Special rotating rack for ion sputtering coating machine

Abstract

The utility model discloses a special rotating rack for an ion sputtering coating machine, which belongs to the technical field of ion beam sputtering coating machines and comprises a coating box, a cover plate is mounted at the upper end of the coating box, a transmission component is mounted in the cover plate, a motor is mounted at the upper end of the cover plate, and the transmission component is mounted in the transmission component. The output end of the motor is fixedly connected with the transmission end of the transmission assembly, the side end of the coating box is movably connected with a sealing door plate, and the lower end of the transmission assembly is provided with a plurality of uniformly distributed rack assemblies. The film coating operation is synchronously carried out in a revolution and rotation mode, so that when a product is placed on the surface of the rack for coating, the product can be subjected to revolution rotation motion and also can be synchronously subjected to rotation rotation motion, raw materials can be more uniformly distributed on the surface during film coating, and the qualification rate of the product is further improved.

Description

Technical Field

[0001] The utility model relates to the technical field of ion beam sputtering coating machines, and more specifically to a special rotating frame for ion beam sputtering coating machines. Background Art

[0002] Coating is the process of applying a very thin metal film on the surface in order to enhance the hardness, wear resistance and corrosion resistance of the substrate.

[0003] A coating machine is a mechanical device that performs automated coating operations on the surface of a product. Compared with manual operation, the coating machine has a fast operation time and high work efficiency. An ion beam sputtering coating machine is a type of coating machine and is a process testing instrument used in the field of physics.

[0004] However, when the existing ion beam sputtering coating machine is in use, the product is placed on a rotating rack inside the equipment. However, the rotating bracket inside the equipment can only rotate in one direction around its axis and the rotation curve always remains unchanged, which leads to uneven distribution of raw materials on the surface of the product during coating, affecting the product's qualification rate. For this reason, this scheme proposes a rotating rack dedicated to ion sputtering coating machine. Utility Model Content

[0005] 1. Technical problems to be solved:

[0006] In response to the problems existing in the prior art, the purpose of the present invention is to provide a special rotating frame for an ion sputtering coating machine. By improving the existing transmission method, the product no longer rotates around the axis at the same rate during coating, but uses the revolution + rotation method to synchronously perform coating operations. When the product is placed on the surface of the frame for coating, it can perform both revolution and rotation, and synchronous rotation, so that the raw materials can be distributed more evenly on the surface during coating, further improving the product qualification rate.

[0007] 2. Technical solution:

[0008] In order to solve the above problems, the present invention adopts the following technical solutions.

[0009] A rotating frame dedicated to an ion sputtering coating machine includes a coating box, a cover plate installed on the upper end of the coating box, a transmission assembly installed inside the cover plate, a motor installed on the upper end of the cover plate, the output end of the motor is fixedly connected to the transmission end of the transmission assembly, a sealing door panel is movably connected to the side end of the coating box, and a plurality of evenly distributed frame assemblies are provided at the lower end of the transmission assembly.

[0010] A further improvement is that a placement groove is provided at the bottom end of the cover plate, the output end of the motor extends through the lower side of the placement groove, and the fixed end of the transmission assembly is located between the inner walls of the placement groove.

[0011] A further improvement is that the transmission assembly includes a plurality of connecting plates fixedly connected between the inner walls of the placement groove, the lower end of the connecting plate is rotatably connected to a transmission gear disk, the transmission shaft of the transmission gear disk passes through the upper side of the connecting plate and is fixedly connected to the output end of the motor, the lower end of the transmission gear disk is movably connected to a connecting rod 1, the side end of the connecting rod 1 is fixedly connected to a plurality of evenly distributed transmission plates 1, and the edge end of the transmission plate 1 is installed with a self-rotating part.

[0012] A further improvement is that: the rotating part includes a transmission rod 1 installed up and down on the edge end of one side of the transmission plate; the upper end of the transmission rod 1 is fixedly connected to the transmission gear 1, the lower end of the transmission rod 1 is fixedly connected to the transmission gear 2, the rear edge end of the transmission plate 1 is rotatably connected to the transmission rod 2, the transmission rod 2 is fixedly connected to the transmission gear 3 and the transmission plate 2 from top to bottom in sequence, the transmission rod 1 and the transmission gear disc are meshed with each other, and the transmission gear 2 and the transmission gear 3 are meshed with each other.

[0013] A further improvement is that the frame assembly includes a connecting rod 2 fixedly connected to the edge end of the transmission plate 2, the lower end of the connecting rod 2 is fixedly connected to a connecting plate, the bottom side of the edge end of the connecting plate is fixedly connected to a support column, the side end of the support column is fixedly connected to a plurality of evenly distributed support frames, and the lower end of the support frame is installed with a hook.

[0014] 3. Beneficial effects:

[0015] Compared with the prior art, the technical solution provided by this utility model has the following beneficial effects:

[0016] The utility model has a reasonable design. By improving the existing transmission method, the product no longer performs a circular rotational motion at the same speed around the axis during coating, but uses a revolution + rotation method to synchronously perform the coating operation. When the product is placed on the surface of the frame for coating, it can perform both revolution and rotation motion and synchronous rotation motion, so that the raw materials can be distributed more evenly on the surface during coating, thereby further improving the qualified rate of the products.

