Pressure detection tool and semiconductor detection equipment

Abstract

The utility model provides a pressure detection tool and a semiconductor detection device, and relates to the technical field of pressure detection, the pressure detection tool provided by the utility model comprises a pedestal and a detection structure installed on the pedestal, the pedestal is enclosed by a detection space, and the detection structure comprises a sliding assembly, an elastic member and a pressure sensor; one end of the sliding assembly extends into the detection space and is connected with the pressure sensor, the other end of the sliding assembly extends out of the detection space, the sliding assembly is in sliding fit with the base, and the sliding assembly is provided with a first limiting surface located in the detection space and a second limiting surface located outside the detection space; the elastic piece is clamped between the sliding assembly and the outer wall of the base in the sliding direction of the sliding assembly so that the first limiting face can abut against the inner wall of the base. The pressure detection tool provided by the utility model can detect whether a pressure value reversely given by an individual pressure head accords with a standard or not, and is convenient for a user to judge whether structures such as a diaphragm, a spring, an air duct rod and the like corresponding to the individual pressure head need to be replaced or not.

Description

Technical Field

[0001] The utility model relates to the technical field of pressure detection, in particular to a pressure detection tool and semiconductor detection equipment. Background Art

[0002] With the advancement of semiconductor technology in recent years, there has been a demand for higher chip inspection efficiency. In the chip inspection industry, a pressure head is connected to one end of the air duct rod and a piston rod is connected to the other end. The air duct rod slides with the base plate, and the piston rod slides with a guide sleeve on the side plate of the base plate. A diaphragm is connected to the end of the piston rod facing away from the air duct rod, and a spring is installed between the diaphragm and the end of the guide sleeve. When the air duct is ventilated, the diaphragm compresses the spring under the action of air pressure, driving the piston rod to slide relative to the base plate, achieving the crimping action of the pressure head on the air duct rod. Therefore, the pressure of the pressure head needs to be standardized.

[0003] In the prior art, a comprehensive floating head teaching aid is used during assembly to test the pressure values ​​of all floating heads at one time. However, the comprehensive floating head teaching aid cannot detect the pressure values ​​of a small number of individual pressure heads, which is inconvenient for personnel to conduct timely inspections. This results in diaphragm fatigue caused by long-term crimping and external factors, and it is impossible to judge whether the diaphragm, spring, air duct rod and other structures need to be replaced based on actual conditions. Utility Model Content

[0004] The purpose of the present utility model is to provide a pressure detection tool and semiconductor detection equipment, which can detect whether the pressure value given by an individual pressure head in reverse meets the standard, so that the user can judge whether the diaphragm, spring, air duct rod and other structures corresponding to the individual pressure head need to be replaced.

[0005] To achieve the above objectives, the present invention provides the following technical solutions:

[0006] In a first aspect, the utility model provides a pressure detection tool, comprising a base and a detection structure mounted on the base, wherein the base is surrounded by a detection space, and the detection structure comprises a sliding assembly, an elastic member, and a pressure sensor;

[0007] One end of the sliding assembly extends into the detection space and is connected to the pressure sensor, and the other end of the sliding assembly extends out of the detection space. The sliding assembly slides with the base in a direction perpendicular to the detection surface of the pressure sensor, and the sliding assembly has a first limit surface located in the detection space and a second limit surface located outside the detection space;

[0008] The elastic member is sandwiched between the sliding assembly and the outer wall of the base along the sliding direction of the sliding assembly, so that the first limiting surface abuts against the inner wall of the base.

[0009] Furthermore, the sliding assembly includes a handle, a guide rod and a limiting guide sleeve;

[0010] The guide rod is slidably engaged with the base in a direction perpendicular to the detection surface, one end of the guide rod extends into the detection space and is provided with a connecting block, one end of the connecting block has the first limiting surface, and the other end is connected to the pressure sensor, the other end of the guide rod extends out of the detection space and is sleeved with the limiting guide sleeve, and the end of the limiting guide sleeve facing the base is the second limiting surface;

[0011] The handle is connected to one end of the guide rod extending out of the detection space.

