Laser modulation mechanism and laser processing device

Abstract

The utility model provides a laser modulation mechanism and a laser processing device.The laser modulation mechanism comprises a mounting base, a light reflection assembly and a spatial light modulator, the light reflection assembly comprises a mounting frame, and the mounting frame is arranged on the mounting base; the reflecting assembly further comprises a first reflecting part and a second reflecting part, the first reflecting part and / or the second reflecting part are / is adjustably arranged on the mounting frame, an included angle is formed between the reflecting face of the first reflecting part and the reflecting face of the second reflecting part, and the first reflecting part and / or the second reflecting part are / is adjusted. The included angle between the reflecting surface of the first reflecting part and the reflecting surface of the second reflecting part can be adjusted; the spatial light modulator is arranged on the mounting base, and the laser is reflected to the spatial light modulator through the first light reflecting part, modulated by the spatial light modulator and then reflected to the second light reflecting part; or the laser is reflected to the spatial light modulator through the second light reflecting part, and is reflected to the first light reflecting part after being modulated by the spatial light modulator. The two reflecting parts are arranged on the mounting frame, so that the structure is optimized, and a light path cannot be blocked.

Description

Technical Field

[0001] The present application belongs to the field of laser processing technology, and more specifically, relates to a laser modulation mechanism and a laser processing device. Background Art

[0002] With the development of laser technology, laser technology has been widely used in the processing and manufacturing fields.

[0003] Related art discloses a laser processing device that includes a laser modulation mechanism in its optical path for modulating the laser light to produce the laser light required for processing. However, due to the irrational configuration of the laser modulation mechanism in related art, the laser modulation process takes a long time to achieve the required accuracy, resulting in low modulation efficiency. Utility Model Content

[0004] The present application provides a laser modulation mechanism that can improve modulation efficiency.

[0005] The technical solution adopted in the present application is: providing a laser modulation mechanism, including a mounting seat, a reflective assembly and a spatial light modulator, the reflective assembly including a mounting frame, and the mounting frame is arranged on the mounting seat; the reflective assembly also includes a first reflector and a second reflector, the first reflector and / or the second reflector can be adjustably arranged on the mounting frame, the reflective surface of the first reflector and the reflective surface of the second reflector have an angle, and by adjusting the first reflector and / or the second reflector, the angle between the reflective surface of the first reflector and the reflective surface of the second reflector can be adjusted; the spatial light modulator is arranged on the mounting seat, the laser light is reflected from the first reflector to the spatial light modulator, and is modulated by the spatial light modulator and then reflected to the second reflector; or, the laser light is reflected from the second reflector to the spatial light modulator, and is modulated by the spatial light modulator and then reflected to the first reflector.

[0006] Furthermore, the mounting frame includes a first mounting portion and a second mounting portion, the first mounting portion and the second mounting portion are connected at a preset angle and are arranged on the mounting seat, the first reflector can be adjusted to be arranged on the first mounting portion, and the second reflector can be adjusted to be arranged on the second mounting portion.

[0007] Furthermore, the reflective assembly also includes a first connecting member, which can loosely or tightly connect the first reflective member and the first mounting portion; the reflective assembly also includes a first adjusting member, which can be movably arranged on the first mounting portion in a direction close to or away from the first reflective member, and one end of the first adjusting member along the corresponding movable direction abuts against the first reflective member; when the first connecting member is loosely connected to the first reflective member and the first mounting portion, the first reflective member and the first mounting portion can move relative to each other, and the movement of the first adjusting member can be controlled to abut against the deflection of the first reflective member relative to the first mounting portion to adjust the angle between the reflective surface of the first reflective member and the reflective surface of the second reflective member, and then the first connecting member is fastened to connect the first reflective member and the first mounting portion to fix the current state of the first reflective member.

[0008] Furthermore, the first adjusting member and the first mounting portion are threadedly engaged, and the first adjusting member is moved relative to the first mounting portion by rotating.