[0017] It should be noted that the structures not introduced in the present invention do not involve the design points and improvement directions of the present invention, and are the same as the existing technology or can be implemented by using the existing technology, so they are not described in detail here. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0019] Figure 2 This is a schematic diagram of the structure of the transmission assembly of the utility model;

[0020] Figure 3 This is a schematic structural diagram of the rotating member of the utility model;

[0021] Figure 4 This is a structural diagram of the rack assembly of the utility model.

[0022] Description of the numbers in the figure:

[0023] 1. Coating box; 2. Cover plate; 21. Placement slot;

[0024] 3. Transmission assembly; 31. Connecting plate; 32. Transmission gear plate; 33. Connecting rod 1; 34. Transmission plate 1;

[0025] 35. Rotating member; 351. Transmission rod 1; 352. Transmission gear 1; 353. Transmission gear 2; 354. Transmission rod 2; 355. Transmission gear 3; 356. Transmission plate 2;

[0026] 4. Motor; 5. Sealing door panel;

[0027] 6. Frame assembly; 61. Connecting rod 2; 62. Connecting plate; 63. Support column; 64. Support frame; 65. Hook. DETAILED DESCRIPTION

[0028] To facilitate understanding of the present invention, the present invention will be described more comprehensively below with reference to the relevant drawings. Several embodiments of the present invention are given in the drawings. However, the present invention can be implemented in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the disclosure of the present invention more thorough and comprehensive.

[0029] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "page", "bottom", "inside", "outside", "clockwise", "counterclockwise", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0030] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of the technical features being referred to. Thus, a feature specified as "first" or "second" may explicitly or implicitly include one or more of such features. In the description of this utility model, "plurality" means two or more, unless otherwise specifically defined.

[0031] In this utility model, unless otherwise expressly specified or limited, the terms "installed," "connected," "connected," "fixed," "provided with," "provided on," etc. should be understood in a broad sense. For example, they may refer to fixed connection, detachable connection, or integral connection; mechanical connection or electrical connection; direct connection or indirect connection through an intermediate medium; or internal communication between two components. Those skilled in the art will be able to understand the specific meanings of the above terms in this utility model based on specific circumstances. Example

[0032] See also Figure 1-4 A rotating frame dedicated to an ion sputtering coating machine includes a coating box 1, a cover plate 2 is installed on the upper end of the coating box 1, a transmission assembly 3 is installed inside the cover plate 2, a motor 4 is installed on the upper end of the cover plate 2, the output end of the motor 4 is fixedly connected to the transmission end of the transmission assembly 3, the side end of the coating box 1 is movably connected to a sealing door panel 5, and the lower end of the transmission assembly 3 is provided with a plurality of evenly distributed frame assemblies 6.

[0033] More specifically, a placement groove 21 is formed at the bottom end of the cover plate 2 , the output end of the motor 4 extends through the lower side of the placement groove 21 , and the fixed end of the transmission assembly 3 is located between the inner walls of the placement groove 21 .

[0034] During use, this solution enables the surface material of existing products to be more evenly distributed when they are coated in an ion beam sputtering coating machine, thereby improving the qualified rate of the products. In this embodiment, by improving the existing transmission method, the product is prompted to no longer perform a circumferential rotational motion at the same rate around the axis during coating, but to perform the coating operation synchronously by using a revolution + rotation method. This enables the product to perform both revolution and rotation when it is placed on the surface of the frame for coating, thereby making the raw materials more evenly distributed on the surface during coating, further improving the qualified rate of the products.

[0035] During use, personnel can hang the products to be coated on the surface of the rack assembly 6 respectively, and then drive the motor 4 to cause the transmission assembly 3 inside the placement slot 21 to rotate, so that the rack assembly 6 connected below can perform revolution + rotation, so that the subsequent raw materials can be evenly distributed on the product surface during coating.

[0036] See also Figure 1-3 The transmission assembly 3 includes a plurality of connecting plates 31 fixedly connected between the inner walls of the placement groove 21, and the lower end of the connecting plate 31 is rotatably connected to a transmission gear disc 32. The transmission shaft of the transmission gear disc 32 passes through the upper side of the connecting plate 31 and is fixedly connected to the output end of the motor 4. The lower end of the transmission gear disc 32 is movably connected to a connecting rod 1 33, and the side end of the connecting rod 1 33 is fixedly connected to a plurality of evenly distributed transmission plates 1 34, and the edge end of the transmission plate 1 34 is installed with a self-rotating part 35.

[0037] More specifically, the rotating part 35 includes a transmission rod 1 351 installed on the upper and lower edge ends of one side of the transmission plate 1 34, the upper end of the transmission rod 1 351 is fixedly connected to the transmission gear 1 352, and the lower end of the transmission rod 1 351 is fixedly connected to the transmission gear 2 353, the rear edge end of the transmission plate 1 34 is rotatably connected to the transmission rod 2 354, and the transmission rod 2 354 is fixedly connected to the transmission gear 3 355 and the transmission plate 2 356 from top to bottom in sequence, the transmission rod 1 351 and the transmission gear disc 32 are meshed with each other, and the transmission gear 2 353 and the transmission gear 3 355 are meshed with each other.

