Four-probe sheet resistance tester for detecting transparent conductive film

Abstract

The utility model discloses a four-probe sheet resistance tester used for detecting a transparent conductive film, comprising a fixed frame comprising a pedestal; the object carrying assembly comprises an object carrying table and a positioning assembly, and the top surface of the object carrying table is an object carrying surface; the detection assembly comprises a lifting unit and a four-needle probe; the plane moving assembly is arranged on the fixing frame, the plane moving assembly is used for driving the four-needle probe and the objective table to move relatively in the first horizontal direction and the second horizontal direction, and the first direction is perpendicular to the second direction. According to the four-probe sheet resistance tester for detecting the transparent conductive film, the position of the glass sheet to be detected on the object carrying surface is fixed through the positioning assembly, the first translation unit and the second translation unit are matched to drive the object carrying table and the four-probe probe to move relatively, and the relative position of the four-probe probe and the glass sheet to be detected is adjusted; and the lifting unit controls the four-needle probe to lift and move, so that the four-needle probe can conveniently and uniformly detect a plurality of preset positions on the glass sheet to be detected, and the detection precision is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of transparent conductive film detection, in particular to a four-probe square resistance tester for detecting transparent conductive films. Background Art

[0002] Transparent conductive film, a thin film material with high light transmittance and electrical conductivity, is widely used in photovoltaic cells. Conventional technology typically uses a four-probe sheet resistance tester to measure parameters such as sheet resistance and resistivity of transparent conductive films deposited on glass sheets to measure photovoltaic cell performance.

[0003] In the prior art, Chinese utility model patent publication number CN221765592U discloses a four-probe resistance meter. This device facilitates positioning by providing a positioning assembly, storing cables, and controlling the movement of a fixed block. It also improves test accuracy by applying controllable pressure to the sample.

[0004] However, when the above-mentioned device is used, only a single position of the sample is measured. During the deposition process of the transparent conductive film, due to the influence of various factors such as the preparation process, composition, thickness and measurement conditions, the transparent conductive film deposited on the glass sheet and the solar cell has certain differences in its square resistance and resistivity at different locations. Since the above-mentioned device can only measure a single location of the sample, the measurement accuracy is reduced. Moreover, during use, the above-mentioned device cannot accurately control the contact position between the four-pin probe and the sample. For different samples, the contact position of the four-pin probe cannot be unified, further reducing the measurement accuracy. Even if the position of the same sample is adjusted multiple times to adjust the contact position of the four-pin probe, the operator's hand will contact the sample during the adjustment process, causing the sample to be contaminated and affecting the final test result.

[0005] Therefore, it is necessary to improve the four-probe square resistance tester in the prior art. Utility Model Content

[0006] The purpose of the utility model is to overcome the defects in the prior art and provide a four-probe square resistance tester for detecting transparent conductive films, which can detect multiple positions and ensure the uniformity of the detection positions to improve the measurement accuracy.

[0007] To achieve the above technical effects, the technical solution of the present invention is: a four-probe square resistance tester for detecting transparent conductive films, comprising:

[0008] A fixing frame, the fixing frame comprising a base;

[0009] A loading assembly, comprising a loading platform movable on the base and a positioning assembly disposed on the loading platform, wherein the top surface of the loading platform is a horizontal loading surface for placing the glass sheet to be tested, and the positioning assembly is used to locate the position of the glass sheet to be tested on the loading surface;

[0010] A detection component, the detection component comprising a lifting unit disposed on the fixing frame and a four-needle probe connected to an output end of the lifting unit and facing downward;

[0011] A planar moving component is provided on the fixed frame and is used to drive the four-needle probe and the stage to move relative to each other along a first horizontal direction and a second horizontal direction, wherein the first direction and the second direction are perpendicular to each other.

[0012] Preferably, in order to precisely control the relative position of the four-needle probe and the stage, the planar moving assembly includes a first translation unit and a second translation unit, one of which has an output end connected to the stage and the other output end connected to the four-needle probe.

[0013] Preferably, in order to further accurately control the relative position of the four-needle probe and the stage, a first distance sensor for detecting the moving distance of the stage and a second distance sensor for detecting the moving distance of the four-needle probe are further included.

