Waste hydrogen recycling system

Abstract

The utility model relates to a waste hydrogen recycling system, which mainly adopts the combined design of a process plant area, separation and purification equipment, a storage barrel and a furnace end, the process plant area is used for producing process tail gas, the process tail gas is separated and purified into hydrogen gas (H2) and nitrogen gas (N2) through the separation and purification equipment, and the storage barrel is used for storing the hydrogen gas (H2) and the nitrogen gas (N2). The hydrogen gas (H2) separated and purified by the separation and purification equipment is conveyed into the storage barrel, the natural gas conveying pipeline conveys a natural gas into the storage barrel, the natural gas and the hydrogen gas (H2) form a storage gas, and the storage gas of the storage barrel is conveyed to the furnace end through the storage gas conveying pipeline. The purified hydrogen (H2) is used as the gas for combustion of the furnace end, so that the waste hydrogen recycling efficiency is improved, and the application of recycling process tail gas is also realized.

Description

Technical Field

[0001] The utility model relates to a waste hydrogen recovery and utilization system, and in particular to a system that has the efficiency of waste hydrogen reuse and the application of recovering process tail gas, and is suitable for semiconductor factories, electronic process factories, optoelectronic process factories or similar areas. Background Art

[0002] Semiconductor manufacturers use hydrogen as a shielding gas in the extreme ultraviolet lithography (EUV) process to prevent tin contamination. EUV light is produced by bombarding liquid tin droplets with a carbon dioxide laser at 50,000 times per second. The resulting EUV light passes through an ellipsoidal reflector with a diameter of 0.65 meters and is then fed into the lithography machine.

[0003] Keeping the ellipsoidal reflector from fogging is key. The reason for fogging is that the tin droplets vaporize after being bombarded by the CO2 laser. Once vaporized, they diffuse within the cavity and deposit on the ellipsoidal reflector. Therefore, hydrogen is introduced around the ellipsoidal reflector. The extreme ultraviolet (EUV) lithography process separates hydrogen molecules from hydrogen atoms, which then combine with tin to form gaseous tin hydride (SnH4). The gaseous tin hydride (SnH4) is then extracted from the cavity to prevent the ellipsoidal reflector from fogging.

[0004] However, after using hydrogen in semiconductor factories, the exhaust hydrogen is considered waste hydrogen. For safety and to prevent danger, nitrogen is also added during the exhaust process. Currently, the main methods for treating waste hydrogen gas flow are to dispose of the waste hydrogen through combustion or directly dilute and discharge it, which easily leads to the waste of hydrogen resources.

[0005] Therefore, in view of the above problems, the present invention hopes to propose a waste hydrogen recovery and utilization system with the efficiency of waste hydrogen reuse, which can be easily operated and assembled by users. The motivation for the development of the present invention is to concentrate on researching and designing the system to provide user convenience. Utility Model Content

[0006] The primary objective of the present invention is to provide a waste hydrogen recovery and utilization system, which comprises a process plant, a separation and purification device, a storage tank, and a furnace. The process plant produces a process tail gas containing at least one hydrogen gas (H2) and at least one nitrogen gas (N2). The separation and purification device separates and purifies the process tail gas into hydrogen gas (H2) and nitrogen gas (N2). The hydrogen gas (H2) separated and purified by the separation and purification device is then transported to the storage tank. A natural gas transmission pipeline transports natural gas, primarily methane (CH4), to the storage tank to form a storage gas with the hydrogen gas (H2). The storage gas in the storage tank is then transported to the furnace via the storage gas transmission pipeline. This allows the purified hydrogen gas (H2) to be used as combustion gas for the furnace, thereby increasing the efficiency of waste hydrogen reuse and recovering the process tail gas, thereby enhancing overall practicality.

[0007] Another object of the present invention is to provide a waste hydrogen recovery and utilization system. The separation and purification equipment has two embodiments. In the first embodiment, the separation and purification equipment includes a hydrogen purifier that utilizes any one of membrane separation technology, cryogenic separation technology, pressure swing adsorption (PSA) technology, and metal hydride technology, or a combination thereof. In the second embodiment, the separation and purification equipment includes any one of an electrochemical hydrogen purifier (ECHP) and a ceramic adsorption purifier (PCAP), or a combination thereof, thereby achieving both purification efficiency and reuse value, thereby increasing overall usability.

[0008] Another object of the present invention is to provide a waste hydrogen recovery and utilization system, wherein the burner is installed in an incinerator, and the incinerator is any one of a direct-fired incinerator (TO), a catalytic incinerator, or a regenerative thermal incinerator (RTO), and the incinerator is combined with any one of a double-rotor volatile organic gas (VOC) treatment system or a single-rotor volatile organic gas (VOC) treatment system, so that the incinerator can use the burner to perform high-temperature cracking on the desorbed concentrated gas desorbed at high temperature to first reduce volatile organic compounds, and has the efficiency of simultaneously treating volatile organic gases (VOCs) and waste hydrogen, so as to achieve the goals of environmental protection, energy saving and carbon reduction, and thereby improve overall operability.

