Furnace barrel structure and single crystal furnace

Abstract

The utility model discloses a furnace barrel structure and a single crystal furnace, the furnace barrel structure comprises a furnace barrel body and a plurality of support arm components arranged on the inner wall of the furnace barrel body, and the plurality of support arm components are uniformly distributed in the circumferential direction of the furnace barrel body; the supporting arm assembly extends from the inner wall of the furnace barrel body to the center in the radial direction, and an adjustable positioning space used for limiting a thermal field assembly is formed between the supporting arm assembly and the furnace bottom of the furnace barrel body. The heating expansion deformation of the thermal field assembly in the furnace barrel body is effectively limited, and the stability of the crystal forming condition of crystals is ensured.

Description

Technical Field

[0001] The utility model belongs to the technical field of single crystal furnaces, and in particular relates to a furnace drum structure and a single crystal furnace. Background Art

[0002] The vertical single crystal furnace is currently the most commonly used single crystal silicon manufacturing device. With the continuous maturity of crystal pulling technology, in order to expand production capacity, the industry has chosen to expand the thermal field components, from the early 32-inch thermal field components to 36-inch and even 40-inch thermal field components. However, as the thermal field components are enlarged, the thermal expansion and contraction caused by temperature changes in the furnace barrel are becoming more and more serious.

[0003] During the crystal growth process, due to the overall thermal expansion of the thermal field assembly, the position of the guide tube and the insulation tube in the furnace will change, and the position of the thermal field assembly in the furnace along the vertical direction will change. The crystal cannot replicate the crystallization conditions of the previous cycle, resulting in an increase in the crystal breakage rate. Utility Model Content

[0004] The purpose of this utility model is to solve the above technical problems and provide a furnace drum structure and a single crystal furnace, so that a plurality of support arm assemblies are arranged in the furnace drum structure, and an adjustable positioning space for limiting the thermal field assembly is formed between the support arm assemblies and the furnace bottom of the furnace drum, effectively limiting the thermal field assembly from expanding and deforming due to heat in the furnace drum, thereby ensuring the stability of the crystallization conditions. In order to achieve the above purpose, the technical solution of this utility model is as follows:

[0005] A furnace drum structure comprises a furnace drum body and a plurality of support arm assemblies arranged on the inner wall of the furnace drum body, wherein the plurality of support arm assemblies are evenly distributed in the circumference of the furnace drum body;

[0006] The support arm assembly extends radially toward the center from the inner wall of the furnace barrel body, and forms an adjustable positioning space for limiting the thermal field assembly between the support arm assembly and the furnace bottom of the furnace barrel body.

[0007] Specifically, the support arm assembly is detachably connected to the inner wall of the furnace body or is integrally connected thereto.

[0008] Specifically, the support arm assembly includes a support rod, a plurality of branch rods arranged circumferentially of the support rod, and a pressure plate with an adjustable axial distance relative to the support rod;

[0009] One end of the support rod is connected to the inner wall of the furnace body and is arranged along the radial direction of the furnace body, and the pressure plate is arranged along the axial direction of the furnace body.

[0010] Specifically, a plurality of branch rods are arranged at equal angles along the circumference of the support rod, one end of the branch rod is connected to the outer wall of the support rod, and the other end of the branch rod extends obliquely relative to the support rod and is connected to the furnace body.

[0011] Specifically, the inner wall of the furnace body is provided with a plurality of fixing holes, and the ends of the branch rods and the ends of the support rods are respectively provided with fixing parts, and the fixing parts are plugged into the fixing holes accordingly.

[0012] Specifically, the pressing plate includes a horizontally extending pressing portion and an adjusting rod vertically arranged on the upper end surface of the pressing portion;

[0013] The adjusting rod passes through the supporting rod, and the adjusting rod is perpendicular to the supporting rod.

[0014] Specifically, a through hole is provided on the support rod, and the adjustment rod is threadedly engaged with the through hole.

[0015] Specifically, the adjusting rod is arranged at the center position of the crimping portion.

[0016] Specifically, the lower end surface of the pressing portion presses against the thermal field assembly.

[0017] The single crystal furnace comprises the furnace drum structure.

