Mobile module and plasma cleaning equipment

Abstract

The utility model discloses a moving module and plasma cleaning equipment, and relates to the technical field of material conveying devices.The moving module comprises a material conveying device, a mounting plate, a driving part and a transmission assembly, the mounting plate is in sliding connection with the material conveying device, and the driving part is connected with the mounting plate; the transmission assembly comprises a transmission piece, a lead screw and a sliding block in threaded connection with the lead screw. The transmission part is connected with the output end of the driving part and the lead screw, the lead screw is rotationally connected with the mounting plate and extends in the material conveying direction of the material conveying device, and the sliding block is connected with the material conveying device; the driving piece can drive the transmission piece to drive the lead screw to rotate, so that the sliding block drives the material conveying device to move in the axial direction of the lead screw. According to the technical scheme, the problems that gaps exist between the material conveying device and the feeding module and between the material conveying device and the cleaning module, material pieces are prone to being clamped, and then the material pieces or the material conveying device is damaged can be solved.

Description

Technical Field

[0001] The utility model relates to the technical field of material transmission devices, in particular to a mobile module and plasma cleaning equipment. Background Art

[0002] Plasma cleaning equipment utilizes plasma technology for surface treatment, generating plasma to clean dirt and grease from the surface of a material. Plasma is a high-energy, highly active ionized substance with unique chemical properties that effectively remove dirt and grease from material surfaces. The operating principle of plasma cleaning equipment primarily involves three steps: plasma generation, ion bombardment, and surface cleaning. Plasma cleaning equipment has a wide range of applications, including semiconductor manufacturing, automotive manufacturing, healthcare, optoelectronics, and plastics. In semiconductor manufacturing, plasma cleaning equipment is used for surface treatment of materials and devices such as transistors, integrated circuits, metal pins, and silicon wafers. The main functions of plasma cleaning equipment include cleaning and activating surfaces, improving wettability, enhancing adhesive adhesion, and performing surface etching. The activation effect of plasma removes various surface contaminants, increases surface activity, and enhances surface energy, improving adhesion during subsequent processes.

[0003] Existing plasma cleaning equipment is usually composed of components such as a loading module, a moving module, and a cleaning module. The moving module includes a material transfer device. When the existing material transfer device receives and outputs the material, there is a gap between the material transfer device and the loading module and the cleaning module, which can easily cause the material to get stuck, thereby causing damage to the material or the material transfer device. Utility Model Content

[0004] The main purpose of the present utility model is to propose a mobile module and plasma cleaning equipment, which aims to solve the problem that when the existing material transfer device receives and outputs the material sheet, the material transfer device cannot move between the loading module and the cleaning module, and there is a gap between the material transfer device and the loading module and the cleaning module, which easily causes the material sheet to get stuck, and then causes damage to the material sheet or the material transfer device.

[0005] In order to achieve the above-mentioned purpose, the utility model proposes a mobile module, which includes: a material transmission device, a mounting plate, a driving member and a transmission assembly, the mounting plate is slidingly connected to the material transmission device, and the driving member is connected to the mounting plate; the transmission assembly includes a transmission member, a screw rod and a slider threadedly connected to the screw rod; the transmission member connects the output end and the screw rod of the driving member, the screw rod is rotatably connected to the mounting plate, the screw rod extends along the material transmission direction of the material transmission device, and the slider is connected to the material transmission device; wherein the driving member can drive the transmission member to drive the screw rod to rotate, so that the slider drives the material transmission device to move along the axial direction of the screw rod.

[0006] In one embodiment, the movable module includes a guide rail connected to the mounting plate, the guide rail extending along the axial direction of the screw rod, and the guide rail is located on a side of the mounting plate facing the material conveying device.

[0007] In one embodiment, the moving module includes a position sensor, the position sensor is connected to the mounting plate, the position sensor is located on a side of the mounting plate facing the driving member, and the position sensor is electrically connected to the driving member.

[0008] In one embodiment, the movable module further includes at least two limit blocks, each of the limit blocks is connected to the mounting plate, and the two limit blocks are respectively located at opposite ends of the guide rail.

[0009] In one embodiment, the transmission assembly further includes a support seat, the support seat is connected to the mounting plate, the screw rod is rotatably disposed on the support seat, and the support seat is located on a side of the mounting plate facing the driving member.