[0009] In order to further understand the characteristics, features and technical contents of the present invention, please refer to the following detailed description and drawings of the present invention, but the attached drawings are only provided for reference and illustration and are not intended to limit the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0010] Figure 1Shows the main system implementation diagram;

[0011] Figure 2 Another schematic diagram of the main system is shown.

[0012] Reference numerals:

[0013] 1. Double-rotor volatile organic compound (VOC) treatment system;

[0014] 10. Process plant area;

[0015] 11. Hydrogen exhaust pipeline;

[0016] 111 exhaust device;

[0017] 112 first drain valve;

[0018] 20. Separation and purification equipment;

[0019] 21 nitrogen output pipeline;

[0020] 201 Hydrogen Purifier;

[0021] 201 Electrochemical Hydrogen Purifier (ECHP);

[0022] 203 Ceramic Adsorption Purifier (PCAP);

[0023] 30 storage barrels;

[0024] 301 Gas storage;

[0025] 31 Hydrogen transmission pipeline;

[0026] 32 natural gas transmission pipelines;

[0027] 40 burners;

[0028] 41 Storage gas transmission pipeline;

[0029] 411 pressure regulating valve;

[0030] 412 first shut-off valve;

[0031] 413 Second drain valve;

[0032] 414 second shut-off valve;

[0033] 415 Gas flow controller;

[0034] 42 air channel pipe;

[0035] 421 Air flow control valve;

[0036] 50 flow control equipment;

[0037] 51 pressure sensor;

[0038] 52 first mass flow controller;

[0039] 53 second mass flow controller;

[0040] 60 incinerators;

[0041] 61 entrance;

[0042] 70 first adsorption wheel;

[0043] 701 adsorption zone;

[0044] 702 cooling area;

[0045] 703 desorption zone;

[0046] 71 exhaust gas intake pipe;

[0047] 711 exhaust gas connecting pipe;

[0048] 7111 exhaust gas connection control valve;

[0049] 72 first clean gas discharge pipeline;

[0050] 721 first clean gas connecting pipeline;

[0051] 7211 First purge gas connection control valve;

[0052] 73 first cooling air intake pipe;

[0053] 74 first cooling air delivery pipeline;

[0054] 75 first hot gas transmission pipeline;

[0055] 76 first desorption concentrated gas pipeline;

[0056] 761 fan;

[0057] 80 second adsorption wheel;

[0058] 801 adsorption zone;

[0059] 802 cooling area;

[0060] 803 desorption zone;

[0061] 81 second clean gas discharge pipeline;

[0062] 811 fan;

[0063] 82 second cooling air intake pipe;

[0064] 83 second cooling gas delivery pipeline;

[0065] 84 second hot gas transmission pipeline;

[0066] 85 second desorption concentrated gas pipeline;

[0067] 851 fan;

[0068] 91 first heat exchanger;

[0069] 911 first cold side pipeline;

[0070] 912 first hot side pipeline;

[0071] 92 second heat exchanger;

[0072] 921 second cold side pipeline;

[0073] 922 second hot side pipeline;

[0074] 93 third heat exchanger;

[0075] 931 third cold side pipeline;

[0076] 932 third hot side pipeline;

[0077] 94 third cold side delivery pipeline;

[0078] 95 chimney. DETAILED DESCRIPTION

[0079] like Figures 1 and 2 The figure shows a schematic diagram of an embodiment of the present invention. The best implementation of the waste hydrogen recovery and utilization system of the present invention is to be used in semiconductor factories, electronic process factories, optoelectronic process factories or similar areas. It mainly has the efficiency of recycling waste hydrogen and also has the application of recovering process exhaust gas.

[0080] The waste hydrogen recovery and utilization system of the present invention is mainly designed by combining a process plant 10, a separation and purification device 20, a storage barrel 30 and a furnace head 40, wherein the process plant 10 is any one of a semiconductor process plant, an electronic process plant, and a photoelectric process plant. The present invention takes a semiconductor process plant as an example. The semiconductor process plant uses hydrogen (H2) as a protective gas in the extreme ultraviolet lithography (EUV) process to prevent tin contamination, thereby forming tin hydride gas to protect the extreme ultraviolet lithography (EUV) lens. Therefore, the process plant 10 is provided with a hydrogen exhaust pipe 11 (such as Figure 1 and Figure 2As shown in the figure, the process plant 10 produces a process tail gas, and the process tail gas contains at least one hydrogen gas (H2) and at least one nitrogen gas (N2). When the process tail gas is discharged, the process tail gas is first mixed with the nitrogen gas (N2) when entering the hydrogen exhaust pipeline 11 to ensure safety, and then output through the hydrogen exhaust pipeline 11.

