Semiconductor low-temperature packaging slurry filtering device

Abstract

The utility model discloses a semiconductor low-temperature packaging slurry filtering device, which comprises a liquid collecting box and a filtering box, the top end of the liquid collecting box is provided with the filtering box, the top end of the filtering box is provided with two groups of residue filtering barrels, the interior of each residue filtering barrel is provided with a rotating arm, and the side wall of each rotating arm is provided with four groups of integrated plates at equal intervals. The device comprises an integrated plate, servo motors are installed at the two ends of the integrated plate, threaded rods are installed at the output ends of the servo motors and movably connected with the integrated plate, the surfaces of the threaded rods are sleeved with threaded sleeves, the threaded sleeves are in threaded connection with the threaded rods, and connecting arms are installed on the side walls of the threaded sleeves. According to the device disclosed by the utility model, large-particle impurities in the waste liquid can be conveniently and doubly stirred, collected and filtered, and particles in the waste liquid can be rotationally filtered again, so that the particle impurities in the waste liquid can be conveniently and effectively collected and filtered, and the filtering effect of the semiconductor low-temperature packaging slurry waste liquid is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of filtering devices, in particular to a semiconductor low-temperature packaging slurry filtering device. Background Art

[0002] Semiconductor low-temperature packaging slurry is a material specially used for the assembly of semiconductor chips and integrated circuits. It has the characteristics of high electrical conductivity, high thermal conductivity, and low thermal expansion coefficient. It is designed to meet the development needs of semiconductor integrated circuit assembly processes towards high power, miniaturization, lightweight, high-density assembly, low cost, high performance and high reliability. After the packaging is completed, the waste of the packaging slurry may be mixed with impurities and cannot be discharged directly. It needs to be filtered before discharge. In order to better filter it, a semiconductor low-temperature packaging slurry filtering device is proposed.

[0003] For example, a semiconductor package residue filtering device disclosed in authorization announcement number CN219462668U includes a water inlet pipe, a water outlet pipe, a filter box and a residue intercepting mechanism, wherein the water inlet pipe and the water outlet pipe are both connected to the filter box, and the residue intercepting mechanism includes an upper filter tube, a lower filter tube, an intercepting seat with a built-in filter mesh and an electromagnet, wherein the upper filter tube and the lower filter tube are both arranged inside the filter box, the intercepting seat is mounted on the end of the lower filter tube through an elastic telescopic tube, the electromagnet is arranged on the outer wall of the upper filter tube, and the outer wall of the intercepting seat is provided with a magnetic ring matching the electromagnet; the electromagnet has a power-on state and a power-off state;

[0004] Although it realizes the purpose of facilitating the operator to regularly clean the pipeline residue through the coordinated use of the above-mentioned device, thereby ensuring the normal discharge function of the pipeline;

[0005] However, the problem that the existing filtering device is not conducive to convenient double stirring to collect large particles of debris in the filtered waste liquid and to perform rotary filtration on the particles in the waste liquid again during use is not solved, which is not conducive to effective collection and filtration of particulate debris in the waste liquid, affecting the filtering effect. Utility Model Content

[0006] The purpose of the present utility model is to provide a semiconductor low-temperature packaging slurry filtering device to solve the problem that the filtering device proposed in the above background technology is not convenient for double stirring to collect large particles of debris in the filtered waste liquid and for rotating the particles in the waste liquid again, which is not conducive to the effective collection and filtration of the particles in the waste liquid and affects the filtering effect.

[0007] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: a semiconductor low-temperature packaging slurry filtering device, comprising a liquid collecting box and a filter box, a filter box installed on the top of the liquid collecting box, two groups of filter residue barrels installed on the top of the filter box, a rotating arm is provided inside the filter residue barrel, four groups of integrated boards with equal spacing are installed on the side walls of the rotating arm, servo motors are installed at both ends of the integrated board, threaded rods are installed at the output ends of the servo motors, and the threaded rods are movably connected to the integrated boards, threaded sleeves are installed on the surfaces of the threaded rods, and the threaded sleeves are threadedly connected to the threaded rods, and the threaded sleeves are threadedly connected to the threaded rods. A connecting arm is installed on the side wall of the connecting arm, and a rotating shaft is installed at one end of the connecting arm close to the threaded sleeve, and the connecting arm is movably connected to the threaded sleeve through the rotating shaft, and a rotating arm is installed at one end of the connecting arm away from the threaded sleeve, and a pin is installed on the side of the rotating arm close to the connecting arm, and the connecting arm is movably connected to the rotating arm through the pin, and a linkage shaft is installed at one end of the rotating arm close to the integrated plate, and the rotating arm is movably connected to the integrated plate through the linkage shaft, and a filter residue box is installed at one end of the rotating arm away from the linkage shaft, and a connecting shaft is installed at one end of the filter residue box close to the rotating arm, and the filter residue box is connected to the rotating arm through the connecting shaft.

