Bearing conversion structure for chip experiment detection

Abstract

The utility model discloses a bearing conversion structure for chip experiment detection, which relates to the technical field of chip detection and comprises an objective table in a plate shape and connected with an FIB detection equipment instrument. The connecting piece is arranged on the objective table, and one end of the connecting piece is detachably connected with the objective table; the connector is columnar, and one end of the connector is detachably connected with the other end of the connecting piece; and an experiment table. According to the utility model, the experiment chip can be installed on the experiment table, and then the whole experiment chip is installed on the objective table through the connector and the connecting piece, so that the experiment chip can be detected on FIB detection equipment and also can be subjected to electron microscope detection, and the experiment chip does not need to be taken and placed. Therefore, the defect of experiment failure caused by transfer when the objective tables of various detection devices are not shared in the prior art is effectively overcome.

Description

Technical Field

[0001] The utility model relates to the technical field of chip detection, in particular to a load-bearing conversion structure for chip experimental detection. Background Art

[0002] During chip testing experiments, the stages used for FIB (focused ion beam) and SEM (scanning electron microscope) testing are often not shared. This requires moving the sample back and forth between the two tests, which can easily lead to experimental failure. Utility Model Content

[0003] The purpose of the utility model is to solve the shortcomings of the prior art that the loading platforms of various testing devices are not shared and need to be transported, resulting in experimental failure, and to propose a chip experimental testing load conversion structure.

[0004] In order to achieve the above purpose, the present invention adopts the following technical solutions:

[0005] A load-carrying conversion structure for chip experimental detection, comprising:

[0006] The loading platform is in the shape of a plate and is connected to the FIB testing equipment;

[0007] A connecting member, the connecting member is arranged on the loading platform, and one end of the connecting member is detachably connected to the loading platform;

[0008] A connector, wherein the connector is columnar and one end of the connector is detachably connected to the other end of the connector;

[0009] The experimental table is in the shape of a disk and is arranged at the other end of the connector. The experimental table is detachably connected to the connector.

[0010] In one feasible solution, it also includes:

[0011] A plug rod, which is arranged on the experimental table near the connector and is plugged into the connector;

[0012] A locking piece is provided on one side of the connector, one end of the locking piece extends into the interior of the connector and abuts against the plug rod, and the locking piece is threadedly connected to the connector.

[0013] In a feasible solution, both ends of the connecting member are detachably connected to the stage and the connector via threads.

[0014] In a feasible solution, the connecting member is a screw.

[0015] In a feasible solution, the thread diameters at both ends of the connecting piece are different in length.

[0016] In a feasible solution, a clamping block is provided at the bottom of the loading platform, and the loading platform is connected to the FIB detection equipment instrument by clamping the clamping block.

[0017] In a feasible solution, a push-pull handle is further provided on one side of the loading platform.

[0018] The beneficial effects of the utility model are:

[0019] The present invention allows the experimental chip to be mounted on a laboratory table and then integrally mounted on a stage via connectors and connectors, enabling the experimental chip to be tested on both FI B testing equipment and electron microscopes without the need for relocation. This effectively addresses the drawback of prior art where experimental failures occur due to the need to transport the test stages of multiple testing devices when the test stages are not shared. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 This is an overall schematic diagram of a chip experimental detection load-carrying conversion structure provided in an embodiment of the present invention;

[0021] Figure 2 The figure is an overall exploded diagram of a load-bearing conversion structure for chip experimental detection provided in an embodiment of the present invention.

[0022] The markings in the figure are as follows:

[0023] 1. Loading platform; 11. Clamping block; 12. Push-pull handle;

[0024] 2. Connector; 21. Connector;

[0025] 3. Laboratory bench; 31. Locking piece; 32. Connecting rod. DETAILED DESCRIPTION

[0026] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0027] It should be noted that all directional indications (such as up, down, left, right, front, back, etc.) in the embodiments of the present invention are only used to explain the relative position relationship, movement status, etc. between the various components under a certain specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indication will also change accordingly.

[0028] In this utility model, unless otherwise specified or limited, the terms "connection" and "fixation" should be understood in a broad sense. For example, "fixation" can mean fixed connection, detachable connection, or integration; mechanical connection or electrical connection; direct connection or indirect connection through an intermediate medium; internal communication between two elements or interaction between two elements, unless otherwise specified. For those skilled in the art, the specific meanings of the above terms in this utility model can be understood according to specific circumstances.

[0029] In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the present invention, the descriptions of "first", "second", etc. are only for descriptive purposes and cannot be understood as indicating or suggesting their relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of such features. In addition, the meaning of "and / or" appearing throughout the text includes three parallel schemes. Taking "A and / or B" as an example, it includes scheme A, or scheme B, or a scheme in which A and B are satisfied at the same time. In addition, the technical solutions between the various embodiments can be combined with each other, but it must be based on the ability of ordinary technicians in this field to implement. When the combination of technical solutions is mutually contradictory or cannot be implemented, it should be deemed that such a combination of technical solutions does not exist and is not within the scope of protection required by the present invention.

