Electrode cooling assembly for PVD (Physical Vapor Deposition) coating equipment
By designing an electrode cooling assembly including a cooling fan, a gas reversing box and reversing blades in the PVD coating equipment, the problem of heat dissipation dead corners of the evaporation source electrode is solved, and efficient heat dissipation and extended electrode life are achieved.
Patent Information
- Application Number
- CN202422511848.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-10-17
- Publication Date
- 2025-09-12
- Estimated Expiration
- 2034-10-17
AI Technical Summary
The heat dissipation effect of the evaporation source electrode in the existing PVD coating equipment is poor, and there are heat dissipation dead corners, which shortens the service life of the electrode.
An electrode cooling assembly was designed, which included a cooling fan, a gas reversing box, an L-shaped sliding bar, a return spring, and reversing blades. The wind direction was changed and decelerated by the cooperation of the driving gear and the driven gear, ensuring efficient heat dissipation of the evaporation source electrode.
The heat dissipation efficiency of the evaporation source electrode is improved, the service life of the electrode is extended, the occurrence of heat dissipation dead corners is prevented, and the normal operation of the PVD coating equipment is ensured.
Smart Images
Figure CN223329372U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of electrode cooling equipment for PVD coating equipment, in particular to an electrode cooling component for PVD coating equipment. Background Art
[0002] PVD coating equipment is a device that converts the material source into gas through physical methods in a vacuum environment and deposits it on the surface of a substrate or product to form a thin film. Electrodes are required in the PVD coating equipment to achieve the above functions, where the electrodes include evaporation source electrodes, target electrodes, etc. Evaporation source electrode: mainly used to heat the evaporation source material, so that its atoms or molecules evaporate and convert into gas, and then deposited on the surface of the substrate to form a thin film; target electrode: the target electrode is used as a sputtering source and is bombarded by high-energy particles, so that the target atoms or molecules are sputtered out and deposited on the surface of the substrate to form a thin film.
[0003] At present, in most PVD coating equipment, a cooling fan is installed next to the evaporation source electrode during long-term use to extend the service life of the electrode. However, the wind direction of the existing cooling fan is only to dissipate heat to the electrode in front. This method will cause the electrode to have a heat dissipation dead angle, resulting in poor heat dissipation effect of the electrode and certain limitations. Utility Model Content
[0004] The purpose of the present utility model is to provide an electrode cooling assembly for PVD coating equipment to solve the problems raised in the above background technology.
[0005] To achieve the above-mentioned purpose, the utility model provides the following technical solution: an electrode cooling assembly for PVD coating equipment, comprising a mounting box, a cooling fan is fixedly installed on one side of the mounting box, and a cooling fan is fixedly connected to a gas reversing box on one side, an inner wall of the gas reversing box is slidably connected to an L-shaped sliding bar on one side of the inner wall of the gas reversing box. Both ends of the L-shaped sliding bar are fixedly connected to a return spring, one end of each return spring is fixedly connected to the inner wall of the gas reversing box, and a pulling rod is fixedly connected to the middle part of the upper end of the L-shaped sliding bar. A driven gear is provided inside the gas reversing box, one side of the driven gear is fixedly connected to a toggle rod, and one side of the outer surface of the toggle rod is slidably connected to one side of the outer surface of the pull rod, and a plurality of reversing blades are rotatably connected to the inner wall of the gas reversing box, and one side of the plurality of reversing blades is fixedly connected to a pull block, and one side of the plurality of pull blocks is rotatably connected to the upper end of the L-shaped sliding bar.
[0006] As a further preferred embodiment of the present technical solution, the outer surface of the L-shaped sliding bar is slidably connected to a guide frame, and one end of the guide frame is fixedly connected to the inner wall of the gas reversing box.
[0007] As a further preferred embodiment of the present technical solution, one side of the pull rod is fixedly connected to a reinforcing rib, and one side of the reinforcing rib is fixedly connected to the upper end of the L-shaped sliding bar.
[0008] As a further preferred embodiment of the present technical solution, the output end of the cooling fan is transmission-connected with a driving gear, and the outer surface of the driving gear is meshed with the outer surface of the driven gear.
[0009] As a further preferred embodiment of the present technical solution, a protective frame is fixedly installed on the other side of the cooling fan.
[0010] As a further preferred embodiment of the present technical solution, a plurality of evaporation source electrodes are fixedly installed on the inner wall of the installation box, a sealing strip is fixedly connected between the plurality of evaporation source electrodes, a mounting frame is fixedly connected to the outer surface of the installation box, and a plurality of fixing bolts are threadedly connected to the outer surface of the installation frame.