[0008] Preferably, a filter residue motor is installed at the center position of the top of the filter residue barrel, and the output end of the filter residue motor is connected to the rotating arm.

[0009] Preferably, a liquid inlet is installed on the top of the filter residue barrel on one side of the filter residue motor, and a water pump is installed on the side wall of the left filter residue barrel.

[0010] Preferably, a connecting pipe is installed at the output end of the water pump, and the connecting pipe is connected to the liquid inlet at the top end of the right filter residue barrel.

[0011] Preferably, a filter barrel is movably installed inside the filter box, and a liquid outlet pipe is installed on the side wall of the right filter residue barrel, and the liquid outlet pipe extends to the interior of the filter barrel.

[0012] Preferably, a rotating motor is installed on the outer wall of the filter box, a rotating shaft is installed at the output end of the rotating motor, and the rotating shaft extends to the interior of the filter box.

[0013] Preferably, a gear is mounted on the surface of the rotating shaft, a gear ring is mounted on the outer wall of the filter barrel on one side of the gear, and the gear and the gear ring are meshed with each other.

[0014] Preferably, a plurality of groups of material guide strips with equal spacing are installed on the inner wall of the filter barrel, and the material guide strips are fixedly connected to the filter barrel.

[0015] Compared with the prior art, the beneficial effects of the present invention are as follows: the filtering device not only realizes convenient double stirring to collect large particles of debris in the filtered waste liquid and once again performs rotary filtration on the particles in the waste liquid, thereby facilitating the effective collection and filtration of particles in the waste liquid, but also improves the filtering effect of semiconductor low-temperature packaging slurry waste liquid;

[0016] (1) The filter residue motor drives the rotating arm to rotate, and the rotating arm drives the integrated plate and the filter residue box to rotate, and the filter residue box stirs the waste liquid, and at the same time, the filter residue box collects and filters the large particles in the waste liquid, the servo motor drives the threaded rod to rotate, the threaded rod drives the threaded sleeve to move, the threaded sleeve drives the connecting arm to rotate through the rotating shaft, the connecting arm drives the rotating arm to rotate with the linkage shaft as the axis through the pin shaft, and the rotating arm drives the filter residue box to rotate through the connecting shaft, so that the two groups of filter residue boxes are moved away from each other, thereby moving the filter residue boxes to different waste liquid layers to filter and collect large particles in different waste liquid layers. After the waste liquid completes the primary filtration inside the left filter residue barrel, the water pump drives the waste liquid inside the left filter residue barrel to be input into the inside of the right filter residue barrel through the connecting pipe, and then repeats the above operation to perform secondary filtration on the waste liquid. The filtered waste liquid is discharged into the inside of the filter barrel through the liquid outlet pipe, realizing convenient double stirring and collection of large particles of debris in the filtered waste liquid, and facilitating the effective collection and filtration of particulate debris in the waste liquid;

[0017] (2) The rotating motor drives the gear to rotate through the rotating shaft, and the gear drives the filter barrel to rotate through the gear ring, and the filter barrel is used to perform a second rotational filtration on the waste liquid, wherein the particulate matter remains on the surface of the filter barrel, and the waste liquid falls into the interior of the liquid collecting box through the holes on the surface of the filter barrel, and the waste liquid is collected by the liquid collecting box. At the same time, the particles inside the filter barrel are discharged from the interior of the filter barrel under the action of the guide bar, thereby completing the use of the semiconductor low-temperature packaging slurry filtering device, realizing a second rotational filtration of the waste liquid, and improving the filtering effect of the semiconductor low-temperature packaging slurry waste liquid. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 This is a schematic diagram of the three-dimensional structure of the utility model;

[0019] Figure 2 This is a three-dimensional perspective structural diagram of the filter residue barrel of the present invention;

[0020] Figure 3 This is a three-dimensional perspective structural diagram of the filter box of the present invention;

[0021] Figure 4 This is a schematic diagram of the front cross-sectional structure of the present utility model;

[0022] Figure 5 This is a side cross-sectional structural diagram of the filter box of the present invention;

[0023] Figure 6 It is a schematic diagram of the three-dimensional structure of the filter residue box of the present invention.

