Exposure workpiece clamping device and exposure equipment

Abstract

The utility model provides a clamping device for an exposure workpiece and exposure equipment. The clamping device comprises a clamping part, a first lifting part, a second lifting part and a hinge part. The clamping part is provided with a lower clamping plate assembly and an upper clamping plate assembly, and the upper clamping plate assembly is arranged above the lower clamping plate assembly; the first lifting component is connected with one side of the upper clamping plate assembly, the second lifting component is connected with the other side of the upper clamping plate assembly, and the first lifting component and the second lifting component can drive the corresponding side of the upper clamping plate assembly to ascend or descend. The hinge part comprises a pin shaft, a hinge seat and a third driving part, the pin shaft is installed in the hinge seat, one side of the upper clamping plate assembly is connected with the pin shaft and can rotate with the pin shaft as a rotating pivot, and the third driving part is connected with one end of the pin shaft and can drive the pin shaft to be disengaged from and restore connection with the hinge seat and the upper clamping plate assembly. The clamping device can be opened in different modes and is suitable for different application scenes, and the operation efficiency can be improved.

Description

Technical Field

[0001] The present application relates to the field of semiconductor display technology, and in particular to a clamping device and exposure equipment for exposing a workpiece. Background Art

[0002] The metal mask is an important tool in the preparation process of OLED (organic light-emitting diode) display panels. It is mainly used for evaporation of organic materials or to limit the deposition area of ​​film materials during the formation of the encapsulation layer.

[0003] The metal mask production process includes pre-cleaning, film / photoresist coating, exposure, development, etching, and film stripping. During the exposure process, a clamping device is required to hold the workpiece flat and maintain it in place to prevent vibration caused by external factors, which could affect exposure accuracy.

[0004] After being used for a period of time, the clamping device needs to be cleaned and maintained. The clamping device in the prior art has a single opening and closing method, which is not convenient for operations in various usage scenarios such as exposure feeding, cleaning and maintenance.

[0005] In view of this, the present application provides a clamping device and exposure equipment for an exposure workpiece, which is intended to improve the existing clamping device and make it more convenient to operate in various usage scenarios. Summary of the Invention

[0006] In order to solve or improve the above-mentioned technical problems existing in the prior art, a first aspect of an embodiment of the present application provides a clamping device for an exposure workpiece, comprising:

[0007] a clamping member having a lower clamping plate assembly and an upper clamping plate assembly, wherein the upper clamping plate assembly is disposed above the lower clamping plate assembly; and

[0008] a first lifting member and a second lifting member, wherein

[0009] The first lifting component is connected to one side of the upper clamping plate assembly and can drive the corresponding side of the upper clamping plate assembly to lift or lower.

[0010] The second lifting component is connected to the other side of the upper clamping plate assembly and can drive the other side of the upper clamping plate assembly to lift or lower; and

[0011] The hinge component includes a pin, a hinge seat and a third driving member,

[0012] The pin is installed in the hinge seat.

[0013] One side of the upper clamping plate assembly is connected to the pin shaft, and can rotate with the pin shaft as the rotation hub.

[0014] The third driving member is connected to one end of the pin shaft, and can drive the pin shaft to be disconnected from the hinge seat and the upper splint assembly, and can drive the pin shaft to reset and restore the connection between the pin shaft, the hinge seat and the upper splint assembly.

[0015] In the above scheme, by setting a third driving member to drive the pin shaft to move, the pin shaft has the ability to detach from the connection with the hinge seat and the upper clamping plate assembly and restore the connection, that is, it has the ability to detach the upper clamping plate assembly from the connection with the hinge part and restore the connection with the hinge part. When the upper clamping plate assembly is detached from the hinge part, the first lifting member and the second lifting member distributed on both sides of the upper clamping plate assembly can be controlled to lift the two sides of the upper clamping plate assembly respectively, thereby achieving the overall lifting of the upper clamping plate assembly, thereby separating the upper clamping plate assembly from the lower clamping plate assembly, that is, opening the clamping member, which can be used in scenarios such as conveying an exposure workpiece into the clamping member. When the upper clamping plate assembly is connected to the hinge part, the upper clamping plate assembly can be flipped around the pin shaft in the hinge part. By controlling the second lifting member to lift the corresponding side of the upper clamping plate assembly, the clamping member can be opened to a certain angle by flipping the upper clamping plate assembly. In this state, it can be used in scenarios such as cleaning and maintaining the surfaces of the upper and lower clamping plate assemblies facing each other. Therefore, the clamping device for the exposure workpiece provided by this solution can provide operational convenience for many different usage scenarios and can improve production efficiency to a certain extent.

