Auxiliary carrying device and carrying system

Abstract

The utility model relates to an auxiliary carrying device and a carrying system.The auxiliary carrying device comprises a carrying main body and a transferring mechanism, the carrying main body comprises a bearing table, the table top of the bearing table comprises a wafer box containing area, the transferring mechanism is arranged on the carrying main body, and the carrying main body is used for bearing wafer boxes from a crown block system to the wafer box containing area; and the transfer mechanism is used for transferring the wafer box in the wafer box placing area to a loading device SMIF arranged in the machine table. In the embodiment of the invention, through the auxiliary carrying device arranged between the crown block system and the machine table, the wafer box can be carried from the crown block system to a loading device SMIF embedded in the machine table. Therefore, not only is the full-automatic production process realized, but also more pollution risks can be reduced due to the full-automatic production process.

Description

Technical Field

[0001] The present application relates to the field of semiconductor manufacturing technology, and in particular to an auxiliary transport device and a transport system. Background Art

[0002] With the rise in labor costs and the increasing intelligence and refinement of production, traditional manual handling has become a bottleneck in production efficiency and quality. Therefore, the application of Automatic Material Handling System (AMHS) has become more and more common.

[0003] As an important automated material handling system, overhead crane systems are widely used in high-end manufacturing, particularly in the semiconductor industry, such as semiconductor wafer fabs. These systems improve overall production processes by increasing material transportation efficiency, reducing labor costs, and minimizing contamination risks.

[0004] In the prior art, the overhead crane system operates as follows: the overhead crane system transports a wafer pod to the corresponding tool. Once above the tool, a sling is used to place the wafer pod into the tool's loader (SMIF). However, with changes in the tool's hardware structure, the overhead crane can no longer directly place the wafer pod into the SMIF. This necessitates the use of a production assistant to transport the wafer pod from the overhead crane system to the SMIF. This not only prevents a fully automated production process, but also introduces increased contamination risks associated with a non-fully automated production process. Summary of the Invention

[0005] In order to solve the above technical problems, the present application provides a storage auxiliary transport device and a transport system.

[0006] On the one hand, the embodiments of the present application disclose a storage auxiliary transport device, including a transport body and a transfer mechanism;

[0007] The transport body includes a receiving platform; the receiving platform's table top includes a wafer box placement area;

[0008] The transfer mechanism is arranged on the transport body;

[0009] The transport body is used to receive the wafer box from the overhead crane system and place it in the wafer box placement area. The transfer mechanism is used to transfer the wafer box in the wafer box placement area to the loader SMIF built into the machine.

[0010] In some possible embodiments, the transfer mechanism includes a guide rail, a robotic arm module, and a drive motor;

[0011] The guide rail is arranged on the transport body;

[0012] One end of the robotic arm module is movably connected to the guide rail;

[0013] The drive motor is connected to the robotic arm module and is used to drive the robotic arm module to slide on the guide rail.

[0014] In some possible embodiments, the robotic arm module includes a sliding component, a lifting component, a translation and rotation component, and a gripper;

[0015] The first end of the sliding assembly is movably connected to the guide rail; the second end of the sliding assembly is connected to the first end of the lifting assembly;

[0016] The second end of the lifting assembly is connected to the first end of the translation and rotation assembly;

[0017] The second end of the translation and rotation assembly is connected to the gripper.

[0018] In some possible embodiments, the transport body further includes a loading structure;

[0019] The loading structure is arranged above the receiving platform, and the bottom of the loading structure is connected to the table top of the receiving platform;

[0020] The transfer mechanism is arranged on the loading structure.

[0021] In some possible embodiments, the loading structure includes a first side panel structure, a second side panel structure, a third side panel structure, and a fourth side panel structure connected around each other;

[0022] The first side plate structure and the third side plate structure are arranged opposite to each other, and the second side plate structure and the fourth side plate structure are arranged opposite to each other.

[0023] In some possible embodiments, the loading structure includes a top opening and a side opening;

[0024] The top opening is formed by being surrounded by the first side plate structure, the second side plate structure, the third side plate structure and the fourth side plate structure;

[0025] The side opening is formed by surrounding the first side plate structure, the second side plate structure, the third side plate structure and the receiving platform.

