Adjusting device and laser processing equipment

Abstract

The utility model belongs to the technical field of acousto-optic modulators, and particularly relates to an adjusting device and laser processing equipment. The adjusting device comprises a modulation module, an adjusting piece, an adapter and a base. The modulation module is installed on the adapter, the adapter can be rotatably connected with the base around an axis, and the adapter is located between the modulation module and the base; the adjusting part is installed on the base, one end of the adjusting part abuts against the adapter, the adjusting part can move in the first direction and drive the adapter and the modulation module to rotate around the axis, the incident angle of the laser beam on the modulation module can be adjusted along with rotation of the modulation module, and in the adjusting process, the incident angle of the laser beam is adjusted. The linear motion of the adjusting part in the first direction is converted into the rotary motion of the modulation module, so that the incident angle of the laser beam is adjusted, the adjusting process is simple, quick response is easy, the adjusting process is more efficient, and the needed incident angle can be achieved more quickly.

Description

Technical Field

[0001] The utility model belongs to the technical field of acousto-optic modulators, in particular to an adjusting device and laser processing equipment. Background Art

[0002] An acousto-optic modulator (AOM) is an optical device that utilizes Raman-Nyss diffraction or Bragg diffraction of a crystal. When using an AOM, it is necessary to ensure that the laser beam is incident at the Bragg angle to maximize the energy of the outgoing first-order diffracted beam.

[0003] However, the adjustment efficiency of the current AOM adjustment device is slow and cannot quickly and accurately adjust the incident angle to the Bragg angle. Utility Model Content

[0004] The technical problem to be solved by the utility model is: to provide an adjustment device and laser processing equipment for the problem that the adjustment efficiency of the existing acousto-optic modulator adjustment device is slow.

[0005] In order to solve the above technical problems, on the one hand, the embodiment of the present utility model provides an adjustment device, including a modulation module, an adjustment member, an adapter and a base;

[0006] The modulation module is mounted on the adapter, and the adapter is rotatable around an axis and connected to the base, and the modulation module is used to diffract the laser beam;

[0007] The adjusting member is mounted on the base, one end of the adjusting member abuts against the adapter, and the adjusting member is capable of moving along a first direction to drive the adapter and the modulation module to rotate around the axis, thereby adjusting the incident angle of the laser beam incident on the modulation module;

[0008] The extending direction of the axis is not parallel to and does not coincide with the first direction.

[0009] Optionally, the adjusting member includes a knob and a screw, the screw is threadedly connected to the base, one end of the screw abuts against the adapter, and the other end of the screw is connected to the knob, and the screw can be driven to move along the first direction by rotating the knob.

[0010] Optionally, the adjustment device further includes a first positioning pin, the first positioning pin is connected between the adapter and the base, and the central axis of the first positioning pin coincides with the axis.

[0011] Optionally, the adapter seat includes a mounting plate and an adapter plate, the adapter plate is located between the mounting plate and the base, the modulation module is mounted on the mounting plate, the mounting plate is mounted on the adapter plate, and one end of the adjustment member abuts against the adapter plate;

[0012] A first positioning hole is provided on the adapter plate, and a second positioning hole is provided on the base. One end of the first positioning pin is loosely fitted in the first positioning hole, and the other end of the first positioning pin is provided in the second positioning hole.

[0013] Optionally, the adapter further includes a second positioning pin and a third positioning pin, the second positioning pin is arranged on a side of the mounting plate facing the modulation module, the modulation module is provided with a third positioning hole, and the second positioning pin is passed through the third positioning hole;

[0014] A fourth positioning hole is provided on the adapter plate, the third positioning pin is provided on a side of the mounting plate facing the adapter plate, and the third positioning pin passes through the fourth positioning hole.

[0015] Optionally, the central axis of the first positioning pin, the central axis of the second positioning pin, and the central axis of the third positioning pin coincide with each other.

[0016] Optionally, the mounting plate includes a main body and a plurality of mounting portions, the plurality of mounting portions are arranged around an outer edge of the main body, and the mounting portions protrude from the modulation module in the first direction;

[0017] The main body is connected to the modulation module, and the mounting portion is connected to the adapter plate.

[0018] Optionally, in the first direction, a surface of one side of the adapter plate close to the adjusting member is an arc surface.