[0009] Furthermore, there are two first adjusting parts, and the reflective assembly also includes a first support ball, which is arranged between the first mounting part and the first reflective part. The first support ball is in contact with both the first mounting part and the first reflective part, and the two first adjusting parts and the first support balls are distributed at the three vertices of a triangle corresponding to each other.

[0010] Furthermore, a direction perpendicular to the angle between the first reflector and the second reflector is defined as a first direction, and the two first adjusting members are spaced apart along the first direction.

[0011] Furthermore, there are at least three first adjusting members, and the at least three first adjusting members are not collinearly distributed.

[0012] Furthermore, the reflective assembly further includes a first elastic member, which is disposed between the first reflective member and the first mounting portion, and whose elastic ends respectively abut against the first reflective member and the first mounting portion.

[0013] Furthermore, the reflective assembly also includes a second connecting piece, which can loosely connect the second reflective element and the second mounting portion; the reflective assembly also includes two second adjusting pieces, and the two second adjusting pieces are threadedly engaged with the second mounting portion, and each second adjusting piece moves relative to the second mounting portion in a direction close to or away from the second reflective element by rotation, and one end of each second adjusting piece along the corresponding movable direction abuts against the second reflective element; the reflective assembly also includes a second supporting ball, which is arranged between the second mounting portion and the second reflective element, and the second supporting ball abuts against both the second mounting portion and the second reflective element, and the two second adjusting pieces and the second supporting balls correspond to the three vertices of the triangle distributed. The two second adjusting members are arranged at intervals along the first direction; the reflective assembly also includes a second elastic member, the second elastic member is arranged between the second reflective member and the second mounting portion, and the elastic ends of the second elastic member are respectively abutted against the second reflective member and the second mounting portion; when the second connecting member is loosely connected to the second reflective member and the second mounting portion, the second reflective member and the second mounting portion can move relative to each other, and the movement of the second adjusting member can be controlled to abut against the deflection of the second reflective member relative to the second mounting portion to adjust the angle between the reflective surface of the second reflective member and the reflective surface of the first reflective member, and then the second connecting member is fastened to connect the second reflective member and the second mounting portion to fix the current state of the second reflective member.

[0014] The present application also provides a laser processing device, which includes a laser and a laser modulation mechanism as described above. The laser emitted by the laser is directed to the first reflector, and the laser is reflected by the first reflector to the spatial light modulator, and is modulated by the spatial light modulator and reflected to the second reflector.

[0015] In the laser modulation mechanism provided in the present application, the mounting seat provides a mounting position for the reflective assembly and the spatial light modulator, so that the reflective assembly and the spatial light modulator can achieve stable cooperation. In use, after the reflective assembly and the spatial light modulator are installed and debugged in place, the laser is reflected from the first reflective element to the spatial light modulator, and then modulated by the spatial light modulator and reflected to the second reflective element; of course, the laser can also be reflected from the second reflective element to the spatial light modulator, and then modulated by the spatial light modulator and reflected to the first reflective element.

[0016] In a configuration where laser light sequentially propagates through a first reflector, a spatial light modulator, and a second reflector, the angle between the incident light of the laser beam entering the spatial light modulator and the emitted light after being modulated by the spatial light modulator is not fixed in the actual optical path construction and may be large or small. Therefore, in the scheme disclosed in the related art where the first and second reflectors are respectively mounted on two spaced-apart mounting frames, when the angle between the incident light and the emitted light of the spatial light modulator is small, one mounting frame often blocks the optical path between the reflector mounted on the other mounting frame and the spatial light modulator, and both mounting frames require a large amount of mounting space. In contrast, the first and second reflectors of the reflective assembly of the present application are both mounted on the same mounting frame, which not only optimizes the space occupied by the optical path construction structure and saves costs, but more importantly, in the constructed laser modulation mechanism, the first and second reflectors are both mounted on the same mounting frame, so that the mounting frame does not block the optical path between the first reflector and the spatial light modulator, nor the optical path between the second reflector and the spatial light modulator.