[0016] Further, wherein:

[0017] The first lifting component is connected to one side of the upper clamping plate assembly through a first connecting seat;

[0018] The second lifting component is connected to the other side of the upper clamping plate assembly through a second connecting seat;

[0019] The upper clamping plate assembly is connected to the pin shaft via a third connecting seat.

[0020] In the above scheme, the first connecting seat, the second connecting seat and the third connecting seat can be part of the upper splint assembly, or part of the first lifting component, the second lifting component or the hinge component connected to each other, or can exist independently.

[0021] Furthermore, the second lifting component includes:

[0022] a linear slide mechanism, which is disposed on the lower side of the second connecting seat and extends in a direction away from the upper clamping plate assembly; and

[0023] a second drive member; and

[0024] The second rotating member has two parts that can rotate relative to each other, one of which is connected to the linear slide mechanism, and the other is connected to the second driving member.

[0025] In the above solution, by providing the linear slide mechanism and the second rotating member, when the second driving member is controlled to drive the upper clamping plate assembly to flip, the second driving member itself does not tilt or deflect.

[0026] Furthermore, the first lifting component includes:

[0027] a first driving member; and

[0028] The first rotating member has two parts that can rotate relative to each other, one of which is connected to the first connecting seat, and the other is connected to the first driving member.

[0029] In the above-mentioned scheme, by arranging the first rotating member between the first driving member and the first connecting seat, the first driving member and the upper splint assembly are not disconnected during the flipping process of the upper splint assembly, but a rotating connection is formed with the first rotating member as the rotating hub, which can improve the support of the upper splint assembly during flipping.

[0030] Optionally, the first rotating member and the second rotating member are each independently selected from a universal joint or a hinge.

[0031] Furthermore, the first lifting component includes a first driving member, and the first driving member and the first connecting seat are directly or indirectly in contact with each other and can be separated from each other.

[0032] In the above solution, when the clamping component is opened by flipping the upper clamping plate assembly, the first driving member is controlled to be disconnected from the first connecting seat, thereby eliminating the obstruction of the first driving member to the rotation of the upper clamping plate assembly.

[0033] Optionally, the first driving member, the second driving member and the third driving member are each independently selected from a cylinder, a hydraulic cylinder, a screw lifting mechanism or an electric slide rail lifting mechanism.

[0034] Furthermore, the sum of the number of the first lifting components and the second lifting components is greater than or equal to three.

[0035] In the aforementioned solution, when the sum of the number of the first lifting components and the second lifting components is greater than or equal to three, the lifted upper clamping plate assembly has better stability.

[0036] Furthermore, the lower clamping plate assembly and the upper clamping plate assembly each include a frame and a transparent pressing plate.

[0037] The two transparent pressing plates are respectively arranged on the opposite sides of the frame of the lower clamping plate assembly and the frame of the upper clamping plate assembly.

[0038] In the above solution, the transparent pressing plates in the upper and lower clamping plate assemblies directly contact and clamp the exposure workpiece, and the light emitted by the exposure light source shines onto the exposure workpiece through the transparent pressing plates, thereby achieving exposure.

[0039] Another aspect of an embodiment of the present application provides an exposure device, wherein the exposure device is equipped with a clamping device for an exposure workpiece as described in the first aspect of the embodiment of the present application.

[0040] To sum up, the exposure equipment using the clamping device for the exposure workpiece provided in the aforementioned technical solution or its preferred or optional solution, including the clamping device for the exposure workpiece, can provide operational convenience for many different usage scenarios and can improve the production efficiency of the exposure process to varying degrees.

