Multi-channel furnace temperature thermodetector of reduction furnace

Abstract

The utility model discloses a multichannel furnace temperature thermodetector for a reduction furnace, which comprises a reduction furnace main body, a furnace top arranged at the top of the reduction furnace main body, a chassis arranged at the bottom of the reduction furnace main body, silicon core rods arranged in the chassis in an array manner, a central control screen arranged in the middle of the outer side of the reduction furnace main body, and a first guide cylinder arranged above the chassis, a second guide cylinder is arranged on the outer side of the first guide cylinder, a third guide cylinder is arranged on the outer side of the second guide cylinder, and a plurality of temperature sensors are installed on the furnace top, the tail gas hole, the furnace wall, the base plate and the outer sides of the guide cylinders of the reduction furnace, so that the temperature in the whole furnace body can be comprehensively monitored; the multi-point temperature measurement can provide more accurate temperature data and is favorable for mastering the temperature distribution condition in the furnace, the central control screen displays the temperature trend in real time, and an operator can obtain the temperature data of each area in the furnace in real time, so that the temperature abnormity can be quickly found and adjusted, and the flexibility and the accuracy of furnace temperature control are improved.

Description

Technical Field

[0001] The utility model belongs to the technical field related to reduction furnaces, and particularly relates to a multi-channel temperature measuring instrument for reduction furnaces. Background Art

[0002] In the polysilicon production process, the reduction furnace is the main equipment, and the uniform distribution of temperature and concentration of the gas in the reduction furnace plays a vital role in the quality of polysilicon production. During the operation of the reduction furnace, process gases such as SiHCl3 and H2 enter the furnace body through the air inlet pipe to undergo reduction reaction to obtain electronic grade polysilicon rods.

[0003] However, there are few temperature measurement points in the existing reduction furnace, which leads to uneven temperature in the reduction furnace during the production process. It is difficult to know the temperature distribution in the furnace, which affects the quality and production efficiency of polysilicon. Utility Model Content

[0004] The purpose of the present utility model is to provide a multi-channel furnace temperature measuring instrument for a reduction furnace, so as to solve the problem proposed in the above background technology that there are few temperature measuring points in the existing reduction furnace, resulting in uneven temperature in the reduction furnace during the production process, making it difficult to obtain the temperature distribution in the furnace, and affecting the quality and production efficiency of polysilicon.

[0005] To achieve the above-mentioned object, the present utility model provides the following technical solutions: a multi-channel temperature measuring instrument for a reduction furnace, comprising a reduction furnace main body;

[0006] The reduction furnace body is provided with a furnace roof at the top position, a disassembly piece is provided at the middle position of the top of the furnace roof, an exhaust hole is provided at the left position of the disassembly piece, a furnace wall is provided at the inner position of the reduction furnace body, a chassis is provided at the bottom position of the reduction furnace body, and silicon core rods are arranged in an array inside the chassis;

[0007] A central control panel is provided at the middle position outside the reduction furnace body, a first guide tube is provided above the chassis, a second guide tube is provided outside the first guide tube, and a third guide tube is provided outside the second guide tube.

[0008] Preferably, a temperature sensor is provided at an inner position of the furnace top, and a temperature sensor is provided at an inner position of the tail gas hole.

[0009] Preferably, the furnace wall is provided with an array of temperature sensors, the chassis is provided with an array of temperature sensors at internal positions, and the first guide tube and the second guide tube are provided with an array of temperature sensors at external positions.

[0010] Preferably, the temperature sensor is connected to the central control screen via a wire, and the central control screen displays the temperature trend in real time.

[0011] Preferably, guide rails are provided in a circular array at the outer sides of the first guide tube and the second guide tube, and silicon core rods are provided at the inner sides of the first guide tube, the second guide tube and the third guide tube, and the silicon core rods are fixedly connected to the chassis through fixing parts.

[0012] Preferably, a feed nozzle is provided at an inner position of the chassis, and the angle between the feed nozzle and the chassis is 45 degrees. Flow-delay plates are provided at the top positions of the first guide tube, the second guide tube and the third guide tube.

[0013] Preferably, a positioning ring is provided at the bottom of the furnace wall, and a positioning groove is provided above the chassis, and the positioning groove is nested and connected to the positioning ring.