[0024] In the figure: 1. Liquid collecting tank; 2. Filter box; 3. Connecting pipe; 4. Filter residue barrel; 5. Rotating motor; 6. Filter residue motor; 7. Rotating arm; 8. Liquid inlet; 9. Filter residue box; 10. Filter barrel; 11. Gear ring; 12. Gear; 13. Rotating shaft; 14. Water pump; 15. Liquid outlet pipe; 16. Guide bar; 17. Integrated board; 18. Threaded sleeve; 19. Threaded rod; 20. Servo motor; 21. Linkage shaft; 22. Rotating arm; 23. Pin shaft; 24. Connecting arm; 25. Rotating shaft; 26. Connecting shaft. DETAILED DESCRIPTION

[0025] The following is a clear and complete description of the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention.

[0026] See also Figure 1-6 , the utility model provides an embodiment: a semiconductor low-temperature packaging slurry filtering device, including a liquid collecting box 1 and a filter box 2, the top of the liquid collecting box 1 is installed with a filter box 2, the top of the filter box 2 is installed with two groups of filter residue barrels 4, the interior of the filter residue barrel 4 is provided with a rotating arm 7, the side walls of the rotating arm 7 are installed with four groups of integrated boards 17 with equal spacing, both ends of the integrated board 17 are installed with a servo motor 20, the servo motor 20 plays a role of power drive, the output end of the servo motor 20 is installed with a threaded rod 19, and the threaded rod 19 is movably connected to the integrated board 17, the surface of the threaded rod 19 is covered with a threaded sleeve 18, and the threaded sleeve 18 is threadedly connected to the threaded rod 19, and the side walls of the threaded sleeve 18 are installed with connecting arms 24, the end of the connecting arm 24 close to the threaded sleeve 18 is equipped with a rotating shaft 25, and the connecting arm 24 is movably connected to the threaded sleeve 18 through the rotating shaft 25, and the end of the connecting arm 24 away from the threaded sleeve 18 is equipped with a rotating arm 22, and the side of the rotating arm 22 close to the connecting arm 24 is equipped with a pin 23, and the connecting arm 24 is movably connected to the rotating arm 22 through the pin 23, and the end of the rotating arm 22 close to the integrated plate 17 is equipped with a linkage shaft 21, and the rotating arm 22 is movably connected to the integrated plate 17 through the linkage shaft 21, and the end of the rotating arm 22 away from the linkage shaft 21 is equipped with a filter residue box 9, and the end of the filter residue box 9 close to the rotating arm 22 is equipped with a connecting shaft 26, and the filter residue box 9 is connected to the rotating arm 22 through the connecting shaft 26;

[0027] First, pour the used semiconductor low-temperature packaging slurry waste liquid into the interior of the left filter residue barrel 4 through the liquid inlet 8, then turn on the filter residue motor 6, and the filter residue motor 6 drives the rotating arm 7 to rotate, and the rotating arm 7 drives the integrated board 17 and the filter residue box 9 to rotate, and the filter residue box 9 is used to stir the waste liquid. At the same time, the filter residue box 9 collects and filters the large particles in the waste liquid, and turns on the servo motor 20, and the servo motor 20 drives the threaded rod 19 to rotate. Under the threaded connection between the threaded rod 19 and the threaded sleeve 18, the threaded rod 19 drives the threaded sleeve 18 to move, and the threaded sleeve 18 drives the connecting arm 24 to rotate through the rotating shaft 25, and the connecting arm 24 drives the rotating arm 22 to rotate with the linkage shaft 21 as the axis through the pin shaft 23. , the filter residue box 9 is driven to rotate by the rotating arm 22 through the connecting shaft 26 to make the two groups of filter residue boxes 9 move away from each other, thereby moving the filter residue boxes 9 to different waste liquid layers to filter and collect large particles in different waste liquid layers. When the waste liquid completes the primary filtration in the left filter residue barrel 4, the water pump 14 is turned on, and the waste liquid in the left filter residue barrel 4 is driven by the water pump 14 to be input into the right filter residue barrel 4 through the connecting pipe 3. Then, the above operation is repeated to perform secondary filtration on the waste liquid. The filtered waste liquid is discharged into the interior of the filter barrel 10 through the liquid outlet pipe 15, realizing convenient double stirring and collection of large particles of debris in the filtered waste liquid, and facilitating the effective collection and filtration of particulate debris in the waste liquid;

