Spray head of etching machine

Abstract

The utility model relates to the related technical field of etching machine accessories, in particular to an etching machine spray head, which comprises an etching machine main body, a control arm is arranged in the etching machine main body, a spray head is arranged at one end of the control arm, a connecting mechanism is arranged on the surface of the spray head, and a fixing mechanism is arranged at one end of the spray head. The corrosion machine nozzle is provided with the connecting mechanism, the pressing block is pressed to enable the spring to contract, the sleeve shell drives the nozzle to be embedded into the fixing plate, then the pressing block is loosened, the spring rebounds to enable the limiting column to penetrate through the round hole in the fixing plate, and then the nozzle can be fixed.

Description

Technical Field

[0001] The utility model relates to the technical field related to etching machine accessories, in particular to an etching machine nozzle. Background Art

[0002] Etching machines mainly use two types of machines to produce chips, projecting circuit diagrams onto silicon wafers coated with photoresist. The photolithography process is to photoetch a layer of photoresist on the prepared silicon wafer surface, and then light can pass through the mask to illuminate the surface of the silicon circle. Due to the coverage of the photoresist, the illuminated part is etched away and the non-luminous part is left. The automatic chemical etcher seen on the market today etches through high-pressure spraying, so an etcher nozzle is particularly needed.

[0003] However, the existing etching machine nozzle is inconvenient to disassemble and replace when the nozzle is damaged during use. The replacement process is tedious and complicated, which wastes maintenance time. Utility Model Content

[0004] The purpose of the present utility model is to provide an etching machine nozzle to solve the problem of the existing etching machine nozzle proposed in the above background technology. When the nozzle is damaged during use, it is inconvenient to disassemble and replace the nozzle head, and the replacement process is cumbersome and complicated, which wastes maintenance time.

[0005] To achieve the above-mentioned object, the present invention provides the following technical solution: an etching machine nozzle, comprising an etching machine body, a control arm installed inside the etching machine body, a nozzle installed at one end of the control arm, a connection mechanism provided on the surface of the nozzle, and a fixing mechanism provided at one end of the nozzle;

[0006] The connecting mechanism includes a sleeve, a connecting rod, a spring, a connecting block, a pressing block, a limiting column and a fixing plate. The surface of the nozzle is sleeved with a sleeve, the surface of the sleeve is connected to the connecting rod, the surface of the connecting rod is sleeved with a spring, one end of the connecting rod is connected to the connecting block, one side of the surface of the connecting block is connected to the pressing block, one end of the connecting block is connected to the limiting column, and one end of the limiting column is sleeved with a fixing plate.

[0007] Preferably, one end of the spring is connected to the housing, and the other end of the spring is connected to the connecting block.

[0008] Preferably, the connecting rod passes through one end of the connecting block, and the sleeve passes through the surface of the fixing plate.

[0009] Preferably, the limiting columns pass through both ends of the fixing plate, and two groups of the limiting columns are provided.

[0010] Preferably, the fixing mechanism includes a threaded hole, a fixing block and a bolt. A threaded hole is opened on one side of the surface of the fixing plate. The surface of the fixing plate is connected to the fixing block. The surface of the fixing block is penetrated by a bolt.

[0011] Preferably, the bolt passes through the fixing block and is threadedly connected to the control arm.

[0012] Preferably, two groups of bolts are provided, and the fixing block is L-shaped.

[0013] Compared with the prior art, the beneficial effect of the present invention is that: since it is inconvenient to disassemble and replace the nozzle of the etching machine when the nozzle is damaged during use, the replacement process is cumbersome and complicated, and maintenance time is wasted. Therefore, the nozzle of the etching machine is equipped with a connecting mechanism. By pressing the pressing block to shrink the spring, the shell and the nozzle are embedded in the fixed plate, and then the pressing block is released. At this time, the spring rebounds and the limit column passes through the circular hole on the fixed plate, so that the nozzle can be fixed. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 This is a side view of the structure of the utility model;

[0015] Figure 2 This is a schematic diagram of the connection mechanism structure of the utility model;

[0016] Figure 3 This is a schematic diagram of the exploded structure of the fixing mechanism of the utility model;

[0017] Figure 4 For this utility model Figure 3 Enlarged structural diagram at point A in the middle.