[0026] In some possible embodiments, the transport body includes a positioning mechanism;

[0027] The positioning mechanism is used to assist in aligning the auxiliary handling device and the machine platform.

[0028] In some possible embodiments, the positioning structure includes a first positioning structure and a second positioning structure;

[0029] The first positioning structure is located on the first side plate structure, and the second positioning structure is located on the second side plate structure;

[0030] The first positioning structure and the second positioning structure are jointly positioned with the third positioning structure and the fourth positioning structure on the machine platform so that the side opening corresponds to the conveying entrance of the machine platform.

[0031] In some possible embodiments, the transport body further includes a support member;

[0032] The support member is arranged at the bottom of the receiving platform;

[0033] The support member includes rollers.

[0034] In some possible embodiments, the table top of the receiving platform includes two wafer box placement areas;

[0035] Both wafer box placement areas are SMIF placement areas.

[0036] On the other hand, an embodiment of the present application discloses a transport system, which includes an overhead crane system, a platform, and an auxiliary transport device.

[0037] In some possible embodiments, the platform includes a third positioning structure and a fourth positioning structure.

[0038] In some possible embodiments, when the machine platform and the auxiliary transport device are aligned and placed, the robotic arm module is located between the machine platform and the auxiliary transport device.

[0039] The technical solution provided by the embodiments of the present application has the following technical effects:

[0040] The auxiliary transport device includes a transport body and a transfer mechanism. The transport body includes a receiving platform. The receiving platform's table top includes a wafer box placement area. The transfer mechanism is provided on the transport body. The transport body is used to receive the wafer box from the overhead crane system in the wafer box placement area. The transfer mechanism is used to transfer the wafer box in the wafer box placement area to the SMIF built into the machine. In the embodiment of the present application, by providing an auxiliary transport device between the overhead crane system and the machine, it is possible to transport the wafer box from the overhead crane system to the SMIF built into the machine. In this way, not only a fully automated production process is achieved, but also more contamination risks can be reduced due to the fully automated production process. BRIEF DESCRIPTION OF THE DRAWINGS

[0041] In order to more clearly illustrate the technical solutions and advantages of the embodiments of the present application or the prior art, the following is a brief introduction to the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.

[0042] Figure 1This is a schematic structural diagram of an auxiliary transport device provided in an embodiment of the present application;

[0043] Figure 2 This is a schematic structural diagram of a transfer mechanism provided in an embodiment of the present application;

[0044] Figure 3 This is a schematic structural diagram of a robotic arm module provided in an embodiment of the present application;

[0045] Figure 4 This is a schematic structural diagram of an auxiliary transport device provided in an embodiment of the present application;

[0046] Figure 5 This is a schematic structural diagram of an auxiliary transport device provided in an embodiment of the present application;

[0047] Figure 6 This is a structural diagram of the connection between an auxiliary transport device and a machine platform provided in an embodiment of the present application;

[0048] 1- auxiliary handling device; 2- machine platform;

[0049] 10- transport body; 20- transfer mechanism;

[0050] 21-guide rail; 22-robotic arm module; 23-drive motor;

[0051] 221-sliding assembly; 222-lifting assembly; 223-translation and rotation assembly; 224-gripping assembly;

[0052] 11- receiving platform; 12- loading structure;

[0053] 121 - first side panel structure; 122 - second side panel structure; 123 - third side panel structure; 124 - fourth side panel structure. DETAILED DESCRIPTION

[0054] The following will be combined with the accompanying drawings in the embodiments of this application to clearly and completely describe the technical solutions in the embodiments of this application. Obviously, the embodiments described are only part of the embodiments of this application, not all of the embodiments. Based on the embodiments of this application, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of this application.

