Vertical positioning device for silicon single crystal rod

Abstract

The utility model discloses a silicon single crystal rod vertical positioning device which comprises a base and a fixing seat, the fixing seat is arranged on the front side of the upper end of the base, a clamp is arranged at the upper end of the fixing seat, two arc-shaped plates are arranged on the upper side of the fixing seat, fixing grooves are formed in the left side and the right side of the upper end of the base, and fixing rods are arranged between the inner walls of the two fixing grooves and the arc-shaped plates. The two fixing rods are fixed to the inner wall of the fixing groove through rotating shafts and can rotate in the fixing groove through the rotating shafts to drive the arc-shaped plate to be opened and closed, a connecting block is arranged on the right side of the fixing groove, a supporting rod is arranged on the inner wall of the connecting block, and a clamping groove is formed in the outer wall of each fixing rod and used for clamping and fixing the corresponding supporting rod. The supporting rods are clamped in the clamping grooves, so that the fixing rods can be prevented from loosening, the fixing rods are reinforced, the silicon single crystal rods can be fixed by the arc-shaped plates when deviating and inclining, and the silicon single crystal rods are prevented from inclining and falling off due to fixing loosening.

Description

Technical Field

[0001] The utility model belongs to the technical field related to single crystal silicon rod positioning, and particularly relates to a single crystal silicon rod vertical positioning device. Background Art

[0002] The single crystal silicon rod vertical positioning device is a device used to locate and detect the position and angle of the single crystal silicon rod in the vertical direction. In semiconductor manufacturing, crystal silicon rods are used to manufacture transistors and other devices, so the accuracy of their vertical positioning is crucial to the production process. However, the single crystal silicon rod is usually fixed by clamping it up and down. After placing the single crystal silicon rod on the upper end of the fixed seat, the staff needs to use hand support to wait for the pressure plate to press down to fix the single crystal silicon rod. If the pressure plate is loose during the detection and rotation of the single crystal silicon rod, the single crystal silicon rod will deviate, causing it to tilt and fall, thereby causing losses. Utility Model Content

[0003] The purpose of the present utility model is to provide a device for vertically positioning a single crystal silicon rod, so as to solve the problem proposed in the above background technology that the single crystal silicon rod is usually fixed by clamping the upper and lower parts, and after the single crystal silicon rod is placed on the upper end of the fixing seat, the staff needs to use the hand-supporting method to wait for the pressure plate to press down to fix the single crystal silicon rod, and if the pressure plate becomes loose during the detection and rotation of the single crystal silicon rod, the single crystal silicon rod will deviate and tilt and fall, thereby causing loss.

[0004] To achieve the above-mentioned purpose, the present utility model provides the following technical solutions: a single crystal silicon rod vertical positioning device, comprising a base and a fixing seat;

[0005] A fixing seat is provided on the front side of the upper end of the base, a clamp is provided on the upper end of the fixing seat, and two arc-shaped plates are provided on the upper side of the fixing seat;

[0006] Fixed grooves are provided on the left and right sides of the upper end of the base, and fixed rods are provided between the inner walls of the two fixed grooves and the curved plate. The two fixed rods are fixed to the inner walls of the fixed grooves through rotating shafts. The two fixed rods can rotate in the fixed grooves through the rotating shafts to drive the curved plate to open and close.

[0007] Preferably, a connecting block is provided on the right side of the fixing groove, a support rod is provided on the inner wall of the connecting block, and a clamping groove is provided on the outer wall of the fixing rod, and the clamping groove is used to clamp and fix the support rod.

[0008] Preferably, the fixing rod is fixed to the inner wall of the fixing groove through a rotating shaft, and the fixing rod can rotate in the fixing groove through the rotating shaft, and the support rod is fixed to the inner wall of the connecting block through a pin, and the support rod can rotate in the connecting block through the pin.

[0009] Preferably, rubber pads are attached to the inner walls of the two curved plates, and the rubber pads can be used to prevent the curved plates from colliding with the single crystal silicon rods.

[0010] Preferably, a fixing plate is provided on the rear side of the upper end of the base, a lifting device is provided on the upper side of the front end of the fixing plate, a slider is provided on the outer wall of the lifting device, and the pressure plate is connected and fixed to the slider.

[0011] Preferably, a fixing frame is provided on the lower side of the front end of the slider, a vertical rod is provided on the front side of the fixing plate at the upper end of the base, and infrared detection components are provided on the upper end of the vertical rod and the fixing frame. The two infrared detection components are used to detect the surface texture of the single crystal silicon rod.

[0012] Preferably, a servo motor is provided at the upper end of the lifting device, and the servo motor is used to transmit power to the lifting device.