[0017] At the same time, the first reflector and the second reflector are arranged on the same mounting frame, which can make the distance between the first reflector and the second reflector closer. When any one of the first reflector and the second reflector is adjusted to adjust the angle between the reflective surface of the first reflector and the reflective surface of the second reflector, the closer distance between the first reflector and the second reflector is more convenient for coordinated adjustment, which helps to shorten the adjustment time and improve the adjustment efficiency. For the laser modulation mechanism, it can achieve the effect of improving the modulation efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the following briefly introduces the drawings required for use in the embodiments or descriptions of the prior art. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.

[0019] Figure 1 A schematic diagram of the structure of a laser modulation mechanism provided for related technology;

[0020] Figure 2 A schematic diagram of the structure of the laser modulation mechanism provided in an embodiment of the present application;

[0021] Figure 3 for Figure 2 A schematic diagram of the three-dimensional structure of the reflective component;

[0022] Figure 4 for Figure 3 A cross-sectional view along section line EE;

[0023] Figure 5 A schematic structural diagram of a laser processing device provided in an embodiment of the present application.

[0024] Among them, the reference numerals in the figures are:

[0025] 10. Laser modulation mechanism; 11. Mounting seat; 12. Reflective assembly; 121. Mounting frame; 1211. First mounting portion; 1212. Second mounting portion; 122. First reflector; 123. Second reflector; 124. First connecting member; 125. First adjusting member; 126. First supporting ball; 127. First elastic member; 128. Second connecting member; 129. Second adjusting member; 121a. Second supporting ball; 121b. Second elastic member; 13. Spatial light modulator; 20. Laser processing device; 21. Laser. DETAILED DESCRIPTION

[0026] In order to make the technical problems, technical solutions and beneficial effects to be solved by this application more clearly understood, this application is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain this application and are not intended to limit this application.

[0027] It should be noted that when an element is referred to as being “fixed on” or “disposed on” another element, it may be directly on the other element or indirectly on the other element. When an element is referred to as being “connected to” another element, it may be directly connected to the other element or indirectly connected to the other element.

[0028] It should be understood that the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of the technical features indicated. Thus, a feature specified as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of this application, "plurality" means two or more, unless otherwise specifically defined.

[0029] See also Figure 1 , which is a laser modulation mechanism L disclosed in the related art. The laser modulation mechanism of the related art includes two mounting frames m and two reflectors n. Each reflector n can be modulated and set on a mounting frame m. The laser (dashed line in the figure) is reflected by a reflector n to the spatial light modulator p, and is modulated by the spatial light modulator p and then reflected to the other reflector n.

[0030] Since the angle between the incident light of the laser incident on the spatial light modulator p and the output light after being modulated by the spatial light modulator p is not fixed in the actual optical path construction, both large and small situations may exist. However, when the angle between the incident light and the output light of the spatial light modulator p is small, one mounting bracket m often blocks the optical path between the reflector n set on the other mounting bracket m and the spatial light modulator p, and the setting of the two mounting brackets m also requires a large installation space.

[0031] See also Figure 2 The laser modulation mechanism 10 provided in the embodiment of the present application is now described. The laser modulation mechanism 10 provided in the embodiment of the present application includes a mounting seat 11, a reflective assembly 12 and a spatial light modulator 13. The reflective assembly 12 includes a mounting frame 121, which is arranged on the mounting seat 11; the reflective assembly 12 also includes a first reflector 122 and a second reflector 123. The first reflector 122 and / or the second reflector 123 can be adjusted and arranged on the mounting frame 121. The reflective surface of the first reflector 122 and the reflective surface of the second reflector 123 have an angle. The first reflector 122 and the second reflector 123 can be adjusted and arranged at an angle. The first reflector 122 and / or the second reflector 123 can adjust the angle between the reflective surface of the first reflector 122 and the reflective surface of the second reflector 123; the spatial light modulator 13 is set on the mounting base 11, and the laser is reflected from the first reflector 122 to the spatial light modulator 13, and then modulated by the spatial light modulator 13 and reflected to the second reflector 123; or, the laser is reflected from the second reflector 123 to the spatial light modulator 13, and then modulated by the spatial light modulator 13 and reflected to the first reflector 122.