[0055] It should be noted that the "one embodiment" or "embodiment" referred to in the description of the embodiments of the present application refers to specific features, structures, or characteristics that may be included in at least one implementation of the present application. It should be understood that in the description and claims of the embodiments of the present application, as well as in the above-mentioned figures, the terms "upper," "lower," "top," "bottom," etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the figures and are intended solely for the purpose of facilitating the description of the present application and simplifying the description. They do not indicate or imply that the devices or components referred to must have a specific orientation, be constructed, or operate in a specific orientation, and therefore should not be construed as limiting the present application. The terms "first" and "second" are used for descriptive purposes only and should not be construed to indicate or imply relative importance or implicitly specify the number of the technical features indicated. Thus, a feature specified as "first" or "second" may explicitly or implicitly include one or more of the features. Furthermore, the terms "first," "second," etc. are used to distinguish similar objects and are not necessarily used to describe a specific order or sequential sequence. It should be understood that the terms used in this manner are interchangeable where appropriate, so that the embodiments of the present application described herein can be implemented in an order other than that illustrated or described herein. In addition, in the description of this embodiment, unless otherwise specified, "a plurality of" means two or more. In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions. For example, a process, method, system or product that includes a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units that are not explicitly listed or are inherent to these processes, methods, products or devices.

[0056] It should be understood that when an element or layer is referred to as being "on," "adjacent to," "connected to," or "coupled to" another element or layer, it may be directly on, adjacent to, connected to, or coupled to the other element or layer, or there may be intervening elements or layers. Conversely, when an element is referred to as being "directly on," "directly adjacent to," "directly connected to," or "directly coupled to" another element or layer, there may be no intervening elements or layers. It should be understood that although the terms first, second, third, etc. may be used to describe various elements, components, regions, layers, and / or parts, these elements, components, regions, layers, and / or parts should not be limited by these terms. These terms are merely used to distinguish one element, component, region, layer, or part from another element, component, region, layer, or part. Therefore, without departing from the teachings of the present application, the first element, component, region, layer, or part discussed below may be represented as a second element, component, region, layer, or part. And when the second element, component, region, layer, or part is discussed, it does not necessarily mean that the first element, component, region, layer, or part is present in the present application.

[0057] In order to make the purpose, technical solutions and advantages disclosed in the embodiments of the present application more clearly understood, the embodiments of the present application are further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the embodiments of the present application and are not intended to limit the embodiments of the present application.

[0058] In the prior art, the overhead crane system operates as follows: the overhead crane system transports the wafer cassette pod to the corresponding tool. Once it reaches the top of the tool, the overhead crane system can use a rope to directly place the wafer cassette into the tool's loader (SMIF) because there is no obstruction above the tool. However, with changes in the tool's hardware structure, such as the presence of electronic structures (such as displays, circuit connections, etc.) above the tool and the SMIF being embedded within the tool, the overhead crane cannot directly place the wafer cassette into the SMIF from above. This necessitates that a production assistant transport the wafer cassette from the overhead crane system to the SMIF. This not only prevents a fully automated production process, but also introduces greater contamination risks due to the non-fully automated production process.

[0059] In view of this, the present application provides a structural diagram of an auxiliary transport device, such as Figure 1 As shown, the auxiliary transport device 1 includes a transport body 10 and a transfer mechanism 20 .

[0060] In some possible embodiments, the transport body 10 includes a receiving platform, the surface of which includes a wafer cassette placement area, and the transfer mechanism 20 is disposed on the transport body 10. The transport body 10 is used to receive wafer cassettes from the overhead crane system in the wafer cassette placement area, and the transfer mechanism 20 is used to transfer the wafer cassettes in the wafer cassette placement area to the loader SMIF built into the machine.

[0061] Optionally, the number of wafer box placement areas included in the table top of the receiving platform may be one. Optionally, the number of wafer box placement areas included in the table top of the receiving platform may be multiple.

[0062] Optionally, the number of wafer cassette placement areas included on the receiving platform's tabletop can be determined based on the number of SMIFs built into the machine. For example, if the number of SMIFs built into the machine is two, the number of wafer cassette placement areas included on the receiving platform's tabletop can be two.

[0063] In some optional embodiments, the wafer box placement area included in the table top of the receiving platform is a common placement area for receiving the wafer box from the overhead crane system.