[0081] In addition, the separation and purification equipment 20 is connected to the hydrogen exhaust pipeline 11, and the hydrogen exhaust pipeline 11 is provided with a gas extraction device 111 (such as Figure 2 As shown in FIG), the exhaust device 111 is any one of a windmill and a blower to push the process tail gas to the separation and purification equipment 20. Furthermore, the hydrogen discharge pipeline 11 is provided with a first discharge valve 112 (as shown in FIG). Figure 1 and Figure 2 As shown), the first drain valve 112 mainly functions as a pressure relief when the gas pressure in the hydrogen exhaust pipeline 11 reaches a certain pressure, or as a pipeline for discharging the gas in the hydrogen exhaust pipeline 11 when the separation and purification equipment 20 encounters a shutdown or cannot operate during operation. In addition, the opening and closing mode of the first drain valve 112 is either pneumatic or electric, and the first drain valve 112 can be controlled by a control mechanism (not shown) to facilitate the operation of the first drain valve 112.

[0082] The separation and purification equipment 20 is used to separate and purify the process tail gas into hydrogen gas (H2) and nitrogen gas (N2). The separation and purification equipment 20 is provided with a nitrogen output pipeline 21 (such as Figure 1 and Figure 2 As shown), the nitrogen gas (N2) is output through the nitrogen output pipeline 21 (such as being discharged into the atmosphere or into a gas cylinder). The separation and purification equipment 20 has two embodiments. The first embodiment comprises a hydrogen purifier 201 (such as Figure 1 As shown, the hydrogen purifier 201 utilizes hydrogen purification technology that produces high-purity hydrogen from various industrial gas feedstocks through catalytic deoxidation, adsorption drying, and filtration dust removal. This catalytic purification device utilizes a specially formulated catalyst with high activity, capable of reducing the oxygen impurity content in industrial gases to below 10 ppb. It also offers long-term operation without the need for regeneration. Hydrogen purifier 201 utilizes any one of membrane separation, cryogenic separation, pressure swing adsorption (PSA), and metal hydride technologies, or a combination thereof.

[0083] The hydrogen purifier 201 (such as Figure 1There are three types of membrane separation technologies. The first is membrane separation: using a selectively permeable membrane as the medium, membrane separation achieves separation and purification by selectively permeating the membrane under driving forces such as potential difference, pressure difference, and concentration difference. The second is palladium membrane diffusion: at a certain temperature, hydrogen molecules dissociate into hydrogen atoms on one side of the palladium membrane, dissolve in the palladium, and diffuse to the other side. Then, they combine into molecules, and after a single stage of separation, hydrogen with a purity of 99.99-99.9999% can be obtained. The third is organic hollow fiber membrane diffusion: using materials such as polysulfone, polyimide, and polycarbonate. Hollow fiber membrane separation and hydrogen recovery equipment is the most widely used, including synthetic ammonia purge gas, methanol plant vent air, and various off-gases from petroleum refining processes. The organic hollow fiber membrane separation process utilizes the off-gas's inherent pressure, using the partial pressure difference across the membrane as the driving force.

[0084] In addition, the hydrogen purifier 201 (such as Figure 1 There are two types of low-temperature separation technologies. The first is cryogenic condensation: based on the significant difference in boiling points between hydrogen and other gases, this separation method condenses all high-boiling-point components, except hydrogen, into liquids at the operating temperature. This separation method is suitable for recovering hydrogen from feed gas containing 30-80% hydrogen, producing hydrogen with a purity of 90-98%. The second is cryogenic adsorption: from electrolytic hydrogen or industrial raw hydrogen with a purity of 99.9%, high-purity and ultrapure hydrogen with a purity of 99.999-99.9999% can be produced. Furthermore, the hydrogen purifier 201 employs pressure swing adsorption (PSA) technology, which is based on the physical adsorption of gas molecules onto the internal surface of a specific adsorbent (a porous solid material). This technology exploits the adsorbent's tendency to readily adsorb high-boiling-point components and less readily adsorb low-boiling-point components at the same pressure, with adsorption increasing at higher pressures and decreasing at lower pressures. The feed gas is passed through the adsorption bed at a specific pressure, where impurities with higher boiling points relative to hydrogen are selectively adsorbed, while the low-boiling-point hydrogen is less readily adsorbed and passes through the bed, achieving separation of hydrogen and impurities.

[0085] In addition, the hydrogen purifier 201 (such as Figure 1 (as shown) uses metal hydride technology, which mainly utilizes the selectivity of hydrogen storage alloys to generate metal hydrides. Other impurities in hydrogen are concentrated outside the hydride. As the exhaust gas is discharged, the metal hydride separates and releases hydrogen, thereby purifying the hydrogen.

