Cooling structure of tail gas vertical pipe of polycrystalline silicon reduction furnace

Abstract

The utility model discloses a cooling structure for tail gas vertical pipes of a polycrystalline silicon reduction furnace. The cooling structure comprises a chassis and a plurality of tail gas vertical pipes arranged on the chassis, tail gas vertical pipe cooling assemblies are arranged on the plurality of tail gas vertical pipes, and the tail gas vertical pipe cooling assemblies are used for cooling the plurality of tail gas vertical pipes; an exhaust assembly connected with the chassis and the tail gas vertical pipe is arranged on the tail gas vertical pipe cooling assembly, and the exhaust assembly is used for exhausting air in the chassis and the tail gas vertical pipe; according to the polycrystalline silicon reduction furnace, the tail gas vertical pipe cooling assembly, the exhaust assembly and the chassis cooling assembly are arranged, the tail gas vertical pipe and the chassis can be effectively cooled respectively, the cooling effect is improved, and normal use of the polycrystalline silicon reduction furnace is guaranteed.

Description

Technical Field

[0001] The utility model belongs to the technical field of polysilicon reduction furnaces, and in particular relates to a cooling structure of a tail gas vertical pipe of a polysilicon reduction furnace. Background Art

[0002] The polysilicon reduction furnace is a key equipment in the polysilicon production process.

[0003] In the conventional arrangement of cooling water for the chassis of a polysilicon reduction furnace, the most common arrangement is to place the water inlet on the jacket of the exhaust gas outlet ring pipe outlet, and after flowing through the exhaust pipe vertical pipe through the upper surface of the chassis, it flows out from the center of the chassis. This cooling structure arrangement is based on the relatively crowded characteristics of the chassis, and the intake pipe, electrode, exhaust pipe and other components are arranged. It is impossible to improve the cooling efficiency by adjusting the flow rate or adjusting the flow channel arrangement. Only one water path is used to cool the chassis, and the focus is on cooling the exhaust gas outlet. When the cooling water enters from the exhaust outlet ring pipe, reaches the exhaust pipe vertical pipe and then reaches the chassis, the cooling path is relatively long, the cooling effect is not good, and the same cooling effect cannot be achieved for the exhaust vertical pipe and the chassis. For this reason, we propose a cooling structure for the exhaust vertical pipe of a polysilicon reduction furnace. Utility Model Content

[0004] The purpose of the utility model is to provide a cooling structure for a tail gas vertical pipe of a polysilicon reduction furnace, so as to solve the problems raised in the above background technology.

[0005] To achieve the above-mentioned object, the present invention provides the following technical solutions: a cooling structure for an exhaust gas vertical pipe of a polysilicon reduction furnace, comprising a chassis and a plurality of exhaust gas vertical pipes arranged on the chassis;

[0006] A plurality of the exhaust standpipes are provided with an exhaust standpipe cooling assembly, and the exhaust standpipe cooling assembly is used to cool the plurality of the exhaust standpipes;

[0007] The exhaust standpipe cooling assembly is provided with an exhaust assembly connected to the exhaust standpipe, and the exhaust assembly is used to discharge the air in the exhaust standpipe;

[0008] A chassis cooling assembly is provided on the chassis, and the chassis cooling assembly is used to cool the chassis.

[0009] Preferably, the exhaust standpipe comprises an inner exhaust pipe and an outer exhaust pipe, the inner exhaust pipe is eccentrically arranged inside the outer exhaust pipe, and an exhaust standpipe jacket is formed between the inner exhaust pipe and the outer exhaust pipe.

[0010] Preferably, the exhaust standpipe cooling assembly includes an exhaust standpipe cooling water inlet, a cooling ring pipe, a semicircular baffle and an exhaust standpipe cooling water outlet;

[0011] Each exhaust standpipe is provided with an exhaust standpipe cooling water inlet, and the exhaust standpipe cooling water inlet is communicated with the exhaust standpipe jacket, the cooling ring pipe is connected to the exhaust outer pipes on a plurality of the exhaust standpipes, and the cooling ring pipe is provided on a section of the exhaust standpipe close to the chassis;

[0012] The semicircular baffle is arranged in the exhaust vertical pipe jacket, and the lower end of the semicircular baffle is connected to the exhaust outer pipe, and the bottom of the semicircular baffle is provided with a drain port, and the upper end of the semicircular baffle is provided with a plurality of U-shaped notches;

[0013] The cooling water outlet of the tail gas vertical pipe is connected to the cooling ring pipe.