[0010] In one embodiment, the transmission assembly further includes a bearing, the support seat is provided with a connecting hole, the bearing insertion limit is located in the connecting hole, and the screw rod is interference fit with the inner ring of the bearing.

[0011] In one embodiment, the mounting plate is provided with a sliding channel, the sliding channel is located between the screw rod and the material transmission device, and the material transmission device is connected to the slider through the sliding channel.

[0012] In one embodiment, the transmission assembly further includes a connecting member having a fixed section detachably connected to the material transmission device and a connecting section detachably connected to the slider, and the connecting member is provided through the sliding channel.

[0013] In one embodiment, an adjustment notch is provided on the connecting member, and the adjustment notch is located at an end of the connecting section away from the fixing section.

[0014] The present invention also proposes a plasma cleaning device, comprising: a loading module, a cleaning module and a moving module, wherein the loading module is used to push the material to be cleaned to the moving module; the cleaning module is used to clean the material to be cleaned; and the moving module is used to transfer the material to be cleaned from the loading module to the cleaning module.

[0015] The present invention employs a movable module in a plasma cleaning device. The movable module primarily comprises a material transfer device, a mounting plate, a driver, and a transmission assembly. The mounting plate supports and guides the movable module, driving the material transfer device. A driver, such as a servo motor or pneumatic cylinder, is mounted on the mounting plate to provide power to move the mounting plate. The transmission assembly comprises a transmission member, a screw, and a slider. The transmission member connects the output end of the driver and the screw to transmit power. The screw is connected to the transmission member and rotatably coupled to the mounting plate. The screw extends along the material transfer device's feed direction, facilitating movement of the material transfer device. The slider moves along the screw and is connected to the material transfer device. Rotation of the screw drives the material transfer device along the feed direction. The slider is connected to the material transfer device, so movement of the slider causes the material transfer device to move accordingly. To adjust the gap between the material transfer device and the loading module or cleaning module, the driver drives the transmission member, thereby rotating the screw. The rotation of the screw causes the slider to move along the screw axis, thereby driving the feed mechanism to move and adjust its position. This allows precise adjustment of the feed mechanism to accommodate tablets of varying sizes, ensuring the proper clearance between the feed mechanism and the loading and cleaning modules, thus preventing tablets from becoming stuck or damaged. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying any creative work.

[0017] Figure 1 This is a structural diagram of an embodiment of a mobile module provided by the present utility model;

[0018] Figure 2 A structural diagram of another embodiment of the mobile module provided by the present invention;

[0019] Figure 3 A structural diagram of another embodiment of the mobile module provided by the present invention;

[0020] Figure 4 A structural diagram of another embodiment of the mobile module provided by the present utility model;

[0021] Figure 5 This is a structural schematic diagram of an embodiment of a connecting piece provided by the utility model.

[0022] Description of Figure Numbers:

[0023] 100. Mobile module; 1. Material transmission device; 2. Mounting plate; 3. Driving member; 4. Transmission assembly; 41. Transmission member; 42. Screw rod; 43. Slider; 5. Guide rail; 6. Position sensor; 7. Limit block; 44. Support seat; 45. Bearing; 44a. Connecting hole; 2a. Sliding channel; 46. Connecting member; 461. Fixed section; 462. Connecting section; 46a. Adjustment notch.

[0024] The realization of the purpose, functional features and advantages of the present invention will be further explained in conjunction with embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION

[0025] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts shall fall within the scope of protection of the present invention.

[0026] It should be noted that if the embodiments of the present invention involve directional indications (such as up, down, left, right, front, back, etc.), the directional indications are only used to explain the relative position relationship, movement status, etc. between the components in a certain specific posture. If the specific posture changes, the directional indications will also change accordingly.

[0027] In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the present invention, the descriptions of "first", "second", etc. are only for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features limited to "first" and "second" may explicitly or implicitly include at least one of such features. In addition, if "and / or" or "and / or" appears in the full text, its meaning includes three parallel schemes. Taking "A and / or B" as an example, it includes scheme A, or scheme B, or a scheme in which A and B are satisfied at the same time. In addition, the technical solutions between the various embodiments can be combined with each other, but it must be based on the ability of ordinary technicians in this field to implement. When the combination of technical solutions is mutually contradictory or cannot be implemented, it should be deemed that such a combination of technical solutions does not exist and is not within the scope of protection required by the present invention.