[0018] Compared with the existing technology, the beneficial effects of the furnace drum structure and single crystal furnace of the utility model are mainly reflected in:

[0019] By arranging a number of support arm assemblies on the circumference of the inner wall of the furnace body, when the thermal field assembly expands due to heat, the positioning space formed between the support arm assembly and the furnace bottom of the furnace body can accurately limit the thermal field assembly, so that the position height of the thermal field assembly is fixed, and the crystallization conditions of the crystal in the previous cycle can be replicated to improve the crystallization rate; reduce the influence of the expansion and deformation of the thermal field assembly on the furnace body in the vertical direction, thereby improving the safety performance of the furnace structure and reducing the risk of ignition; the positioning space between the support arm assembly and the furnace bottom of the furnace body is adjustable to adapt to thermal field assemblies of different structural sizes, improve the applicability of the furnace structure, and facilitate the replacement or maintenance of the thermal field assembly. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 A schematic cross-sectional view of a single crystal furnace according to an embodiment of the present application;

[0021] Figure 2 A schematic diagram of a partial structure of a furnace drum structure provided in an embodiment of the present application;

[0022] Figure 3 A schematic structural diagram of the support arm assembly provided in an embodiment of the present application.

[0023] Reference numerals:

[0024] Furnace barrel body 1;

[0025] Support arm assembly 2, support rod 21, branch rod 22, pressing plate 23, crimping portion 231, adjusting rod 232, fixing portion 24;

[0026] Thermal field assembly 3, thermal insulation tube 31, thermal insulation cover 32, thermal insulation layer 33;

[0027] Crucible 4;

[0028] Guide tube assembly 5. DETAILED DESCRIPTION

[0029] In order to make the technical solutions and advantages of the embodiments of the present application more clearly understood, the exemplary embodiments of the present application are further described in detail below with reference to the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present application, and are not an exhaustive list of all the embodiments. It should be noted that the embodiments and features in the embodiments of the present application can be combined with each other unless they conflict.

[0030] Example 1

[0031] This embodiment provides a furnace drum structure for use in single crystal furnaces. The position of the thermal field assembly 3 within the furnace drum structure affects crystal growth. Thermal expansion of the thermal field assembly 3 can cause significant deformation, posing a safety hazard. This can also affect crystallization conditions throughout the entire crystallization cycle, reducing the crystallization rate. This embodiment effectively positions the thermal field assembly 3 vertically within the furnace drum structure by modifying the furnace drum structure, thereby improving the stability of crystallization conditions.

[0032] Figure 1 A schematic cross-sectional view of a single crystal furnace according to an embodiment of the present application; Figure 2 A schematic diagram of a partial structure of a furnace drum structure provided in an embodiment of the present application; Figure 3 A schematic structural diagram of the support arm assembly provided in an embodiment of the present application.

[0033] like Figure 1-Figure 3 As shown, this embodiment provides a furnace structure, including a furnace body 1 and a plurality of support arm assemblies 2 arranged on the inner wall of the furnace body 1, and the plurality of support arm assemblies 2 are evenly distributed in the circumference of the furnace body 1; the support arm assembly 2 extends radially toward the center from the inner wall of the furnace body 1, and forms an adjustable positioning space for limiting the thermal field assembly 3 between the support arm assembly 2 and the furnace bottom of the furnace body 1.

[0034] In this embodiment, the furnace barrel body 1 is a hollow cylindrical tube structure. A thermal field component 3 placed at the bottom of the furnace is provided inside the furnace barrel body 1. The bottom of the thermal field component 3 is against the bottom of the furnace barrel body 1, and the top of the thermal field component 3 is against the support arm component 2. The support arm component 2 is detachably connected to the inner wall of the furnace barrel body 1, thereby achieving adjustable relative distance between the support arm component 2 and the bottom of the furnace barrel body 1. The support arm component 2 can be adaptively installed at a specified position height on the inner wall of the furnace barrel body 1, so that the positioning space can accurately limit the thermal field component 3. The vertical position of the thermal field component 3 inside the furnace barrel body 1 is restricted by the support arm component 2 to avoid excessive deformation of the thermal field component 3 due to thermal expansion.

[0035] The support arm assembly 2 is detachably connected to the inner wall of the furnace body 1, and the detachable connection method can be screwing or clamping; alternatively, the support arm assembly 2 is integrally connected to the inner wall of the furnace body 1, and the integral connection method can be welding. In this embodiment, the support arm assembly 2 is welded and fixed to the inner wall of the furnace body 1. To facilitate the positioning of the support arm assembly 2 on the inner wall of the furnace body 1, the inner wall of the furnace body 1 is provided with a plurality of fixing holes (not shown in the figure). The ends of the support arm assembly 2 are inserted and positioned in the fixing holes and fixed by welding to achieve a stable connection between the support arm assembly 2 and the furnace body 1.