[0014] Preferably, the exhaust assembly includes an exhaust pipe, an end cover, an exhaust elbow and an exhaust valve;

[0015] The exhaust pipe is an arc-shaped structure, and is arranged outside the cooling ring pipe. End caps are provided at both ends of the exhaust pipe.

[0016] An exhaust cavity is provided on the inner side of the exhaust outer pipe, a notch is provided at the upper end of the exhaust cavity, the exhaust cavity is connected to the exhaust pipe through a connecting pipe, one end of the exhaust pipe is connected to the cooling water outlet of the exhaust vertical pipe through the connecting pipe, the upper end of the cooling water outlet of the exhaust vertical pipe is connected to the chassis through the exhaust elbow, and the exhaust valve is provided on the outer side of the chassis.

[0017] Preferably, two exhaust pipes are provided, and the two exhaust pipes are symmetrically arranged on the outside of the cooling ring pipe with the cooling water outlet of the tail gas vertical pipe as the center.

[0018] Preferably, the chassis cooling assembly includes a chassis cooling water inlet and a chassis cooling water outlet;

[0019] The chassis cooling water inlet is arranged on the central vertical pipe, and the chassis cooling water inlet is connected to the central vertical pipe jacket on the central vertical pipe, the central vertical pipe jacket on the central vertical pipe is connected to the chassis inner cavity, and the chassis cooling water outlet is connected to the chassis inner cavity.

[0020] Compared with the prior art, the beneficial effects of the present invention are:

[0021] 1. The utility model is equipped with an exhaust standpipe cooling assembly. When in use, cooling water enters the exhaust standpipe jacket through the exhaust standpipe cooling water inlet to cool the exhaust standpipe. The cooling water then enters the cooling loop pipe through the exhaust standpipe jacket and flows to the exhaust standpipe cooling water outlet for discharge, thereby cooling the exhaust standpipe.

[0022] 2. In the present invention, the semicircular baffle is arranged in the exhaust standpipe jacket, and the lower end of the semicircular baffle is connected to the exhaust outer pipe. A drain port is provided at the bottom of the semicircular baffle, and a plurality of U-shaped notches are provided at the upper end of the semicircular baffle. This can effectively utilize the limited space in the exhaust standpipe jacket, increase the contact surface between the cooling water and the exhaust standpipe, reduce the cooling dead zone, and improve the cooling efficiency.

[0023] 3. The utility model is equipped with an exhaust assembly. When in use, when cooling water enters from the exhaust standpipe and the center standpipe, the air in the exhaust standpipe quickly enters the exhaust chamber through the notch, then enters the exhaust pipe from the exhaust chamber through the connecting pipe, gradually gathers at the upper end of the cooling water outlet of the exhaust standpipe, enters the chassis through the exhaust elbow, and is discharged through the exhaust valve. This can quickly discharge the residual air in the cooling water flow channel, increase the contact area between the cooling water and the exhaust standpipe, and improve the cooling efficiency.

[0024] 4. The utility model is provided with a chassis cooling assembly. When in use, cooling water enters the central vertical pipe jacket on the central vertical pipe from the chassis cooling water inlet, then enters the inner cavity of the chassis from the central vertical pipe jacket to cool the chassis, and then is discharged from the chassis cooling water outlet, which can effectively cool down the chassis. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 This is a schematic diagram of the main cross-sectional structure of the utility model;

[0026] Figure 2 This is a schematic diagram of a top-view cross-sectional structure of the present utility model;

[0027] Figure 3 It is a partial cross-sectional structural schematic diagram of the utility model;

[0028] Figure 4 for Figure 2 Schematic diagram of the enlarged structure of A in the middle;

[0029] Figure 5 It is a partial structural diagram of the utility model;

[0030] Figure 6 This is a schematic cross-sectional view of the semicircular arc baffle of the present invention.

