Opening and closing mechanism for upper cavity cover of vacuum cavity

Abstract

The utility model discloses an opening and closing mechanism for an upper cavity cover of a vacuum cavity. The opening and closing mechanism comprises an upper hearth top cover, a lower hearth rack, an upper cavity module, a lower cavity module, a first lifting structure and a lifting power system, the edge of one side of the upper hearth top cover is hinged to the edge of one side of the lower hearth rack, and the edge of the other side of the upper hearth top cover is connected with the edge of the other side of the lower hearth rack through a second lifting structure. The upper cavity module is located above the lower cavity module and is parallel to the lower cavity module, and the lifting power system controls the upper cavity module to be close to or away from the lower cavity module through the first lifting structure. The utility model has the advantages that the upper hearth top cover and the lower hearth rack can be automatically closed or opened, so that the labor intensity is reduced, and the cleaning and maintenance efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor equipment, in particular to an opening and closing mechanism for an upper cavity cover of a vacuum cavity. Background Art

[0002] In existing semiconductor vacuum reflow oven equipment, the vacuum chamber is the core of the process. Due to the long preheating and welding area at the front of the chamber, contaminants such as flux are released during the heating process. These contaminants can also flow into the vacuum zone. If not cleaned promptly, they can easily contaminate the product surface, causing defective products. This can also increase the resistance of the chain and the load on the transport motor, shortening the equipment's service life. To ensure product welding quality, the upper chamber cover must be opened regularly to clean and maintain the components inside the chamber. Even when the chamber is still hot, the cover must be opened to inspect the product or structural changes within the chamber. Semiconductor reflow oven vacuum chambers are generally large and heavy, with the entire upper chamber cover module weighing approximately 30-200 kg. Manual removal typically requires two to three people (two for lifting, one for safety and maintenance). High temperatures cannot be immediately inspected until the equipment cools down to room temperature. Utility Model Content

[0003] The technical problem to be solved by the utility model is to provide an opening and closing mechanism for an upper chamber cover of a vacuum chamber in view of the deficiencies in the prior art.

[0004] In order to solve the above technical problems, the present utility model adopts the following technical solutions.

[0005] A vacuum chamber upper chamber cover opening and closing mechanism comprises an upper furnace cover, a lower furnace frame, an upper chamber module, a lower chamber module, a first lifting structure and a lifting power system; one side edge of the upper furnace cover is hinged to one side edge of the lower furnace frame, and the other side edge of the upper furnace cover is connected to the other side edge of the lower furnace frame via a second lifting structure; the upper chamber module is located above the lower chamber module and is arranged parallel to the lower chamber module, and the lifting power system controls the upper chamber module to approach or move away from the lower chamber module via the first lifting structure.

[0006] A preferred solution is that the first lifting structure includes two parallel lifting rods, the inner wall of the upper furnace top cover is provided with a slide groove, the first end of the upper cavity module is hinged to the top of a lifting rod, the second end is slidably connected to the slide groove, and the top of the other lifting rod is used to drive the second end of the upper cavity module to slide up and down along the slide groove.

[0007] A preferred solution is that the lifting power system includes a fixed frame, a cross bar and a power source, the two ends of the cross bar are respectively connected to the bottom of the two lifting rods, the power source drives the cross bar to move up and down, and the fixed frame is provided with an upper travel switch and a lower travel switch; the upper travel switch and the lower travel switch point to the lifting rods respectively.

[0008] A preferred solution is that the upper surface of the lower cavity module is provided with a transport rail, which is used to transport the products passing through the furnace.

[0009] A preferred solution is that the two lifting rods movably pass through the two ends of the lower cavity module.

[0010] A preferred solution is that the second lifting structure is a linear lifter, one end of the second lifting structure is hinged to the outer wall of the lower furnace frame, and the other end is hinged to the outer wall of the upper furnace top cover.

[0011] The vacuum chamber upper chamber cover opening and closing mechanism provided by the embodiment of the present invention has at least the following beneficial effects: when the equipment is in normal production, the upper furnace top cover and the lower furnace frame cover each other, the upper cavity module and the lower cavity module are in a parallel state and at a certain height apart, ensuring that the product flows into the upper surface of the lower cavity module, and the lifting power system starts to work, and the lifting power system drives the upper cavity module to move downward, so that the upper cavity module and the lower cavity module cover each other and close, and vacuum is drawn inside the upper cavity module and the lower cavity module. After the vacuum is drawn, the lifting power system controls the upper cavity module to rise through the first lifting structure, and the furnace products flow out of the lower cavity module; when the present invention needs maintenance, the second lifting structure rises, so that the upper furnace top cover is opened relative to the lower furnace frame, and the upper cavity module is also opened, so that the maintenance and maintenance of the interior of the vacuum chamber can be realized.