[0032] In the laser modulation mechanism 10 provided in the embodiment of the present application, the mounting seat 11 provides a mounting position for the reflective component 12 and the spatial light modulator 13, so that the reflective component 12 and the spatial light modulator 13 can achieve stable cooperation. In use, after the reflective component 12 and the spatial light modulator 13 are installed and debugged in place, the laser is reflected from the first reflector 122 to the spatial light modulator 13, and then modulated by the spatial light modulator 13 and reflected to the second reflector 123; of course, the laser can also be reflected from the second reflector 123 to the spatial light modulator 13, and then modulated by the spatial light modulator 13 and reflected to the first reflector 122.

[0033] Compared with the laser modulation mechanism L disclosed in the above-mentioned related art, the first reflector 122 and the second reflector 123 of the reflective assembly 12 in the laser modulation mechanism 10 of the embodiment of the present application are both arranged on the same mounting frame 121. This not only optimizes the space occupied by the structure for constructing the optical path and saves costs, but more importantly, in the constructed laser modulation mechanism 10, the first reflector 122 and the second reflector 123 are both arranged on the same mounting frame 121, and the mounting frame 121 does not block the optical path between the first reflector 122 and the spatial light modulator 13, and the optical path between the second reflector 123 and the spatial light modulator 13.

[0034] At the same time, the first reflector 122 and the second reflector 123 are arranged on the same mounting frame 121, which can make the distance between the first reflector 122 and the second reflector 123 closer. When any one of the first reflector 122 and the second reflector 123 is adjusted to adjust the angle between the reflective surface of the first reflector 122 and the reflective surface of the second reflector 123, the closer distance between the first reflector 122 and the second reflector 123 is more convenient for coordinated adjustment, which helps to shorten the adjustment time and improve the adjustment efficiency. For the laser modulation mechanism 10, it can achieve the effect of improving the modulation efficiency.

[0035] It should be noted that the mounting bracket 121 can be adjustably set on the mounting base 11 to control the installation accuracy, and can also provide a certain position adjustment function for the first reflector 122 and the second reflector 123, which is helpful to construct a high-precision laser modulation optical path. The adjustable setting method is not limited and depends on the needs. For example, it can be a connection method using screws and bar holes. The mounting base 11 has a bar hole, and then a screw is used to penetrate the bar hole and screw it with the thread of the mounting bracket 121. When the screw is loosened, the mounting bracket 121 can be adjusted along the trajectory of the bar hole; when the screw is tightened, the mounting bracket 121 can be fixedly connected to the mounting base 11.

[0036] The mounting base 11 and the mounting bracket 121 can be of any desired shape. In the embodiment of the present application, the mounting base 11 is exemplified by a flat plate structure to provide a coplanar reference for the mounting bracket 121 and the spatial light modulator 13. The mounting bracket 121 is exemplified by a configuration including a first mounting portion 1211 and a second mounting portion 1212, which are connected at a predetermined angle and mounted on the mounting base 11. The first reflector 122 is adjustably mounted on the first mounting portion 1211, and the second reflector 123 is adjustably mounted on the second mounting portion 1212. Both the first reflector 122 and the second reflector 123 are adjustable, thereby increasing the adjustment range and adjustability of the angle between the first reflector 122 and the second reflector 123. Of course, in the embodiment of the present application, one of the first reflector 122 and the second reflector 123 can also be adjustable, as required, without limitation.