[0031] In the figure: 1. chassis; 2. exhaust vertical pipe; 201. exhaust inner pipe; 202. exhaust outer pipe; 3. exhaust vertical pipe cooling assembly; 301. exhaust vertical pipe cooling water inlet; 302. cooling ring pipe; 303. semi-circular arc baffle; 304. exhaust vertical pipe cooling water outlet; 305. drain port; 306. U-shaped notch; 4. exhaust assembly; 401. exhaust pipe; 402. end cover; 403. exhaust elbow; 404. exhaust valve; 405. exhaust cavity; 406. notch; 407. connecting pipe; 5. chassis cooling assembly; 501. chassis cooling water inlet; 502. chassis cooling water outlet; 6. center vertical pipe. DETAILED DESCRIPTION

[0032] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0033] See also Figures 1-6 The cooling structure of the tail gas riser of the polysilicon reduction furnace provided by the present invention includes a chassis 1 and a plurality of tail gas risers 2 arranged on the chassis 1. The tail gas risers 2 include an inner tail gas pipe 201 and an outer tail gas pipe 202. The inner tail gas pipe 201 is eccentrically arranged inside the outer tail gas pipe 202. A tail gas riser jacket is formed between the inner tail gas pipe 201 and the outer tail gas pipe 202.

[0034] A plurality of exhaust standpipes 2 are provided with exhaust standpipe cooling components 3, which are used to cool the plurality of exhaust standpipes 2. The exhaust standpipe cooling components 3 include an exhaust standpipe cooling water inlet 301, a cooling ring pipe 302, a semicircular baffle 303 and an exhaust standpipe cooling water outlet 304. Each exhaust standpipe 2 is provided with an exhaust standpipe cooling water inlet 301, and the exhaust standpipe cooling water inlet 301 is connected to the exhaust standpipe jacket, and the cooling ring pipe 302 and The exhaust outer pipes 202 on several exhaust standpipes 2 are connected, and a cooling ring pipe 302 is provided on a section of the exhaust standpipe 2 near the chassis 1; a semicircular baffle 303 is provided in the exhaust standpipe jacket, and the lower end of the semicircular baffle 303 is connected to the exhaust outer pipe 202, and a drain port 305 is provided at the bottom of the semicircular baffle 303, and a plurality of U-shaped notches 306 are opened at the upper end of the semicircular baffle 303; the exhaust standpipe cooling water outlet 304 is connected to the cooling ring pipe 302;

[0035] The utility model is provided with an exhaust standpipe cooling assembly 3. When in use, cooling water enters the exhaust standpipe jacket through the exhaust standpipe cooling water inlet 301 to cool the exhaust standpipe 2. The cooling water then enters the cooling loop 302 through the exhaust standpipe jacket and flows to the exhaust standpipe cooling water outlet 304 for discharge, thereby cooling the exhaust standpipe 2.

[0036] In the present invention, the semicircular baffle 303 is arranged in the exhaust standpipe jacket, and the lower end of the semicircular baffle 303 is connected to the exhaust outer pipe 202. A drain port 305 is provided at the bottom of the semicircular baffle 303, and a plurality of U-shaped notches 306 are provided at the upper end of the semicircular baffle 303. This can effectively utilize the limited space in the exhaust standpipe jacket, increase the contact surface between the cooling water and the exhaust standpipe 2, reduce the cooling dead zone, and improve the cooling efficiency.