[0064] In other optional embodiments, the wafer box placement area included in the table top of the receiving platform is a SMIF placement area. First, the SMIF placement area can comply with the SMIF isolation technology. Secondly, the reason why the wafer box placement area included in the table top of the receiving platform is a SMIF placement area is that there is a reading function to obtain the Pod information of the wafer box. When the SMIF placement area receives the wafer box from the overhead crane system, the Pod information of the wafer box can be read. If the reading is successful and it is determined based on the Pod information that the wafer box is a wafer box to be placed in the built-in loading device of the machine, it will continue to be transferred to the built-in loading device SMIF of the machine. If the reading fails or it is determined based on the Pod information that the wafer box is not a wafer box to be placed in the built-in loading device of the machine, it cannot continue to be transferred to the built-in loading device SMIF of the machine.

[0065] In this way, by setting up an SMIF placement area on the table of the receiving platform of the auxiliary transport device, the information of the wafer box transported by the overhead crane system can be confirmed. If the information confirmation fails, it can be not transported to the loader SMIF built into the machine, and there is no need to perform Pod information confirmation in the loader SMIF built into the machine. The correctness of the wafer box can be confirmed as early as possible, which can save overall transportation time.

[0066] The present application embodiment provides a structural diagram of a transfer mechanism, such as Figure 2 As shown, the structural diagram of the transfer mechanism 20 is a simple structural diagram, which includes a guide rail 21, a robotic arm module 22 and a drive motor 23.

[0067] Optionally, the guide rail 21 can be set on the transport body 10, and the drive motor 23 is connected to the robotic arm module 22, and the drive motor 23 is used to drive the robotic arm module 22 to slide on the guide rail 21.

[0068] In some possible embodiments, one end of the robotic arm module 22 is movably connected to the guide rail 21, and the other end of the robotic arm module 22 is used to grab the wafer box in the wafer box placement area and transfer the grabbed wafer box to the loading device SMIF built into the machine.

[0069] In the embodiment of the present application, the above-mentioned robotic arm module 22 can be composed of multiple components, and the multiple components can cooperate to enable the robotic arm module 22 to operate in a three-dimensional space.

[0070] The present application embodiment provides a schematic diagram of the structure of a robotic arm module, such as Figure 3 As shown, the schematic diagram of the robotic arm module 22 is a simple structural schematic diagram. The robotic arm module 22 includes a sliding component 221, a lifting component 222, a translation and rotation component 223 and a gripper 224.

[0071] Optionally, the first end of the sliding assembly 221 can be movably connected to the guide rail 21, the second end of the sliding assembly 221 can be connected to the first end of the lifting assembly 222, the second end of the lifting assembly 222 can be connected to the first end of the translation and rotation assembly 223, and the second end of the translation and rotation assembly 223 can be connected to the clamp 224.

[0072] Specifically, the first end of the sliding assembly 221 is movably connected to the guide rail 21, the second end of the sliding assembly 221 is electromechanically connected to the first end of the lifting assembly 222, the second end of the lifting assembly 222 is electromechanically connected to the first end of the translation and rotation assembly 223, and the second end of the translation and rotation assembly 223 is electromechanically connected to the clamp 224.

[0073] In the embodiment of the present application, the electromechanical connection in the above paragraph means that the two connected parts have both a mechanical connection relationship and an electrical connection relationship.

[0074] In a specific embodiment, the sliding assembly 221 can slide along the guide rail under the action of the drive motor 23, and the lifting assembly 222 can expand and contract in the Z-axis direction, or in the vertical dimension, so that the gripper 224 can pick up and raise the wafer box or lower and lower the wafer box. The translation and rotation assembly 223 can move in the X-axis direction and the Y-axis direction, or in the plane dimension, and can rotate around a certain point as the center of the circle to drive the gripper 224 below to move on the plane or rotate around a certain point as the center of the circle, so that the gripper 224 can more conveniently and accurately grab and lower the wafer box.

[0075] In the embodiment of the present application, the transport body may include a receiving platform and a loading structure. The embodiment of the present application provides a structural schematic diagram of an auxiliary transport device, such as Figure 4 As shown, the auxiliary transport device 1 includes a transport body 10 and a transfer mechanism 20 . The transport body 10 includes a receiving platform 11 and a loading structure 12 .