[0037] The preset angle between the first mounting portion 1211 and the second mounting portion 1212 is determined based on a desired angle between the first reflector 122 and the second reflector 123. For example, in constructing the optical path of the laser modulation mechanism 10, a theoretical angle between the first reflector 122 and the second reflector 123 is generally calculated first. Then, when designing and manufacturing the mounting frame 121, the first mounting portion 1211 and the second mounting portion 1212 of the mounting frame 121 are aligned with the theoretical angle. However, slight errors are inevitable in actual manufacturing. Thus, the adjustable arrangement of the first and second reflectors 122 and 123 can overcome the actual manufacturing errors of the mounting frame 121, thereby adjusting the angle between the first and second reflectors 122 and 123 to the theoretical value. Although the first and second mounting portions 1211 and 1212 have certain errors, they still provide greater adjustment convenience for the first and second reflectors 122 and 123, allowing them to be fine-tuned, thereby helping to improve adjustment efficiency.

[0038] Furthermore, regarding the adjustable settings of the first reflector 122 and the second reflector 123 , the embodiment of the present application takes the adjustable setting of the first reflector 122 on the first mounting portion 1211 as an example, and the adjustable settings of the second reflector 123 and the second mounting portion 1212 are equivalent.

[0039] See also Figure 3 Specifically, the reflective assembly 12 of the above embodiment may also include a first connecting member 124 and a first adjusting member 125. The first connecting member 124 can loosely or tightly connect the first reflective member 122 and the first mounting portion 1211; the first adjusting member 125 can be movably arranged on the first mounting portion 1211 along a direction close to or away from the first reflective member 122, and one end of the first adjusting member 125 along the corresponding movable direction abuts against the first reflective member 122.

[0040] When the first connecting member 124 is loosely connected to the first reflector 122 and the first mounting portion 1211, in this state, it can be understood that the first connecting member 124 is still in the state of the first reflector 122 and the first mounting portion 1211, except that the first reflector 122 and the first mounting portion 1211 can move relative to each other. As for the movement, it can be any method that can meet the requirements of subsequent adjustment of the first reflector 122. For example, the first connecting member 124 takes a screw as an example, and a through hole is provided on the first mounting portion 1211 to allow the screw to pass through. The aperture of the through hole is larger than the diameter of the threaded section of the screw, and the first reflector 122 is provided with a threaded hole that can be screwed together with the screw. In this way, when the screw passes through the through hole to connect the first reflector When the first adjusting member 125 is moved toward or away from the first reflector 122, the first reflector 122 is held tilted, and the screw is correspondingly deflected in the through hole. After the adjustment is in place, the screw is tightened to fix the first reflector 122 and the first mounting portion 1211, so that the first reflector 122 and the first mounting portion 1211 remain in the state when they are adjusted to place.

[0041] Among them, the first reflector 122 can be any structure that meets the reflective function and is provided with a reflective surface or reflective component. It can be an integrated structure or an assembled structure. The embodiment of the present application takes the first reflector 122 as an assembled structure as an example, and takes the reflective reflective component as an example of being installed on a fixed seat. The specific installation method is not limited, and any method that can achieve mutual fixation is acceptable, and the reflective component takes a mirror as an example.

[0042] In the embodiment of the present application, the first adjusting member 125 is exemplified by abutting against the fixing seat in a direction toward or away from the first reflector 122. Specifically, any adjustment means, as long as the adjustment means can be adjusted toward or away from the first reflector 122 and the first adjusting member 125 can support the fixing seat in that direction, are acceptable. Specifically, in the embodiment of the present application, the first adjusting member 125 is an adjusting screw. For example, the first mounting portion 1211 is provided with a threaded hole that threadably engages with the adjusting screw. The adjusting screw can be threaded through the threaded hole of the first mounting portion 1211. The end of the adjusting screw that passes through the threaded hole and is closest to the first reflector 122 abuts against the fixing seat of the first reflector 122. By screwing, the adjusting screw adjusts the angle of the first reflector 122, resulting in relatively high adjustment accuracy. The amount of adjustment per turn is constant, facilitating precise control of the adjustment scale. Of course, the other end of the adjusting screw can also be provided with a fastening structure, such as a nut that is threadably engaged with the adjusting screw, to enhance the securement of the adjusting screw to the first mounting portion 1211.