[0086] Furthermore, the second embodiment of the separation and purification equipment 20 is to include any one of an electrochemical hydrogen purifier (ECHP) 202 and a ceramic adsorption purifier (PCAP) 203 or a combination thereof (such as Figure 2As shown, the electrochemical hydrogen purifier (ECHP) 202 can be used alone. The ECHP 202 uses a platinum catalyst to split hydrogen gas in the process off-gas into hydrogen ions, which are then allowed to pass through a membrane. Only hydrogen ions can penetrate the membrane, while nitrogen gas (N2) in the process off-gas cannot. The principle is that the hydrogen ions are first split into positively charged ions, which then pass through the membrane and combine with electrons to transform back into hydrogen (H2). Alternatively, the ECHP 202 can be used in combination with the ceramic adsorption purifier (PCAP) 203, with the ceramic adsorption purifier (PCAP) 203 primarily filtering various impurities while the ECHP 202 purifies and recovers the hydrogen.

[0087] In addition, the storage tank 30 is provided with a hydrogen delivery pipeline 31 and a natural gas delivery pipeline 32 (such as Figure 1 As shown in the figure, the hydrogen transmission pipeline 31 is connected to the separation and purification equipment 20 to transmit the hydrogen gas (H2) separated and purified by the separation and purification equipment 20 to the storage barrel 30. In addition, a natural gas gas is transmitted to the storage barrel 30 through the natural gas transmission pipeline 32, wherein the main component of the natural gas gas is methane, namely CH4. One end of the natural gas transmission pipeline 32 is connected to a natural gas storage cylinder, a natural gas storage tank or a natural gas equipment (not shown), and the natural gas gas and the hydrogen gas (H2) are combined to form a stored gas 301.

[0088] Furthermore, the storage tank 30 is assembled with a flow control device 50 (eg Figure 2As shown), the flow control device 50 is provided with a pressure sensor 51, a first mass flow controller 52 and a second mass flow controller 53, and the pressure sensor 51 is connected to the storage barrel 30 to detect the gas pressure of the stored gas 301 stored in the storage barrel 30. In addition, the first mass flow controller 52 is provided on the hydrogen transmission pipeline 31 to control the flow rate of the hydrogen gas (H2) in the hydrogen transmission pipeline 31. The first mass flow controller 52 is connected to the pressure sensor 51 for signal communication, and the second mass flow controller 53 is provided on the natural gas transmission pipeline 32 to control the natural gas transmission. The flow rate of the natural gas in the delivery pipeline 32 is controlled by the second mass flow controller 53, and the second mass flow controller 53 is connected to the pressure sensor 51. The pressure sensor 51 detects the gas pressure of the stored gas 301 stored in the storage barrel 30, and the first mass flow controller 52 and the second mass flow controller 53 are controlled to form a proportional control. That is, the flow rate of the hydrogen gas (H2) in the first mass flow controller 52 and the flow rate of the natural gas in the second mass flow controller 532 are respectively controlled to ensure that the stored gas 301 in the storage barrel 30 reaches the optimal concentration and ratio required for the flame of the burner 40.

[0089] In addition, the burner head 40 is provided with a storage gas delivery pipeline 41, and the storage gas delivery pipeline 41 is connected to the storage barrel 30 (such as Figure 1 As shown in FIG, the stored gas 301 stored in the storage barrel 30 can be delivered to the burner 40 via the stored gas delivery pipeline 41 to be used for the flame combustion of the burner 40. The stored gas delivery pipeline 41 is provided with a pressure regulating valve 411, a first shut-off valve 412, a second drain valve 413, a second shut-off valve 414, and a gas flow control valve 415 (as shown in FIG. Figure 2). The pressure reducing valve 411 is located near the storage tank 30 to facilitate regulation of the stored gas 301. The pressure reducing valve 411, also known as a pressure regulating valve, is a fluid control device primarily used to ensure that the stored gas 301 maintains a safe and stable pressure level within the stored gas delivery pipeline 41. The pressure reducing valve 411 operates by limiting the pressure of the stored gas 301 passing through the stored gas delivery pipeline 41 by adjusting the degree of valve opening. The second drain valve 413 is provided on the stored gas delivery pipeline 41. When the pressure in the stored gas delivery pipeline 41 exceeds the pressure set by the second drain valve 413, the pressure relief valve 413 is opened to ensure that the pressure in the stored gas delivery pipeline 41 is below the pressure set by the second drain valve 413, thereby protecting the stored gas delivery pipeline 41. In addition, the opening and closing method of the second drain valve 413 is either pneumatic or electric, and the second drain valve 413 can be controlled by a control mechanism (not shown) to facilitate the operation of the second drain valve 413.