[0076] like Figure 4 As shown, the loading structure 12 is arranged above the receiving platform 11 , and the bottom of the loading structure 12 is connected to the table top of the receiving platform 11 .

[0077] In the embodiment of the present application, the transfer mechanism 20 can be provided on the loading structure 12. Specifically, the transfer mechanism 20 can be provided in the loading structure 12 and facing the table of the receiving table 11, so that the transfer mechanism 20 can easily grab the wafer box placed in the wafer box placement area on the table of the receiving table 11.

[0078] The embodiment of the application provides a structural diagram of an auxiliary transport device, such as Figure 5As shown, the auxiliary transport device 1 includes a transport body 10 and a transfer mechanism 20 . The transport body 10 includes a receiving platform 11 and a loading structure 12 .

[0079] Optionally, the loading structure 12 includes a first side plate structure 121, a second side plate structure 122, a third side plate structure 123 and a fourth side plate structure 124 that are connected around each other. Figure 5 As shown, the first side plate structure 121 and the third side plate structure 123 are arranged opposite to each other, and the second side plate structure 122 and the fourth side plate structure 124 are arranged opposite to each other.

[0080] In a specific embodiment, both sides of the first side panel structure 121 are fixedly connected to the second side panel structure 122 and the fourth side panel structure 124. Both sides of the second side panel structure 122 are fixedly connected to the first side panel structure 121 and the third side panel structure 123. The third side panel structure 123 is fixedly connected to the second side panel structure 122 and the fourth side panel structure 124. The fourth side panel structure 124 is fixedly connected to the first side panel structure 121 and the third side panel structure 123.

[0081] In an optional embodiment, the loading structure 12 includes a top opening and a side opening.

[0082] Optionally, the top opening can be formed by surrounding the first side panel structure 121, the second side panel structure 122, the third side panel structure 123, and the fourth side panel structure 124. The top opening is provided to facilitate the overhead crane system to directly place the wafer box from above the auxiliary transport device 1 onto the table surface of the receiving table 11 of the auxiliary transport device 1 using the lifting rope.

[0083] Optionally, a side opening can be formed by surrounding the first side panel structure 121, the second side panel structure 122, the third side panel structure 123, and the receiving platform 11. The side opening is provided to correspond to the transfer entrance of the machine, so that after the robot arm module 22 grabs the wafer box, it can exit from the side opening and be placed into the loader SMIF embedded in the machine through the transfer entrance.

[0084] In another optional embodiment, as Figure 5 As shown, the loading structure 12 includes a top opening, a first side opening, and a second side opening.

[0085] Optionally, the top opening can be formed by surrounding the first side panel structure 121, the second side panel structure 122, the third side panel structure 123, and the fourth side panel structure 124. The top opening is provided to facilitate the overhead crane system to directly place the wafer box from above the auxiliary transport device 1 onto the table surface of the receiving table 11 of the auxiliary transport device 1 using the lifting rope.

[0086] Optionally, the first side opening can be formed by surrounding the first side panel structure 121, the second side panel structure 122, the third side panel structure 123, and the receiving platform 11. The first side opening is provided to correspond to the transfer entrance of the first machine, so that after the robot arm module 22 grabs the wafer box, it can exit from the first side opening and be placed into the loader SMIF embedded in the first machine through the transfer entrance.

[0087] Optionally, a second side opening can be formed by surrounding the fourth side panel structure 124, the second side panel structure 122, the third side panel structure 123, and the receiving platform 11. The second side opening is provided to correspond to the transfer entrance of the second machine, so that after the robot arm module 22 grabs the wafer box, it can exit from the second side opening and be placed into the loader SMIF embedded in the second machine through the transfer entrance.

[0088] In an embodiment of the present application, the transport body 10 also includes a positioning mechanism, which is used to assist in aligning the auxiliary transport device and the machine so that the above-mentioned side opening corresponds to the transmission entrance of the machine, so that after the robotic arm module 22 grabs the wafer box, it can come out from the side opening and be placed in the loading device SMIF embedded in the machine through the transmission entrance.