[0028] The present invention provides a mobile module 100 .

[0029] See also Figure 1 and Figure 2In one embodiment of the present invention, the mobile module 100 includes: a material transmission device 1, a mounting plate 2, a driving member 3 and a transmission assembly 4, the mounting plate 2 is slidingly connected to the material transmission device 1, and the driving member 3 is connected to the mounting plate 2; the transmission assembly 4 includes a transmission member 41, a screw rod 42 and a slider 43 threadedly connected to the screw rod 42; the transmission member 41 connects the output end of the driving member 3 and the screw rod 42, the screw rod 42 is rotatably connected to the mounting plate 2, the screw rod 42 extends along the material transmission direction of the material transmission device 1, and the slider 43 is connected to the material transmission device 1; wherein the driving member 3 can drive the transmission member 41 to drive the screw rod 42 to rotate, so that the slider 43 drives the material transmission device 1 to move along the axial direction of the screw rod 42.

[0030] In one embodiment, the material transfer device 1 typically comprises a conveyor belt, chain, or rollers, and is used to transfer the material between the loading module and the cleaning module. The conveyor belt is typically made of a wear-resistant and heat-resistant material, such as polyurethane (PU), polyvinyl chloride (PVC), or stainless steel. The chain and rollers can be made of stainless steel or aluminum alloy, which are corrosion-resistant and lightweight. The material transfer device 1 and the mounting plate 2 utilize a sliding connection, such as a guide rail 5 or bearings 45, to ensure smooth and precise movement. The mounting plate 2 provides stable support and allows the material transfer device 1 to move within a certain range. Adjustment of the material transfer device 1 is typically achieved using a precision adjustment mechanism, such as a servo motor-driven screw 42 system or a pneumatic cylinder system, for fine-tuning. Specifically, the position of the material transfer device 1 within the plasma cleaning equipment is first determined. The mounting plate 2 is secured to a suitable location within the equipment, ensuring its stability and levelness. The drive member 3 and transmission assembly 4, including the motor, screw 42, and slider 43, are mounted on the mounting plate 2. Connect the material transfer device 1 (such as a conveyor belt) to the slider 43 and ensure that it can move smoothly on the mounting plate 2. Through this design and installation method, the material transfer device 1 can adapt to different production requirements, ensure the smooth transfer of the sheet during the plasma cleaning process, reduce failures and improve production efficiency.

[0031] Among them, the mounting plate 2 is usually a flat, rigid structure designed to support the driving member 3 and the transmission assembly 4, and at the same time be slidably connected to the material transfer device 1. The mounting plate 2 is slidably connected to the material transfer device 1 through a guide rail 5, a bearing 45 or a sliding block, etc., to ensure that the material transfer device 1 can move back and forth smoothly. The mounting plate 2 may be fixed to the equipment frame by bolts, pins or welding. The mounting plate 2 is generally made of metal materials, such as carbon steel, stainless steel or aluminum alloy, which have good strength and rigidity and can withstand the forces generated by the driving member 3 during movement. The surface of the mounting plate 2 may be specially treated, such as plating, painting or anodizing, to improve corrosion resistance and wear resistance. The mounting plate 2 can ensure the precise position adjustment of the material transfer device 1 to adapt to different production needs and improve the flexibility and production efficiency of the plasma cleaning equipment.

[0032] Furthermore, the driver 3 is the core component of the moving device in the plasma cleaning equipment. Its function is to provide power to move the mounting plate 2, thereby driving the material transfer device 1 to make corresponding position adjustments. The driver 3 can be a servo motor, a cylinder, or other type of actuator. The specific selection depends on the required force and torque, speed, control accuracy, and application environment. The driver 3 transmits power through the transmission assembly 4 (such as gears, chains, belts, screws 42, etc.) to achieve precise control of the mounting plate 2. The driver 3 is usually connected to a control system (such as a PLC or computer control system) to achieve automated control. The control system can adjust the movement of the driver 3 based on sensor feedback signals or operator instructions. The driver 3 is fixed to the mounting plate 2 with bolts, screws, or other fasteners to ensure that its output shaft is properly connected to the input end of the transmission assembly 4. Through this design, the driver 3 can provide stable power output, achieve precise adjustment of the material transfer device 1 to accommodate sheets of different sizes, and ensure that the gap between the material transfer device 1 and the loading module and cleaning module remains appropriate.