[0043] Specifically, regarding the adjustment setting of the first reflector 122, an embodiment of the present application is to use multiple first adjustment members 125 for cooperation, and the specific number of the first adjustment members 125 is greater than or equal to three, and the multiple first adjustment members 125 are not collinearly distributed. The embodiment of the present application takes the use of three first adjustment members 125 as an example, and the three first adjustment members 125 are distributed at the three vertices of a triangle, and the fixing seat of the first reflector 122 is in a plate shape as an example, and the three first adjustment members 125 are in contact with one side plate surface of the fixing seat as an example, and a plane is determined according to the three points, so that the three first adjustment members 125 can adjust the plate surface deflection of the fixing seat of the first reflector 122.

[0044] Another embodiment of the present application is to use two first adjustment members 125 in combination with a fulcrum setting. In the embodiment of the present application, a supporting ball is used as the fulcrum, that is, a spherical body or a partial sphere. The supporting ball is set between the first mounting portion 1211 and the fixing seat of the first reflector 122, so that the fixing seat of the first reflector 122 abuts against the spherical surface of the supporting ball. The supporting ball can be fixed to the first mounting portion 1211, or can be fixedly constrained between the first mounting portion 1211 and the fixing seat of the first reflector 122. Of course, the two first adjustment members 125 and the supporting ball are also distributed in a triangle with three vertices. In this way, when any first adjustment member 125 is adjusted to abut against the movement of the first reflector 122, the board surface deflection of the fixing seat of the first reflector 122 can be adjusted.

[0045] It should be noted that, in the above-mentioned embodiment, the abutting end of the first adjusting member 125 and the first reflector 122 is also set as a spherical surface. When adjusting the deflection angle of the first reflector 122 relative to the first mounting portion 1211, the smooth structure of the spherical surface can have little obstruction to the deflection process of the first reflector 122 and low friction, which is conducive to accurate feedback during adjustment.

[0046] See also Figure 3 Furthermore, in the embodiment of the present application, the angle adjustment direction of the first reflector 122 is taken as an example along the arc direction of the angle between the first mounting portion 1211 and the second mounting portion 1212, and the direction perpendicular to the angle between the first reflector 122 and the second reflector 123 is specifically defined as the first direction, which is denoted as X. The two first adjustment members 125 in any of the above embodiments are arranged at intervals along the first direction, and the support ball or the other first adjustment member 125 is equidistant from the corresponding other two first adjustment members 125, which can be understood as a three-point distribution forming an isosceles triangle. Therefore, by adjusting the two first adjustment members 125 arranged at intervals along the first direction to push against the first reflector 122 to deflect, the angle between the first reflector 122 and the second reflector 123 can be adjusted along the arc direction of the angle between the first mounting portion 1211 and the second mounting portion 1212.

[0047] See also Figure 4Specifically, the reflective assembly 12 in any of the above embodiments may further include a first elastic member 127, which is arranged between the first reflective member 122 and the first mounting portion 1211, and the elastic ends of the first elastic member 127 respectively abut against the first reflective member 122 and the first mounting portion 1211.

[0048] The first elastic member 127 is arranged between the first reflector 122 and the first mounting portion 1211 and is in an elastically expanded state to apply an elastic thrust to the first reflector 122 and the first mounting portion 1211. The first elastic member 127 cooperates with the first adjusting member 125 and the first connecting member 124. When the first connecting member 124 is in a loosely connected state, the elastic force of the first elastic member 127 maintains the first reflector 122 and the first mounting portion 1211 in a relatively adjustable state and can maintain the current relatively fixed state when the adjustment stops. Such an arrangement can enable the first reflector 122 to be in a state that can respond to the adjustment action during the adjustment process of the first adjusting member 125.

[0049] The first elastic member 127 may be any component that satisfies the elastic function required by the embodiment of the present application, such as a spring, a spring or other elastic structure. The embodiment of the present application takes a spring as an example.

[0050] It should also be noted that the number of first connecting members 124 in the embodiment of the present application is no less than three. Specifically, taking four as an example, the four first connecting members 124 are distributed at four points in a quadrilateral, providing a stable connection for the first reflective member 122. The springs are also set as an example, with four springs each being sleeved on a first connecting member 124. This can not only optimize the installation space, but also help improve the installation stability of the springs.