[0019] Optionally, an arcuate groove is provided on the adapter plate, a fixing piece is detachably connected to the base, an end of the fixing piece away from the base is provided in the arcuate groove, and the fixing piece can move along the arcuate groove when the adapter seat rotates.

[0020] Optionally, the adjustment device further comprises an elastic member, one end of the elastic member is connected to the adapter seat, and the other end of the elastic member is connected to the base;

[0021] The elastic member is used to drive the adapter and the modulation module to rotate around the axis. The rotation direction of the adapter driven by the elastic member is a first rotation direction, and the rotation direction of the adapter driven by the adjustment member is a second rotation direction. The first rotation direction is opposite to the second rotation direction.

[0022] Optionally, the base includes a base body, a first boss and a second boss, the first boss and the second boss are provided on the base body, the first boss abuts against the adapter in the first direction, the adjusting member is mounted on the first boss, and the other end of the elastic member is connected to the first boss;

[0023] The second boss abuts against the adapter seat in the extending direction of the axis.

[0024] On the other hand, an embodiment of the present invention provides a laser processing device, including a laser, a galvanometer assembly and an adjustment device as described above, wherein the laser is used to emit a laser beam to the modulation module, and the diffraction beam emitted by the modulation module passes through the galvanometer assembly and performs laser processing on the workpiece.

[0025] The adjustment device provided by the embodiment of the present invention can drive the adapter to rotate around the axis by moving the adjustment member in the first direction. The modulation module is installed on the adapter and can rotate around the axis along with the adapter, thereby enabling the modulation module to be adjusted at multiple angles. The incident direction of the laser beam remains unchanged. As the modulation module rotates, the incident angle of the laser beam on the modulation module changes. When the incident angle of the laser beam is adjusted to the Bragg angle, the first-order diffraction light energy of the laser beam emitted through the modulation module is maximized. During the adjustment process, the linear motion of the adjustment member in the first direction is converted into the rotational motion of the modulation module, thereby achieving the adjustment of the incident angle of the laser beam. The adjustment process is simple and easy to respond quickly, making the adjustment process more efficient and able to achieve the desired incident angle more quickly. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 It is a schematic diagram of an adjustment device provided by an embodiment of the present utility model;

[0027] Figure 2 It is a top view of an adjusting device provided in one embodiment of the present utility model.

[0028] The reference numerals in the specification are as follows:

[0029] 1. Modulation module; 2. Adjustment member; 21. Knob; 22. Screw; 3. Adapter; 31. Mounting plate; 311. Main body; 312. Mounting portion; 32. Adapter plate; 321. First positioning hole; 322. Fourth positioning hole; 323. Arc groove; 33. Second positioning pin; 34. Third positioning pin; 4. Base; 41. Fixing member; 42. Base body; 43. First boss; 44. Second boss; 5. First positioning pin; 6. Elastic member;

[0030] a. The first direction. DETAILED DESCRIPTION

[0031] In order to make the technical problems, technical solutions and beneficial effects solved by the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.

[0032] like Figures 1 to 2 As shown, an adjustment device provided by one embodiment of the present invention includes a modulation module 1, an adjustment member 2, an adapter 3 and a base 4. The modulation module 1 is mounted on the adapter 3, which is rotatably connected to the base 4 around an axis, and the adapter 3 is located between the modulation module 1 and the base 4.

[0033] The adjusting member 2 is mounted on the base 4, with one end of the adjusting member 2 abutting against the adapter 3. The adjusting member 2 can move along a first direction a to drive the adapter 3 and the modulation module 1 to rotate about an axis, thereby adjusting the incident angle of the laser beam incident on the modulation module 1. The extending direction of the axis is non-parallel to and does not coincide with the first direction a.

[0034] In this embodiment, the movement of the adjusting member 2 in the first direction a can drive the adapter 3 to rotate around the axis. The modulation module 1 is mounted on the adapter 3 and can rotate around the axis along with the adapter 3, thereby enabling adjustment of multiple angles of the modulation module 1 and adapting to different processing requirements. The incident direction of the laser beam remains unchanged. As the modulation module 1 rotates, the incident angle of the laser beam on the modulation module 1 changes. When the incident angle of the laser beam is adjusted to the Bragg angle, the first-order diffraction light energy of the laser beam emitted by the modulation module 1 is maximized. During the adjustment process, the linear motion of the adjusting member 2 in the first direction a is converted into the rotational motion of the modulation module 1, thereby achieving adjustment of the incident angle of the laser beam. The adjustment process is simple and easy to respond quickly, making the adjustment process more efficient and able to achieve the desired incident angle more quickly.