[0014] Compared with the prior art, the present invention provides a multi-channel temperature measuring instrument for a reduction furnace, which has the following beneficial effects:

[0015] 1. Through the arrangement of the central control panel, the first guide tube, the second guide tube, the third guide tube and the temperature sensor, multiple temperature sensors are installed on the reduction furnace such as the furnace top, the exhaust hole, the furnace wall, the chassis and the outside of the guide tube, which can realize the comprehensive monitoring of the internal temperature of the entire furnace body. This multi-point temperature measurement can provide more accurate temperature data, which is helpful to understand the temperature distribution in the furnace. The central control panel displays the temperature trend in real time, and the operator can immediately obtain the temperature data of each area in the furnace, which is helpful to quickly discover and adjust temperature anomalies and improve the flexibility and accuracy of furnace temperature control. By setting temperature sensors in multiple positions, the errors caused by local temperature changes can be reduced, and the accuracy and stability of the overall temperature data can be improved. The multi-stage guide tube design in the equipment can effectively optimize the distribution of airflow and heat, ensure the uniformity of the temperature inside the reduction furnace, thereby improving the heating effect and efficiency. The connection between the temperature sensor and the central control panel is realized through wires, which can centrally manage and monitor the data of each temperature sensor, simplifying the maintenance and management process.

[0016] 2. Through the arrangement of guide rails, feed nozzles, and slow-flow plates, a circular array of guide rails is arranged on the outside of the first and second guide tubes. This layout facilitates the smooth movement and adjustment of the guide tubes, ensuring the uniformity and stability of the airflow distribution within the furnace. The arrangement of the first, second, and third guide tubes forms a multi-stage airflow channel, which facilitates the hierarchical guidance and uniform distribution of the airflow, thereby improving the uniformity of the temperature field within the furnace. The silicon core rods are arranged on the inner side of the guide tubes. This layout facilitates the full utilization of the heat within the furnace and improves heating efficiency. At the same time, the silicon core rods are fixedly connected to the chassis via fixings, ensuring its stability and reliability. The angle between the feed nozzle and the chassis is designed to be 30 degrees. This angle facilitates the uniform injection of materials into the furnace, avoiding material accumulation and temperature unevenness, thereby improving the heating effect and product quality. Slow-flow plates are arranged on the top of the first, second, and third guide tubes to help slow down the airflow speed and prevent the airflow from directly impacting the furnace top, causing heat loss and temperature fluctuations. The slow-flow plates also promote the uniform distribution of airflow within the furnace, further improving the uniformity of the temperature field. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a structural diagram of the present utility model.

[0018] Figure 2 It is a structural schematic diagram of the chassis section of the present invention.

[0019] Figure 3 It is a structural schematic diagram of the cross section of the reduction furnace main body in the utility model.

[0020] Figure 4 It is a structural diagram of the chassis in the present utility model.

[0021] Figure 5 It is a structural schematic diagram of the guide tube in the utility model.

[0022] In the figure: 1. Reduction furnace body; 2. Central control panel; 3. Furnace top; 4. Temperature sensor; 5. Disassembly parts; 6. Exhaust hole; 7. Chassis; 8. Positioning ring; 9. Fixing parts; 10. Silicon core rod; 11. Second guide tube; 12. Furnace wall; 13. Positioning groove; 14. Feed nozzle; 15. Guide rail; 16. Slow flow plate; 17. Third guide tube; 18. First guide tube. DETAILED DESCRIPTION

[0023] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0024] The utility model provides Figure 1-5 The multi-channel temperature measuring instrument for a reduction furnace shown includes a reduction furnace body 1;

[0025] A furnace roof 3 is provided at the top of the reduction furnace body 1, a disassembly member 5 is provided at the middle of the top of the furnace roof 3, an exhaust hole 6 is provided at the left side of the disassembly member 5, a furnace wall 12 is provided at the inner side of the reduction furnace body 1, a chassis 7 is provided at the bottom of the reduction furnace body 1, and silicon core rods 10 are arranged in an array inside the chassis 7;

[0026] A central control panel 2 is provided at the middle position outside the reduction furnace body 1, a first guide tube 18 is provided above the chassis 7, a second guide tube 11 is provided outside the first guide tube 18, and a third guide tube 17 is provided outside the second guide tube 11.

[0027] A temperature sensor 4 is provided at an inner position of the furnace top 3 , and a temperature sensor 4 is provided at an inner position of the tail gas hole 6 .

[0028] Temperature sensors 4 are arranged in an array inside the furnace wall 12 , temperature sensors 4 are arranged in an array at positions inside the chassis 7 , and temperature sensors 4 are arranged in an array at positions outside the first guide tube 18 and the second guide tube 11 .

[0029] The temperature sensor 4 is connected to the central control screen 2 via a wire, and the central control screen 2 displays the temperature trend in real time.