[0033] It should be noted that the transmission assembly 4 is a crucial component of the plasma cleaning system, responsible for transmitting power from the drive member 3 to the feed mechanism 1 for precise position adjustment. The transmission assembly 4 comprises a transmission member 41, a screw 42, and a slider 43 threadedly connected to the screw 42. The transmission member 41 can be a gear, chain, belt, or synchronous belt, connecting the output end of the drive member 3 and the screw 42 to transmit power. The selection of the transmission member 41 depends on the required torque, speed, and load conditions. The screw 42 is typically connected to the transmission member 41 and rotationally connected to the mounting plate 2. The screw 42 can be rotated by the rotation of the transmission member 41, thereby achieving linear motion. The slider 43 moves along the screw 42 and is connected to the feed mechanism 1. The slider 43 drives the feed mechanism 1 in the feed direction as the screw 42 rotates. The material of the transmission member 41 can be selected based on the required load and operating environment. Common materials include polyurethane (PU), polyvinyl chloride (PVC), or stainless steel. The lead screw 42 is generally made of high-strength steel to ensure precise movement and durability under high loads. The slider 43 is usually made of high-strength engineering plastics or aluminum alloy to ensure stability and wear resistance during movement. The transmission assembly 4 needs to be precisely positioned to ensure the correct engagement of the transmission member 41 with the drive member 3 and the lead screw 42. The transmission assembly 4 is usually fixed to the mounting plate 2 by bolts, pins or welding. The design and installation of the transmission assembly 4 are crucial to the operation of the entire plasma cleaning equipment. They need to be able to withstand repeated loads and accurately control the position of the feed device 1. The transmission assembly 4 can improve the efficiency and reliability of the plasma cleaning equipment.

[0034] The technical solution of the present invention designs a movable module 100 in a plasma cleaning device, and the movable module 100 mainly includes a material conveying device 1, a mounting plate 2, a driving member 3 and a transmission assembly 4. The mounting plate 2 is used to support and guide the movable module 100 to drive the movement of the material conveying device 1. The driving member 3, such as a servo motor or a cylinder, is installed on the mounting plate 2 to provide power to move the mounting plate 2. The transmission assembly 4 includes a transmission member 41, a screw rod 42 and a slider 43; the transmission member 41 connects the output end of the driving member 3 and the screw rod 42 for transmitting power. The screw rod 42 is connected to the transmission member 41 and is rotatably connected to the mounting plate 2. The screw rod 42 extends along the material conveying direction of the material conveying device 1, which can better move the material conveying device 1. The slider 43 moves along the screw rod 42 and is connected to the material conveying device 1. The slider 43 is used to drive the material conveying device 1 to move along the material conveying direction of the material conveying device 1 when the screw rod 42 rotates. Slider 43 is connected to the feed mechanism 1, so when slider 43 moves, the feed mechanism 1 moves accordingly. To adjust the gap between the feed mechanism 1 and the loading or cleaning modules, driver 3 drives transmission member 41, which in turn rotates screw 42. The rotation of screw 42 causes slider 43 to move along its axis, thereby moving the feed mechanism 1 and adjusting its position. This allows precise adjustment of the feed mechanism 1's position to accommodate webs of varying sizes, ensuring an appropriate gap between the feed mechanism 1 and the loading and cleaning modules, and preventing webs from becoming stuck or damaged.

[0035] In one embodiment of the present invention, Figure 3 As shown, the movable module 100 includes a guide rail 5 , which is connected to the mounting plate 2 . The guide rail 5 extends along the axial direction of the screw rod 42 . The guide rail 5 is located on a side of the mounting plate 2 facing the material conveying device 1 .