[0018] In the figure: 1. Detector; 2. Detection mechanism; 201. Detection port; 202. Light tube; 203. Lens; 204. Spring; 205. Clamp; 206. Rubber pad; 207. Threaded interface; 208. Threaded cover; 3. Storage mechanism; 301. Base; 302. Slide; 303. Slider; 304. Pull-out box; 305. First sample placement plate; 306. Second sample placement plate; 307. Elastic band. DETAILED DESCRIPTION

[0019] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0020] See also Figure 1-4The utility model provides a technical solution: an etching machine nozzle, comprising an etching machine body 1, a control arm 2 is installed inside the etching machine body 1, a nozzle 3 is installed at one end of the control arm 2, a connection mechanism 4 is provided on the surface of the nozzle 3, and a fixing mechanism 5 is provided at one end of the nozzle 3;

[0021] The connecting mechanism 4 includes a casing 401, a connecting rod 402, a spring 403, a connecting block 404, a pressing block 405, a limiting column 406 and a fixing plate 407. The surface of the nozzle 3 is sleeved with a casing 401, the surface of the casing 401 is connected to the connecting rod 402, the surface of the connecting rod 402 is sleeved with a spring 403, one end of the connecting rod 402 is connected to the connecting block 404, one side of the surface of the connecting block 404 is connected to the pressing block 405, one end of the connecting block 404 is connected to the limiting column 406, and one end of the limiting column 406 is sleeved with a fixing plate 407. When installing the nozzle 3, first place the nozzle 3 into the interior of the housing 401, then pinch the two sets of pressing blocks 405, at this time, the connecting block 404 can be driven to penetrate the connecting rod 402, and the spring 403 is forced to shrink it, and then the housing 401 is penetrated through the surface of the fixed plate 407, and then the two sets of pressing blocks 405 are released. At this time, the spring 403 on the surface of the connecting rod 402 applies force to both sides, and the two sets of limiting columns 406 can be pushed into the circular holes on the fixed plate 407. At this time, the housing 401 and the nozzle 3 can be fixed on the fixed plate 407, and the installation of the nozzle 3 is completed.

[0022] Furthermore, one end of the spring 403 is connected to the sleeve 401, and the other end of the spring 403 is connected to the connecting block 404. Through the setting of the spring 403, the two sets of pressing blocks 405 are pinched to compress the spring 403. When the limiting column 406 is aligned with the circular hole, the force on the spring 403 is released, and the limiting column 406 can be pushed into the circular hole, so that the sleeve 401 is fixed on the surface of the fixing plate 407.

[0023] Furthermore, the connecting rod 402 passes through one end of the connecting block 404, and the shell 401 passes through the surface of the fixed plate 407. Through the setting of the connecting rod 402, since one end of the connecting rod 402 is connected to the shell 401 and the other end passes through the connecting block 404, when the two sets of pressing blocks 405 are pinched, the connecting block 404 moves on the connecting rod 402 and compresses the spring 403, so that one end of the limiting column 406 is engaged with the circular hole and passes through the fixed plate 407.

[0024] Furthermore, the limiting columns 406 pass through both ends of the fixed plate 407, and two groups of limiting columns 406 are provided. Through the setting of the limiting columns 406, when the limiting columns 406 pass through the circular holes at both ends of the fixed plate 407, the housing 401 can be fixed on the fixed plate 407, thereby simultaneously fixing the nozzle 3 inside the housing 401 on the fixed plate 407.