[0038] During use of this solution, when the motor 4 is driven, its output end can drive the transmission gear disc 32 to rotate, and because the side of the transmission gear disc 32 is meshed with the transmission gear 1 352, the transmission gear 1 352 rotates while driving the transmission gear 2 353 connected to the bottom through the transmission rod 1 351, and transmission occurs synchronously. At this time, because the transmission plate 1 34 is connected to the transmission plate 2 356, and the transmission plate 2 356 is connected to the frame assembly 6, the transmission gear disc 32 rotates while the transmission rod 1 351 rotates around the surface of the transmission gear disc 32, thereby driving the products hung below the frame assembly 6 to rotate in orbit.

[0039] Subsequently, when the second transmission gear 353 is passively rotated, it meshes with the third transmission gear 355, and the second transmission gear 353 drives the second transmission rod 354 and the second transmission plate 356 while transmitting, so that the second transmission plate 356 can rotate around the second transmission rod 354, thereby causing the product hung on the lower frame assembly 6 to rotate relative to the central axis;

[0040] As described above, the product mounted on the frame assembly 6 can realize rotational motion while performing revolution, so that the raw materials can be distributed more evenly when the product is coated, thereby improving the quality of the product.

[0041] See also Figure 1 and Figure 4 The frame assembly 6 includes a connecting rod 2 61 fixedly connected to the edge end of the transmission plate 2 356, the lower end of the connecting rod 2 61 is fixedly connected to a connecting plate 62, the bottom side of the edge end of the connecting plate 62 is fixedly connected to a support column 63, the side end of the support column 63 is fixedly connected to a plurality of evenly distributed support frames 64, and the lower end of the support frame 64 is installed with a hook 65.

[0042] During use of this solution, by fixing the connecting rod 2 61 to the edge of the transmission plate 2 356, the products can be hung on the outside of multiple hooks 65 respectively, so that when the subsequent products are coated, the multiple hooks 65 and the connecting rod 2 61 will rotate and transmit around the transmission rod 2 354, thereby realizing self-rotation.

[0043] The above-mentioned embodiments only express a certain implementation method of the utility model, and the description thereof is relatively specific and detailed, but it cannot be understood as limiting the scope of the patent of the utility model. It should be pointed out that for ordinary technicians in this field, several variations and improvements can be made without departing from the concept of the utility model, which all fall within the scope of protection of the utility model. Therefore, the scope of protection of the utility model patent shall be based on the attached claims.

Claims

1. A rotating frame for an ion sputtering coating machine, comprising a coating box (1), characterized in that: The coating box (1) is provided with a cover plate (2) at the upper end, a transmission assembly (3) is provided inside the cover plate (2), a motor (4) is provided at the upper end of the cover plate (2), an output end of the motor (4) is fixedly connected to a transmission end of the transmission assembly (3), a sealing door panel (5) is movably connected to the side end of the coating box (1), and a plurality of evenly distributed rack assemblies (6) are provided at the lower end of the transmission assembly (3); A placement groove (21) is provided at the bottom end of the cover plate (2), the output end of the motor (4) extends through the lower side of the placement groove (21), and the fixed end of the transmission assembly (3) is located between the inner walls of the placement groove (21); The transmission assembly (3) includes a plurality of connecting plates (31) fixedly connected between the inner walls of the placement groove (21), the lower end of the connecting plate (31) is rotatably connected to a transmission gear disc (32), the transmission shaft of the transmission gear disc (32) passes through the upper side of the connecting plate (31) and is fixedly connected to the output end of the motor (4), the lower end of the transmission gear disc (32) is movably connected to a connecting rod (33), the side end of the connecting rod (33) is fixedly connected to a plurality of evenly distributed transmission plates (34), and the edge end of the transmission plate (34) is installed with a self-rotating member (35).

2. The rotating frame for an ion sputtering coating machine according to claim 1, characterized in that: The rotating member (35) includes a transmission rod (351) installed on the upper and lower edges of one side of the transmission plate (34), the upper end of the transmission rod (351) is fixedly connected to the transmission gear (352), the lower end of the transmission rod (351) is fixedly connected to the transmission gear (353), the rear edge of the transmission plate (34) is rotatably connected to the transmission rod (354), the transmission rod (354) is fixedly connected to the transmission gear (355) and the transmission plate (356) from top to bottom, the transmission rod (351) and the transmission gear (32) are meshed with each other, and the transmission gear (353) and the transmission gear (355) are meshed with each other.

3. The special rotating frame for ion sputtering coating machine according to claim 2, characterized in that: The frame assembly (6) includes a second connecting rod (61) fixedly connected to the edge end of the second transmission plate (356), the lower end of the second connecting rod (61) is fixedly connected to a connecting plate (62), the bottom side of the edge end of the connecting plate (62) is fixedly connected to a support column (63), the side end of the support column (63) is fixedly connected to a plurality of evenly distributed support frames (64), and the lower end of the support frame (64) is installed with a hook (65).

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