[0041] In addition, other additional aspects and advantages of the present application will be given in part in the following description, and in part will become obvious from the following description, or will be learned through the practice of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0042] Figure 1 1 is a structural diagram of the main parts of the clamp device in an embodiment of the present application;

[0043] Figure 2 1 is a structural diagram of a hinge component in an embodiment of the present application;

[0044] Figure 3 is a schematic diagram of an embodiment of the present application in which the clamp device is opened by lifting the upper clamping plate assembly;

[0045] Figure 4 is a schematic diagram of an embodiment of the present application in which the clamp device is opened by flipping over the upper clamping plate assembly;

[0046] Figure 5 1 is a schematic diagram of the rotation state of the universal joint in the first lifting component when the clamp device is opened by flipping the upper clamping plate assembly in an embodiment of the present application;

[0047] Note in the figure:

[0048] 1: Clamping part; 2: First lifting part; 3: Second lifting part; 4: Hinge part;

[0049] 11: lower splint assembly; 12: upper splint assembly;

[0050] 101: frame; 102: transparent pressing plate;

[0051] 21: first connecting seat; 22: first rotating member; 23: first connecting member; 24: first driving member;

[0052] 31: second connecting seat; 32: linear slide mechanism; 33: second rotating member; 34: second connecting member; 35: second driving member;

[0053] 41: third connecting seat; 42: pin shaft; 43: hinged seat; 44: third driving member. DETAILED DESCRIPTION

[0054] The present application will now be described more fully below with reference to the accompanying drawings. However, the present application can be implemented in many different ways and should not be construed as limited to the embodiments set forth herein. On the contrary, providing these embodiments herein will make the present application more detailed and complete and fully convey the scope of the present application to those skilled in the art.

[0055] It should be noted that in this application, all directional indications (such as up, down, left, right, etc.) are only used to explain the relative position relationship, movement status, etc. between the various components under a certain specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indication will also change accordingly.

[0056] Furthermore, in this application, terms such as "connected," "fixedly connected," and "connected" should be interpreted broadly. For example, these terms may refer to direct connection or indirect connection through an intermediate medium; they may be fixedly connected (e.g., welded, riveted, etc.) or removably fixedly connected (e.g., bolted) or integrally connected; they may be merely in contact or abutment, separable from each other, or inseparable from each other. Persons of ordinary skill in the art will understand the specific meanings of these terms in this application based on the specific circumstances.

[0057] Furthermore, in this application, terms such as "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Therefore, features specified as "first" or "second" may explicitly or implicitly include at least one of these features.

[0058] In addition, in the present application, when describing a component as having "one end" and "the other end", the "one end" and "the other end" may refer to the two ends of a workpiece in a shape such as a long strip or a rod in its length direction; or they may be used only to distinguish two different positions on the workpiece, and should not be limitedly understood to mean that the workpiece must have a similar shape such as a long strip or a rod.

[0059] In addition, the technical solutions between the various implementation methods of this application can be combined with each other, but they must be based on the ability of ordinary technicians in this field to implement them. When the combination of technical solutions is mutually contradictory or cannot be implemented, it should be deemed that such a combination of technical solutions does not exist and is not within the scope of protection required by this application.

[0060] Like reference numerals refer to like objects throughout this document.

[0061] It should be understood that in order to accurately disclose the structures described in the embodiments in the black and white drawings, in the drawings of this application, the areas where the filling patterns are drawn or partially drawn represent that the areas are solid, rather than openings, through holes or similar structures, such as the attached drawings. Figure 1 The portion indicated by reference numeral 102 is a solid surface, not an opening.

[0062] In view of the actual situation of the above-mentioned prior art, in order to at least solve or improve some of the above-mentioned technical problems existing in the prior art, the embodiment of the present application provides a clamping device for an exposure workpiece, see the attached Figure 1 As shown in , the clamping device includes:

[0063] The clamping component 1 includes a lower clamping plate assembly 11 and an upper clamping plate assembly 12. The upper clamping plate assembly 12 is arranged above the lower clamping plate assembly 11. During the exposure process, the exposure workpiece is clamped between the upper and lower clamping plate assemblies to receive exposure.