[0014] Preferably, in order to position the glass sheet to be tested on the stage and prevent relative displacement between the glass sheet to be tested and the stage, the positioning assembly includes a driving unit and four horizontal positioning clamps, the four positioning clamps are all straight bars and the straight lines where the extension tracks are located intersect to form a square positioning area, and the driving unit drives the four positioning clamps to move in a horizontal direction perpendicular to their own length direction and the movement amplitude is the same.

[0015] Preferably, in order to ensure the positioning effect and prevent the glass sheet to be tested from being damaged or separated from the loading surface due to excessive squeezing, elastic buffer pads with the same length direction as the corresponding positioning clamps are provided on one side of the four positioning clamps adjacent to the positioning area.

[0016] Preferably, in order to ensure the stable movement of the positioning clamps, the loading platform includes a horizontal loading plate, on which four strip-shaped through holes are provided, which correspond one-to-one to the four positioning clamps and are perpendicular to each other in length direction. The inner side of each strip-shaped through hole is slidably fitted with a slider which corresponds one-to-one to the corresponding positioning clamps.

[0017] Preferably, in order to drive the four positioning clamps to move synchronously, the driving unit includes a driving motor fixed on the worktable and a driving disk coaxially connected to the output end of the driving motor and horizontal, the axis of the driving disk passes through the center of the positioning area, and four arc-shaped through holes corresponding to the four bar-shaped through holes are distributed in a circular array on the driving disk, and the bottom end of the slider is provided with a guide member that fits between the two opposite inner walls of the corresponding arc-shaped through holes.

[0018] Preferably, in order to reduce the friction force on the guide member when it moves and facilitate the movement of the positioning clamp, the guide member is a guide sleeve extending in the vertical direction, and the guide sleeve rotates around its own axis below the slider.

[0019] Preferably, in order to ensure stable rotation of the guide sleeve, the bottom end of the slider is connected to a convex plate via a vertical shaft, the guide sleeve is fitted between the convex plate and the bottom surface of the carrier plate, and a sealing sleeve is arranged outside the vertical shaft.

[0020] Preferably, in order to facilitate determination of the detection position of the four-needle probe on the glass sheet to be detected, two of the four positioning clips extend along the first direction, and the other two extend along the second direction.

[0021] To sum up, compared with the existing technology, the four-probe square resistance tester for detecting transparent conductive films of the utility model fixes the position of the glass sheet to be tested on the loading surface through the positioning component, cooperates with the first translation unit and the second translation unit to drive the relative movement of the loading table and the four-needle probe, adjusts the relative position of the four-needle probe and the glass sheet to be tested, and the lifting unit controls the lifting and lowering movement of the four-needle probe, which facilitates the four-needle probe to uniformly detect multiple preset positions on the glass sheet to be tested, thereby improving the detection accuracy. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a structural diagram of the utility model 1;

[0023] Figure 2 yes Figure 1 Front view of

[0024] Figure 3 yes Figure 1 Explosion diagram of

[0025] Figure 4 This is a schematic diagram of the connection structure between the detection component and the second translation unit of the utility model;

[0026] Figure 5 yes Figure 4 Explosion diagram of

[0027] Figure 6 yes Figure 5 A magnified view of part A;

[0028] Figure 7 This is a schematic diagram of the connection structure between the loading platform and the positioning assembly of the utility model;

[0029] Figure 8 yes Figure 7 Schematic diagram of the cross-section structure;

[0030] Figure 9 yes Figure 8 Explosion diagram of

[0031] Figure 10 yes Figure 9 A magnified view of part B;

[0032] Figure 11 yes Figure 8 Explosion diagram from another perspective;

[0033] In the figure: 1. Fixing frame; 11. Base; 12. Bracket; 2. Loading platform; 21. Loading plate; 211. Loading surface; 212. Strip-shaped through hole; 22. Sliding shell; 3. Positioning assembly; 31. Driving unit; 311. Driving motor; 312. Driving disk; 3121. Arc-shaped through hole; 32. Positioning clamp; 33. Buffer pad; 34. Sliding block; 35. Guide member; 36. Vertical axis; 37. Convex plate; 4. Glass sheet to be tested; 5. Detection assembly; 51. Lifting unit; 52. Four-needle probe; 53. Compression spring; 54, lifting plate; 55, pressure plate; 56, guide rod; 57, convex cover; 6, planar moving component; 61, first translation unit; 611, first motor; 612, first screw rod; 613, first screw sleeve; 614, bushing; 615, first sliding sleeve; 616, first guide rod; 62, second translation unit; 621, second motor; 622, second screw rod; 623, second screw sleeve; 624, second sliding sleeve; 625, second sliding rod; 7, first distance sensor; 8, second distance sensor. DETAILED DESCRIPTION

[0034] The following embodiments are used to further describe the specific embodiments of the present invention in conjunction with the accompanying drawings and examples. The following embodiments are only used to more clearly illustrate the technical solutions of the present invention and are not intended to limit the scope of protection of the present invention.