[0036] The support arm assembly 2 includes a support rod 21, a plurality of branch rods 22 arranged circumferentially around the support rod 21, and a pressure plate 23 whose axial distance relative to the support rod 21 is adjustable. One end of the support rod 21 is connected to the inner wall of the furnace drum body 1 and is arranged radially along the furnace drum body 1. The pressure plate 23 is arranged axially along the furnace drum body 1.

[0037] Among them, the support rod 21 can be a cylindrical structure or a square column structure. Several branch rods 22 are arranged at equal angles along the circumference of the support rod 21, and the angles between adjacent branch rods 22 are equal; one end of the branch rod 22 is connected to the outer wall of the support rod 21, and the other end of the branch rod 22 extends obliquely relative to the support rod 21 and is connected to the furnace body 1, and the angles between each branch rod 22 and the support rod 21 are equal. Several branch rods 22 are connected to the support rod 21 to increase the connection strength of the support rod 21. The ends of the branch rods 22 are connected to the furnace body 1 to increase the contact area with the furnace body 1, thereby improving the connection stability between the support arm assembly 2 and the furnace body 1.

[0038] The ends of the branch rod 22 and the support rod 21 are respectively provided with fixing parts 24, which are plugged into the fixing holes, so that the support arm assembly 2 and the inner wall of the furnace body 1 are conveniently aligned and connected, and it is also beneficial to weld the fixing parts 24 to the fixing holes.

[0039] The pressure plate 23 includes a horizontally extending crimping portion 231 and an adjustment rod 232 perpendicularly mounted on the upper end surface of the crimping portion 231. The adjustment rod 232 extends through the support rod 21 and is positioned perpendicular to the support rod 21. The support rod 21 is provided with a through hole extending therethrough, into which the adjustment rod 232 is threadedly engaged. By turning the knob on the adjustment rod 232, the distance between the pressure plate 23 and the support rod 21 can be adjusted. The adjustment rod 232 is positioned at the center of the crimping portion 231.

[0040] The lower end surface of the crimping portion 231 is adapted to the thermal field assembly 3 so that the lower end surface of the crimping portion 231 can be accurately pressed against the thermal field assembly 3; the end surface of the crimping portion 231 can be flat or non-flat. In this embodiment, the crimping portion 231 is a disc structure, and the bottom surface of the crimping portion 231 is flat, which is used to abut and position the top of the thermal field assembly 3. By adjusting the distance of the crimping portion 231 relative to the support rod 21, and then adjusting the relative distance of the crimping portion 231 relative to the furnace bottom of the furnace barrel body 1, an adjustable positioning space is formed, which is suitable for positioning thermal field assemblies 3 of different heights and sizes in the positioning space. At the same time, a detachable pressing plate 23 is provided on the support rod 21. After the pressing plate 23 is detached from the support rod 21 or the pressing plate 23 is adjusted relative to the support rod 21, it is convenient to replace the thermal field assembly 3, thereby improving the efficiency of maintenance.

[0041] In this embodiment, a number of support arm assemblies 2 are arranged on the circumference of the inner wall of the furnace body 1. When the thermal field assembly 3 expands due to heat, the positioning space formed between the support arm assembly 2 and the furnace bottom of the furnace body 1 can accurately limit the thermal field assembly 3, so that the position height of the thermal field assembly 3 is fixed, and the crystallization conditions of the crystal in the previous cycle can be replicated to improve the crystallization rate; the expansion and deformation influence of the thermal field assembly 3 in the vertical direction of the furnace body 1 is reduced, thereby improving the safety performance of the furnace structure and reducing the risk of ignition; the positioning space between the support arm assembly 2 and the furnace bottom of the furnace body 1 is adjustable to adapt to thermal field assemblies 3 of different structural sizes, thereby improving the applicability of the furnace structure and facilitating the replacement or maintenance of the thermal field assembly 3.

[0042] Example 2

[0043] This embodiment provides a single crystal furnace, including the furnace drum structure in the above embodiment. The single crystal furnace also includes a thermal field component 3, a crucible 4 and a guide tube component 5.