[0036] In one embodiment, the mobile module 100 includes a guide rail 5, which serves as a key guiding and supporting structure and is connected to the mounting plate 2 to ensure that the material transfer device 1 can move smoothly along the axial direction of the screw 42. Specifically, the guide rail 5 can be a sliding guide rail 5, a rolling guide rail 5, etc., and is fixed to the mounting plate 2 as required. The selection of the guide rail 5 should take into account load capacity, smoothness of movement, wear life, and ease of installation. The guide rail 5 is arranged along the axial direction of the screw 42, ensuring that it is consistent with the movement direction of the screw 42 to achieve linear motion of the material transfer device 1. The guide rail 5 is located on the side of the mounting plate 2 facing the material transfer device 1, which means that the position of the guide rail 5 corresponds to the operating direction of the material transfer device 1 to provide stable guidance during the movement of the material transfer device 1. The guide rail 5 can be connected to the mounting plate 2 by welding, bolting, or other mechanical connection methods to ensure that the guide rail 5 does not loosen or shift during the movement of the material transfer device 1. During the installation process, the position and parallelism of the guide rail 5 need to be adjusted to ensure the smooth operation of the material transfer device 1. At the same time, the design of the guide rail 5 should be convenient for future maintenance and replacement. The guide rail 5 provides precise guidance for the material conveyor 1, so that the material conveyor 1 can move smoothly and accurately along the predetermined path, thereby improving the efficiency and reliability of the entire plasma cleaning equipment.

[0037] In one embodiment of the present invention, Figure 2 As shown, the moving module 100 includes a position sensor 6 , which is connected to the mounting plate 2 . The position sensor 6 is located on a side of the mounting plate 2 facing the driving member 3 , and the position sensor 6 is electrically connected to the driving member 3 .

[0038] In this embodiment, the mobile module 100 includes a position sensor 6, which is used to accurately monitor and control the position of the material conveying device 1; the position sensor 6 is electrically connected to the driver 3, and after collecting position data, the position sensor 6 feeds back the data to the driver 3, thereby realizing the movement of the material conveying device 1 through the forward or reverse rotation of the driver 3. Specifically, according to the motion requirements and accuracy requirements of the material conveying device 1, a suitable position sensor 6 is selected, such as a photoelectric sensor, a magnetic induction sensor or an encoder. The position sensor 6 is fixed on the mounting plate 2, and can face the driver 3 or face away from the driver 3, which is not limited here; the installation position of the position sensor 6 needs to be precisely adjusted to ensure that it can accurately capture the position signal of the driver 3. The data output end of the position sensor 6 is connected to the control system of the driver 3 to realize closed-loop control. The driver 3 (such as a servo motor or a cylinder) can be adjusted according to the position information fed back by the sensor to ensure the precise positioning of the material conveying device 1. Through this embodiment, the position sensor 6 provides real-time position feedback for the mobile module 100, so that the driving member 3 can be adjusted according to the deviation between the actual position and the target position, thereby achieving precise control of the position of the material feeding device 1, and improving the automation level and operation accuracy of the entire plasma cleaning equipment.

[0039] In one embodiment of the present invention, Figure 3 As shown, the moving module 100 further includes at least two limiting blocks 7 , each limiting block 7 is connected to the mounting plate 2 , and the two limiting blocks 7 are respectively located at opposite ends of the guide rail 5 .

[0040] In one embodiment, the moving module 100 also includes at least two stoppers 7. The stoppers 7 are provided to ensure the stability of the material transfer device 1 during movement and prevent the material transfer device 1 from exceeding its limit during movement, potentially causing the material transfer device 1 to detach from the plasma cleaning equipment. The stoppers 7 are designed to interact with the guide rail 5 and typically have a shape that matches the groove or edge of the guide rail 5 to ensure that the material transfer device 1 stops moving when it reaches its limit position. At least two stoppers 7 are fixed to the mounting plate 2, one at each opposite end of the guide rail 5. This provides a stop for the material transfer device 1 throughout the entire travel range of the guide rail 5. The stoppers 7 are mounted at each end of the guide rail 5 to ensure that the material transfer device 1 contacts the material transfer device 1 or the slider 43 when the material transfer device 1 reaches its starting and ending positions on the guide rail 5, preventing further movement. The stoppers 7 can be connected to the mounting plate 2 by bolts, welding, or other fixing methods to ensure that the stoppers 7 do not loosen or shift during movement of the material transfer device 1. The material of the limit block 7 should be strong enough to withstand the impact of the material transfer device 1 and have a certain degree of wear resistance. Commonly used materials include steel, aluminum alloy or engineering plastics. The installation position of the limit block 7 can be adjusted as needed to adapt to different travel requirements. At the same time, it is necessary to regularly check the wear of the limit block 7 and perform maintenance or replacement in a timely manner. In this way, the limit block 7 provides an effective extreme position limit for the mobile module 100, preventing the material transfer device 1 from exceeding the predetermined travel during movement, protecting the safety of the equipment and operators, and also ensuring the stability and reliability of the material transfer process.