[0035] like Figures 1-11 As shown, the four-probe square resistance tester for detecting transparent conductive films of the present invention comprises:

[0036] A fixing frame 1, the fixing frame 1 includes a base 11;

[0037] The loading assembly includes a loading platform 2 movable on a base 11 and a positioning assembly 3 disposed on the loading platform 2. The top surface of the loading platform 2 is a horizontal loading surface 211 for placing a glass sheet 4 to be tested. The positioning assembly 3 is used to locate the position of the glass sheet 4 to be tested on the loading surface 211.

[0038] The detection component 5 includes a lifting unit 51 provided on the fixing frame 1 and a four-needle probe 52 connected to the output end of the lifting unit 51 and facing downward;

[0039] The planar moving component 6 is arranged on the fixed frame 1 and is used to drive the four-needle probe 52 and the stage 2 to move relative to each other along a first horizontal direction and a second horizontal direction, and the first direction and the second direction are perpendicular to each other.

[0040] When using the device, a glass sheet 4 to be tested, one side of which has a transparent conductive film deposited thereon, is placed on the loading surface 211 of the loading stage 2, with the side of the glass sheet 4 to be tested deposited with the transparent conductive film facing upward. The positioning assembly 3 is then activated to position the glass sheet 4 to be tested on the loading surface 211 to prevent the glass sheet 4 to be tested from sliding relative to the loading surface 211.

[0041] After the positioning is completed, the plane moving component 6 is started, and the relative position of the four-needle probe 52 and the object stage 2 is controlled to move relative to each other, so as to adjust the relative position of the four-needle probe 52 and the glass sheet 4 to be tested, so that the four-needle probe 52 moves to just above the glass sheet 4 to be tested, and the four-needle probe 52 is driven downward by the lifting unit 51 to contact the transparent conductive film on the glass sheet 4 to be tested, thereby measuring the square resistance and resistivity of the transparent conductive film; then the lifting unit 51 drives the four-needle probe 52 to move upward, so that the four-needle probe 52 is separated from the glass sheet 4 to be tested, and then the relative position of the four-needle probe 52 and the glass sheet 4 to be tested is adjusted by the plane moving component 6, and then the lifting unit 51 drives the four-needle probe 52 to move downward to measure other positions of the transparent conductive film on the glass sheet 4 to be tested.

[0042] In this way, multiple measurements of the transparent conductive film on the glass sheet 4 to be tested are achieved, thereby improving the detection accuracy. In addition, during the detection process, due to the positioning function of the positioning component 3, the glass sheet 4 to be tested and the stage 2 maintain a relatively fixed position, preventing the position of the glass sheet 4 to be tested from shifting, thereby facilitating the device to measure multiple unified positions and avoiding a decrease in measurement accuracy caused by deviations in the measurement position.

[0043] Specifically, in the present invention, the fixing frame 1 includes a horizontal base 11 and a bracket 12 fixed above the base 11. Specifically, the base 11 is a horizontal rectangular plate structure, the length direction of the base 11 is the first direction, the width direction of the base 11 is the second direction, and the bracket 12 is an inverted U shape, with both ends of the bracket 12 fixed to both sides of the base 11.

[0044] In order to conveniently control the detection position of the four-needle probe 52 on the glass sheet 4 to be tested, the plane moving assembly 6 includes a first translation unit 61 and a second translation unit 62 , one of which has an output end connected to the stage 2 and the other connected to the four-needle probe 52 .

[0045] Specifically, the output end of the first translation unit 61 is connected to the stage 2 , and the output end of the second translation unit 62 is connected to the four-needle probe 52 via the lifting unit 51 .