[0090] Furthermore, the stored gas delivery pipeline 41 is respectively provided with the first shut-off valve 412 and the second shut-off valve 414 on both sides of the second drain valve 413. The first shut-off valve 412 and the second shut-off valve 414 are mainly linked with the second drain valve 413. When the pressure in the stored gas delivery pipeline 41 exceeds the pressure set by the second drain valve 413, in addition to opening the second drain valve 413 to release the pressure, the first shut-off valve 412 and the second shut-off valve 414 will be quickly closed or opened to temporarily stop the supply of the stored gas 301 in the stored gas delivery pipeline 41. In addition, the gas flow control valve 415 is located near the burner head 40 and is mainly used to open or close the stored gas 301 in the stored gas delivery pipeline 41. The gas flow control valve 415 can control the flow of the stored gas 301 delivered to the burner head 40, so that the flame of the burner head 40 can increase or decrease with the size of the opening valve of the gas flow control valve 415.

[0091] In addition, the burner head 40 is connected to an air passage pipe 42 (such as Figure 2As shown in the figure, the air passage pipe 42 is for admitting outside air or atmospheric air, so that the outside air or atmospheric air input through the air passage pipe 42 can be mixed with the stored gas 301 transported through the stored gas transport pipe 41. The air passage pipe 42 is provided with an air flow control valve 421 to control the flow of the outside air or atmospheric air input through the air passage pipe 42, and the air passage pipe 42 is provided with a windmill (not shown) to push and pull the outside air or atmospheric air in the air passage pipe 42.

[0092] In addition, the burner head 40 is installed in an incinerator 60 (such as Figure 1 and Figure 2 As shown), the incinerator 60 is any one of a direct-fired incinerator (TO), a catalytic incinerator or a regenerative thermal incinerator (RTO). When the incinerator 60 is a direct-fired incinerator (TO), the direct-fired incinerator (TO) is equipped with any one of two heat exchangers, three heat exchangers or four heat exchangers, and the incinerator 60 is combined with any one of a dual-rotor volatile organic gas (VOC) treatment system 1 or a single-rotor volatile organic gas (VOC) treatment system (not shown), so that the incinerator 60 can perform high-temperature cracking on the desorbed concentrated gas desorbed by high temperature through the burner head 40 to first reduce volatile organic compounds, and has the efficiency of simultaneously treating volatile organic gases (VOCs) and waste hydrogen, so as to achieve the purpose of environmental protection, energy saving and carbon reduction.

[0093] Furthermore, the present invention has been described in the preceding paragraph as being configured with either a dual-rotor VOC treatment system 1 or a single-rotor VOC treatment system (not shown). When the incinerator 60 is configured with a dual-rotor VOC treatment system 1, the dual-rotor VOC treatment system 1 is configured with a first heat exchanger 91, a second heat exchanger 92, a third heat exchanger 93, a third cold-side transport pipeline 94, a first adsorption rotor 70, a second adsorption rotor 80, and a chimney 95 (e.g., Figure 1 and Figure 2 As shown), the first heat exchanger 91 is provided with a first cold side pipe 911 and a first hot side pipe 912, the second heat exchanger 92 is provided with a second cold side pipe 921 and a second hot side pipe 922, and the third heat exchanger 93 is provided with a third cold side pipe 931 and a third hot side pipe 932.

[0094] The burner head 40 (such as Figure 1 and Figure 2As shown in the figure, the high-temperature gas that has been incinerated can be first transported to one side of the third hot side pipe 932 of the third heat exchanger 93 for heat exchange, and the other side of the third hot side pipe 932 of the third heat exchanger 93 can transport the high-temperature gas that has been incinerated to one side of the first hot side pipe 912 of the first heat exchanger 91 for heat exchange, and then the other side of the first hot side pipe 912 of the first heat exchanger 91 can transport the high-temperature gas that has been incinerated to one side of the second hot side pipe 922 of the second heat exchanger 92 for heat exchange, and then the other side of the second hot side pipe 922 of the second heat exchanger 92 can transport the high-temperature gas that has been incinerated to the chimney 95.

[0095] In addition, the first adsorption rotor 70 of the present invention is provided with an adsorption zone 701, a cooling zone 702 and a desorption zone 703 (such as Figure 1 and Figure 2 As shown in FIG. 1 , the first adsorption rotor 70 is connected to an exhaust gas intake line 71, a first clean gas exhaust line 72, a first cooling gas intake line 73, a first cooling gas delivery line 74, a first hot gas delivery line 75, and a first desorption concentrated gas line 76. The second adsorption rotor 80 is provided with an adsorption zone 801, a cooling zone 802, and a desorption zone 803. The second adsorption rotor 80 is connected to a second clean gas exhaust line 81, a second cooling gas intake line 82, a second cooling gas delivery line 83, a second hot gas delivery line 84, and a second desorption concentrated gas line 85. The first adsorption rotor 70 and the second adsorption rotor 80 are respectively zeolite concentrating rotors or concentrating rotors made of other materials.