[0011] The utility model provides an electrode cooling assembly for PVD coating equipment, which has the following beneficial effects:
[0012] (1) The utility model turns on the cooling fan, the driving gear drives the driven gear to rotate, the toggle rod pushes the pull rod, and the L-shaped sliding bar slides on the inner wall of the gas reversing box. When the toggle rod slides away from the pull rod, the reaction force of the reset spring pushes the L-shaped sliding bar in the opposite direction, so that the L-shaped sliding bar slides back and forth on the inner wall of the gas reversing box. While the L-shaped sliding bar slides, the pull block pulls the reversing blade to rotate, and the wind blown out by the cooling fan is changed in direction, so as to dissipate heat efficiently for the evaporation source electrode in the installation box, thereby improving the service life of the evaporation source electrode.
[0013] (2) The utility model adopts the structural design of the driving gear and the driven gear, and the driving gear drives the driven gear. Since the driving gear is smaller than the driven gear, the cooperation between the driving gear and the driven gear has a deceleration effect, preventing the reversing blades on the gas reversing box from rotating too fast and affecting the gas reversing effect. BRIEF DESCRIPTION OF THE DRAWINGS
[0014] Figure 1 It is a schematic diagram of the three-dimensional structure of the utility model;
[0015] Figure 2 This is a schematic diagram of the cross-sectional structure of the installation box in the present utility model;
[0016] Figure 3 Schematic diagram of the cross-sectional structure of the gas reversing box in the present utility model;
[0017] Figure 4 for Figure 3 A partial enlarged schematic diagram of area A in the middle;
[0018] In the figure: 1. Installation box; 2. Cooling fan; 3. Evaporation source electrode; 4. Installation frame; 5. Fixing bolts; 6. Sealing strip; 7. Protective frame; 8. Reversing blades; 9. Gas reversing box; 10. Driving gear; 11. Driven gear; 12. Pull block; 13. Toggle rod; 14. Pull rod; 15. Reinforcing rib; 16. L-shaped sliding bar; 17. Return spring; 18. Guide frame. DETAILED DESCRIPTION
[0019] The technical solutions in the embodiments of the present invention will be described clearly and completely below with reference to the accompanying drawings in the embodiments of the present invention.
[0020] The utility model provides a technical solution: Figure 1 - Figure 4 As shown, in this embodiment, an electrode cooling assembly for PVD coating equipment includes a mounting box 1, a cooling fan 2 is fixedly mounted on one side of the mounting box 1, a gas reversing box 9 is fixedly connected to one side of the cooling fan 2, an L-shaped sliding bar 16 is slidably connected to one side of the inner wall of the gas reversing box 9, both ends of the L-shaped sliding bar 16 are fixedly connected to a return spring 17, one end of the two return springs 17 is fixedly connected to the inner wall of the gas reversing box 9, a pull rod 14 is fixedly connected to the middle part of the upper end of the L-shaped sliding bar 16, a driven gear 11 is provided inside the gas reversing box 9, a toggle rod 13 is fixedly connected to one side of the driven gear 11, an outer surface of the toggle rod 13 is slidably connected to one side of the outer surface of the pull rod 14, and the inner wall of the gas reversing box 9 is rotated. It is connected to multiple reversing blades 8, and one side of the multiple reversing blades 8 is fixedly connected to a pull block 12. One side of the multiple pull blocks 12 is rotatably connected to the upper end of the L-shaped sliding bar 16. The cooling fan 2 is turned on, the driving gear 10 drives the driven gear 11 to rotate, and the toggle rod 13 pushes the pull rod 14 to make the L-shaped sliding bar 16 slide on the inner wall of the gas reversing box 9. When the toggle rod 13 slides away from the pull rod 14, the reaction force of the return spring 17 pushes the L-shaped sliding bar 16 in the opposite direction, so that the L-shaped sliding bar 16 slides back and forth on the inner wall of the gas reversing box 9. While the L-shaped sliding bar 16 slides, the pull block 12 pulls the reversing blade 8 to rotate, and the wind blown out of the cooling fan 2 is changed in direction, so as to efficiently dissipate heat for the evaporation source electrode 3 in the installation box 1.
[0021] like Figure 4 As shown, the outer surface of the L-shaped sliding bar 16 is slidably connected to a guide frame 18, and one end of the guide frame 18 is fixedly connected to the inner wall of the gas reversing box 9. The guide frame 18 can limit the sliding of the L-shaped sliding bar 16 to prevent the sliding direction of the L-shaped sliding bar 16 from deviating due to long-term use.
[0022] like Figure 4As shown, one side of the pull rod 14 is fixedly connected with a reinforcing rib 15, and one side of the reinforcing rib 15 is fixedly connected to the upper end of the L-shaped sliding bar 16. Through the structural design of the reinforcing rib 15, the strength of the pull rod 14 can be enhanced to prevent the pull rod 14 from being toggled by the toggle rod 13 for a long time, causing the pull rod 14 to be deformed.