[0064] As well as the first lifting component 2 and the second lifting component 3, the first and second lifting components are used to push the upper clamping plate assembly 12 mentioned above, so that the upper clamping plate assembly 12 is lifted as a whole or partially and separated from the lower clamping plate assembly 11 to open the clamping component 1, and by controlling the first lifting component 2 and the second lifting component 3, the lifted upper clamping plate assembly 12 can also be lowered as a whole or in part, so that the upper clamping plate assembly 12 and the lower clamping plate assembly 11 are re-engaged to achieve the clamping of the exposure workpiece by the clamping component 1.

[0065] Among them, the first lifting component 2 is connected to one side of the upper splint assembly 12, and can drive the corresponding side of the upper splint assembly 12 to lift or lower, and the second lifting component 3 is connected to the other side of the upper splint assembly 12, and can drive the other side of the upper splint assembly 12 to lift or lower.

[0066] And hinge part 4, see attached Figure 2As shown in the figure, the hinge component 4 includes a pin 42, a hinge seat 43 and a third drive member 44. The pin 42 is installed in the hinge seat 43. One side of the upper splint assembly 12 is connected to the pin 42, so that the upper splint assembly 12 can rotate with the pin 42 as the rotation pivot. The third drive member 44 is connected to one end of the pin 42, which can drive the pin 42 to disengage from the connection with the hinge seat 43 and the upper splint assembly 12, and can drive the pin 42 to reset, that is, restore the connection between the pin 42 and the hinge seat 43 and the upper splint assembly 12.

[0067] In some usage scenarios, such as in the exposure process, when the exposure workpiece needs to be sent into the clamping component 1 for exposure, the third driving component 44 is first controlled to extract the pin 42 in the hinge seat 43, specifically to extract the pin 42 from the pin hole on the hinge seat 43, so that the pin 42 is disconnected from the hinge seat 43 and the upper clamping plate assembly 12. At this time, the upper clamping plate assembly 12 is no longer restricted by the connection of the pin 42 in the hinge component 4. Then the first lifting component 2 and the second lifting component 3 are controlled to start at the same time, and the upper clamping plate assembly 12 is pushed and lifted as a whole from both sides of the upper clamping plate assembly 12, so that it is separated from the lower clamping plate assembly 11 and raised to a certain height, as shown in FIG. Figure 3 , and then the exposure workpiece is transported from one end of the clamping component 1 to between the upper and lower clamping plate assemblies, and finally the first lifting component 2 and the second lifting component 3 are started again to drive the upper clamping plate assembly 12 to return and re-engage it on the lower clamping plate assembly 11, so that the exposure workpiece is tightly clamped between the upper and lower clamping plate assemblies and enters the exposure waiting state.

[0068] In other usage scenarios, for example, when the interior of the clamping component 1 needs to be cleaned and maintained, the open state of the clamping component 1 obtained by lifting the upper splint assembly 12 as a whole makes it difficult to clean and maintain the interior of the clamping component 1, especially the lower side of the upper splint assembly 12. Therefore, in response to this usage scenario, in this application, the third driving member 44 is first controlled to reinsert the pin 42 that has been separated from the hinge seat 43 into the hinge seat 43, thereby restoring the connection between the pin 42 and the hinge seat 43 and the upper splint assembly 12, and then the second lifting member 3 is started. By controlling the second lifting member 3 to lift the corresponding side of the upper splint assembly 12, the clamping component 1 is opened to a certain angle by flipping the upper splint assembly 12, until the clamping component 1 is opened to a certain angle. Figure 4 In the open state shown in FIG, the lower side of the upper clamping plate assembly 12 is tilted toward the operating station, so that cleaning and maintenance personnel can perform cleaning and maintenance operations more conveniently. After the cleaning and maintenance is completed, the second lifting component 3 is activated again to drive the upper clamping plate assembly 12 back and re-engage it on the lower clamping plate assembly 11, entering the standby state.

[0069] The clamping device for the exposure workpiece provided in the aforementioned solution can provide operational convenience for many different usage scenarios, and can reduce the operational difficulty during use to a certain extent, thereby improving production efficiency.