[0013] Compared with the prior art, the present invention provides a device for vertically positioning a single crystal silicon rod, which has the following beneficial effects:

[0014] The single crystal silicon rod is placed vertically on the upper end of the fixing seat and fixed by a clamp. After the single crystal silicon rod is placed on the upper end of the fixing seat, the fixing rods on the left and right sides can be moved to clamp the single crystal silicon rod through the two curved plates. After the two curved plates are merged, the support rods on both sides of the fixing rod are rotated upward and clamped in the grooves on the outer wall of the fixing rod. The support rods are clamped in the grooves to prevent the fixing rod from loosening, thereby reinforcing the fixing rod. The rubber pad on the inner wall of the curved plate can prevent the single crystal silicon rod from colliding with the curved plate when in contact with the curved plate, causing damage to the surface. When the single crystal silicon rod is offset and tilted, it can be fixed by the curved plate, thereby preventing the single crystal silicon rod from tilting and falling due to loose fixation. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 This is a structural schematic diagram of a single crystal silicon rod vertical positioning device of the present utility model.

[0016] Figure 2 This is a schematic diagram of the connection structure between the arc plate and the base of the utility model.

[0017] Figure 3 This is a schematic diagram of the upper structure of the arc-shaped plate of the present invention.

[0018] Figure 4 This is a schematic diagram of the connection structure between the support rod and the fixing rod of the utility model.

[0019] In the figure: 1. Fixed seat; 2. Clamp; 3. Arc plate; 4. Infrared detection component; 5. Pressing plate; 6. Slider; 7. Lifting device; 8. Servo motor; 9. Fixed frame; 10. Vertical pole; 11. Fixed plate; 12. Rubber pad; 13. Base; 14. Fixed rod; 15. Slot; 16. Support rod; 17. Fixed slot; 18. Connecting block; 19. Rotating shaft; 20. Latch. DETAILED DESCRIPTION

[0020] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0021] The utility model provides Figure 1-4 A single crystal silicon rod vertical positioning device shown includes a base 13 and a fixing base 1;

[0022] A fixing seat 1 is provided on the front side of the upper end of the base 13, a clamp 2 is provided on the upper end of the fixing seat 1, and two arc-shaped plates 3 are provided on the upper side of the fixing seat 1;

[0023] Fixed grooves 17 are provided on the left and right sides of the upper end of the base 13. Fixed rods 14 are provided between the inner walls of the two fixed grooves 17 and the curved plate 3. The two fixed rods 14 are fixed to the inner walls of the fixed grooves 17 through rotating shafts 19. The two fixed rods 14 can rotate in the fixed grooves 17 through the rotating shafts 19 to drive the curved plate 3 to open and close.

[0024] The single crystal silicon rod is placed on the fixing seat 1 and fixed by the clamp 2, and then the arc plate 3 is driven to move toward the middle and closed by the fixing rod 14 to fix the single crystal silicon rod to prevent the single crystal silicon rod from deflecting, tilting or falling.

[0025] like Figure 2 and Figure 4 As shown, a connecting block 18 is provided on the right side of the fixing groove 17, a support rod 16 is provided on the inner wall of the connecting block 18, and a card slot 15 is provided on the outer wall of the fixing rod 14. The card slot 15 is used to clamp and fix the support rod 16. The fixing rod 14 is fixed to the inner wall of the fixing groove 17 through the rotating shaft 19, and the fixing rod 14 can rotate in the fixing groove 17 through the rotating shaft 19. The support rod 16 is fixed to the inner wall of the connecting block 18 through the pin 20, and the support rod 16 can rotate in the connecting block 18 through the pin 20.

[0026] After the fixing rod 14 is fixed, the support rod 16 is rotated and inserted into the slot 15 on the outer wall of the fixing rod 14 for fixing, so that the fixing rod 14 is supported by the support rod 16, the stability of the fixing rod 14 is increased, and the fixing rod 14 is prevented from loosening.

[0027] like Figure 2 As shown, rubber pads 12 are attached to the inner walls of the two curved plates 3 , and the rubber pads 12 can be used to prevent the curved plates 3 from colliding with the single crystal silicon rods.

[0028] The rubber pad 12 on the inner wall of the curved plate 3 can prevent the single crystal silicon rod from colliding with the curved plate 3 when in contact with the curved plate 3, thereby preventing the surface from being damaged.

[0029] like Figure 1 As shown, a fixed plate 11 is provided on the rear side of the upper end of the base 13, a lifting device 7 is provided on the upper side of the front end of the fixed plate 11, a slider 6 is provided on the outer wall of the lifting device 7, the pressure plate 5 is connected and fixed to the slider 6, a fixing frame 9 is provided on the lower side of the front end of the slider 6, a vertical pole 10 is provided on the front side of the fixed plate 11 at the upper end of the base 13, and infrared detection components 4 are provided on the upper ends of the vertical pole 10 and the fixing frame 9. The two infrared detection components 4 are used to detect the surface texture of the single crystal silicon rod. A servo motor 8 is provided on the upper end of the lifting device 7, and the servo motor 8 is used to transmit power to the lifting device 7.