[0025] Furthermore, the fixing mechanism 5 includes a threaded hole 501, a fixing block 502 and a bolt 503. A threaded hole 501 is opened on one side of the surface of the fixing plate 407, and the fixing block 502 is connected to one side of the surface of the fixing plate 407. The bolt 503 passes through one side of the surface of the fixing block 502. Through the arrangement of the threaded hole 501, the fixing block 502 and the bolt 503, first, one side of the fixing plate 407 is fitted with the control arm 2, and then the bolt 503 is passed through the screw fixing block 502 and rotated into the threaded hole 501. At this time, one group of bolts 503 can be threadedly connected to the fixing plate 407, and the other group of bolts 503 can be threadedly connected to the control arm 2, so that the fixing plate 407 can be connected to one end of the control arm 2.

[0026] Furthermore, the bolt 503 passes through the fixing block 502 and is threadedly connected to the control arm 2. Through the setting of the bolt 503, after the bolt 503 is passed through the fixing block 502, the bolt 503 is rotated so that it is threadedly connected to the control arm 2 and the fixing plate 407 respectively, so that the fixing plate 407 can be fixed to one end of the control arm 2.

[0027] Furthermore, two groups of bolts 503 are provided, and the fixing block 502 is L-shaped. Through the setting of the fixing block 502, one side of the fixing plate 407 is fitted with the fixing block 502, and then the other side of the fixing block 502 is fitted with the control arm 2. When the bolt 503 passes through the fixing block 502 and is threadedly connected to the control arm 2 and the fixing plate 407, the fixing block 502 can fix the fixing plate 407 to one end of the control arm 2.

[0028] 402, and the spring 403 on the surface of the connecting rod 402 applies force to both sides, and the two sets of limiting columns 406 can be pushed into the round holes on the fixing plate 407. At this time, the housing 401 and the nozzle head 3 can be fixed on the fixing plate 407, and the installation of the nozzle head 3 is completed.

[0029] Although the embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations may be made to these embodiments without departing from the principles and spirit of the present invention, and the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. An etching machine nozzle, comprising an etching machine body (1), characterized in that: A control arm (2) is installed inside the etching machine body (1), a nozzle (3) is installed at one end of the control arm (2), a connecting mechanism (4) is provided on the surface of the nozzle (3), and a fixing mechanism (5) is provided at one end of the nozzle (3); The connecting mechanism (4) comprises a housing (401), a connecting rod (402), a spring (403), a connecting block (404), a pressing block (405), a limiting column (406) and a fixing plate (407); the surface of the nozzle (3) is sleeved with the housing (401); the surface of the housing (401) is connected to the connecting rod (402); the surface of the connecting rod (402) is sleeved with the spring (403); one end of the connecting rod (402) is connected to the connecting block (404); one side of the surface of the connecting block (404) is connected to the pressing block (405); one end of the connecting block (404) is connected to the limiting column (406); and one end of the limiting column (406) is sleeved with the fixing plate (407).

2. The etching machine nozzle according to claim 1, characterized in that: One end of the spring (403) is connected to the housing (401), and the other end of the spring (403) is connected to the connecting block (404).

3. The etching machine nozzle according to claim 1, characterized in that: The connecting rod (402) passes through one end of the connecting block (404), and the sleeve (401) passes through the surface of the fixing plate (407).

4. The etching machine nozzle according to claim 1, characterized in that: The limiting columns (406) pass through both ends of the fixing plate (407), and two groups of the limiting columns (406) are provided.

5. The etching machine nozzle according to claim 1, characterized in that: The fixing mechanism (5) comprises a threaded hole (501), a fixing block (502) and a bolt (503); a threaded hole (501) is provided on one side of the surface of the fixing plate (407); a fixing block (502) is connected to one side of the surface of the fixing plate (407); and a bolt (503) penetrates one side of the surface of the fixing block (502).

6. The etching machine nozzle according to claim 5, characterized in that: The bolt (503) passes through the fixing block (502) and is threadedly connected to the control arm (2).

7. The shower head of an etching machine according to claim 5, characterized in that: Two groups of bolts (503) are provided, and the fixing block (502) is L-shaped.

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