[0035] Modulation module 1 is an AOM modulation module, which can diffract the laser beam. The extension direction of the axis is Figure 1 In the vertical direction, the extension direction of the axis is perpendicular to the first direction a. By operating the adjustment member 2 to rotate, the adapter 3 and the modulation module 1 can be driven to rotate on the horizontal plane around the vertical axis, which makes it easier for the operator to find the Bragg angle faster and better.

[0036] In one embodiment, if Figure 2As shown, the adjustment member 2 includes a knob 21 and a screw 22. The screw 22 is threadedly connected to the base 4. The base 4 provides stable support for the screw 22, ensuring that the screw 22 does not bend or shake during movement, thereby ensuring the accuracy and stability of the adjustment. One end of the screw 22 abuts against the adapter 3, and the other end of the screw 22 is connected to the knob 21. By rotating the knob 21, the screw 22 can be driven to move along the first direction a, thereby converting the rotational motion of the knob 21 into linear motion of the screw 22. By rotating the knob 21, the movement distance of the screw 22 along the first direction a can be precisely controlled, thereby achieving precise adjustment of the adapter 3 and the modulation module 1, and then achieving precise adjustment of the incident angle, which can improve the adjustment efficiency.

[0037] In one embodiment, if Figure 1 As shown, the adjustment device also includes a first locating pin 5, which is connected between the adapter 3 and the base 4. The central axis of the first locating pin 5 coincides with the axis. The first locating pin 5 enables relative rotation between the adapter 3 and the base 4, providing a precise positioning reference, capable of positioning the relative position of the adapter 3 and the base 4, thereby ensuring the installation position of the adjustment module and maintaining the stability of the rotation axis of the adapter 3.

[0038] Among them, the first positioning pin 5 is a positioning pin.

[0039] In one embodiment, if Figure 1 As shown, the adapter seat 3 includes a mounting plate 31 and an adapter plate 32. The adapter plate 32 is located between the mounting plate 31 and the base 4 in the direction of the axis. The modulation module 1 is mounted on the mounting plate 31, and the mounting plate 31 is mounted on the adapter plate 32. One end of the adjustment member 2 abuts against the adapter plate 32. By dividing the adapter seat 3 into two layers, the mounting plate 31 and the adapter plate 32, the installation and removal of the modulation module 1 are more convenient. The mounting plate 31 can be assembled separately with the modulation module 1 and then installed on the adapter plate 32. When the modulation module 1 needs to be maintained or replaced, only the mounting plate 31 needs to be removed, without having to disassemble the entire adapter seat 3.

[0040] A first positioning hole 321 is provided on the adapter plate 32, and a second positioning hole (not shown in the figure) is provided on the base 4. One end of the first positioning pin 5 is clearance-matched with the first positioning hole 321, and the other end of the first positioning pin 5 is provided in the second positioning hole. Through the clearance fit between the first positioning pin 5 and the first positioning hole 321, when the adjusting member 2 moves along the first direction a, the adapter plate 32 can rotate around the central axis of the first positioning pin 5, and then realize the rotation of the modulation module 1 through the mounting plate 31. During the rotation process, the first positioning pin 5 can ensure that the relative position of the adapter plate 32 and the base 4 is stable, thereby avoiding shaking and deviation of the adapter seat 3.

[0041] The other end of the first positioning pin 5 is clearance-fitted with the second positioning hole, or the other end of the first positioning pin 5 is interference-fitted with the second positioning hole.

[0042] In one embodiment, if Figure 1 As shown, the adapter 3 also includes a second positioning pin 33 and a third positioning pin 34. The second positioning pin 33 is arranged on the side of the mounting plate 31 facing the modulation module 1. The modulation module 1 is provided with a third positioning hole. The second positioning pin 33 is passed through the third positioning hole. The cooperation between the second positioning pin 33 and the third positioning hole can provide precise positioning when installing the modulation module 1, ensuring that the position of the modulation module 1 on the mounting plate 31 is accurate.