[0070] In the examples of this application, see the attached Figure 1 and attached Figure 3 As shown in the figure, the first lifting component 2 is connected to one side of the upper clamping plate assembly 12 mentioned above through the first connecting seat 21. Specifically, one end of the first connecting seat 21 is fixedly connected to the upper clamping plate assembly 12, and the other end is connected to the first lifting component 2.

[0071] Further, see Appendix Figure 1 , Attachment Figure 3 and attached Figure 4 As shown in the figure, the second lifting component 3 is connected to the other side of the upper clamping plate assembly 12 mentioned above through the second connecting seat 31. Specifically, one end of the second connecting seat 31 is fixedly connected to the upper clamping plate assembly 12, and the other end is connected to the second lifting component 3.

[0072] Furthermore, attend the Figure 1 and attached Figure 2 As shown in FIG, the upper plate assembly 12 is connected to the pin 42 via the third connecting seat 41. Specifically, one end of the third connecting seat 41 is fixedly connected to one side of the upper plate assembly 12, on the same side as the first lifting member 2, and the other end of the third connecting seat 41 is sleeved on the pin 42 in the hinge seat 43, forming a hinge structure with the pin 42 as the pivot.

[0073] In one embodiment, the first connecting seat 21 , the second connecting seat 31 and the third connecting seat 41 are part of the upper clamping plate assembly 12 .

[0074] In another embodiment, the first connecting seat 21 , the second connecting seat 31 and the third connecting seat 41 exist independently of the upper clamping plate assembly 12 and the first lifting component 2 , the second lifting component 3 and the hinge component 4 .

[0075] In a typical embodiment, see the attached Figure 1 、 Figure 3 and Figure 4 As shown, the second lifting component 3 includes the aforementioned second connecting base 31, as well as a linear slide mechanism 32, a second rotating member 33, and a second driving member 35. The linear slide mechanism 32 is disposed below the second connecting base 31 and extends away from the upper clamping plate assembly 12. The second rotating member 33 has two parts that can rotate relative to each other, one of which is connected to the linear slide mechanism 32 and the other is connected to the second driving member 35. The second driving member 35 is used to provide power for raising and lowering the upper clamping plate assembly 12.

[0076] Furthermore, the linear slide mechanism 32 includes a guide rail and a slider. The guide rail extends away from the upper clamping plate assembly 12. The slider is mounted on the guide rail and can slide freely along the guide rail. A portion of the second rotating member 33 is connected to the slider. It should be understood that the guide rail extension direction herein corresponds to the extension direction of the linear slide mechanism 32.

[0077] Optional, see attached Figure 1 and attached Figure 3 As shown in , the second rotating member 33 and the second driving member 35 are indirectly connected via a second connecting member 34. As a different embodiment, the second connecting member 34 may not be provided, but another part of the second rotating member 33 may be directly connected to the second driving member 35.

[0078] In the above embodiment, when the second lifting member 3 is controlled to drive the upper clamping plate assembly 12 to flip open, the second rotating member 33 moves relative to the upper clamping plate assembly 12 and moves along the linear slide mechanism 32 in a direction away from the upper clamping plate assembly 12. As a result, the second driving member 35 itself does not tilt or deflect. It should be understood that the movement between the second rotating member 33 and the upper clamping plate assembly 12 is relative movement and does not represent their actual movement direction or state.

[0079] In a typical embodiment, see the attached Figure 1 , Attachment Figure 3 and attached Figure 5 As shown in FIG, the first lifting member 2 includes the aforementioned first connecting seat 21, a first rotating member 22, and a first driving member 24. The first rotating member 22 has two parts that can rotate relative to each other, one of which is connected to the first connecting seat 21 and the other is connected to the first driving member 24. The first driving member 24 is used to provide power for raising and lowering the upper clamping plate assembly 12.

[0080] Optional, see attached Figure 1 and attached Figure 3 As shown in , the first rotating member 22 and the first driving member 24 are indirectly connected via the first connecting member 23. As a different embodiment, the first connecting member 23 may not be provided, but another part of the first driving member 24 may be directly connected to the first driving member 24.