[0037] The exhaust standpipe cooling assembly 3 is provided with an exhaust assembly 4 connected to the exhaust standpipe 2. The exhaust assembly 4 is used to discharge the air in the exhaust standpipe 2. The exhaust assembly 4 includes an exhaust pipe 401, an end cover 402, an exhaust elbow 403 and an exhaust valve 404. The exhaust pipe 401 is an arc-shaped structure. The exhaust pipe 401 is arranged on the outside of the cooling ring pipe 302. The end covers 402 are provided at both ends of the exhaust pipe 401. An exhaust cavity 405 is provided on the inside of the exhaust outer pipe 202. The upper end of the exhaust cavity 405 is open. A notch 406 is provided. The exhaust chamber 405 is connected to the exhaust pipe 401 via a connecting pipe 407. One end of the exhaust pipe 401 is connected to the exhaust standpipe cooling water outlet 304 via the connecting pipe 407. The upper end of the exhaust standpipe cooling water outlet 304 is connected to the chassis 1 via an exhaust elbow 403. The exhaust valve 404 is provided on the outside of the chassis 1. Two exhaust pipes 401 are provided, and the two exhaust pipes 401 are symmetrically arranged on the outside of the cooling ring pipe 302 with the exhaust standpipe cooling water outlet 304 as the center.

[0038] The utility model is provided with an exhaust assembly 4. When in use, when cooling water enters from the exhaust standpipe 2 and the central standpipe 6, the air in the exhaust standpipe 2 quickly enters the exhaust chamber 405 through the notch 406, and then enters the exhaust pipe 401 from the exhaust chamber 405 through the connecting pipe 407, gradually converges to the upper end of the cooling water outlet 304 of the exhaust standpipe, and enters the chassis 1 through the exhaust elbow 403, and is discharged by the exhaust valve 404. This can quickly discharge the residual air in the cooling water flow channel, increase the contact area between the cooling water and the exhaust standpipe 2, and improve the cooling efficiency.

[0039] A chassis cooling assembly 5 is provided on the chassis 1. The chassis cooling assembly 5 is used to cool the chassis 1. The chassis cooling assembly 5 includes a chassis cooling water inlet 501 and a chassis cooling water outlet 502. The chassis cooling water inlet 501 is provided on the central vertical pipe 6 and is in communication with the central vertical pipe jacket on the central vertical pipe 6. The central vertical pipe jacket on the central vertical pipe 6 is in communication with the inner cavity of the chassis 1. The chassis cooling water outlet 502 is in communication with the inner cavity of the chassis 1.

[0040] The utility model is provided with a chassis cooling assembly 5. When in use, cooling water enters the central vertical pipe jacket on the central vertical pipe 6 from the chassis cooling water inlet 501, then enters the inner cavity of the chassis 1 from the central vertical pipe jacket to cool the chassis 1, and then is discharged from the chassis cooling water outlet 502, which can effectively cool down the chassis 1.

[0041] The utility model is provided with an exhaust vertical pipe cooling component 3, an exhaust component 4 and a chassis cooling component 5, which can effectively cool the exhaust vertical pipe and the chassis respectively, improve the cooling effect, and ensure the normal use of the polysilicon reduction furnace.

[0042] In summary, the cooling structure of the tail gas riser of a polysilicon reduction furnace provided in this embodiment is used as follows: during use, cooling water enters the tail gas riser jacket through the tail gas riser cooling water inlet 301 to cool the tail gas riser 2, then enters the cooling loop 302 through the tail gas riser jacket, flows to the tail gas riser cooling water outlet 304 for discharge, and then enters the central riser jacket on the central riser 6 through the chassis cooling water inlet 501, then enters the inner cavity of the chassis 1 through the central riser jacket to cool the chassis 1, and then is discharged through the chassis cooling water outlet 502.

[0043] When cooling water enters from the exhaust standpipe 2 and the central standpipe 6, the air in the exhaust standpipe 2 quickly enters the exhaust chamber 405 through the notch 406, and then enters the exhaust pipe 401 from the exhaust chamber 405 through the connecting pipe 407, gradually converging to the upper end of the exhaust standpipe cooling water outlet 304, and enters the chassis 1 through the exhaust elbow 403, and is discharged through the exhaust valve 404. This can quickly discharge the residual air in the cooling water flow channel, increase the contact area between the cooling water and the exhaust standpipe 2, and improve the cooling efficiency.