[0012] The above description is only an overview of the technical solution of the present invention. In order to more clearly understand the technical means of the present invention, it can be implemented in accordance with the contents of the specification. In addition, in order to make the above and other purposes, features and advantages of the present invention more obvious and easy to understand, the following preferred embodiments are specifically cited and described in detail with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 The utility model is a three-dimensional structure when the upper furnace cover and the lower furnace frame are covered with each other. Figure 1 ;

[0014] Figure 2 The utility model is a three-dimensional structure when the upper furnace cover and the lower furnace frame are covered with each other. Figure 2 ;

[0015] Figure 3 This is a three-dimensional diagram of the utility model when the upper furnace cover and the lower furnace frame are opened to each other;

[0016] Figure 4 It is an internal stereogram of the present utility model. DETAILED DESCRIPTION

[0017] In order to illustrate the idea and purpose of this application, this application will be further described below with reference to the accompanying drawings and specific embodiments.

[0018] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by those skilled in the art to which this application belongs; the terms used in the specification of the application are only for the purpose of describing specific embodiments and are not intended to limit this application; the terms "including" and "having" and any variations thereof in the specification and claims of this application and the above-mentioned drawings are intended to cover non-exclusive inclusions. The terms "first", "second", "left", "right", etc. in the specification and claims of this application or the above-mentioned drawings are used to distinguish different objects, not to describe a specific order.

[0019] References herein to "embodiments" mean that a particular feature, structure, or characteristic described in connection with the embodiments may be included in at least one embodiment of the present application. The appearance of this phrase in various places in the specification does not necessarily refer to the same embodiment, nor does it constitute an independent or alternative embodiment that is mutually exclusive of other embodiments. It is understood, both explicitly and implicitly, by those skilled in the art that the embodiments described herein may be combined with other embodiments.

[0020] like Figures 1 to 4 As shown, an embodiment of the present application provides a vacuum chamber upper chamber cover opening and closing mechanism, comprising an upper furnace top cover 1, a lower furnace frame 2, an upper chamber module 3, a lower chamber module 4, a first lifting structure 5 and a lifting power system 6; one side edge of the upper furnace top cover 1 is hinged to one side edge of the lower furnace frame 2, and the other side edge of the upper furnace top cover 1 is connected to the other side edge of the lower furnace frame 2 through a second lifting structure 7; the upper chamber module 3 is located above the lower chamber module 4 and is arranged parallel to the lower chamber module 4, and the lifting power system 6 controls the upper chamber module 3 to approach or move away from the lower chamber module 4 through the first lifting structure 5.

[0021] like Figures 1 to 4As shown, the lower cavity module 4 is fixed in the lower furnace frame 2. When the equipment is in normal production, the upper furnace cover 1 and the lower furnace frame 2 cover each other, the upper cavity module 3 and the lower cavity module 4 are in a parallel state and at a certain height, ensuring that the product 15 flows into the upper surface of the lower cavity module 4, and the lifting power system 6 starts to work, and the lifting power system 6 drives the upper cavity module 3 to move downward, so that the upper cavity module 3 and the lower cavity module 4 cover each other and close, and vacuum is drawn in the upper cavity module 3 and the lower cavity module 4. After the vacuum is drawn, the lifting power system 6 controls the upper cavity module 3 to rise through the first lifting structure 5, and the furnace product 15 flows out of the lower cavity module 4; when the utility model needs maintenance, the second lifting structure 7 rises, so that the upper furnace cover 1 is opened relative to the lower furnace frame 2, and the upper cavity module 3 is also opened accordingly, so that the interior of the vacuum chamber can be maintained.

[0022] like Figures 1 to 4 As shown, the first lifting structure 5 includes two parallel lifting rods 8, the inner wall of the upper furnace top cover 1 is provided with a slide groove 9, the first end of the upper cavity module 3 is hinged to the top of a lifting rod 8, and the second end is slidably connected to the slide groove 9, and the top of the other lifting rod 8 is used to drive the second end of the upper cavity module 3 to slide up and down along the slide groove 9.

[0023] like Figures 1 to 4 When the upper and lower parts of the equipment are in normal production, the upper furnace cover 1 and the lower furnace frame 2 are covered with each other, and the upper cavity module 3 and the lower cavity module 4 are in a parallel state and at a certain height. The upper surface of the lower cavity module 4 is ensured to have the product 15 flow into the upper surface of the lower cavity module 4. The lifting power system 6 starts to work, and the lifting power system 6 drives the lifting rod 8 to descend. The lifting rod 8 drives the upper cavity module 3 to move downward, so that the upper cavity module 3 and the lower cavity module 4 cover and close each other, and vacuum is drawn in the upper and lower cavity modules 3 and 4. After the vacuum is drawn, the lifting power system 6 controls the upper cavity module 3 to rise through the first lifting structure 5, and the furnace products 15 flow out of the lower cavity module 4; when the utility model needs maintenance, the second lifting structure 7 rises, so that the upper furnace cover 1 is opened relative to the lower furnace frame 2, and the second end of the upper cavity module 3 is pushed up together with the upper furnace cover 1, and the upper cavity module 3 is also opened relative to the lower cavity module 4, so that the maintenance and maintenance of the vacuum chamber can be realized.

