Cavity sealing device

Abstract

The utility model discloses a cavity sealing device which comprises a sealing frame, a base is arranged at the bottom in the sealing frame, a containing groove is formed in the upper surface of the base, a vent hole is communicated between the upper surface of the base and the containing groove, a sealing piece is placed in the middle of the containing groove, and an air bag is directly placed between the sealing piece and the inner wall of the sealing frame. One end of the air bag communicates with a first air pipe, a first air valve is arranged outside the first air pipe, a sealing cover is arranged at the upper end of the sealing frame, a plurality of mounting plates and mounting shells are arranged on the side edges of the sealing cover and the sealing frame correspondingly, inserting rods are arranged on the side edges of the mounting plates correspondingly, and positioning holes are formed in the middles of the inserting rods correspondingly. Positioning rods are arranged in the middles of the multiple positioning holes. By means of the structure, after the sealing piece is placed in the sealing frame, under the cooperation of the first air pipe and the second air pipe, the interior of the sealing frame is kept in a sealed state, and therefore the sealing piece is sealed, and the sealing effect is guaranteed.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor transportation, in particular to a cavity sealing device. Background Art

[0002] In recent years, with the rapid development of industry and the increasing demand for environmental protection, the semiconductor industry has developed rapidly. Semiconductors need to be sealed during transportation to ensure their safety. However, the existing semiconductor sealing devices have defects in the sealing effect when sealing semiconductors, which is prone to air leakage and easily affects the transportation of semiconductors. Utility Model Content

[0003] The purpose of the utility model is to provide a cavity sealing device. When sealing semiconductors, the existing semiconductor sealing devices have defects in sealing effect, are prone to air leakage, and are likely to affect the transportation of semiconductors.

[0004] To achieve the above object, a cavity sealing device is provided, comprising: a sealing frame, a base provided at the bottom of the sealing frame, a placement groove provided on the upper surface of the base, a vent hole communicating with the placement groove, a sealing member provided in the middle of the placement groove, an airbag provided directly between the sealing member and the inner wall of the sealing frame, one end of the airbag communicating with a first air pipe, and a first air valve provided on the outside of the first air pipe;

[0005] A sealing cover is provided at the upper end of the sealing frame, and multiple mounting plates and mounting shells are provided on the sides of the sealing cover and the sealing frame. Insertion rods are provided on the sides of multiple mounting plates, positioning holes are opened in the middle of multiple insertion rods, and positioning rods are provided in the middle of multiple positioning holes.

[0006] According to the cavity sealing device, the middle parts of the multiple mounting shells are rotatably connected to threaded rods, one end of the two connected positioning rods is fixedly connected to a movable plate, the outsides of the multiple threaded rods are threadedly connected to two threaded blocks, and rotating parts are provided on both sides of the multiple threaded blocks and the side edges of the movable plate, and the sides of the rotating parts are cross-rotatably connected to support rods.

[0007] According to the cavity sealing device, the plurality of vent holes are interconnected, one end of the vent hole is connected to a second air pipe, and a second air valve is provided on the outside of the second air pipe.

[0008] According to the cavity sealing device, a protrusion is provided inside the sealing cover, a spring is provided inside the protrusion, a limiting plate is provided on a side wall of the spring, and a clamping plate is provided on a side wall of the limiting plate.

[0009] According to the cavity sealing device, a groove is formed on the lower surface of the protrusion, the upper end of the sealing member fits in the interior of the groove, and the side wall of the clamping plate fits in the side wall of the sealing member.

[0010] According to the cavity sealing device, a sealing ring is provided on the upper surface of the sealing frame, positioning grooves are provided at the four corners of the upper end of the sealing frame, positioning blocks are provided at the four corners of the lower end of the sealing cover, and knobs are provided at the lower ends of the multiple mounting shells, and the side wall of the knob is fixedly connected to one end of the threaded rod.

[0011] The above scheme has the beneficial effects: the utility model utilizes the sealing frame to cooperate with the sealing cover, and places the sealing member inside the placement groove. After the sealing cover is matched with the sealing frame, the airbag is inflated by connecting the air pump with the first air pipe, which can block the gap between the sealing member and the sealing frame, and the air extraction pump is used in conjunction with the second air pipe to extract excess gas, thereby keeping the inside of the sealing frame sealed.