[0012] Furthermore, the elastic member is clamped between the limiting guide sleeve and the outer wall of the base along a direction perpendicular to the detection surface.

[0013] Furthermore, the guide rods and the pressure sensors are both configured in plurality, the connecting blocks at one end of the plurality of guide rods are connected to the plurality of pressure sensors in a one-to-one correspondence, and the other ends of the plurality of guide rods are connected to the handle.

[0014] Furthermore, the guide rod and the connecting block are both configured in numbers of two.

[0015] Furthermore, the base is provided with a through hole, a sleeve is installed in the through hole, and the guide rod is slidably matched with the sleeve along a direction perpendicular to the detection surface.

[0016] Furthermore, the base includes a connecting plate, a first support plate and a second support plate, the sliding assembly slides with the connecting plate in a direction perpendicular to the detection surface, and the first support plate and the second support plate are respectively connected to the two ends of the connecting plate and form the detection space between the connecting plates.

[0017] Furthermore, a first positioning member is protrudingly provided on a side of the first support plate facing away from the connecting plate, and a second positioning member is protrudingly provided on a side of the second support plate facing away from the connecting plate.

[0018] Furthermore, it also includes a digital display connected to the pressure sensor.

[0019] In a second aspect, the present invention further provides a semiconductor testing device, comprising a base plate and the pressure testing tool described in the above scheme, wherein the base plate is provided with an insertion hole for inserting the base.

[0020] The pressure detection tool and semiconductor detection equipment provided by the utility model can produce the following

[0021] Beneficial effects:

[0022] The pressure detection tool provided by the first aspect of the present invention is in a natural state, and the first limit surface is against the inner wall of the base under the elastic action of the elastic member. When the pressure value of an individual pressure head needs to be detected, the base is pressed against the bottom plate, the pressure sensor is aligned with the pressure head, and the elastic force of the elastic member is manually overcome to push the sliding assembly, so that the sliding assembly slides relative to the base in a direction perpendicular to the detection surface in the pressure sensor until the second limit surface is against the outer wall of the base. At this time, the pressure sensor applies a certain pressure to the pressure head, and the pressure head transmits the pressure to the air duct rod, piston rod, spring and diaphragm. The pressure sensor measures the pressure value given by the pressure head in the reverse direction, and can then detect whether the pressure value given by the individual pressure head in the reverse direction meets the standard, eliminating the possibility of the product accuracy being affected by factors such as internal diaphragm fatigue, and facilitating the user to judge whether the diaphragm, spring, air duct rod and other structures corresponding to the individual pressure head need to be replaced.

[0023] The semiconductor testing equipment provided in the second aspect of the present invention includes a base plate, which is provided with an insertion hole for inserting the base, so as to facilitate the positioning of the pressure testing tool and the use by the testing personnel. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] In order to more clearly illustrate the specific implementation methods of the utility model or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0025] Figure 1 A schematic diagram of the three-dimensional structure of a pressure detection tool provided by an embodiment of the present invention under a first viewing angle during detection;

[0026] Figure 2 A schematic diagram of the three-dimensional structure of a pressure detection tool provided by an embodiment of the present utility model under a second viewing angle during detection;

[0027] Figure 3 A bottom view of a pressure detection tool provided by an embodiment of the present utility model during detection;

[0028] Figure 4 for Figure 3 A-A cross-sectional view;

[0029] Figure 5 A schematic diagram of a three-dimensional structure of a bottom plate and a pressing head in cooperation with each other from a first perspective provided by an embodiment of the present utility model;

[0030] Figure 6 A schematic diagram of a three-dimensional structure of a bottom plate and a pressing head in cooperation with each other under a second viewing angle provided by an embodiment of the present invention;

[0031] Figure 7 for Figure 6 A partial enlarged schematic diagram of point B.

