two vacuum bearings (2) mounted on the inner wall of the flange housing (1), a transmission shaft (3) sleeved on the inner wall of the vacuum bearing (2), two sealing mechanisms (4) centrally symmetrically arranged between the flange housing (1) and the transmission shaft (3), and a detection mechanism (5) arranged on the flange housing (1); The detection mechanism (5) comprises: a filling cavity (51) formed between the flange housing (1), the transmission shaft (3) and the two vacuum bearings (2); a first channel (52) and a second channel (53) provided on the flange housing (1); an N2 charging device (54) connected to an end of the first channel (52) away from the transmission shaft (3); and an N2 pressure detection sensor (55) provided to an end of the second channel (53) away from the transmission shaft (3); the first channel (52) and the second channel (53) are in communication with the filling cavity (51); and the N2 pressure detection sensor (55) is connected to the N2 charging device (54).

2. The sealing device for vacuum coating equipment according to claim 1, characterized in that: The sealing mechanism (4) comprises: a pan-seal sealing ring (41) connected to the inner wall of the flange housing (1), a sealing ring pressure ring (42) connected to the inner wall of the flange housing (1), and an end face sealing ring (43) connected to the end face of the flange housing (1); the pan-seal sealing ring (41), the sealing ring pressure ring (42), and the end face sealing ring (43) are arranged in sequence along the axial direction of the transmission shaft (3).

3. The sealing device for vacuum coating equipment according to claim 1, characterized in that: The N2 pressure detection sensor (55) comprises: an N2 pressure sensor and a warning module connected to the N2 pressure sensor; the warning module is used to send startup information and output leakage information.

4. The sealing device for vacuum coating equipment according to claim 3, characterized in that: The N2 charging device (54) comprises: an air pump, a control module connected to the air pump; the control module is connected to the warning module; the control module is used to receive start-up information and start the air pump.

5. The sealing device for vacuum coating equipment according to claim 1, characterized in that: The detection mechanism (5) includes a stable state and a leakage state. The stable state is a state in which the filling chamber (51) maintains the initial air pressure. The leakage state is a state in which the initial air pressure of the filling chamber (51) drops by 50% within 1 second.

6. The sealing device for vacuum coating equipment according to claim 5, characterized in that: The initial air pressure of the filling chamber (51) is 0.5 MPa.

7. The sealing device for vacuum coating equipment according to claim 6, characterized in that: In the stable state, the N2 pressure detection sensor (55) is used to detect the initial gas pressure, and the N2 charging device (54) is used to charge N2; In the leakage state, the N2 pressure detection sensor (55) is used to detect the initial gas pressure, send start-up information and output leakage information, and the N2 charging device (54) is used to receive the start-up information and charge N2.

8. The sealing device for vacuum coating equipment according to claim 2, characterized in that: The pan-seal sealing ring (41) comprises a sealing ring and a spring embedded in the sealing ring.

9. The sealing device for vacuum coating equipment according to claim 1, characterized in that: The flange housing (1) is provided with a cooling mechanism (6).

10. The sealing device for vacuum coating equipment according to claim 9, characterized in that: The cooling mechanism (6) comprises: a cooling cavity provided on the flange housing (1), a cooling water inlet and a cooling water outlet provided on the flange housing (1); the cooling water inlet and the cooling water outlet are in communication with the cooling cavity.

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