[0044] like Figure 1As shown, the thermal field assembly 3 is disposed within the furnace structure and includes an insulation barrel 31, an insulation cover 32 disposed on the top of the insulation barrel 31, and an insulation layer 33 disposed on the circumferential outer wall of the insulation barrel 31. The insulation layer 33 may be soft felt. The insulation barrel 31 is a hollow cylindrical structure, and the insulation cover 32 is an annular structure. A crucible 4 is disposed within the insulation barrel 31. The draft tube assembly 5 penetrates the insulation cover 32 and extends into the insulation barrel 31. The draft tube assembly 5 is located above the crucible 4.

[0045] The thermal field assembly 3 is positioned between the support arm assembly 2 and the furnace bottom of the furnace body 1 , and the bottom of the pressing portion 231 is pressed against the top of the thermal insulation cover 32 .

[0046] In this embodiment, the thermal field assembly 3 in the single crystal furnace is positioned by the support arm assembly 2, which effectively limits the thermal expansion and deformation of the thermal field assembly 3 due to heat, ensures the stability of the crystal growth conditions, and improves the crystallization rate.

[0047] In the description of this application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on this application.

[0048] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be understood to indicate or imply relative importance or implicitly specify the number of the technical features indicated. Thus, a feature specified as "first" or "second" may explicitly or implicitly include one or more of the features. Throughout the description of this application, "plurality" means at least two, such as two, three, etc., unless otherwise specifically defined.

[0049] In this application, unless otherwise expressly specified or limited, terms such as "mounted," "connected," "connect," and "fixed" should be understood broadly. For example, they may refer to fixed connections, detachable connections, or integration; mechanical connections, electrical connections, or communication; direct connections or indirect connections through an intermediate medium; and internal communication between two components or interaction between two components. Those skilled in the art will understand the specific meanings of these terms in this application based on specific circumstances.

[0050] Although the preferred embodiments of the present application have been described, those skilled in the art may make additional changes and modifications to these embodiments once they have learned the basic creative concept. Therefore, the appended claims are intended to be interpreted as including the preferred embodiments and all changes and modifications that fall within the scope of the present application.

[0051] Obviously, those skilled in the art may make various changes and modifications to this application without departing from the spirit and scope of this application. Thus, if these modifications and variations of this application fall within the scope of the claims of this application and their equivalents, this application is intended to include these modifications and variations.

Claims

1. Furnace drum structure, characterized by: It comprises a furnace body and a plurality of support arm assemblies arranged on the inner wall of the furnace body, wherein the plurality of support arm assemblies are evenly distributed in the circumference of the furnace body; The support arm assembly extends radially toward the center from the inner wall of the furnace barrel body, and forms an adjustable positioning space for limiting the thermal field assembly between the support arm assembly and the furnace bottom of the furnace barrel body.

2. The furnace drum structure according to claim 1, characterized in that: The support arm assembly is detachably connected to the inner wall of the furnace body or is integrally connected thereto.

3. The furnace drum structure according to claim 1, characterized in that: The support arm assembly includes a support rod, a plurality of branch rods arranged around the support rod, and a pressure plate with an adjustable axial distance relative to the support rod; One end of the support rod is connected to the inner wall of the furnace body and is arranged along the radial direction of the furnace body, and the pressure plate is arranged along the axial direction of the furnace body.

4. The furnace drum structure according to claim 3, characterized in that: A plurality of branch rods are arranged at equal angles along the circumference of the support rod, one end of the branch rod is connected to the outer wall of the support rod, and the other end of the branch rod extends obliquely relative to the support rod and is connected to the furnace body.

5. The furnace drum structure according to claim 3, characterized in that: The inner wall of the furnace body is provided with a plurality of fixing holes, and the ends of the branch rods and the ends of the support rods are respectively provided with fixing parts, and the fixing parts are plugged into the fixing holes accordingly.

6. The furnace drum structure according to claim 3, characterized in that: The pressing plate includes a horizontally extending pressing portion and an adjusting rod vertically arranged on the upper end surface of the pressing portion; The adjusting rod passes through the supporting rod, and the adjusting rod is perpendicular to the supporting rod.

7. The furnace drum structure according to claim 6, characterized in that: The support rod is provided with a through hole, and the adjusting rod is threadedly engaged with the through hole.

8. The furnace drum structure according to claim 6, characterized in that: The adjusting rod is arranged at the center position of the crimping portion.

9. The furnace drum structure according to claim 6, characterized in that: The lower end surface of the pressing portion presses against the thermal field component.

10. Single crystal furnace, characterized by: The invention comprises a furnace drum structure as described in any one of claims 1 to 9.

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