[0051] See also Figures 2 to 4 Furthermore, regarding the adjustable setting of the second reflector 123 and the second mounting portion 1212, the setting of the embodiment of the present application is:

[0052] The reflective assembly 12 may further include a second connecting piece 128 and two second adjusting pieces 129, the second connecting piece 128 may be loosely connected to the second reflective element 123 and the second mounting portion 1212; the two second adjusting pieces 129 are threadedly matched with the second mounting portion 1212, and each second adjusting piece 129 moves relative to the second mounting portion 1212 in a direction close to or away from the second reflective element 123 by rotation, and one end of each second adjusting piece 129 along the corresponding movable direction abuts against the second reflective element 123; the reflective assembly 12 may further include a second supporting ball 121a, the second supporting ball 121a is arranged between the second mounting portion 1212 and the second reflective element 123, the second supporting ball 121a abuts against the second mounting portion 1212 and the second reflective element 123, the two second adjusting pieces 129 and the second supporting balls 121a are distributed corresponding to the three vertices of the triangle, and ... The sections 129 are arranged at intervals along the first direction; the reflective assembly 12 may further include a second elastic member 121b, which is arranged between the second reflective member 123 and the second mounting portion 1212, and the elastic ends of the second elastic member 121b respectively abut against the second reflective member 123 and the second mounting portion 1212; when the second connecting member 128 is loosely connected to the second reflective member 123 and the second mounting portion 1212, the second reflective member 123 and the second mounting portion 1212 can move relative to each other, and the second adjusting member 129 is controlled to move to abut against the second reflective member 123 to deflect relative to the second mounting portion 1212, so as to adjust the angle between the reflective surface of the second reflective member 123 and the reflective surface of the first reflective member 122, and then the second connecting member 128 is fastened to the second reflective member 123 and the second mounting portion 1212 to fix the current state of the second reflective member 123.

[0053] For the specific configuration of the second connecting member 128 , the second adjusting member 129 and the second reflective member 123 , reference may be made to the configuration of the first connecting member 124 , the first adjusting member 125 and the first reflective member 122 in the above embodiment, and no further details will be given.

[0054] See also Figure 5 The present embodiment further provides a laser processing device 20, comprising a laser 21 and the laser modulation mechanism 10 of any of the above embodiments. The laser light emitted by the laser 21 is directed to a first reflector 122. The laser light is reflected by the first reflector 122 to a spatial light modulator 13, and then modulated by the spatial light modulator 13 and reflected to a second reflector 123. Of course, the laser processing device 20 of the present embodiment may also include other optical components, such as a beam expander, a focusing lens, and the like.

[0055] The laser processing device 20 of the embodiment of the present application includes the laser modulation mechanism 10 in any of the above embodiments, and thus has the beneficial effects brought by the laser modulation mechanism 10 in any of the above embodiments, which will not be described in detail here.

[0056] The above description is only a preferred embodiment of the present application and is not intended to limit the present application. Any modifications, equivalent replacements and improvements made within the spirit and principles of the present application should be included in the scope of protection of the present application.

Claims

1. A laser modulation mechanism, characterized in that: include: Mounting seat; A reflective assembly, the reflective assembly comprising a mounting frame, the mounting frame being disposed on the mounting seat; The reflective assembly further includes a first reflector and a second reflector, wherein the first reflector and / or the second reflector are adjustably mounted on the mounting frame, a reflective surface of the first reflector and a reflective surface of the second reflector form an angle, and the angle between the reflective surface of the first reflector and the reflective surface of the second reflector can be adjusted by adjusting the first reflector and / or the second reflector; as well as A spatial light modulator is disposed on the mounting base, wherein the laser light is reflected by the first reflector to the spatial light modulator, and then modulated by the spatial light modulator and reflected to the second reflector; or, The laser light is reflected by the second reflector to the spatial light modulator, and then modulated by the spatial light modulator and reflected to the first reflector.