[0032] Icons: 1-base; 11-detection space; 12-sleeve; 13-connecting plate; 14-first support plate; 15-second support plate; 16-first positioning member; 17-second positioning member; 2-sliding assembly; 21-handle; 22-guide rod; 221-connecting block; 2211-first limiting surface; 23-limiting guide sleeve; 231-second limiting surface; 3-elastic member; 4-pressure sensor; 41-detection surface; 5-base plate; 51-insertion hole; 6-pressure head. DETAILED DESCRIPTION

[0033] The following is a clear and complete description of the technical solution of the present invention in conjunction with the accompanying drawings. Obviously, the embodiments described are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making any creative efforts are within the scope of protection of the present invention.

[0034] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating positions or relationships, are based on the positions or relationships shown in the accompanying drawings and are intended solely to facilitate the description of this utility model and simplify the description. They do not indicate or imply that the devices or components referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0035] In the description of this utility model, it should be noted that, unless otherwise expressly specified or limited, the terms "installed," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; mechanical connections, electrical connections; direct connections, indirect connections through an intermediate medium, and internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on specific circumstances.

[0036] The following is a detailed description of the specific embodiments of the present invention in conjunction with the accompanying drawings. It should be understood that the specific embodiments described herein are only used to illustrate and explain the present invention and are not intended to limit the present invention.

[0037] The embodiment of the first aspect of the present invention is to provide a pressure detection tool, such as Figures 1 to 4 As shown, it includes a base 1 and a detection structure installed on the base 1, the base 1 is surrounded by a detection space 11, and the detection structure includes a sliding component 2, an elastic member 3 and a pressure sensor 4; one end of the sliding component 2 extends into the detection space 11 and is connected to the pressure sensor 4, and the other end of the sliding component 2 extends out of the detection space 11, and the sliding component 2 slides with the base 1 in a direction perpendicular to the detection surface 41 in the pressure sensor 4, and the sliding component 2 has a first limit surface 2211 located in the detection space 11 and a second limit surface 231 located outside the detection space 11; the elastic member 3 is clamped between the sliding component 2 and the outer wall of the base 1 along the sliding direction of the sliding component 2, so that the first limit surface 2211 is against the inner wall of the base 1.

[0038] When the pressure detection tool provided by the embodiment of the first aspect of the present invention is in a natural state, the first limiting surface 2211 abuts against the inner wall of the base 1 under the elastic action of the elastic member 3 .

[0039] When the pressure value of an individual pressure head 6 needs to be detected, the base 1 is pressed onto the bottom plate 5, the pressure sensor 4 is aligned with the pressure head 6, and the sliding assembly 2 is pushed manually to overcome the elastic force of the elastic member 3, so that the sliding assembly 2 slides relative to the base 1 in a direction perpendicular to the detection surface 41 of the pressure sensor 4, as shown in FIG. Figure 4 As shown, until the second limit surface 231 is against the outer wall of the base 1, the pressure sensor 4 gives a certain pressure to the pressure head 6, and the pressure head 6 transmits the pressure to the air duct rod, piston rod, spring and diaphragm. The pressure sensor 4 measures the pressure value given by the pressure head 6 in the opposite direction, and then can detect whether the pressure value given by the individual pressure head 6 in the opposite direction meets the standard, eliminating the possibility that the product accuracy is affected by factors such as internal diaphragm fatigue, so that users can judge whether it is necessary to replace the diaphragm, spring, air duct rod and other structures corresponding to the individual pressure head 6.

[0040] In an optional embodiment, if Figure 4 As shown, the sliding assembly 2 includes a handle 21, a guide rod 22 and a limiting guide sleeve 23. The guide rod 22 slides with the base 1 in a direction perpendicular to the detection surface 41. One end of the guide rod 22 extends into the detection space 11 and is provided with a connecting block 221. The top of the connecting block 221 has a first limiting surface 2211, and the bottom end is connected to the pressure sensor 4. The other end of the guide rod 22 extends out of the detection space 11 and is sleeved with a limiting guide sleeve 23. The end of the limiting guide sleeve 23 facing the base 1 is a second limiting surface 231; the handle 21 is connected to the end of the guide rod 22 extending out of the detection space 11.