[0041] In one embodiment of the present invention, Figure 2 and Figure 4 As shown, the transmission assembly 4 further includes a support seat 44 , which is connected to the mounting plate 2 , and the screw rod 42 is rotatably disposed on the support seat 44 , and the support seat 44 is located on the side of the mounting plate 2 facing the driving member 3 .

[0042] In this embodiment, the transmission assembly 4 also includes a support base 44, which is used to fix and support the screw 42, ensuring the stable rotation of the screw 42, reducing vibration and tilt, and improving transmission accuracy. The support base 44 is connected to the mounting plate 2 by an appropriate mechanical connection method (such as bolting, welding, etc.) to ensure the stability of the support base 44 during the movement of the material transmission device 1. The support base 44 is located on the side of the mounting plate 2 facing the driver 3. This design allows the rotating part of the screw 42 to be close to the driver 3, facilitating the transmission of power. The rotating part of the screw 42 is located on the support base 44 and is usually fixed to the support base 44 by bearings 45 or other supporting structures to achieve smooth rotational movement of the screw 42. The material of the support base 44 should have sufficient mechanical strength and rigidity to withstand the forces generated by the rotation of the screw 42. Common materials include cast iron, steel, or aluminum alloy. The design of the support base 44 should facilitate the adjustment of the coaxiality and straightness of the screw 42. At the same time, the wear of the screw 42 and the support base 44 should be regularly checked and maintained in a timely manner. In this way, the support base 44 provides a stable support for the screw rod 42, ensuring the high precision and high reliability of the transmission assembly 4, while also facilitating the installation and maintenance of the transmission system.

[0043] In one embodiment of the present invention, Figure 4 As shown, the transmission assembly 4 further includes a bearing 45 , the support seat 44 is provided with a connecting hole 44 a , the bearing 45 is inserted into the connecting hole 44 a , and the screw rod 42 and the inner ring of the bearing 45 are interference fit.

[0044] In one embodiment, the installation of bearing 45 in transmission assembly 4 is critical for ensuring the stable operation of screw 42. Support base 44, used to secure and support bearing 45, is connected to mounting plate 2 via connecting hole 44a. Bearing 45 is inserted and positioned within connecting hole 44a of support base 44, ensuring its stable positioning within support base 44. Screw 42 and the inner ring of bearing 45 utilize an interference fit. This creates a preload between the inner ring of bearing 45 and screw 42, preventing relative slippage of bearing 45 on screw 42 during operation, thereby ensuring accurate and stable transmission. Bearing 45 is typically installed using specialized tools or methods, such as a bearing assembly bushing and specialized tools, to avoid direct impact on bearing 45 and ensure proper installation and preload. The outer and inner rings of bearing 45 are typically made of bearing steel, while the rolling elements can be made of steel or ceramic. The retainer is typically made of engineering plastic or steel plate. These materials are selected to ensure the strength, wear resistance, and service life of bearing 45. The installation of bearing 45 requires consideration of the direction and magnitude of the load, as well as the rigidity and stability of support base 44. The installation position of bearing 45 should ensure the rotational accuracy of screw 42 and the centering of support base 44. Bearing 45 provides stable support for screw 42, ensuring high precision and reliability of transmission assembly 4, while also facilitating installation and maintenance of the transmission system.

[0045] In one embodiment of the present invention, Figure 2 As shown, the mounting plate 2 is provided with a sliding channel 2a, which is located between the screw rod 42 and the material transfer device 1, and the material transfer device 1 is connected to the slider 43 via the sliding channel 2a.