[0096] One end of the exhaust gas intake pipe 71 is connected to one side of the adsorption zone 701 of the first adsorption rotor 70, so that the exhaust gas intake pipe 71 can transport the organic exhaust gas to one side of the adsorption zone 701 of the first adsorption rotor 70, and one end of the first clean air discharge pipe 72 is connected to the other side of the adsorption zone 701 of the first adsorption rotor 70, and one end of the first clean air discharge pipe 72 is connected to one side of the adsorption zone 801 of the second adsorption rotor 80, so that the organic exhaust gas can pass through the adsorption zone 701 of the first adsorption rotor 70 to adsorb organic matter and then be transported to the adsorption zone 801 of the second adsorption rotor 80 by the first clean air discharge pipe 72. In addition, the other side of the adsorption area 801 of the second adsorption wheel 80 is connected to the second clean gas exhaust pipeline 81, so as to be connected to the chimney 97 through the other end of the second clean gas exhaust pipeline 81, and the second clean gas exhaust pipeline 81 is provided with a fan 811, so that the adsorbed gas in the second clean gas exhaust pipeline 81 can be pushed and pulled into the chimney 95 for discharge through the fan 811.

[0097] In addition, one side of the cooling zone 702 of the first adsorption wheel 70 is connected to the first cooling air inlet pipe 73 (such as Figure 1 and Figure 2 As shown), so that the gas enters the cooling zone 702 of the first adsorption rotor 70 for cooling, and the other side of the cooling zone 702 of the first adsorption rotor 70 is connected to one end of the first cooling gas delivery pipeline 74, and the other end of the first cooling gas delivery pipeline 74 is connected to one end of the first cold side pipeline 911 of the first heat exchanger 91, so as to deliver the gas after entering the cooling zone 702 of the first adsorption rotor 70 to the first heat exchanger 91 for heat exchange. Furthermore, one end of the first hot gas delivery pipeline 75 is connected to the other side of the desorption zone 703 of the first adsorption rotor 70, and the other end of the first hot gas delivery pipeline 75 is connected to the other end of the first cold side pipeline 911 of the first heat exchanger 91, so that the high-temperature hot gas that has undergone heat exchange through the first heat exchanger 91 can be delivered to the desorption zone 703 of the first adsorption rotor 70 through the first hot gas delivery pipeline 75 for desorption.

[0098] The cooling zone 702 of the first adsorption rotor 70 is provided with two embodiments. In the first embodiment, the first cooling air intake pipe 73 connected to one side of the cooling zone 702 of the first adsorption rotor 70 is for fresh air or external air to enter (not shown), and the cooling zone 702 of the first adsorption rotor 70 is cooled by the fresh air or external air. In the second embodiment, the exhaust gas intake pipe 71 is provided with an exhaust gas connecting pipe 711 (such as Figure 1 As shown), the other end of the exhaust gas connecting pipe 711 is connected to the first cooling air intake pipe 73, so that the exhaust gas in the exhaust gas intake pipe 71 can be transported to the cooling area 702 of the first adsorption wheel 70 through the exhaust gas connecting pipe 711 for cooling. In addition, the exhaust gas connecting pipe 711 is provided with an exhaust gas connecting control valve 7111 (as shown). Figure 2 As shown), to control the air volume of the exhaust gas connecting pipe 711.

[0099] In addition, one side of the cooling zone 802 of the second adsorption wheel 80 is connected to the second cooling air inlet pipe 82 (such as Figure 1 and Figure 2As shown), so that the gas enters the cooling zone 802 of the second adsorption rotor 80 for cooling, and the other side of the cooling zone 802 of the second adsorption rotor 80 is connected to one end of the second cooling gas delivery pipeline 83, and the other end of the second cooling gas delivery pipeline 83 is connected to one end of the second cold side pipeline 921 of the second heat exchanger 92, so as to deliver the gas after entering the cooling zone 802 of the second adsorption rotor 80 to the second heat exchanger 92 for heat exchange. Furthermore, one end of the second hot gas delivery pipeline 84 is connected to the other side of the desorption zone 803 of the second adsorption rotor 80, and the other end of the second hot gas delivery pipeline 84 is connected to the other end of the second cold side pipeline 921 of the second heat exchanger 92, so that the high-temperature hot gas that has undergone heat exchange through the second heat exchanger 92 can be delivered to the desorption zone 803 of the second adsorption rotor 80 through the second hot gas delivery pipeline 84 for desorption.