[0043] The adapter plate 32 is provided with a fourth positioning hole 322. A third positioning pin 34 is provided on the side of the mounting plate 31 facing the adapter plate 32. The third positioning pin 34 is inserted into the fourth positioning hole 322. The cooperation between the third positioning pin 34 and the fourth positioning hole 322 provides accurate positioning during installation between the mounting plate 31 and the adapter plate 32, ensuring that the mounting plate 31 is fixed and accurately positioned on the adapter plate 32.

[0044] During the installation process, the modulation module 1 and the mounting plate 31 are positioned by the second positioning pin 33 and then fixed by screws, and the mounting plate 31 and the adapter plate 32 are positioned by the third positioning pin 34 and then fixed by screws. This positioning and installation method does not require the use of complex tools or tedious adjustments, which greatly improves the installation efficiency.

[0045] Preferably, the second positioning pin 33 is loosely fitted with the third positioning hole, and the third positioning pin 34 is loosely fitted with the fourth positioning hole 322 .

[0046] In one embodiment, the second positioning pin 33 and the third positioning pin 34 are an integrated structure, and a positioning pin is passed through the mounting plate 31. In the extension direction of the axis, the part of the positioning pin protruding from the upper surface of the mounting plate 31 is the second positioning pin 33, and the part of the positioning pin protruding from the lower surface of the mounting plate 31 is the third positioning pin 34.

[0047] In one embodiment, a through hole is provided on the adapter plate 32, and the through hole passes through the adapter plate 32 along the extension direction of the axis. The first positioning hole 321 and the fourth positioning hole 322 are connected to form the through hole. During positioning, one end of the first positioning pin 5 is inserted into the lower part of the through hole, and the third positioning pin 34 is inserted into the upper part of the through hole.

[0048] In one embodiment, the central axis of the first locating pin 5, the central axis of the second locating pin 33, and the central axis of the third locating pin 34 coincide with each other. The central axis of the first locating pin 5 coincides with the axis, that is, the central axis of the first locating pin 5, the central axis of the second locating pin 33, and the central axis of the third locating pin 34 all coincide with the axis. This makes the relative positions of the various components of the entire adapter 3 more accurate, further improves the positioning accuracy, and provides a more precise rotation center for the rotation of the adapter 3.

[0049] During the adjustment process, the adapter 3 rotates around its axis, ensuring rotational stability and precision. When fine-tuning the laser beam's incident angle, the adapter 3 can be adjusted accurately each time, avoiding incident angle errors caused by a shift in the rotation center and improving processing quality and efficiency.

[0050] In one embodiment, if Figure 1 、 Figure 2 As shown, the mounting plate 31 includes a main body 311 and multiple mounting portions 312. The multiple mounting portions 312 are arranged around the outer edge of the main body 311. The mounting portions 312 protrude from the modulation module 1 in the first direction a. The main body 311 is connected to the modulation module 1, and the mounting portions 312 are connected to the adapter plate 32. A second locating pin 33 and a third locating pin 34 are provided on the main body 311. After the second locating pin 33 is inserted into the third locating hole, the main body 311 and the modulation module 1 are fixed together using screws. Next, the third locating pin 34 is inserted into the fourth locating hole 322, and the mounting portion 312 is fixed to the adapter plate 32 using screws.

[0051] Since the mounting portion 312 protrudes from the modulation module 1 in the first direction a, when the modulation module 1 needs to be maintained or replaced and the mounting plate 31 is disassembled, the mounting portion 312 is not blocked or interfered with by the modulation module 1, making it easier to disassemble and install the mounting plate 31, thereby making the installation and disassembly of the modulation module 1 more convenient.

[0052] The mounting portions 312 are disposed on two opposite sides of the main body portion 311 in the first direction a to ensure the connection stability between the mounting plate 31 and the adapter plate 32 .

[0053] In one embodiment, in the first direction a, the surface of the adapter plate 32 on one side near the adjusting member 2 is an arcuate surface. During the rotation of the adapter base 3, the arcuate surface better adapts to the motion trajectory of the adapter plate 32, thereby reducing the space on the adjusting device for the adapter plate 32 to rotate, helping to optimize the spatial layout without increasing the overall size of the adjusting device.