[0023] like Figure 3 and Figure 4 As shown, the output end of the cooling fan 2 is connected to the driving gear 10, and the outer surface of the driving gear 10 is meshed with the outer surface of the driven gear 11. The structural design of the driving gear 10 and the driven gear 11 is that the driving gear 10 drives the driven gear 11. Since the driving gear 10 is smaller than the driven gear 11, the cooperation between the driving gear 10 and the driven gear 11 has a deceleration effect, preventing the reversing blades 8 from rotating too fast on the gas reversing box 9, affecting the gas reversing effect.
[0024] like Figure 2 and Figure 3 As shown, a protective frame 7 is fixedly installed on the other side of the cooling fan 2, and the protective frame 7 can protect the cooling fan 2 to prevent external force from hitting the cooling fan 2 and causing damage to the cooling fan 2.
[0025] like Figure 1 and Figure 2 As shown, a plurality of evaporation source electrodes 3 are fixedly mounted on the inner wall of the mounting box 1, and a sealing strip 6 is fixedly connected between the plurality of evaporation source electrodes 3. A mounting frame 4 is fixedly connected to the outer surface of the mounting box 1, and a plurality of fixing bolts 5 are threadedly connected to the outer surface of the mounting frame 4. The structural design of the sealing strip 6 can prevent the heat dissipation wind of the heat dissipation fan 2 from entering the equipment and affecting the PVD coating production.
[0026] The utility model provides an electrode cooling assembly for PVD coating equipment, and the specific working principle is as follows:
[0027] When the PVD coating equipment is used, the electrodes in the equipment are working. When the temperature of the electrodes is high, the cooling fan 2 is turned on, the driving gear 10 drives the driven gear 11 to rotate, and the toggle rod 13 pushes the pull rod 14 to make the L-shaped sliding bar 16 slide on the inner wall of the gas reversing box 9. When the toggle rod 13 slides away from the pull rod 14, the reaction force of the return spring 17 pushes the L-shaped sliding bar 16 in the opposite direction, so that the L-shaped sliding bar 16 can slide back and forth on the inner wall of the gas reversing box 9. While sliding, the L-shaped sliding bar 16 pulls the reversing blade 8 by the pull block 12 to rotate, changing the direction of the wind blown out by the cooling fan 2, and efficiently dissipating the heat for the evaporation source electrode 3 in the installation box 1.
[0028] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations may be made to these embodiments without departing from the principles and spirit of the present invention, and the scope of the present invention is defined by the appended claims and their equivalents.
Claims
1. An electrode cooling assembly for PVD coating equipment, comprising a mounting box (1), characterized in that: A cooling fan (2) is fixedly installed on one side of the installation box (1), and a gas reversing box (9) is fixedly connected to one side of the cooling fan (2). An L-shaped sliding bar (16) is slidably connected to one side of the inner wall of the gas reversing box (9), and both ends of the L-shaped sliding bar (16) are fixedly connected to return springs (17), and one end of each of the two return springs (17) is fixedly connected to the inner wall of the gas reversing box (9). A pull rod (14) is fixedly connected to the middle of the upper end of the L-shaped sliding bar (16). A driven gear (11) is provided inside the gas reversing box (9), one side of the driven gear (11) is fixedly connected to a toggle rod (13), one side of the outer surface of the toggle rod (13) is slidably connected to one side of the outer surface of the pull rod (14), and the inner wall of the gas reversing box (9) is rotatably connected to a plurality of reversing blades (8), one side of the plurality of reversing blades (8) is fixedly connected to a pull block (12), and one side of the plurality of pull blocks (12) is rotatably connected to the upper end of the L-shaped sliding bar (16).
2. The electrode cooling assembly for PVD coating equipment according to claim 1, characterized in that: The outer surface of the L-shaped sliding bar (16) is slidably connected to a guide frame (18), and one end of the guide frame (18) is fixedly connected to the inner wall of the gas reversing box (9).
3. The electrode cooling assembly for PVD coating equipment according to claim 1, characterized in that: One side of the pulling rod (14) is fixedly connected to a reinforcing rib (15), and one side of the reinforcing rib (15) is fixedly connected to the upper end of the L-shaped sliding bar (16).
4. The electrode cooling assembly for PVD coating equipment according to claim 1, characterized in that: The output end of the heat dissipation fan (2) is transmission-connected to a driving gear (10), and the outer surface of the driving gear (10) is meshed with the outer surface of the driven gear (11).
5. The electrode cooling assembly for PVD coating equipment according to claim 1, characterized in that: A protective frame (7) is fixedly mounted on the other side of the cooling fan (2).
6. The electrode cooling assembly for PVD coating equipment according to claim 1, characterized in that: A plurality of evaporation source electrodes (3) are fixedly mounted on the inner wall of the installation box (1), and sealing strips (6) are fixedly connected between the plurality of evaporation source electrodes (3). A mounting frame (4) is fixedly connected to the outer surface of the installation box (1), and a plurality of fixing bolts (5) are threadedly connected to the outer surface of the installation frame (4).