[0089] In one specific embodiment, the transport body 10 includes a first positioning mechanism, and the platform includes a second positioning mechanism. The first and second positioning mechanisms cooperate to assist in aligning the auxiliary transport device and the platform so that the aforementioned side opening corresponds to the platform's transfer inlet. This allows the robotic arm module 22 to grasp a wafer cassette, then exit through the side opening and place it into the platform's built-in loader SMIF through the transfer inlet.

[0090] Alternatively, the first positioning mechanism and the second positioning mechanism may both be mechanical structures, for example, the first positioning mechanism may be a circular hole, and the second positioning mechanism may be a cylinder. During the alignment process between the machine platform and the auxiliary transport device, when the cylinder is inserted into the circular hole, the auxiliary transport device and the machine platform are aligned.

[0091] Optionally, the first positioning mechanism and the second positioning mechanism may both be electronic components, for example, both the first positioning mechanism and the second positioning mechanism may be distance sensing components. During the alignment process of the machine platform and the auxiliary transport device, when both the first positioning mechanism and the second positioning mechanism determine that the distance between the machine platform and the auxiliary transport device satisfies a preset distance, the auxiliary transport device and the machine platform may be aligned.

[0092] Alternatively, the first and second positioning mechanisms may be a combination of electronic components and mechanical structures. For example, the first positioning mechanism may be a circular hole and a distance sensing element, and the second positioning mechanism may be a cylinder. During the alignment process between the machine and the auxiliary handling device, when the cylinder is inserted into the circular hole and the distance sensing element detects that the insertion depth of the cylinder meets a predetermined depth, the auxiliary handling device and the machine are aligned.

[0093] In the embodiment of the present application, the positioning mechanism included in the transport body 10 may be a first positioning structure and a second positioning structure, wherein the first positioning structure is located on the first side plate structure 121 , and the second positioning structure is located on the second side plate structure 122 .

[0094] Optionally, the first positioning structure and the second positioning structure can be positioned together with the third positioning structure and the fourth positioning structure on the machine platform so that the side opening corresponds to the conveying entrance of the machine platform.

[0095] In a specific embodiment, the first positioning structure and the third positioning structure are engaged, and the second positioning structure and the fourth positioning structure are engaged. When the two sets of positioning structures are successfully engaged, the first positioning structure and the second positioning structure and the third positioning structure and the fourth positioning structure on the machine are successfully positioned together so that the side opening corresponds to the transmission entrance of the machine.

[0096] In the embodiment of the present application, each machine in the wafer field can be fixedly associated with an auxiliary transport device.

[0097] In the embodiment of the present application, the transport body 10 further includes a support member, wherein the support member includes a roller, and the support member is disposed at the bottom of the receiving platform 11 .

[0098] Optionally, not every machine in the wafer field can be fixedly connected to an auxiliary transport device. Based on this, the auxiliary transport device can also include a support member, which can be four roller devices arranged at the bottom of the receiving platform 11. In this way, the auxiliary transport device can be moved to connect to different machines, thereby greatly reducing the number of auxiliary transport devices.

[0099] In the embodiment of the present application, the embodiment of the application provides a structural diagram of the connection between the auxiliary transport device and the machine platform, such as Figure 6 As shown, it includes an auxiliary transport device 1 and a machine platform 2.

[0100] Optionally, the auxiliary transport device 1 has a length of A1, a width of B, and a distance between two adjacent wafer box placement areas of C1. Figure 6 As shown, when the number of wafer box placement areas included in the table top of the receiving table is 2, the distance between the two wafer box placement areas is the distance between the midpoints of the two wafer box placement areas.

[0101] Optionally, the length of the platform 2 is A2, and the distance between the loading devices SMIF built into the platform is C2. Figure 6 As shown in FIG, when the number of the loader SMIFs built into the machine is two, the distance between the two loader SMIFs is the distance between the midpoints of the two loader SMIFs.

[0102] In an optional embodiment, in the auxiliary transport device 1 , the distance C1 between the wafer box placement areas included in the table top of the receiving table may be less than or equal to the distance C2 between the loading devices SMIF built into the machine 2 .