[0041] In the natural state, under the elastic action of the elastic member 3 , the first limiting surface 2211 on the connecting block 221 abuts against the inner wall of the base 1 , and the pressure sensor 4 is in the first limit position.

[0042] When the pressure value of an individual pressure head 6 needs to be tested, the base 1 is pressed on the bottom plate 5, and the handle 21 is manually pressed to overcome the elastic force of the elastic member 3 and push the guide rod 22. The guide rod 22 slides relative to the base 1 in a direction perpendicular to the detection surface 41. Figure 4 As shown, until the second limit surface 231 on the limit guide sleeve 23 abuts against the outer wall of the base 1, the pressure sensor 4 is in the second limit position and can apply a certain pressure to the pressure head 6. The pressure sensor 4 can detect the pressure value applied in the opposite direction by the pressure head 6.

[0043] The sliding assembly 2 in the above-described embodiment has a simple structure and ensures that the pressure sensor 4 remains stationary at the first extreme position when not in use and at the second extreme position when in use, thereby limiting the travel range of the pressure sensor 4. Because the base 1 presses against the bottom plate 5 during testing, the pressure sensor 4 can be guaranteed to move a certain distance relative to the pressure head 6 during each test. The reaction force exerted on the pressure sensor 4 by a qualified pressure head 6 is essentially consistent, making it easy for the user to determine whether the reaction force exerted by each pressure head 6 meets the requirements based on the difference between the standard value and the measured value.

[0044] In addition, the maximum moving stroke of the pressure head 6 is 2 mm. The above setting makes it easy to limit the moving stroke of the pressure sensor 4 within an appropriate range, avoiding the pressure sensor 4 continuing to move a distance greater than 2 mm after contacting the pressure head 6 and exceeding the maximum moving stroke of the pressure head 6, causing damage to the pressure head 6 and leading to inaccurate test results.

[0045] The limiting guide sleeve 23 can slide relative to the guide rod 22 along the extension direction of the guide rod 22 , or it can be fixed on the guide rod 22 . Either method does not affect the limiting effect of the second limiting surface 231 .

[0046] In an optional embodiment, if Figure 4 As shown, the elastic member 3 is sandwiched between the limiting guide sleeve 23 and the outer wall of the base 1 along a direction perpendicular to the detection surface 41 .

[0047] In the natural state, the elastic member 3 pushes the limiting guide sleeve 23 by its own elastic force, so that the second limiting surface 231 is away from the outer surface of the base 1 .

[0048] Specifically, if Figure 4 As shown, there is a certain gap between the end of the limiting guide sleeve 23 closest to the base 1 and the guide rod 22. The gap forms an annular groove. The top end of the elastic member 3 extends into the annular groove and abuts against the inner end surface of the limiting guide sleeve 23, while the bottom end of the elastic member 3 abuts against the outer wall of the base 1. In some other embodiments, the elastic member 3 can also be sleeved around the side of the limiting guide sleeve 23, with the two ends of the elastic member 3 respectively abutting between the handle 21 and the base 1.

[0049] The elastic member 3 may be a coil spring or an elastic sheet, etc.

[0050] The guide rod 22 and the pressure sensor 4 can be configured as one, the connecting block 221 at one end of the guide rod 22 is connected to the pressure sensor 4, and the other end of the guide rod 22 is connected to the handle 21. The guide rod 22 drives a pressure sensor 4 to operate, thereby realizing the detection of a pressure head 6.

[0051] In an optional embodiment, the guide rods 22 and the pressure sensors 4 are configured in multiple numbers, specifically two, three, four or five, the connecting blocks 221 at one end of the multiple guide rods 22 are connected one-to-one with the multiple pressure sensors 4, and the other ends of the multiple guide rods 22 are connected to the handle 21.

[0052] By pressing the handle 21 , multiple pressure sensors 4 can detect multiple pressure heads 6 together, thereby improving test efficiency.