[0100] The cooling zone 802 of the second adsorption wheel 80 is provided with two embodiments, wherein the first embodiment is that the second cooling air inlet pipe 82 connected to one side of the cooling zone 802 of the second adsorption wheel 80 is for fresh air or external air to enter (such as Figure 2 As shown in FIG), the fresh air or external air is used to cool the cooling area 802 of the second adsorption wheel 80. In addition, the second embodiment is that the first clean air discharge pipeline 72 is provided with a first clean air communication pipeline 721 (as shown in FIG). Figure 1 As shown), the other end of the first clean air communication pipeline 721 is connected to the second cooling air inlet pipeline 83, so that the gas in the first clean air discharge pipeline 72 can be transported to the cooling zone 802 of the second adsorption wheel 80 through the first clean air communication pipeline 721 for cooling. In addition, the first clean air communication pipeline 721 is provided with a first clean air communication control valve 7211 (as shown). Figure 1 As shown), to control the air volume of the first clean air communicating pipeline 721.

[0101] In addition, one end of the first desorption concentrated gas pipeline 76 is connected to one side of the desorption zone 703 of the first adsorption rotor 70 (as shown in FIG. Figure 1 and Figure 2As shown), the other end of the first desorbed concentrated gas pipeline 76 is connected to one end of the third cold side pipeline 931 of the third heat exchanger 93, wherein the other end of the third cold side pipeline 931 of the third heat exchanger 93 is connected to one end of the third cold side transport pipeline 94. Furthermore, the other end of the third cold side transport pipeline 94 is connected to the inlet 61 of the incinerator 60, so that the desorbed concentrated gas desorbed by high temperature can be transported to one end of the third cold side pipeline 931 of the third heat exchanger 93 through the first desorbed concentrated gas pipeline 76, and transported from the other end of the third cold side pipeline 931 of the third heat exchanger 93 to one end of the third cold side transport pipeline 94, and transported from the other end of the third cold side transport pipeline 94 to the inlet 61 of the incinerator 60 (as shown). Figure 1 and Figure 2 As shown), the burner head 40 of the incinerator 60 is allowed to perform high temperature cracking to reduce volatile organic compounds. In addition, the first desorption concentrated gas pipeline 76 is provided with a fan 761 (as shown). Figure 2 As shown), the desorbed concentrated gas can be pushed and pulled into one end of the third cold side pipeline 931 of the third heat exchanger 93.

[0102] In addition, one end of the second desorption concentrated gas pipeline 85 is connected to one side of the desorption zone 803 of the second adsorption rotor 80, wherein the other end of the second desorption concentrated gas pipeline 85 has two implementation modes, and the first implementation mode is that the other end of the second desorption concentrated gas pipeline 85 is connected to the exhaust gas intake pipeline 71 (such as Figure 1 As shown), the concentrated gas can then enter the adsorption zone 701 of the first adsorption wheel 70 through the exhaust gas intake pipe 71 for further adsorption. In addition, a second embodiment is that the other end of the second desorption concentrated gas pipeline 85 is connected to the first cooling gas intake pipe 73 (as shown). Figure 2 As shown, the concentrated gas can then enter the cooling zone 702 of the first adsorption rotor 70 through the first cooling gas inlet pipe 73 for cooling. Furthermore, the second desorbed concentrated gas pipe 85 is equipped with a fan 851 to push and pull the desorbed concentrated gas into the exhaust gas inlet pipe 71 or the first cooling gas inlet pipe 73. This allows the desorbed gas generated by the desorption zone 803 of the second adsorption rotor 80 to enter the adsorption zone 701 or the cooling zone 702 of the first adsorption rotor 70 for recycling.

[0103] Finally, when the incinerator 60 is configured as a direct-fired incinerator (TO), the dual-rotor volatile organic compound (VOC) treatment system 1 can, in addition to the first heat exchanger 91, the second heat exchanger 82, and the third heat exchanger 93 described above, also be equipped with the first heat exchanger 91, the second heat exchanger 92, the third heat exchanger 93, and a new fourth heat exchanger (not shown). The difference lies in the addition of the new fourth heat exchanger (not shown). The remaining first adsorption rotor 70 and the second adsorption rotor 80 adopt the same design. Therefore, when the incinerator 60 is converted to a direct-fired incinerator (TO), the details of the first heat exchanger 91, the second heat exchanger 92, the third heat exchanger 93, the third cold-side transport pipeline 94, the first adsorption rotor 70, the second adsorption rotor 80, and the chimney 95 are not repeated. Please refer to the above description.

[0104] In addition, in addition to being assembled with the dual-rotor VOC treatment system 1 as described above, the incinerator 60 of the present invention can also be assembled with a single-rotor VOC treatment system (not shown). The difference between the single-rotor VOC treatment system (not shown) and the dual-rotor VOC treatment system 1 described above is that the second adsorption rotor 80 is missing. When the incinerator 60 is configured as a direct-fired incinerator (TO), the direct-fired incinerator (TO) can be equipped with two or three heat exchangers. The configuration thereof can refer to the design of the first adsorption rotor 70 in the dual-rotor VOC treatment system 1. The details will not be repeated here. Please refer to the above description.