[0046] The first translation unit 61 includes a first motor 611, a first screw rod 612, a first threaded sleeve 613, and a shaft sleeve 614, which are arranged on one side below the object platform 2, and a first sleeve 615 and a first guide rod 616, which are arranged on the other side below the object platform 2. The first threaded sleeve 613 and the first sleeve 615 are respectively fixed to the two sides below the object platform 2. The first threaded sleeve 613 is threadedly connected to the first screw rod 612 whose axis is parallel to the first direction. The first motor 611 and the shaft sleeve 614 are respectively arranged at both ends of the first screw rod 612 and fixed above the base 11. The first motor 611 is coaxially connected to one end of the first screw rod 612. The other end of the first screw rod 612 is rotatably connected to the first sleeve 614. The first guide rod 616 extends in the first direction and is fixed just above the base 11. The first guide rod 616 and the first sleeve 615 are slidably engaged.

[0047] After the first motor 611 is started, it drives the first screw rod 612 to rotate around its own axis under the support of the shaft sleeve 614, acting on the first screw sleeve 613. Under the sliding cooperation of the first guide rod 616 and the first sliding sleeve 615, the worktable 2 moves smoothly along the first direction.

[0048] The second translation unit 62 is arranged below the top of the bracket 12, and includes a second motor 621, a second screw rod 622, a second screw sleeve 623, a second sleeve 624 and a second slide rod 625. The second motor 621 is fixed on a side wall of the bracket 12 and the output end is fixedly connected to the second screw rod 622 coaxially. The axial direction of the second screw rod 622 is the second direction. The second screw rod 622 is threadedly connected to the second screw sleeve 623. The second screw sleeve 623 is connected to the lifting unit 51. The two sides of the second screw sleeve 623 are fixedly connected with the second sleeve 624 in the same length direction as the second sleeve. The second sleeve 624 is sealed with a second slide rod 625 that slides with it and is fixed just below the top of the bracket 12.

[0049] After adopting the above structure, the second motor 621 is started, driving the second screw rod 622 to rotate around its own axis, and then acts on the second screw sleeve 623. Under the sliding cooperation of the second sliding sleeve 624 and the second sliding rod 625, the second screw sleeve 623 drives the lifting unit 51 and the four-needle probe 52 to move smoothly along the second direction.

[0050] In the detection assembly 5, the lifting unit 51 is a lifting cylinder, the cylinder of which is fixed directly below the second screw sleeve 623. The piston rod extends downward in the vertical direction and is fixedly connected to a horizontal lifting plate 54 at its bottom end. The bottom surface of the lifting plate 54 is connected to a horizontal pressure plate 55 via a compression spring 53. The four-pin probe 52 is fixed directly below the pressure plate 55. Guide rods 56 are fixed at the four corners of the pressure plate 55, extending upward in the vertical direction and slidingly sealingly penetrating the lifting plate 54. A convex cover 57 is fixed to the top of the guide rod 56, and the outer diameter of the convex cover 57 is larger than that of the guide rod 56. With the above structure, the compression spring 53 facilitates the relative displacement of the lifting plate 54 and the pressure plate 55 in the vertical direction. The sliding fit of the guide rod 56 and the lifting plate 54 ensures that the pressure plate 55 is always in a horizontal state. The four probes of the four-pin probe 52 can contact the transparent conductive film on the glass sheet 4 to be tested with appropriate pressure, so as to detect the transparent conductive film.

[0051] A further improvement is that it further includes a first distance sensor 7 for detecting the moving distance of the object carrier 2 and a second distance sensor 8 for detecting the moving distance of the four-needle probe 52.

[0052] Specifically, the first distance sensor 7 is fixed above the first guide rod 616 and faces the first sleeve 615 to detect the distance between it and the first sleeve 615, and the first sleeve 615 is fixed below the worktable 2, so as to facilitate the determination of the relative positions of the worktable 2 and the glass sheet 4 to be tested relative to the four-needle probe 52 in the first direction; the second distance sensor 8 is fixed on the bracket 12 and faces the second screw sleeve 623. The distance position of the second screw sleeve 623 is detected by the second distance sensor 8, so that the position of the four-needle probe 52 directly below the second screw sleeve 623 can be determined, and then the relative position of the four-needle probe 52 and the glass sheet 4 to be tested in the second direction can be determined.

[0053] A further improvement is that the positioning assembly 3 includes a driving unit 31 and four horizontal positioning clips 32. The four positioning clips 32 are all straight bars and the straight lines where the extension trajectories are located intersect to form a square positioning area. The driving unit 31 drives the four positioning clips 32 to move in a horizontal direction perpendicular to its own length direction and the movement amplitude is the same.