[0054] In one embodiment, if Figure 2As shown, an arc groove 323 is provided on the adapter plate 32, and a fixing part 41 is detachably connected to the base 4. The end of the fixing part 41 away from the base 4 is set in the arc groove 323, and the fixing part 41 can move along the arc groove 323 when the adapter 3 rotates. When the incident angle of the laser beam is adjusted, the fixing part 41 is loosened, and the adapter 3 rotates around the axis under the drive of the adjusting part 2 until the incident angle of the laser beam reaches the Bragg angle. The adapter 3 stops rotating and the fixing part 41 is tightened to keep the position of the adapter 3 and the modulation module 1 on the adapter 3 fixed.

[0055] During the rotation process, the arc-shaped groove 323 can limit the rotation range of the adapter 3 , and the cooperation between the fixing member 41 and the arc-shaped groove 323 can guide the rotation of the adapter 3 to a certain extent.

[0056] The fixing member 41 is a fixing screw or a fixing bolt, and the fixing member 41 passes through the arc groove 323 and is threadedly connected to the base 4 .

[0057] In one embodiment, in the first direction a, arc-shaped grooves 323 and fixing members 41 are provided on opposite sides of the adapter plate 32 to ensure the connection stability of the adapter base 3 .

[0058] In one embodiment, if Figure 1 、 Figure 2 As shown, the adjustment device also includes an elastic member 6, one end of the elastic member 6 is connected to the adapter 3, and the other end of the elastic member 6 is connected to the base 4. The elastic member 6 is used to drive the adapter 3 and the modulation module 1 to rotate around the axis. The rotation direction of the adapter 3 driven by the elastic member 6 is a first rotation direction, and the rotation direction of the adapter 3 driven by the adjustment member 2 is a second rotation direction. The first rotation direction is opposite to the second rotation direction.

[0059] The elastic member 6 and the adjusting member 2 are arranged on the same side of the adapter plate 32 in the first direction a. The elastic member 6 can provide a pulling force so that the adapter plate 32 has a tendency to rotate around the axis.

[0060] Specifically, the adjusting member 2 abuts against the adapter plate 32, and the adjusting member 2 moves along the first direction a, which can drive the adapter seat 3 to move along the first direction a. Figure 2 The second rotation direction is counterclockwise. The elastic member 6 is a tension spring with a pulling force, so that the adapter 3 has a Figure 2The first rotation direction is clockwise. During adjustment of the laser beam incident angle, the adjusting member 2 moves toward the adapter 3 along the first direction a, pushing the adapter 3 to rotate counterclockwise about its axis. The adjusting member 2 moves away from the adapter 3 along the first direction a. Under the pulling force of the elastic member 6, the elastic member 6 drives the adapter 3 to rotate clockwise about its axis, thereby achieving precise adjustment of the adapter 3 and ensuring precise adjustment of the incident angle on the modulation module 1.

[0061] In one embodiment, if Figure 1 As shown, the base 4 includes a base body 42, a first boss 43 and a second boss 44. The first boss 43 and the second boss 44 are arranged on the base body 42. The first boss 43 abuts against the adapter seat 3 in the first direction a. The adjusting member 2 is installed on the first boss 43. The other end of the elastic member 6 is connected to the first boss 43. Specifically, the arcuate surface of the adapter plate 32 abuts against the first boss 43. During the rotation of the adapter plate 32, the arcuate surface and the surface of the first boss 43 remain tangent. The first boss 43 will not interfere with the rotation of the adapter plate 32. Compared with adapter plates 32 of other shapes, the adapter plate 32 in this embodiment occupies a smaller space when rotating.

[0062] The second boss 44 abuts against the adapter seat 3 in the extension direction of the axis. In the extension direction of the axis, the projection area of ​​the second boss 44 is smaller than the projection area of ​​the base body 42, so that when the adapter plate 32 and the base 4 are installed, the contact area between the adapter plate 32 and the base 4 is the second boss 44. This makes it possible to separately process the parallelism of the second boss 44 when processing the base 4. Since the size of the second boss 44 is relatively small, the processing difficulty and precision requirements are relatively low, and it is easier to meet the parallelism requirements and processing precision of the base 4.