[0103] In another optional embodiment, in the auxiliary handling device 1, the distance C1 between the wafer cassette placement areas included on the receiving table's surface can be greater than the distance C2 between the SMIFs built into the platform 2. Specifically, the distance C1 between the wafer cassette placement areas included on the receiving table's surface can be determined based on the distance C2 between the SMIFs built into the platform 2. Optionally, the difference between C1 and C2 is between 0 and 100 mm.

[0104] For example, if the distance C2 between the SMIFs built into platform 2 is 345 mm, the distance C1 between the cassette placement areas on the receiving platform's surface can be 400 mm. This way, when a cassette is placed in one of the cassette placement areas on the receiving platform's surface, setting C1 wider prevents collisions when the overhead crane system places a cassette in another cassette placement area.

[0105] In the embodiment of the present application, the length A1 of the auxiliary handling device 1 can be less than the length A2 of the machine platform 2. The length A1 of the auxiliary handling device 1 can be determined based on the length A2 of the machine platform 2. For example, if the length A2 of the machine platform 2 is 880 mm, the length A1 of the auxiliary handling device 1 can be 870 mm.

[0106] In this way, considering that the auxiliary transport device 1 and the machine 2 need to be docked side by side, the side-by-side docking of the auxiliary transport device 1 and the machine 2 can be achieved by making the length A1 of the auxiliary transport device 1 smaller than the length A2 of the machine 2. For example, the two sides of the auxiliary transport device 1 can be restricted by the two sides of the machine 2.

[0107] In the embodiment of the present application, the width B of the auxiliary transport device 1 can be determined according to the machine platform 2. The width B of the auxiliary transport device 1 can also be determined according to the space where the auxiliary transport device 1 and the machine platform 2 are located.

[0108] In some possible embodiments, the size of the wafer box placement area included on the table top of the receiving table can be determined according to the size of the loading device SMIF built into the machine 2. For example, the size of the wafer box placement area included on the table top of the receiving table is: 372 mm in length or width.

[0109] In the embodiment of this application, Figure 6 As shown, when the machine platform and the auxiliary transport device are aligned, the transfer mechanism 20 can be located between the machine platform 2 and the auxiliary transport device 1 .

[0110] Correspondingly, an embodiment of the present application further provides a transport system, which includes an overhead crane system, a machine platform, and the auxiliary transport device mentioned above.

[0111] In the embodiment of the present application, the machine includes a third positioning structure and a fourth positioning structure. The transport body includes a first positioning structure and a second positioning structure, wherein the first positioning structure is located on the first side plate structure and the second positioning structure is located on the second side plate structure.

[0112] In a specific embodiment, the first positioning structure and the third positioning structure are engaged, and the second positioning structure and the fourth positioning structure are engaged. When the two sets of positioning structures are successfully engaged, the first positioning structure and the second positioning structure and the third positioning structure and the fourth positioning structure on the machine are successfully positioned together so that the side opening corresponds to the transmission entrance of the machine.

[0113] In the embodiment of the present application, when the machine platform and the auxiliary transport device are aligned and placed, the robotic arm module can be located between the machine platform and the auxiliary transport device.

[0114] The electronic device described in the embodiments of the present application can be any electronic product or device such as a smartphone, a desktop computer, a tablet computer, a laptop computer, a digital assistant, an augmented reality (AR) / virtual reality (VR) device, an intelligent voice interaction device, a smart home appliance, a smart wearable device, an in-vehicle terminal device, or any intermediate product that includes the above-mentioned storage device.

[0115] It should be noted that the order of the embodiments of the present application described above is for descriptive purposes only and does not represent the superiority or inferiority of the embodiments. The above description is of specific embodiments of this specification. Other embodiments are within the scope of the appended claims. In some cases, the actions or steps described in the claims can be performed in an order different from that in the embodiments and still achieve the desired results. In addition, the processes depicted in the accompanying drawings do not necessarily require the specific order or continuous order shown to achieve the desired results. In some embodiments, multitasking and parallel processing are also possible or may be advantageous.