[0012] Additional aspects and advantages of the present invention will be given in part in the following description and will become apparent from the following description or learned through practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] The present invention will be further described below with reference to the accompanying drawings and embodiments;

[0014] Figure 1 This is a three-dimensional diagram of a cavity sealing device of the present invention;

[0015] Figure 2 This is a top view of a cavity sealing device of the present invention;

[0016] Figure 3 This is a side sectional view of a cavity sealing device of the present invention;

[0017] Figure 4 This is a cross-sectional view of the installation shell of a cavity sealing device of the utility model;

[0018] Figure 5 For this utility model Figure 3 Enlarged view of point A in the middle.

[0019] Legend:

[0020] 1. Sealing frame; 2. Sealing cover; 3. Sealing element; 4. Base; 5. Vent; 6. Positioning groove; 7. Bump; 8. Positioning block; 9. First air valve; 10. First air pipe; 11. Sealing ring; 12. Placement groove; 13. Second air valve; 14. Second air pipe; 15. Mounting plate; 16. Mounting shell; 17. Positioning rod; 18. Rotating element; 19. Movable plate; 20. Knob; 21. Support rod; 22. Threaded rod; 23. Insert rod; 24. Threaded block; 25. Limit plate; 26. Clamp; 27. Spring. DETAILED DESCRIPTION

[0021] This section will describe in detail the specific embodiments of the present invention. The preferred embodiments of the present invention are shown in the accompanying drawings. The purpose of the accompanying drawings is to supplement the description of the text part of the specification with graphics, so that people can intuitively and vividly understand each technical feature and overall technical solution of the present invention, but it cannot be understood as a limitation on the scope of protection of the present invention.

[0022] Reference Figure 1-5 The embodiment of the present invention provides a cavity sealing device, which includes: a sealing frame 1, a base 4 is provided at the bottom of the sealing frame 1, a placement groove 12 is provided on the upper surface of the base 4, a vent 5 is connected between the upper surface of the base 4 and the placement groove 12, the vent 5 is connected to the second air pipe 14, and excess gas can be extracted under the action of an air pump, a sealing member 3 is placed in the middle of the placement groove 12, an air bag is directly placed between the sealing member 3 and the inner wall of the sealing frame 1, and the air bag is inflated by the air pump to block the gap and ensure the sealing performance of the sealing frame 1, one end of the air bag is connected to the first air pipe 10, and a first air valve 9 is provided on the outside of the first air pipe 10;

[0023] A sealing cover 2 is provided at the upper end of the sealing frame 1. Multiple mounting plates 15 and mounting shells 16 are provided on the sides of the sealing cover 2 and the sealing frame 1. Insertion rods 23 are provided on the sides of the multiple mounting plates 15. Positioning holes are opened in the middle of the multiple insertion rods 23. Positioning rods 17 are provided in the middle of the multiple positioning holes. The insertion rods 23 cooperate with the mounting shell 16, and the positioning rods 17 cooperate with the positioning holes, so as to fix the sealing cover 2 and the sealing frame 1.

[0024] The middle part of multiple mounting shells 16 is rotatably connected with a threaded rod 22, and the external threads of the threaded rod 22 are symmetrically arranged so that the two threaded blocks 24 move toward each other. One end of the two connected positioning rods 17 is fixedly connected with a movable plate 19, and the external parts of multiple threaded rods 22 are threadedly connected to two threaded blocks 24. Rotating parts 18 are provided on both sides of multiple threaded blocks 24 and the side of the movable plate 19. The rotating parts 18 on the side wall of the movable plate 19 are slidably connected inside the movable plate 19, and the side of the rotating parts 18 is cross-rotatably connected with the support rod 21. Multiple vents 5 are connected to each other, and one end of the vent 5 is connected to the second air pipe 14. The second air valve 13 is provided on the outside of the second air pipe 14, which is sealed. A protrusion 7 is provided inside the cover 2, and a spring 27 is provided inside the protrusion 7. A limit plate 25 is provided on the side wall of the spring 27, and a clamping plate 26 is provided on the side wall of the limit plate 25 to facilitate positioning of the seal 3. A groove is provided on the lower surface of the protrusion 7, and the upper end of the seal 3 fits into the inner part of the groove, and the side wall of the clamping plate 26 fits into the side wall of the seal 3. A sealing ring 11 is provided on the upper surface of the sealing frame 1 to ensure the sealing between the sealing frame 1 and the sealing cover 2. Positioning grooves 6 are provided at the four corners of the upper end of the sealing frame 1, and positioning blocks 8 are provided at the four corners of the lower end of the sealing cover 2. Knobs 20 are provided at the lower ends of multiple mounting shells 16, and the side wall of the knob 20 is fixedly connected to one end of the threaded rod 22.