[0054] Specifically, two of the four positioning clips 32 are positioned opposite each other and extend in a first direction, while the other two are positioned opposite each other and extend in a second direction. All four positioning clips 32 are attached to the object loading surface 211. The four positioning clips 32 are controlled by the drive unit 31 to move synchronously, so that the four positioning clips 32 move toward or away from each other at the same amplitude. Furthermore, the straight lines along which the four positioning clips 32 extend intersect in all cases, forming a square positioning area. This facilitates positioning of the square, thin sheet of glass to be tested 4. When the four positioning clips 32 move away from each other, the size of the positioning area increases, making it easier to place or remove the glass to be tested 4 from the positioning area. When the four positioning clips 32 move away from each other, the size of the positioning area decreases until the positioning area matches the size of the glass to be tested 4. This allows the glass to be tested 4 to be positioned, preventing relative displacement of the glass to be tested 4 on the object loading surface 211.

[0055] A further improvement is that a buffer pad 33 which is elastic and has the same length direction as the corresponding positioning clip 32 is provided on one side of the four positioning clips 32 adjacent to the positioning area.

[0056] Specifically, the buffer pad 33 is a rubber pad. With the above design, when positioning, the elastic buffer pad 33 contacts the side wall of the glass sheet 4 to be tested, thereby preventing the rigid positioning clamp 32 from rigidly contacting the glass sheet 4 to be tested, thereby preventing the glass sheet 4 from being broken or damaged or being squeezed upward and away from the loading surface 211.

[0057] A further improvement is that the loading platform 2 includes a horizontal loading plate 21, which is provided with four strip-shaped through holes 212 corresponding one-to-one to the four positioning clamps 32 and perpendicular to each other in length direction, and the inner side of each strip-shaped through hole 212 is slidably fitted with a slider 34 corresponding one-to-one to the corresponding positioning clamp 32.

[0058] The slidingly matched slider 34 and the strip-shaped through hole 212 ensure that the four positioning clamps 32 move smoothly in the horizontal direction perpendicular to their own length direction, which is beneficial to ensure that after the driving unit 31 is running, the movement amplitude of the four positioning clamps 32 is consistent, so as to achieve a good positioning effect on the glass sheet 4 to be tested.

[0059] A further improvement is that the drive unit 31 includes a drive motor 311 fixed on the worktable 2 and a drive disk 312 which is coaxially connected to the output end of the drive motor 311 and is horizontal. The axis of the drive disk 312 passes through the center of the positioning area. Four arc-shaped through holes 3121 corresponding to the four strip-shaped through holes 212 are distributed in a circular array on the drive disk 312. The bottom end of the slider 34 is provided with a guide member 35 which fits between the two opposite inner walls of the corresponding arc-shaped through holes 3121; the guide member 35 is a guide sleeve extending in the vertical direction, and the guide sleeve rotates around its own axis below the slider 34; the bottom end of the slider 34 is connected to a convex plate 37 through a vertical shaft 36, and the guide sleeve fits between the convex plate 37 and the bottom surface of the worktable 21 and the sealing sleeve is provided outside the vertical shaft 36.

[0060] Specifically, a barrel-shaped sliding shell 22 is fixed under the carrier plate 21, and the sliding shell 22 is fixed above the first screw sleeve 613 and the first sliding sleeve 615. The sliding shell 22 and the carrier plate 21 enclose a driving cavity. The driving disk 312 is horizontally arranged in the driving cavity and the top surface is in contact with the bottom surface of the carrier plate 21. The driving motor 311 is fixed to the bottom of the sliding shell 22 and the output end is fixedly connected to the driving disk 312 coaxially. The arc-shaped through holes 3121 are distributed in a circular array on the driving disk 312, and the axial center line of the arc-shaped through holes 3121 is located on the circumferential outer edge of the driving disk 312.

[0061] After adopting the above design, after the driving motor 311 is started, it drives the driving disk 312 to rotate, so that after the arc-shaped through hole 3121 rotates, it contacts the guide member 35 through its own inner wall and acts on the guide member 35, driving the slider 34 to slide along the strip through hole 212, changing the position of the positioning clamp 32, so that the four positioning clamps 32 are synchronously approached or moved away. The guide member 35 is a guide sleeve, which is convenient for rotating around the axis of the vertical axis 36 as the center line while rolling between the two inner walls facing the arc-shaped through hole 3121, reducing the resistance encountered by the driving disk 312 when rotating, thereby facilitating the rotation of the driving disk 312, and then facilitating the movement of the positioning clamp 32, so as to position the glass piece 4 to be tested placed on the carrier plate 21 so that it is located above the center position of the carrier plate 21.