[0063] On the other hand, an embodiment of the present invention provides a laser processing device, including a laser, a galvanometer assembly and the adjustment device of the above embodiment, the laser is used to emit a laser beam to the modulation module 1, the modulation module 1 diffracts the laser beam, and the diffracted light beam emitted by the modulation module 1 passes through the galvanometer assembly to perform laser processing on the workpiece.

[0064] In one embodiment, the laser processing equipment is a laser drilling machine, a cutting machine, etc.

[0065] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent replacements and improvements made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A regulating device, characterized in that: Including modulation module, adjustment part, adapter and base; The modulation module is mounted on the adapter, the adapter is connected to the base by rotating around an axis, and the modulation module is used to diffract the laser beam; The adjusting member is mounted on the base, one end of the adjusting member abuts against the adapter, and the adjusting member is capable of moving along a first direction to drive the adapter and the modulation module to rotate around the axis, thereby adjusting the incident angle of the laser beam incident on the modulation module; The extending direction of the axis is not parallel to and does not coincide with the first direction.

2. The adjustment device according to claim 1, characterized in that The adjusting member includes a knob and a screw, the screw is threadedly connected to the base, one end of the screw abuts against the adapter, and the other end of the screw is connected to the knob. The screw can be driven to move along the first direction by rotating the knob.

3. The adjustment device according to claim 1, characterized in that The adjusting device further includes a first positioning pin connected between the adapter and the base, and a central axis of the first positioning pin coincides with the axis.

4. The adjustment device according to claim 3, characterized in that The adapter seat includes a mounting plate and an adapter plate, the adapter plate is located between the mounting plate and the base, the modulation module is mounted on the mounting plate, the mounting plate is mounted on the adapter plate, and one end of the adjustment member abuts against the adapter plate; A first positioning hole is provided on the adapter plate, and a second positioning hole is provided on the base. One end of the first positioning pin is loosely fitted in the first positioning hole, and the other end of the first positioning pin is provided in the second positioning hole.

5. The adjustment device according to claim 4, characterized in that The adapter further includes a second positioning pin and a third positioning pin, wherein the second positioning pin is arranged on a side of the mounting plate facing the modulation module, the modulation module is provided with a third positioning hole, and the second positioning pin is passed through the third positioning hole; A fourth positioning hole is provided on the adapter plate, the third positioning pin is provided on a side of the mounting plate facing the adapter plate, and the third positioning pin passes through the fourth positioning hole.

6. The adjustment device according to claim 5, characterized in that The central axis of the first positioning pin, the central axis of the second positioning pin, and the central axis of the third positioning pin coincide with each other.

7. The adjustment device according to claim 4, characterized in that The mounting plate includes a main body and a plurality of mounting portions, the plurality of mounting portions are arranged around an outer edge of the main body, and the mounting portions protrude from the modulation module in the first direction; The main body is connected to the modulation module, and the mounting portion is connected to the adapter plate.

8. The adjustment device according to claim 4, characterized in that In the first direction, a surface of one side of the adapter plate close to the adjusting member is an arc surface.

9. The adjustment device according to claim 4, characterized in that An arc groove is provided on the adapter plate, and a fixing piece is detachably connected to the base. One end of the fixing piece away from the base is provided in the arc groove, and the fixing piece can move along the arc groove when the adapter seat rotates.

10. The regulating device according to any one of claims 1 to 9, characterized in that: The adjusting device further comprises an elastic member, one end of which is connected to the adapter, and the other end of which is connected to the base; The elastic member is used to drive the adapter and the modulation module to rotate around the axis. The rotation direction of the adapter driven by the elastic member is a first rotation direction, and the rotation direction of the adapter driven by the adjustment member is a second rotation direction. The first rotation direction is opposite to the second rotation direction.

11. The adjustment device according to claim 10, characterized in that The base includes a base body, a first boss and a second boss, the first boss and the second boss are arranged on the base body, the first boss abuts against the adapter in the first direction, the adjusting member is mounted on the first boss, and the other end of the elastic member is connected to the first boss; The second boss abuts against the adapter seat in the extending direction of the axis.

12. A laser processing device, characterized in that: It comprises a laser, a galvanometer assembly and the adjustment device according to any one of claims 1 to 11, wherein the laser is used to emit a laser beam to the modulation module, and the diffraction beam emitted by the modulation module passes through the galvanometer assembly and performs laser processing on the workpiece.

Images