[0046] In this embodiment, the mounting plate 2 is provided with a sliding channel 2a. The sliding channel 2a on the mounting plate 2 is used to guide the connection between the material transfer device 1 and the slider 43 to drive the material transfer device 1 to move. Specifically, the mounting plate 2 is provided with a sliding channel 2a. The design dimensions of the sliding channel 2a need to match the dimensions of the material transfer device 1 and the slider 43 to ensure smooth sliding and precise positioning. The sliding channel 2a is located between the screw 42 and the material transfer device 1. Its position and layout are intended to enable the material transfer device 1 to move linearly along the axial direction of the screw 42. At the same time, it also allows the material transfer device 1 and the transmission assembly 4 to be separated to avoid affecting the material transfer operation of the material transfer device 1. The material transfer device 1 is connected to the slider 43 via the sliding channel 2a. This connection method allows the slider 43 to move freely within the sliding channel 2a while maintaining synchronization with the material transfer device 1. In this way, the mounting plate 2 isolates the material transfer device 1 and the transmission assembly 4 through the sliding channel 2a, preventing the transmission assembly 4 from interfering with the material transfer device 1. The sliding channel 2a provides precise guidance for the material transfer device 1, so that the material transfer device 1 can move smoothly and accurately along the predetermined path, thereby improving the efficiency and reliability of the entire plasma cleaning equipment.

[0047] In one embodiment of the present invention, Figure 5 As shown, the transmission assembly 4 further includes a connecting member 46, which has a fixed section 461 detachably connected to the material transmission device 1 and a connecting section 462 detachably connected to the slider 43, and the connecting member 46 is disposed in the sliding channel 2a.

[0048] In this embodiment, the transmission assembly 4 also includes a connector 46, which removably connects the material transfer device 1 to the slider 43. Specifically, the connector 46 comprises a fixed section 461, which is removably connected to the material transfer device 1, and a connecting section 462, which is removably connected to the slider 43. The fixed section 461 is used to connect to the material transfer device 1, while the connecting section 462 is used to connect to the slider 43. The fixed section 461 is removably connected to the material transfer device 1 through a mechanical connection such as bolts, pins, snaps, or threads. The connecting section 462 is also removably connected to the slider 43 through bolts, pins, snaps, or threads, allowing for quick disassembly and reassembly when needed. The connector 46 is inserted into the sliding channel 2a defined in the mounting plate 2. This design allows the connector 46 to move freely within the sliding channel 2a while maintaining connection to the material transfer device 1 and the slider 43. The material of the connector 46 needs to be strong and durable enough to withstand repeated disassembly and assembly. Common materials include steel, aluminum alloy, or high-grade engineering plastics. With this design, the connecting member 46 provides a secure and convenient connection method, so that the material transfer device 1 can be quickly separated from the slider 43 or other components when needed, which is convenient for maintenance and adjustment.

[0049] In one embodiment of the present invention, Figure 5 As shown, an adjustment notch is provided on the connecting member 46 , and the adjustment notch is located at an end of the connecting section 462 away from the fixing section 461 .

[0050] In one embodiment, an adjustment notch is provided on the connector 46 of the transmission assembly 4 for fine-tuning and precise positioning. The adjustment notch allows an operator or an automated tool to make fine adjustments when the connecting section 462 is connected to the slider 43 to ensure the correct position and alignment of the material transfer device 1. The adjustment notch is located at the end of the connecting section 462 away from the fixed section 461. This design allows the connector 46 to have a larger adjustment range when connected to the slider 43. The adjustment notch can be in a straight line or arc shape. The size and shape of the adjustment notch should facilitate the connection adjustment between the connector 46 and the slider 43. By adjusting the notch, the position of the connector 46 can be fine-tuned to adapt to different position or angle requirements of the material transfer device 1, ensuring the precise fit of the transmission system. Through this design, the connector 46 not only provides the convenience of detachability, but also increases the flexibility of adjustment, making the entire transmission assembly 4 more adaptable to diverse operational requirements.

[0051] The present invention also provides a plasma cleaning device, comprising a loading module, a cleaning module, and a movable module 100. The specific structure of the movable module 100 is similar to that of the aforementioned embodiments. Since the present plasma cleaning device utilizes all the technical solutions of all the aforementioned embodiments, it at least possesses all the beneficial effects brought about by the technical solutions of the aforementioned embodiments, and therefore will not be described in detail here. The loading module is used to push the sheet to be cleaned onto the movable module 100; the cleaning module is used to clean the sheet to be cleaned; and the movable module 100 is used to transfer the sheet to be cleaned from the loading module to the cleaning module.