[0116] The various embodiments in this specification are described in a progressive manner. Similar parts between the various embodiments can be referred to in conjunction with each other. Each embodiment focuses on the differences between the other embodiments. In particular, the device embodiments are generally similar to the method embodiments, so the description is relatively simple. For relevant parts, refer to the description of the method embodiments.

[0117] Those skilled in the art will understand that all or part of the steps to implement the above embodiments may be accomplished by hardware, or by a program to instruct the relevant hardware, and the program may be stored in a computer-readable storage medium, which may be a read-only memory, a disk, or an optical disk, etc.

[0118] The above description is only a preferred embodiment of the present application and is not intended to limit the present application. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present application should be included in the scope of protection of the present application.

Claims

1. An auxiliary transport device, characterized in that: Including transport body and transfer mechanism; The transport body includes a receiving platform; the table top of the receiving platform includes a wafer box placement area; The transfer mechanism is provided on the transport body; The transport body is used to receive the wafer box from the overhead crane system and place it in the wafer box placement area. The transfer mechanism is used to transfer the wafer box in the wafer box placement area to the loader SMIF built into the machine.

2. The auxiliary transport device according to claim 1, characterized in that: The transfer mechanism includes a guide rail, a robotic arm module and a drive motor; The guide rail is arranged on the transport body; One end of the robotic arm module is movably connected to the guide rail; The driving motor is connected to the robotic arm module and is used to drive the robotic arm module to slide on the guide rail.

3. The auxiliary transport device according to claim 2, characterized in that: The robotic arm module includes a sliding component, a lifting component, a translation and rotation component, and a gripper; The first end of the sliding assembly is movably connected to the guide rail; the second end of the sliding assembly is connected to the first end of the lifting assembly; The second end of the lifting assembly is connected to the first end of the translation and rotation assembly; The second end of the translation and rotation assembly is connected to the gripper.

4. The auxiliary transport device according to claim 1, characterized in that: The transport body further includes a loading structure; The loading structure is arranged above the receiving platform, and the bottom of the loading structure is connected to the table top of the receiving platform; The transfer mechanism is arranged on the loading structure.

5. The auxiliary transport device according to claim 4, characterized in that: The loading structure includes a first side plate structure, a second side plate structure, a third side plate structure and a fourth side plate structure connected around each other; The first side plate structure and the third side plate structure are arranged opposite to each other, and the second side plate structure and the fourth side plate structure are arranged opposite to each other.

6. The auxiliary transport device according to claim 5, characterized in that: The loading structure includes a top opening and a side opening; The top opening is formed by being surrounded by the first side panel structure, the second side panel structure, the third side panel structure and the fourth side panel structure; The side opening is formed by being surrounded by the first side panel structure, the second side panel structure, the third side panel structure and the receiving platform.

7. The auxiliary transport device according to claim 6, characterized in that: The transport body includes a positioning mechanism; The positioning mechanism is used to assist the auxiliary transport device in aligning and placing with the machine platform.

8. The auxiliary transport device according to claim 7, characterized in that: The positioning mechanism includes a first positioning structure and a second positioning structure; The first positioning structure is located on the first side plate structure, and the second positioning structure is located on the second side plate structure; The first positioning structure and the second positioning structure and the third positioning structure and the fourth positioning structure on the platform are jointly positioned so that the side opening corresponds to the conveying entrance of the platform.

9. The auxiliary transport device according to any one of claims 1 to 8, characterized in that: The transport body further includes a support member; The support member is arranged at the bottom of the receiving platform; The support member includes a roller.

10. The auxiliary transport device according to any one of claims 1 to 8, characterized in that: The table top of the receiving platform includes two wafer box placement areas; The two wafer box placement areas are both SMIF placement areas.

11. A transport system, characterized in that: The transport system includes an overhead crane system, a machine platform, and the auxiliary transport device according to any one of claims 1 to 10.

12. The transport system according to claim 11, wherein: The platform includes a third positioning structure and a fourth positioning structure.

13. The transport system according to claim 11, wherein: When the machine platform and the auxiliary transport device are aligned, the robot arm module is located between the machine platform and the auxiliary transport device.

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