[0030] Guide rails 15 are arranged in a circular array at the outer sides of the first guide tube 18 and the second guide tube 11 , and silicon core rods 10 are arranged at the inner sides of the first guide tube 18 , the second guide tube 11 and the third guide tube 17 . The silicon core rods 10 are fixedly connected to the chassis 7 through fixing parts 9 .

[0031] A feed nozzle 14 is provided inside the chassis 7 , and the angle between the feed nozzle 14 and the chassis 7 is 45 degrees. Slow flow plates 16 are provided at the top of the first guide tube 18 , the second guide tube 11 and the third guide tube 17 .

[0032] A positioning ring 8 is provided at the bottom of the furnace wall 12 , and a positioning groove 13 is provided above the chassis 7 . The positioning groove 13 is nested and connected to the positioning ring 8 .

[0033] In this embodiment, the specific implementation steps of a multi-channel furnace temperature meter for a reduction furnace are as follows: fix the silicon core rod 10 on the chassis 7 through the fixing part 9 to ensure that it is firmly connected to the chassis 7, confirm that the slow flow plate 16 of the guide tube, the temperature sensor 4 and other components are installed in place, connect the reduction furnace body 1 and the central control screen 2 to the power supply, add the material gas to the reduction furnace through the feed nozzle 14, and the angle between the feed nozzle 14 and the chassis 7 is 45 degrees to ensure uniform distribution of the gas, ensure that the positioning groove 13 on the chassis 7 and the positioning ring 8 at the bottom of the furnace wall 12 are correctly nested and connected to ensure stable operation of the equipment, set the required furnace temperature and other operating parameters through the central control screen 2, and the central control screen 2 will display the temperature trend in real time and monitor the temperature data provided by each temperature sensor 4.

[0034] like Figure 1 and Figure 2 As shown, a central control panel 2 is provided at the middle position outside the reduction furnace body 1, a first guide tube 18 is provided at the position above the chassis 7, a second guide tube 11 is provided at the outer position of the first guide tube 18, a third guide tube 17 is provided at the outer position of the second guide tube 11, a temperature sensor 4 is provided at the inner position of the furnace top 3, a temperature sensor 4 is provided at the inner position of the exhaust hole 6, a temperature sensor 4 is provided in an array inside the furnace wall 12, a temperature sensor 4 is provided in an array at the inner position of the chassis 7, and a temperature sensor 4 is provided in an array at the outer positions of the first guide tube 18 and the second guide tube 11. The temperature sensor 4 is connected to the central control panel 2 through a wire, and the central control panel 2 displays the temperature trend in real time.

[0035] Preferably, multiple temperature sensors 4 are installed on the reduction furnace, such as the furnace top 3, exhaust vents 6, furnace walls 12, chassis 7 and the outside of the guide tube, so as to realize comprehensive monitoring of the internal temperature of the entire furnace body. This multi-point temperature measurement can provide more accurate temperature data, which is helpful to grasp the temperature distribution in the furnace. The central control screen 2 displays the temperature trend in real time, and the operator can immediately obtain the temperature data of each area in the furnace, which is helpful to quickly discover and adjust temperature anomalies and improve the flexibility and accuracy of furnace temperature control. By setting temperature sensors 4 at multiple positions, the errors caused by local temperature changes can be reduced, and the accuracy and stability of the overall temperature data can be improved. The multi-stage guide tube design in the equipment can effectively optimize the distribution of airflow and heat, ensure the uniformity of the temperature inside the reduction furnace, thereby improving the heating effect and efficiency. The connection between the temperature sensor 4 and the central control screen 2 is realized by wires, which can centrally manage and monitor the data of each temperature sensor 4, simplifying the maintenance and management process.

[0036] like Figure 3-5As shown, guide rails 15 are provided in a circular array at the outer sides of the first guide tube 18 and the second guide tube 11, silicon core rods 10 are provided at the inner sides of the first guide tube 18, the second guide tube 11 and the third guide tube 17, and the silicon core rods 10 are fixedly connected to the chassis 7 through fixing parts 9. A feed nozzle 14 is provided at the inner position of the chassis 7, and the angle between the feed nozzle 14 and the chassis 7 is 45 degrees. A slow flow plate 16 is provided at the top of the first guide tube 18, the second guide tube 11 and the third guide tube 17.