[0030] Reference Figures 1 to 2In order to solve the shortcomings of the prior art in that the stages 1 of various testing equipment are not shared and need to be transported, resulting in experimental failure, the present invention provides a carrier conversion structure for chip experimental testing, and the carrier conversion structure includes: a stage 1, a laboratory table 3, a connector 2 and a connector 21. The stage 1 is in the shape of a plate, and the stage 1 is connected to the FIB testing equipment. The connector 21 is arranged on the stage 1, and one end of the connector 21 is detachably connected to the stage 1. The connector 2 is in the shape of a column, and one end of the connector 2 is detachably connected to the other end of the connector 21. The laboratory table 3 is in the shape of a disc, and the laboratory table 3 is arranged at the other end of the connector 2. The laboratory table 3 is detachably connected to the connector 2, and the laboratory table is used to carry chips for electron microscopy testing. In this embodiment, the experimental chip can be mounted on the experimental table 3 and then integrally mounted on the stage 1 via the connector 2 and the connector 21. This allows the experimental chip to be tested both on the FIB testing equipment and under an electron microscope, eliminating the need for relocation. This effectively addresses the drawback of prior art techniques that can lead to experimental failures due to the need to transport the stages 1 between multiple testing devices.

[0031] Reference Figure 2 In this embodiment, in order to facilitate the installation of the experimental chip on the experimental table 3 on the connector 2, the experimental table 3 is provided with a plug rod 32 near the connector 2. The plug rod 32 is plugged into the interior of the connector 2. The load-carrying conversion structure further includes a locking member 31. The locking member 31 is provided on one side of the connector 2. One end of the locking member 31 extends into the interior of the connector 2 and abuts against the plug rod 32. The locking member 31 is threadedly connected to the connector 2. That is, in this embodiment, the experimental table is plugged into the connector 2 away from the loading platform 1 through the plug rod 32, and then the plug rod 32 is threadedly abutted and locked by the locking member 31 to ensure that the position of the experimental chip on the experimental table is fixed.

[0032] In this embodiment, to ensure the connection stability of the connector 2 and the stage 1, the connector 21 is removably connected to the stage 1 and the connector 2 at both ends via threads. Preferably, the connector 21 is a screw. In some preferred embodiments, to accommodate the different threaded hole sizes of the connector 2 and the stage 1, the connector 21 can be configured at both ends according to the threaded hole sizes of the connector 2 and the stage 1.

[0033] In this embodiment, to facilitate moving the stage 1 out of the inspection area of ​​the test equipment, a snap-fit ​​block 11 is provided at the bottom of the stage 1. The stage 1 is snap-fitted to the FIB test equipment via the snap-fit ​​block 11. In addition, a push-pull handle 12 is provided on one side of the stage 1. The push-pull handle 12 is used to snap-fit ​​the stage 1 to the test equipment via the snap-fit ​​block 11.

[0034] The above is only a preferred specific implementation method of the present invention, but the protection scope of the present invention is not limited to this. Any technician familiar with the technical field within the technical scope disclosed by the present invention can make equivalent replacements or changes based on the technical solution and utility model concept of the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A load-carrying conversion structure for chip experimental detection, characterized in that: include: The loading platform is in the shape of a plate and is connected to the FIB testing equipment; A connecting member, the connecting member is arranged on the loading platform, and one end of the connecting member is detachably connected to the loading platform; A connector, wherein the connector is columnar and one end of the connector is detachably connected to the other end of the connector; The experimental table is in the shape of a disk and is arranged at the other end of the connector. The experimental table is detachably connected to the connector.

2. A chip experimental detection load-carrying conversion structure according to claim 1, characterized in that: Also includes: A plug rod, which is arranged on the experimental table near the connector and is plugged into the connector; A locking piece is provided on one side of the connector, one end of the locking piece extends into the interior of the connector and abuts against the plug rod, and the locking piece is threadedly connected to the connector.

3. The chip experimental detection load-carrying conversion structure according to claim 1, characterized in that: The two ends of the connecting piece are detachably connected to the loading platform and the connector via threads.

4. A chip experimental detection load-carrying conversion structure according to claim 3, characterized in that: The connecting piece is a screw.

5. The chip experimental detection load-carrying conversion structure according to claim 4, characterized in that: The thread diameters at both ends of the connecting piece are different in length.

6. The chip experimental detection load-carrying conversion structure according to claim 1, characterized in that: A clamping block is provided at the bottom of the stage, and the stage is connected to the FIB testing equipment via the clamping block.

7. The chip experimental detection load-carrying conversion structure according to claim 6, characterized in that: A push-pull handle is also provided on one side of the loading platform.

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