[0028] A filter residue motor 6 is installed at the center position of the top of the filter residue barrel 4. The filter residue motor 6 plays the role of power drive, and the output end of the filter residue motor 6 is connected to the rotating arm 7;

[0029] The top of the filter residue barrel 4 on one side of the filter residue motor 6 is equipped with a liquid inlet 8, and a water pump 14 is installed on the side wall of the left filter residue barrel 4. The output end of the water pump 14 is equipped with a connecting pipe 3, and the connecting pipe 3 is connected to the liquid inlet 8 at the top of the right filter residue barrel 4;

[0030] A filter barrel 10 is movably installed inside the filter box 2, and a liquid outlet pipe 15 is installed on the side wall of the right filter residue barrel 4, and the liquid outlet pipe 15 extends to the interior of the filter barrel 10. A rotating motor 5 is installed on the outer wall of the filter box 2, and the rotating motor 5 plays a role of power drive. A rotating shaft 13 is installed at the output end of the rotating motor 5, and the rotating shaft 13 extends to the interior of the filter box 2;

[0031] A gear 12 is mounted on the surface of the rotating shaft 13. A gear ring 11 is mounted on the outer wall of the filter barrel 10 on one side of the gear 12. The gear 12 and the gear ring 11 are meshed with each other. Multiple groups of guide strips 16 are mounted on the inner wall of the filter barrel 10 at equal intervals. The guide strips 16 are fixedly connected to the filter barrel 10.

[0032] Turn on the rotating motor 5, and the rotating motor 5 drives the gear 12 to rotate through the rotating shaft 13. Under the mutual engagement of the gear 12 and the gear ring 11, and the active cooperation of the filter barrel 10 and the filter box 2, the gear 12 drives the filter barrel 10 to rotate through the gear ring 11, and the filter barrel 10 is used to perform another rotational filtration on the waste liquid, wherein the particulate matter remains on the surface of the filter barrel 10, and the waste liquid falls into the interior of the liquid collecting box 1 through the holes on the surface of the filter barrel 10, and the waste liquid is collected by the liquid collecting box 1. At the same time, the particles inside the filter barrel 10 are discharged from the interior of the filter barrel 10 under the action of the guide bar 16, thereby completing the use of the semiconductor low-temperature packaging slurry filtering device, realizing another rotational filtration of the waste liquid, and improving the filtering effect of the semiconductor low-temperature packaging slurry waste liquid.

[0033] Working principle: First, pour the used semiconductor low-temperature packaging slurry waste liquid into the left filter residue barrel 4 through the liquid inlet 8, and the filter residue motor 6 drives the rotating arm 7 to rotate, and the rotating arm 7 drives the integrated board 17 and the filter residue box 9 to rotate, and the filter residue box 9 is used to stir the waste liquid. At the same time, the filter residue box 9 collects and filters the large particles in the waste liquid, and the servo motor 20 drives the threaded rod 19 to rotate, and the threaded rod 19 drives the threaded sleeve 18 to move, and the threaded sleeve 18 drives the connecting arm 24 to rotate through the rotating shaft 25, and the connecting arm 24 drives the rotating arm 22 to rotate with the linkage shaft 21 as the axis through the pin shaft 23, and the rotating arm 22 drives the filter residue box 9 to rotate through the connecting shaft 26, so that the two groups of filter residue boxes 9 are moved away from each other, thereby moving the filter residue box 9 to different waste liquid layers to filter and collect large particles in different waste liquid layers. When the waste liquid is After the primary filtration is completed inside the left filter residue barrel 4, the water pump 14 drives the waste liquid inside the left filter residue barrel 4 to be input into the inside of the right filter residue barrel 4 through the connecting pipe 3, and then repeats the above operation to perform secondary filtration on the waste liquid. The filtered waste liquid is discharged into the interior of the filter barrel 10 through the liquid outlet pipe 15, and the rotating motor 5 drives the gear 12 to rotate through the rotating shaft 13, and the gear 12 drives the filter barrel 10 to rotate through the gear ring 11, and the filter barrel 10 is used to perform another rotational filtration on the waste liquid, wherein the particulate matter remains on the surface of the filter barrel 10, and the waste liquid falls into the interior of the liquid collecting box 1 through the holes on the surface of the filter barrel 10, and the waste liquid is collected by the liquid collecting box 1, and at the same time, the particles inside the filter barrel 10 are discharged from the interior of the filter barrel 10 under the action of the guide bar 16, thereby completing the use of the semiconductor low-temperature packaging slurry filtration device.