[0025] Working principle: When in use, place the seal 3 inside the placement groove 12, cover the sealing cover 2 on the sealing frame 1, and insert the insertion rod 23 into the interior of the mounting shell 16 in sequence. Use the knob 20 to drive the threaded rod 22 to rotate, and the two threaded blocks 24 move toward each other. During the movement, the support rod 21 drives the movable plate 19 to move, so that the positioning rod 17 cooperates with the positioning hole, thereby fixing the insertion rod 23, so that the sealing cover 2 remains stable, and with the cooperation of the sealing ring 11, the sealing cover 2 and the sealing frame 1 are kept sealed. Use the inflation pump to connect with the first air pipe 10 to inflate the airbag, which can block the gap between the seal 3 and the sealing frame 1, and use the vacuum pump to cooperate with the second air pipe 14 to extract excess gas, so that the inside of the sealing frame 1 remains sealed.

[0026] The embodiments of the present invention are described in detail above with reference to the accompanying drawings. However, the present invention is not limited to the above embodiments. Various changes can be made within the scope of knowledge possessed by ordinary technicians in the relevant technical field without departing from the purpose of the present invention.

Claims

1. A cavity sealing device, comprising: A sealing frame (1), characterized in that a base (4) is provided at the bottom inner portion of the sealing frame (1), a placement groove (12) is provided on the upper surface of the base (4), a vent (5) is communicated between the upper surface of the base (4) and the placement groove (12), a sealing member (3) is placed in the middle of the placement groove (12), an air bag is directly placed between the sealing member (3) and the inner wall of the sealing frame (1), one end of the air bag is communicated with a first air pipe (10), and a first air valve (9) is provided on the outside of the first air pipe (10); A sealing cover (2) is provided at the upper end of the sealing frame (1), and a plurality of mounting plates (15) and mounting shells (16) are provided on the sides of the sealing cover (2) and the sealing frame (1), and insertion rods (23) are provided on the sides of the plurality of mounting plates (15), and positioning holes are provided in the middle of the plurality of insertion rods (23), and positioning rods (17) are provided in the middle of the plurality of positioning holes.

2. A cavity sealing device according to claim 1, characterized in that: The middle parts of the plurality of mounting shells (16) are all rotatably connected to a threaded rod (22), one end of the two connected positioning rods (17) are fixedly connected to a movable plate (19), the exteriors of the plurality of threaded rods (22) are all threadedly connected to two threaded blocks (24), both sides of the plurality of threaded blocks (24) and the side edges of the movable plate (19) are provided with rotating parts (18), and the side edges of the rotating parts (18) are cross-rotatably connected to support rods (21).

3. A cavity sealing device according to claim 1, characterized in that: The plurality of vent holes (5) are interconnected, one end of the vent hole (5) is connected to a second air pipe (14), and a second air valve (13) is provided outside the second air pipe (14).

4. A cavity sealing device according to claim 1, characterized in that: A protrusion (7) is provided inside the sealing cover (2), a spring (27) is provided inside the protrusion (7), a limiting plate (25) is provided on the side wall of the spring (27), and a clamping plate (26) is provided on the side wall of the limiting plate (25).

5. A cavity sealing device according to claim 4, characterized in that: A groove is formed on the lower surface of the protrusion (7), the upper end of the sealing member (3) is fitted with the interior of the groove, and the side wall of the clamping plate (26) is fitted with the side wall of the sealing member (3).

6. The cavity sealing device according to claim 1, characterized in that: The upper surface of the sealing frame (1) is provided with a sealing ring (11), the four corners of the upper end of the sealing frame (1) are provided with positioning grooves (6), the four corners of the lower end of the sealing cover (2) are provided with positioning blocks (8), and the lower ends of the plurality of mounting shells (16) are provided with knobs (20), and the side walls of the knobs (20) are fixedly connected to one end of the threaded rod (22).

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