[0062] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the technical principles of the present invention. These improvements and modifications should also be regarded as within the scope of protection of the present invention.

Claims

1. A four-probe square resistance tester for detecting transparent conductive films, characterized in that: include: A fixing frame (1), the fixing frame (1) comprising a base (11); A loading assembly, the loading assembly comprising a loading platform (2) movable on the base (11) and a positioning assembly (3) arranged on the loading platform (2), the top surface of the loading platform (2) being a horizontal loading surface (211) for placing the glass sheet (4) to be tested, and the positioning assembly (3) being used to locate the position of the glass sheet (4) to be tested on the loading surface (211); A detection component (5), the detection component (5) comprising a lifting unit (51) arranged on the fixing frame (1) and a four-needle probe (52) connected to an output end of the lifting unit (51) and facing downward; A planar moving assembly (6), the planar moving assembly (6) being arranged on the fixing frame (1), the planar moving assembly (6) being used to drive the four-needle probe (52) and the stage (2) to move relative to each other along a first horizontal direction and a second horizontal direction, wherein the first direction and the second direction are perpendicular to each other.

2. The four-probe square resistance tester for detecting transparent conductive films according to claim 1, characterized in that: The planar moving assembly (6) comprises a first translation unit (61) and a second translation unit (62), wherein an output end of one of the units is connected to the stage (2), and the other output end is connected to the four-needle probe (52).

3. The four-probe square resistance tester for detecting transparent conductive films according to claim 2, characterized in that: It also includes a first distance sensor (7) for detecting the moving distance of the object carrier (2) and a second distance sensor (8) for detecting the moving distance of the four-needle probe (52).

4. The four-probe square resistance tester for detecting transparent conductive films according to claim 1, characterized in that: The positioning assembly (3) comprises a driving unit (31) and four horizontal positioning clamps (32), wherein the four positioning clamps (32) are all straight bars and the straight lines on which the extension tracks are located intersect to enclose a square positioning area, and the driving unit (31) drives the four positioning clamps (32) to move in a horizontal direction perpendicular to the length direction thereof and with the same movement amplitude.

5. The four-probe square resistance tester for detecting transparent conductive films according to claim 4, characterized in that: A buffer pad (33) that is elastic and has the same length direction as the corresponding positioning clamp (32) is provided on one side of the four positioning clamps (32) adjacent to the positioning area.

6. The four-probe square resistance tester for detecting transparent conductive films according to claim 4, characterized in that: The loading platform (2) includes a horizontal loading plate (21), and the loading plate (21) is provided with four strip-shaped through holes (212) corresponding to the four positioning clamps (32) one by one and perpendicular to each other in length direction. The inner side of each strip-shaped through hole (212) is slidably matched with a slider (34) corresponding to the corresponding positioning clamp (32).

7. The four-probe square resistance tester for detecting transparent conductive films according to claim 6, characterized in that: The driving unit (31) includes a driving motor (311) fixed on the loading platform (2) and a driving disk (312) connected to the output end of the driving motor (311) coaxially and horizontally, the axis of the driving disk (312) passing through the center of the positioning area, and four arc-shaped through holes (3121) corresponding to the four strip-shaped through holes (212) are distributed in a circular array on the driving disk (312), and the bottom end of the slider (34) is provided with a guide member (35) that fits between the two inner side walls of the corresponding arc-shaped through holes (3121).

8. The four-probe square resistance tester for detecting transparent conductive films according to claim 7, characterized in that: The guide member (35) is a guide sleeve extending in a vertical direction, and the guide sleeve rotates around its own axis below the slider (34).

9. The four-probe square resistance tester for detecting transparent conductive films according to claim 8, characterized in that: The bottom end of the slider (34) is connected to a convex plate (37) via a vertical shaft (36), the guide sleeve is fitted between the convex plate (37) and the bottom surface of the carrier plate (21), and the sealing sleeve is arranged outside the vertical shaft (36).

10. The four-probe square resistance tester for detecting transparent conductive films according to claim 4, characterized in that: Among the four positioning clips (32), two extend along the first direction, and the other two extend along the second direction.

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