[0052] In this embodiment, the plasma cleaning equipment includes a loading module, a cleaning module, and a moving module 100. This design allows the webs to be cleaned to be automatically transferred from one workstation to another, thereby improving the efficiency and automation of the cleaning process. The loading module is responsible for feeding the webs to be cleaned into the cleaning process. It typically includes a web storage area and a push mechanism to push the webs onto the moving module 100. The cleaning module is the core of the cleaning process and may include a plasma generator, a vacuum chamber, and a control system. Here, the webs are exposed to plasma to remove surface contaminants. The moving module 100 is responsible for accurately transferring the webs from the loading module to the cleaning module and then removing them after cleaning. The moving module 100 includes a feeder 1, a mounting plate 2, a drive member 3, and a transmission assembly 4. This design allows the position of the feeder 1 to be precisely adjusted to accommodate webs of varying sizes, ensuring appropriate clearances between the feeder 1 and the loading and cleaning modules, thereby reducing the risk of webs becoming stuck or damaged.

[0053] The above description is merely an exemplary embodiment of the present invention and does not limit the patent scope of the present invention. All equivalent structural transformations made using the contents of the present invention specification and drawings under the technical concept of the present invention, or direct / indirect application in other related technical fields are included in the patent protection scope of the present invention.

Claims

1. A mobile module, characterized in that: The mobile module includes: Material conveying device (1); A mounting plate (2), wherein the mounting plate (2) is slidably connected to the material transfer device (1); a driving member (3), the driving member (3) being connected to the mounting plate (2); and A transmission assembly (4), the transmission assembly (4) comprising a transmission member (41), a screw rod (42), and a slider (43) threadedly connected to the screw rod (42); the transmission member (41) connects the output end of the driving member (3) and the screw rod (42), the screw rod (42) is rotatably connected to the mounting plate (2), the screw rod (42) extends along the material transmission direction of the material transmission device (1), and the slider (43) is connected to the material transmission device (1); The driving member (3) is capable of driving the transmission member (41) to drive the screw rod (42) to rotate, so that the slider (43) drives the material transfer device (1) to move along the axial direction of the screw rod (42).

2. The mobile module according to claim 1, wherein: The movable module comprises a guide rail (5), the guide rail (5) being connected to the mounting plate (2), the guide rail (5) extending along the axial direction of the screw rod (42), and the guide rail (5) being located on a side of the mounting plate (2) facing the material conveying device (1).

3. The mobile module according to claim 2, wherein: The moving module comprises a position sensor (6), the position sensor (6) is connected to the mounting plate (2), the position sensor (6) is located on a side of the mounting plate (2) facing the driving member (3), and the position sensor (6) is electrically connected to the driving member (3).

4. The mobile module according to claim 3, wherein: The movable module further comprises at least two limit blocks (7), each of the limit blocks (7) is connected to the mounting plate (2), and the two limit blocks (7) are respectively located at opposite ends of the guide rail (5).

5. The mobile module according to any one of claims 1 to 4, wherein: The transmission assembly (4) further includes a support seat (44), the support seat (44) being connected to the mounting plate (2), the screw rod (42) being rotatably disposed on the support seat (44), and the support seat (44) being located on a side of the mounting plate (2) facing the driving member (3).

6. The mobile module according to claim 5, wherein: The transmission assembly (4) further includes a bearing (45), the support seat (44) is provided with a connecting hole (44a), the bearing (45) is inserted into the connecting hole (44a), and the screw rod (42) is interference-fitted with the inner ring of the bearing (45).

7. The mobile module according to claim 6, wherein: The mounting plate (2) is provided with a sliding channel (2a), the sliding channel (2a) is located between the screw rod (42) and the material transfer device (1), and the material transfer device (1) is connected to the slider (43) through the sliding channel (2a).

8. The mobile module according to claim 7, wherein: The transmission assembly (4) further comprises a connecting member (46), wherein the connecting member (46) comprises a fixed section (461) detachably connected to the material transmission device (1), and a connecting section (462) detachably connected to the slider (43), and the connecting member (46) is provided through the sliding channel (2a).

9. The mobile module according to claim 8, wherein: An adjustment notch (46a) is provided on the connecting piece (46), and the adjustment notch (46a) is located at an end of the connecting section (462) away from the fixing section (461).

10. A plasma cleaning device, characterized in that: include: A loading module, the loading module is used to push the sheet to be cleaned to the moving module; A cleaning module, the cleaning module is used to clean the sheet to be cleaned; as well as The mobile module according to any one of claims 1 to 9, wherein the mobile module is used to transfer the sheet to be cleaned from the loading module to the cleaning module.

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