[0053] In a preferred embodiment, two guide rods 22 and two pressure sensors 4 are configured, the connecting blocks 221 at one end of the two guide rods 22 are connected to the two pressure sensors 4 in a one-to-one correspondence, and the other ends of the two guide rods 22 are connected to the handle 21.

[0054] In an optional embodiment, two guide rods 22 and two connecting blocks 221 are provided.

[0055] In an optional embodiment, if Figure 4 As shown, the base 1 is provided with a through hole, in which a sleeve 12 is installed, and the guide rod 22 is slidably engaged with the sleeve 12 along a direction perpendicular to the detection surface 41 .

[0056] In the above embodiment, the insert sleeve 12 can guide the movement of the guide rod 22 . The insert sleeve 12 can be clamped in the through hole or bonded in the through hole.

[0057] In an optional embodiment, if Figure 1 As shown, the base 1 includes a connecting plate 13, a first support plate 14 and a second support plate 15. The sliding component 2 slides with the connecting plate 13 in a direction perpendicular to the detection surface 41. A through hole can be provided on the connecting plate 13, and a sleeve 12 is installed in the through hole. The first support plate 14 and the second support plate 15 are respectively connected to the two ends of the connecting plate 13 and form a detection space 11 between the connecting plate 13.

[0058] When in use, the first support plate 14 and the second support plate 15 can be supported on the bottom plate 5 , thereby defining the position of the pressure detection tool and facilitating the user to apply force to the handle 21 .

[0059] In an optional embodiment, in order to avoid the first support plate 14 and the second support plate 15 from being dislocated relative to the bottom plate 5 during the detection process, thereby affecting the detection results, as shown in FIG. Figure 4 As shown, a first positioning member 16 is protrudingly provided on a side of the first support plate 14 facing away from the connecting plate 13 , and a second positioning member 17 is protrudingly provided on a side of the second support plate 15 facing away from the connecting plate 13 .

[0060] During use, the first positioning member 16 on the first support plate 14 and the second positioning member 17 on the second support plate 15 can cooperate with the limiting structure on the base plate 5 to limit the position of the first support plate 14 and the second support plate 15 relative to the base plate 5, thereby ensuring that the first support plate 14 and the second support plate 15 will not move relative to the base plate 5 during the tester's application of force. The first positioning member 16 and the second positioning member 17 can be positioning holes or positioning pins, and correspondingly, the base plate 5 is provided with a positioning structure that cooperates with the positioning holes or positioning pins.

[0061] During the above process, the elastic member 3 is in a naturally stretched state. Under the elastic action of the elastic member 3, the first limit surface 2211 is against the inner wall of the base 1, so that the pressure sensor 4 stops applying pressure to the diaphragm cylinder, making it easier for the first positioning member 16 and the second positioning member 17 to be inserted into the base plate 5.

[0062] In specific working conditions, the base plate 5 is set vertically, and the pressure detection tool needs to be installed vertically on the base plate 5 from the side of the base plate 5. When the elastic member 3 is in a naturally stretched state, the pressure sensor 4 does not contact the diaphragm cylinder and will not generate installation resistance, which facilitates the installation of the pressure detection tool.

[0063] In an optional embodiment, the pressure detection tool may also include a digital display electrically connected to the pressure sensor 4. The digital display can be purchased externally. The digital display can directly display the pressure data detected by the pressure sensor 4, making it easier for testers to determine whether the pressure value given in reverse by the pressure head 6 meets the standard.

[0064] The second aspect of the present invention provides a semiconductor testing device. Figures 5 to 7 As shown, the semiconductor testing device provided by the embodiment of the second aspect of the present invention includes a base plate 5 and the above-mentioned pressure testing tool, and an insertion hole 51 for inserting the base 1 is opened on the base plate 5.

[0065] In the semiconductor testing equipment provided by the embodiment of the second aspect of the present invention, an insertion hole 51 for inserting the base 1 is provided on the base plate 5. The insertion hole 51 can limit the position of the base 1, thereby ensuring that the base 1 will not move relative to the base plate 5 during the test process.