[0037] Preferably, the guide rail annular array is arranged outside the first guide tube 18 and the second guide tube 11. This layout helps to achieve smooth movement and adjustment of the guide tube, ensuring the uniformity and stability of the airflow distribution in the furnace. The arrangement of the first guide tube 18, the second guide tube 11 and the third guide tube 17 forms a multi-stage airflow channel, which helps to achieve graded guidance and uniform distribution of the airflow, and improve the uniformity of the temperature field in the furnace. The silicon core rod 10 is arranged on the inner side of the guide tube. This layout is conducive to fully utilizing the heat in the furnace and improving the heating efficiency. At the same time, the silicon core rod 10 and the chassis 7 is fixedly connected by a fixing piece 9 to ensure its stability and reliability. The angle between the feed nozzle 14 and the chassis 7 is designed to be 45 degrees. This angle is conducive to the uniform spraying of materials into the furnace, avoiding the problems of material accumulation and temperature unevenness, thereby improving the heating effect and product quality. A slow flow plate 16 is set on the top of the first guide tube 18, the second guide tube 11 and the third guide tube 17 to help slow down the air flow speed and avoid the air flow directly impacting the furnace top to cause heat loss and temperature fluctuations. The slow flow plate can also promote the uniform distribution of air flow in the furnace, further improving the uniformity of the temperature field.

[0038] like Figure 1-5 As shown, a positioning ring 8 is provided at the bottom of the furnace wall 12 , and a positioning groove 13 is provided above the chassis 7 , and the positioning groove 13 is nested and connected with the positioning ring 8 .

[0039] Optionally, the design of the positioning ring 8 and the positioning groove 13 makes the installation and removal of the chassis simpler and faster. The operator can quickly position the chassis to the correct position, reducing the time for equipment maintenance and overhaul. The nested connection helps to improve the sealing between the chassis and the furnace wall, prevent hot air or gas leakage, improve the control accuracy and efficiency of the temperature in the furnace, and also help to keep the operating environment clean.

[0040] Finally, it should be noted that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or make equivalent replacements for some of the technical features therein. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A multi-channel temperature measuring instrument for a reduction furnace, comprising a reduction furnace body (1); The reduction furnace body (1) is provided with a furnace top (3) at the top position, a disassembly component (5) is provided at the middle position of the top of the furnace top (3), an exhaust hole (6) is provided at the left position of the disassembly component (5), a furnace wall (12) is provided at the inner position of the reduction furnace body (1), a chassis (7) is provided at the bottom position of the reduction furnace body (1), and silicon core rods (10) are arranged in an array inside the chassis (7); Its characteristics are: A central control panel (2) is provided at the middle position outside the reduction furnace body (1), a first guide tube (18) is provided above the chassis (7), a second guide tube (11) is provided outside the first guide tube (18), and a third guide tube (17) is provided outside the second guide tube (11).

2. A multi-channel temperature measuring instrument for a reduction furnace according to claim 1, characterized in that: A temperature sensor (4) is provided at an inner position of the furnace top (3), and a temperature sensor (4) is provided at an inner position of the tail gas hole (6).

3. The multi-channel temperature measuring instrument for a reduction furnace according to claim 2, characterized in that: Temperature sensors (4) are arranged in an array inside the furnace wall (12), temperature sensors (4) are arranged in an array at positions inside the chassis (7), and temperature sensors (4) are arranged in an array at positions outside the first guide tube (18) and the second guide tube (11).

4. A multi-channel temperature measuring instrument for a reduction furnace according to claim 3, characterized in that: The temperature sensor (4) is connected to the central control screen (2) via a wire, and the central control screen (2) displays the temperature trend in real time.

5. The multi-channel temperature measuring instrument for a reduction furnace according to claim 1, characterized in that: Guide rails (15) are provided in a circular array at the outer sides of the first guide tube (18) and the second guide tube (11), and silicon core rods (10) are provided at the inner sides of the first guide tube (18), the second guide tube (11) and the third guide tube (17). The silicon core rods (10) are fixedly connected to the chassis (7) via fixing members (9).

6. The multi-channel temperature measuring instrument for a reduction furnace according to claim 5, characterized in that: A feed nozzle (14) is provided at an inner position of the chassis (7), and the angle between the feed nozzle (14) and the chassis (7) is 45 degrees. A slow flow plate (16) is provided at the top position of the first guide tube (18), the second guide tube (11), and the third guide tube (17).

7. The multi-channel temperature measuring instrument for a reduction furnace according to claim 1, characterized in that: A positioning ring (8) is provided at the bottom of the furnace wall (12), and a positioning groove (13) is provided above the chassis (7), wherein the positioning groove (13) is nested and connected with the positioning ring (8).

Images