[0044] Although the embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations may be made to these embodiments without departing from the principles and spirit of the present invention, and the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A cooling structure for a tail gas vertical pipe of a polysilicon reduction furnace, characterized in that: It comprises a chassis (1) and a plurality of exhaust vertical pipes (2) arranged on the chassis (1); A plurality of the exhaust standpipes (2) are provided with an exhaust standpipe cooling assembly (3), and the exhaust standpipe cooling assembly (3) is used to cool the plurality of the exhaust standpipes (2); The exhaust standpipe cooling assembly (3) is provided with an exhaust assembly (4) connected to the exhaust standpipe (2), and the exhaust assembly (4) is used to discharge the air in the exhaust standpipe (2); A chassis cooling assembly (5) is provided on the chassis (1), and the chassis cooling assembly (5) is used to cool the chassis (1).

2. The cooling structure of the tail gas vertical pipe of a polysilicon reduction furnace according to claim 1, characterized in that: The tail gas standpipe (2) comprises an inner tail gas pipe (201) and an outer tail gas pipe (202); the inner tail gas pipe (201) is eccentrically arranged inside the outer tail gas pipe (202); and an tail gas standpipe jacket is formed between the inner tail gas pipe (201) and the outer tail gas pipe (202).

3. The cooling structure of the tail gas vertical pipe of a polysilicon reduction furnace according to claim 2, characterized in that: The exhaust standpipe cooling assembly (3) comprises an exhaust standpipe cooling water inlet (301), a cooling ring pipe (302), a semicircular baffle (303) and an exhaust standpipe cooling water outlet (304); Each exhaust vertical pipe (2) is provided with an exhaust vertical pipe cooling water inlet (301), and the exhaust vertical pipe cooling water inlet (301) is communicated with the exhaust vertical pipe jacket, the cooling ring pipe (302) is connected to the exhaust outer pipe (202) on a plurality of the exhaust vertical pipes (2), and the cooling ring pipe (302) is provided on a section of the exhaust vertical pipe (2) close to the chassis (1); The semicircular baffle (303) is arranged in the exhaust vertical pipe jacket, and the lower end of the semicircular baffle (303) is connected to the exhaust outer pipe (202), and a drain port (305) is provided at the bottom of the semicircular baffle (303), and a plurality of U-shaped notches (306) are opened at the upper end of the semicircular baffle (303); The tail gas vertical pipe cooling water outlet (304) is connected to the cooling ring pipe (302).

4. The cooling structure of the tail gas vertical pipe of a polysilicon reduction furnace according to claim 3, characterized in that: The exhaust assembly (4) comprises an exhaust pipe (401), an end cover (402), an exhaust elbow (403) and an exhaust valve (404); The exhaust pipe (401) is an arc-shaped structure, the exhaust pipe (401) is arranged outside the cooling ring pipe (302), and end covers (402) are provided at both ends of the exhaust pipe (401); An exhaust cavity (405) is provided on the inner side of the exhaust outer pipe (202), a notch (406) is provided at the upper end of the exhaust cavity (405), the exhaust cavity (405) is connected to the exhaust pipe (401) via a connecting pipe (407), one end of the exhaust pipe (401) is connected to the exhaust vertical pipe cooling water outlet (304) via the connecting pipe (407), the upper end of the exhaust vertical pipe cooling water outlet (304) is connected to the chassis (1) via the exhaust elbow (403), and the exhaust valve (404) is provided on the outer side of the chassis (1).

5. The cooling structure of the tail gas vertical pipe of a polysilicon reduction furnace according to claim 4, characterized in that: Two exhaust pipes (401) are provided, and the two exhaust pipes (401) are symmetrically arranged on the outside of the cooling ring pipe (302) with the exhaust vertical pipe cooling water outlet (304) as the center.

6. The cooling structure of the tail gas vertical pipe of a polysilicon reduction furnace according to claim 1, characterized in that: The chassis cooling assembly (5) comprises a chassis cooling water inlet (501) and a chassis cooling water outlet (502); The chassis cooling water inlet (501) is arranged on the central vertical pipe (6), and the chassis cooling water inlet (501) is communicated with the central vertical pipe jacket on the central vertical pipe (6), the central vertical pipe jacket on the central vertical pipe (6) is communicated with the inner cavity of the chassis (1), and the chassis cooling water outlet (502) is communicated with the inner cavity of the chassis (1).

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