[0030] After the single crystal silicon rod is fixed on the fixing seat 1, the servo motor 8 will drive the slider 6 on the outer wall of the lifting device 7 to move up and down, thereby controlling the pressure plate 5 to press down and fix the upper end of the single crystal silicon rod. After the single crystal silicon rod is fixed, the clamp 2 will drive the single crystal silicon rod to rotate. During the rotation of the single crystal silicon rod, the infrared detection component 4 will scan and detect the outer wall of the single crystal silicon rod.

[0031] The working principle of the present invention is as follows: the single crystal silicon rod is placed on the fixing seat 1 and fixed by the clamp 2, and then the arc plate 3 is driven to move toward the middle and closed by the fixing rod 14 to fix the single crystal silicon rod to prevent the single crystal silicon rod from shifting, tilting and falling. After the fixing rod 14 is fixed, the support rod 16 is rotated to insert the support rod 16 into the slot 15 on the outer wall of the fixing rod 14 for fixing, so that the fixing rod 14 is supported by the support rod 16. After the single crystal silicon rod is fixed on the fixing seat 1, the servo motor 8 will drive the slider 6 on the outer wall of the lifting device 7 to move up and down, thereby controlling the pressure plate 5 to press down and fix the upper end of the single crystal silicon rod. After the single crystal silicon rod is fixed, the clamp 2 will drive the single crystal silicon rod to rotate. During the rotation of the single crystal silicon rod, the infrared detection component 4 will scan and detect the outer wall of the single crystal silicon rod.

[0032] Finally, it should be noted that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or make equivalent replacements for some of the technical features therein. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A single crystal silicon rod vertical positioning device, comprising a base (13) and a fixing seat (1); A fixing seat (1) is provided on the front side of the upper end of the base (13), a clamp (2) is provided on the upper end of the fixing seat (1), and two arc-shaped plates (3) are provided on the upper side of the fixing seat (1); Its characteristics are: The base (13) is provided with fixed grooves (17) on the left and right sides of the upper end. Fixed rods (14) are provided between the inner walls of the two fixed grooves (17) and the arc-shaped plate (3). The two fixed rods (14) are fixed to the inner walls of the fixed grooves (17) via rotating shafts (19). The two fixed rods (14) can rotate in the fixed grooves (17) via the rotating shafts (19) to drive the arc-shaped plate (3) to open and close.

2. The device for vertically positioning a single crystal silicon rod according to claim 1, wherein: A connecting block (18) is provided on the right side of the fixing groove (17), a supporting rod (16) is provided on the inner wall of the connecting block (18), and a clamping groove (15) is provided on the outer wall of the fixing rod (14), and the clamping groove (15) is used to clamp and fix the supporting rod (16).

3. The device for vertically positioning a single crystal silicon rod according to claim 2, wherein: The fixing rod (14) is fixed to the inner wall of the fixing groove (17) via the rotating shaft (19), and the fixing rod (14) can rotate in the fixing groove (17) via the rotating shaft (19); the supporting rod (16) is fixed to the inner wall of the connecting block (18) via the latch (20), and the supporting rod (16) can rotate in the connecting block (18) via the latch (20).

4. The device for vertically positioning a single crystal silicon rod according to claim 1, wherein: Rubber pads (12) are adhered to the inner walls of the two curved plates (3), and the rubber pads (12) can be used to prevent the curved plates (3) from colliding with the single crystal silicon rods.

5. The device for vertically positioning a single crystal silicon rod according to claim 1, wherein: A fixing plate (11) is provided on the rear side of the upper end of the base (13), a lifting device (7) is provided on the upper side of the front end of the fixing plate (11), a slider (6) is provided on the outer wall of the lifting device (7), and the pressing plate (5) is connected and fixed to the slider (6).

6. The device for vertically positioning a single crystal silicon rod according to claim 5, characterized in that: A fixing frame (9) is provided at the lower side of the front end of the slider (6), a vertical rod (10) is provided at the front side of the fixing plate (11) at the upper end of the base (13), and infrared detection components (4) are provided at the upper ends of the vertical rod (10) and the fixing frame (9). The two infrared detection components (4) are used to detect the surface texture of the single crystal silicon rod.

7. The single crystal silicon rod vertical positioning device according to claim 6, characterized in that: A servo motor (8) is provided at the upper end of the lifting device (7), and the servo motor (8) is used to transmit power to the lifting device (7).

Images