[0066] Specifically, the bottom plate 5 on both sides of each pressing head 6 is provided with insertion holes 51 , so that the base 1 can detect each pressing head 6 .

[0067] In an optional embodiment, when a first positioning member 16 is protruding from the side of the first support plate 14 facing away from the connecting plate 13, and a second positioning member 17 is protruding from the side of the second support plate 15 facing away from the connecting plate 13, the first positioning member 16 and the second positioning member 17 are respectively inserted into the insertion holes 51 on both sides of the pressure head 6 to be tested.

[0068] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the above embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the above embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A pressure detection tool, characterized in that: The invention comprises a base (1) and a detection structure mounted on the base (1); the base (1) is provided with a detection space (11) around it; the detection structure comprises a sliding component (2), an elastic member (3) and a pressure sensor (4); One end of the sliding assembly (2) extends into the detection space (11) and is connected to the pressure sensor (4), and the other end of the sliding assembly (2) extends out of the detection space (11). The sliding assembly (2) slides with the base (1) in a direction perpendicular to the detection surface (41) in the pressure sensor (4). The sliding assembly (2) has a first limiting surface (2211) located in the detection space (11) and a second limiting surface (231) located outside the detection space (11). The elastic member (3) is clamped between the sliding assembly (2) and the outer wall of the base (1) along the sliding direction of the sliding assembly (2), so that the first limiting surface (2211) abuts against the inner wall of the base (1).

2. The pressure detection tool according to claim 1, characterized in that: The sliding assembly (2) comprises a handle (21), a guide rod (22) and a limiting guide sleeve (23); The guide rod (22) is slidably engaged with the base (1) in a direction perpendicular to the detection surface (41); one end of the guide rod (22) extends into the detection space (11) and is provided with a connecting block (221); one end of the connecting block (221) has the first limiting surface (2211), and the other end is connected to the pressure sensor (4); the other end of the guide rod (22) extends out of the detection space (11) and is sleeved with the limiting guide sleeve (23); the end of the limiting guide sleeve (23) facing the base (1) is the second limiting surface (231); The handle (21) is connected to one end of the guide rod (22) extending out of the detection space (11).

3. The pressure detection tool according to claim 2, characterized in that: The elastic member (3) is clamped between the limiting guide sleeve (23) and the outer wall of the base (1) along a direction perpendicular to the detection surface (41).

4. The pressure detection tool according to claim 2, characterized in that: The guide rods (22) and the pressure sensors (4) are both configured in plurality, the connecting blocks (221) at one end of the plurality of guide rods (22) are connected to the plurality of pressure sensors (4) in a one-to-one correspondence, and the other ends of the plurality of guide rods (22) are connected to the handle (21).

5. The pressure detection tool according to claim 3, characterized in that: The guide rod (22) and the connecting block (221) are both configured in pairs.

6. The pressure detection tool according to claim 2, characterized in that: The base (1) is provided with a through hole, a sleeve (12) is installed in the through hole, and the guide rod (22) is slidably matched with the sleeve (12) along a direction perpendicular to the detection surface (41).

7. The pressure detection tool according to claim 1, characterized in that: The base (1) comprises a connecting plate (13), a first supporting plate (14) and a second supporting plate (15); the sliding assembly (2) is slidably engaged with the connecting plate (13) in a direction perpendicular to the detection surface (41); the first supporting plate (14) and the second supporting plate (15) are respectively connected to two ends of the connecting plate (13) and form the detection space (11) between the connecting plate (13).

8. The pressure detection tool according to claim 7, characterized in that: A first positioning member (16) is protruding from the side of the first support plate (14) facing away from the connecting plate (13), and a second positioning member (17) is protruding from the side of the second support plate (15) facing away from the connecting plate (13).

9. The pressure detection tool according to claim 1, characterized in that: It also includes a digital display connected to the pressure sensor (4).

10. A semiconductor testing device, characterized in that: It comprises a base plate (5) and a pressure detection tool according to any one of claims 8 to 9, wherein the base plate (5) is provided with an insertion hole (51) for inserting the base (1).

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