2. The laser modulation mechanism according to claim 1, characterized in that: The mounting frame includes a first mounting portion and a second mounting portion, the first mounting portion and the second mounting portion are connected at a preset angle and are arranged on the mounting seat, the first reflector can be adjusted to be arranged on the first mounting portion, and the second reflector can be adjusted to be arranged on the second mounting portion.

3. The laser modulation mechanism according to claim 2, characterized in that: The reflective assembly further includes a first connecting member, which can loosely or tightly connect the first reflective member and the first mounting portion; The reflective assembly further includes a first adjusting member, the first adjusting member being movably disposed on the first mounting portion in a direction approaching or away from the first reflective member, and one end of the first adjusting member in a corresponding movable direction abuts against the first reflective member; When the first connecting member is loosely connected to the first reflector and the first mounting portion, the first reflector and the first mounting portion can move relative to each other. The first adjusting member is controlled to move to push the first reflector against the first mounting portion so as to deflect, thereby adjusting the angle between the reflective surface of the first reflector and the reflective surface of the second reflector. Then, the first connecting member is fastened to connect the first reflector and the first mounting portion so as to fix the current state of the first reflector.

4. The laser modulation mechanism according to claim 3, characterized in that: The first adjusting member is threadedly engaged with the first mounting portion, and the first adjusting member is moved relative to the first mounting portion by rotating.

5. The laser modulation mechanism according to claim 3, characterized in that: There are two first adjusting members, and the reflective assembly also includes a first support ball, which is arranged between the first mounting portion and the first reflective member. The first support ball is in contact with both the first mounting portion and the first reflective member, and the two first adjusting members and the first support ball correspond to the three vertices of the triangle.

6. The laser modulation mechanism according to claim 5, characterized in that: A direction perpendicular to the angle between the first reflector and the second reflector is defined as a first direction, and the two first adjusting members are spaced apart along the first direction.

7. The laser modulation mechanism according to claim 3, characterized in that: There are at least three first adjusting members, and the at least three first adjusting members are not collinearly distributed.

8. The laser modulation mechanism according to any one of claims 3 to 7, characterized in that: The reflective assembly further includes a first elastic member, which is disposed between the first reflective member and the first mounting portion, and whose elastic ends respectively abut against the first reflective member and the first mounting portion.

9. The laser modulation mechanism according to claim 6, wherein: The reflective assembly further includes a second connecting member, which can loosely or tightly connect the second reflective member and the second mounting portion; The reflective assembly further includes two second adjusting members, both of which are threadedly engaged with the second mounting portion. Each of the second adjusting members is movable relative to the second mounting portion in a direction toward or away from the second reflective member by rotation, and one end of each of the second adjusting members along the corresponding movable direction abuts against the second reflective member. The reflective assembly further includes a second support ball, the second support ball being disposed between the second mounting portion and the second reflective element, the second support ball being in contact with both the second mounting portion and the second reflective element, the two second adjustment members being distributed at three vertices of a triangle corresponding to the second support ball, and the two second adjustment members being spaced apart along the first direction; The reflective assembly further includes a second elastic member, the second elastic member is disposed between the second reflective member and the second mounting portion, and elastic ends of the second elastic member are respectively in contact with the second reflective member and the second mounting portion; When the second connecting member is loosely connected to the second reflector and the second mounting portion, the second reflector and the second mounting portion can move relative to each other. The second adjusting member is controlled to move to push the second reflector against the second mounting portion so as to deflect the second reflector, thereby adjusting the angle between the reflective surface of the second reflector and the reflective surface of the first reflector. Then, the second connecting member is fastened to connect the second reflector and the second mounting portion to fix the current state of the second reflector.

10. A laser processing device, characterized in that: The laser processing device includes a laser and a laser modulation mechanism as described in any one of claims 1 to 9. The laser emitted by the laser is directed to the first reflector, and the laser is reflected by the first reflector to the spatial light modulator, and then modulated by the spatial light modulator and reflected to the second reflector.

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