[0105] Through the above detailed description, it can be understood by those skilled in the art that the present invention can indeed achieve the aforementioned objectives and complies with the provisions of the Patent Law, and therefore an application for a patent for the present utility model is filed.

[0106] The above description is only a preferred embodiment of the present invention and cannot be used to limit the scope of implementation of the present invention; therefore, any simple equivalent changes and modifications made according to the claims of the present invention and the contents of the utility model specification should still fall within the scope of the present utility model patent.

Claims

1. A waste hydrogen recovery and utilization system, characterized in that: include: A process plant is provided with a hydrogen exhaust pipeline. The process plant produces a process tail gas containing at least one hydrogen gas (H2) and at least one nitrogen gas (N2) and outputted through the hydrogen exhaust pipeline; a separation and purification device, the separation and purification device being provided with a nitrogen output pipeline, the separation and purification device being connected to the hydrogen exhaust pipeline, and separating and purifying the process tail gas into hydrogen gas (H2) and nitrogen gas (N2) through the separation and purification device, the nitrogen gas (N2) being output through the nitrogen output pipeline; a storage tank, the storage tank being provided with a hydrogen transmission pipeline and a natural gas transmission pipeline, the hydrogen transmission pipeline being connected to the separation and purification equipment to transmit hydrogen gas (H2) separated and purified by the separation and purification equipment to the storage tank, and the natural gas transmission pipeline transmitting natural gas into the storage tank to form a stored gas with the hydrogen gas (H2); and A burner head is provided with a stored gas delivery pipeline, which is connected to the storage barrel so that the stored gas in the storage barrel can be delivered to the burner head through the stored gas delivery pipeline.

2. The waste hydrogen recovery and utilization system according to claim 1, characterized in that: The process plant is further any one of a semiconductor process plant, an electronic process plant, and a photoelectric process plant.

3. The waste hydrogen recovery and utilization system according to claim 1, characterized in that: The hydrogen exhaust pipeline is further provided with a gas extraction device to push the process tail gas to the separation and purification equipment.

4. The waste hydrogen recovery and utilization system according to claim 1, characterized in that: The hydrogen discharge pipeline is further provided with a first discharge valve, and the opening and closing mode of the first discharge valve is further pneumatic or electric.

5. The waste hydrogen recovery and utilization system according to claim 1, characterized in that: The storage tank is further assembled with a flow control device, which is equipped with a pressure sensor, a first mass flow controller and a second mass flow controller. The pressure sensor is connected to the storage tank, the first mass flow controller is arranged on the hydrogen transmission pipeline and is connected to the pressure sensor signal, and the second mass flow controller is arranged on the natural gas transmission pipeline and is connected to the pressure sensor signal.

6. The waste hydrogen recovery and utilization system according to claim 5, characterized in that: The pressure sensor is further used to detect the gas pressure of the stored gas in the storage barrel.

7. The waste hydrogen recovery and utilization system according to claim 1, characterized in that: The stored gas delivery pipeline is further provided with any one of a pressure regulating valve, a first shut-off valve, a second drain valve, a second shut-off valve, and a gas flow control valve.

8. The waste hydrogen recovery and utilization system according to claim 1, characterized in that: The burner head is further connected to an air passage pipeline, and the air passage pipeline is provided with an air flow control valve to control the air flow.

9. The waste hydrogen recovery and utilization system according to claim 8, characterized in that: The air passage pipeline is further provided with a windmill to push and pull the gas in the air passage pipeline.

10. The waste hydrogen recovery and utilization system according to claim 1, characterized in that: The separation and purification equipment further comprises a hydrogen purifier, which adopts any one of membrane separation technology, low-temperature separation technology, pressure swing adsorption (PSA) technology, and metal hydride technology, or a combination thereof.

11. The waste hydrogen recovery and utilization system according to claim 1, characterized in that: The separation and purification equipment further comprises an electrochemical hydrogen purifier (ECHP), a ceramic adsorption purifier (PCAP), or a combination thereof.

12. The waste hydrogen recovery and utilization system according to claim 1, characterized in that: The burner head is further installed in an incinerator, which is any one of a direct-fired incinerator (TO), a catalyst incinerator or a regenerative thermal incinerator (RTO).

13. The waste hydrogen recovery and utilization system according to claim 12, characterized in that: The incinerator is further combined with either a double-rotor volatile organic gas (VOC) treatment system or a single-rotor volatile organic gas (VOC) treatment system.

14. The waste hydrogen recovery and utilization system according to claim 12, characterized in that: The direct-fired incinerator (TO) is further provided with any one of two heat exchangers, three heat exchangers or four heat exchangers.

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