Claims

1. A semiconductor low-temperature packaging slurry filtering device, comprising a liquid collecting box (1) and a filter box (2), characterized in that: The top of the liquid collecting box (1) is provided with a filter box (2), the top of the filter box (2) is provided with two groups of filter residue barrels (4), the inside of each filter residue barrel (4) is provided with a rotating arm (7), the side wall of each rotating arm (7) is provided with four groups of integrated boards (17) at equal intervals, both ends of each integrated board (17) are provided with a servo motor (20), the output end of each servo motor (20) is provided with a threaded rod (19), and the threaded rod (19) is movably connected to the integrated board (17), the surface of each threaded rod (19) is provided with a threaded sleeve (18), and the threaded sleeve (18) is threadedly connected to the threaded rod (19), the side wall of each threaded sleeve (18) is provided with a connecting arm (24), the end of each connecting arm (24) close to the threaded sleeve (18) is provided with a rotating shaft (25), and the connecting arm (24) is provided with a rotating shaft (25). (24) is movably connected to the threaded sleeve (18) through a rotating shaft (25); a rotating arm (22) is installed at one end of the connecting arm (24) away from the threaded sleeve (18); a pin (23) is installed at one side of the rotating arm (22) close to the connecting arm (24); and the connecting arm (24) is movably connected to the rotating arm (22) through the pin (23); a linkage shaft (21) is installed at one end of the rotating arm (22) close to the integrated plate (17); and the rotating arm (22) is movably connected to the integrated plate (17) through the linkage shaft (21); a filter residue box (9) is installed at one end of the rotating arm (22) away from the linkage shaft (21); a connecting shaft (26) is installed at one end of the filter residue box (9) close to the rotating arm (22), and the filter residue box (9) is connected to the rotating arm (22) through the connecting shaft (26).

2. The semiconductor low-temperature packaging slurry filtering device according to claim 1, characterized in that: A filter residue motor (6) is installed at the center position of the top end of the filter residue barrel (4), and the output end of the filter residue motor (6) is connected to the rotating arm (7).

3. The semiconductor low-temperature packaging slurry filtering device according to claim 2, characterized in that: The top of the filter residue barrel (4) on one side of the filter residue motor (6) is equipped with a liquid inlet (8), and a water pump (14) is installed on the side wall of the left filter residue barrel (4).

4. The semiconductor low-temperature packaging slurry filtering device according to claim 3, characterized in that: The output end of the water pump (14) is provided with a connecting pipe (3), and the connecting pipe (3) is connected to the liquid inlet (8) at the top end of the right filter residue barrel (4).

5. The semiconductor low-temperature packaging slurry filtering device according to claim 1, characterized in that: A filter barrel (10) is movably installed inside the filter box (2), and a liquid outlet pipe (15) is installed on the side wall of the right filter residue barrel (4), and the liquid outlet pipe (15) extends to the interior of the filter barrel (10).

6. The semiconductor low-temperature packaging slurry filtering device according to claim 1, characterized in that: A rotating motor (5) is mounted on the outer wall of the filter box (2), a rotating shaft (13) is mounted on the output end of the rotating motor (5), and the rotating shaft (13) extends into the interior of the filter box (2).

7. The semiconductor low-temperature packaging slurry filtering device according to claim 6, characterized in that: A gear (12) is mounted on the surface of the rotating shaft (13), and a gear ring (11) is mounted on the outer wall of the filter barrel (10) on one side of the gear (12), and the gear (12) and the gear ring (11) are meshed with each other.

8. The semiconductor low-temperature packaging slurry filtering device according to claim 5, characterized in that: A plurality of groups of material guide strips (16) at equal intervals are installed on the inner wall of the filter barrel (10), and the material guide strips (16) are fixedly connected to the filter barrel (10).

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