[0024] like Figures 1 to 4 As shown, the lifting power system 6 includes a fixed frame 10, a cross bar 11 and a power source 12. The two ends of the cross bar 11 are respectively connected to the bottom of the two lifting rods 8. The power source 12 drives the cross bar 11 to move up and down. The fixed frame 10 is provided with an upper travel switch 13 and a lower travel switch 14; the upper travel switch 13 and the lower travel switch 14 respectively point to the lifting rod 8.

[0025] like Figures 1 to 4As shown, the upper furnace top cover 1 and the lower furnace frame 2 cover each other, the upper cavity module 3 and the lower cavity module 4 are in a parallel state and at a certain height, ensuring that the product 15 flows into the upper surface of the lower cavity module 4, and the lifting power system 6 starts to work, and the lifting power system 6 drives the lifting rod 8 to descend, and the lifting rod 8 drives the upper cavity module 3 to move downward, and the lifting rod 8 descends to the lower travel switch 14, so that the upper cavity module 3 and the lower cavity module 4 cover each other and close, and vacuum is drawn in the upper cavity module 3 and the lower cavity module 4 After the vacuum is exhausted, the lifting power system 6 controls the upper cavity module 3 to rise through the first lifting structure 5. The first lifting structure 5 rises to the upper travel switch 13, and the furnace products 15 flow out of the lower cavity module 4. When the utility model needs maintenance, the second lifting structure 7 rises, so that the upper furnace top cover 1 is opened relative to the lower furnace frame 2, and the second end of the upper cavity module 3 is pushed up together with the upper furnace top cover 1, and the upper cavity module 3 is also opened relative to the lower cavity module 4, so that the interior of the vacuum chamber can be maintained.

[0026] like Figures 1 to 4 As shown, the upper surface of the lower cavity module 4 is provided with a transport rail 16 , which is used to transport the furnace-passed products 15 .

[0027] like Figures 1 to 4 As shown, the two lifting rods 8 move through the two ends of the lower cavity module 4.

[0028] like Figures 1 to 4 As shown, the second lifting structure 7 is a linear lifter, one end of the second lifting structure 7 is hinged to the outer wall of the lower furnace frame 2, and the other end is hinged to the outer wall of the upper furnace top cover 1.

[0029] The above is a specific implementation of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principles of the present invention. These improvements and modifications are also considered to be within the scope of protection of the present invention.

Claims

1. A vacuum chamber upper cover opening and closing mechanism, characterized in that: It includes an upper furnace top cover, a lower furnace frame, an upper cavity module, a lower cavity module, a first lifting structure and a lifting power system; one side edge of the upper furnace top cover is hinged to one side edge of the lower furnace frame, and the other side edge of the upper furnace top cover is connected to the other side edge of the lower furnace frame through a second lifting structure; the upper cavity module is located above the lower cavity module and is arranged parallel to the lower cavity module, and the lifting power system controls the upper cavity module to approach or move away from the lower cavity module through the first lifting structure.

2. The vacuum chamber upper cover opening and closing mechanism according to claim 1, characterized in that: The first lifting structure includes two parallel lifting rods, the inner wall of the upper furnace top cover is provided with a slide groove, the first end of the upper cavity module is hinged to the top of a lifting rod, and the second end is slidably connected to the slide groove, and the top of the other lifting rod is used to drive the second end of the upper cavity module to slide up and down along the slide groove.

3. The vacuum chamber upper cover opening and closing mechanism according to claim 2, characterized in that: The lifting power system includes a fixed frame, a cross bar and a power source. The two ends of the cross bar are respectively connected to the bottom of the two lifting rods. The power source drives the cross bar to move up and down. The fixed frame is provided with an upper travel switch and a lower travel switch; the upper travel switch and the lower travel switch point to the lifting rods respectively.

4. The vacuum chamber upper cover opening and closing mechanism according to claim 1, wherein: The upper surface of the lower cavity module is provided with a transport guide rail, which is used to transport the products passing through the furnace.

5. The vacuum chamber upper cover opening and closing mechanism according to claim 2, characterized in that: The two lifting rods movably pass through the two ends of the lower cavity module.

6. The vacuum chamber upper cover opening and closing mechanism according to claim 1, characterized in that: The second lifting structure is a linear lifter, one end of which is hinged to the outer wall of the lower furnace frame, and the other end of which is hinged to the outer wall of the upper furnace top cover.

Images