[0081] In the above solution, when the upper clamping plate assembly 12 is opened in a flipping manner, one part of the first rotating member 22 rotates with the other part without being disconnected, as shown in the attached Figure 5Thus, a rotation connection with the first rotating member 22 as a rotation pivot is formed between the upper clamping plate assembly 12 and the first driving member 24, which can improve the support of the rotating upper clamping plate assembly 12.

[0082] In another embodiment, the first driving member 24 and the first connecting seat 21 are directly or indirectly connected to each other, that is, they do not form an inseparable substantial connection, but are separable from each other. Before the upper clamping plate assembly 12 is flipped open, the first driving member 24 is controlled to be disengaged from the direct or indirect connection with the upper clamping plate assembly 12. At this time, the first driving member 24 can eliminate the obstruction of the upper clamping plate assembly 12 from performing the flipping action.

[0083] As an optional embodiment, the first rotating member 22 and the second rotating member 33 in the above solution are independently selected from a universal shaft or a hinge. Figure 1 , Attachment Figure 3 , Attachment Figure 4 and attached Figure 5 The first rotating member 22 and the second rotating member 33 shown in the figure are universal shafts. When the first rotating member 22 is a universal shaft, the two parts that rotate relative to each other can be selectively configured to be able to be separated from each other or not.

[0084] As an optional embodiment, the first driving member 24, the second driving member 35, and the third driving member 44 in the aforementioned solution are each independently selected from a pneumatic cylinder, a hydraulic cylinder, a screw lifting mechanism, or an electric slide rail lifting mechanism. The screw lifting mechanism may be a lifting mechanism including a screw transmission mechanism, and the electric slide rail lifting mechanism may be a lifting mechanism using an electric slide rail as a driving portion. Their structures are all existing technologies and will not be described in detail here.

[0085] It should be understood that the cylinder and hydraulic cylinder in this application can be a whole device with the cylinder or hydraulic cylinder as the final power output unit. For example, the hydraulic cylinder can include not only the hydraulic cylinder body, but also a hydraulic station connected to the hydraulic cylinder.

[0086] In one embodiment, the sum of the number of the first lifting member 2 and the second lifting member 3 is greater than or equal to three, which can reduce the tilt or shaking of the upper clamping plate assembly 12 when lifting or lowering it, so that it has better stability. Optionally, the sum of the number of the first and second lifting members can be three, four, five, or more. For example, see the attached Figure 1 As shown in FIG, two groups of first lifting members 2 and second lifting members 3 are respectively provided on both sides of the clamping member 1.

[0087] In one embodiment, see the attached Figure 1 , Attachment Figure 3 and attached Figure 4As shown in the figure, the lower splint assembly 11 and the upper splint assembly 12 both include a frame 101 and a transparent pressure plate 102, wherein the transparent pressure plates 102 in the upper and lower splint assemblies are respectively arranged on the side facing each other of the frame 101 of the lower splint assembly 11 and the frame 101 of the upper splint assembly 12.

[0088] In the above solution, the transparent pressing plates 102 in the upper and lower clamping plate assemblies directly contact and clamp the exposure workpiece, and the light emitted by the exposure light source shines onto the exposure workpiece through the transparent pressing plates 102, thereby achieving exposure.

[0089] Optionally, the transparent pressing plate 102 may be a glass plate or an acrylic plate with good transmittance.

[0090] Furthermore, the first connecting seat 21, the second connecting seat 31 and the third connecting seat 41 are fixedly connected to the frame 101; or, the first connecting seat 21, the second connecting seat 31 and the third connecting seat 41 are a part of the frame 101 and are integrally formed with the frame 101.

[0091] In addition, the present application further provides an embodiment of an exposure device, in which the aforementioned clamping device for the exposure workpiece is configured.

[0092] Therefore, the exposure equipment in the embodiment of the present application has multiple or all of the structural features described in the aforementioned embodiment of the clamping device for exposing the workpiece.

[0093] The above description is merely a specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any person skilled in the art who can easily conceive of changes or substitutions within the technical scope disclosed in the present invention should be included in the scope of protection of the present invention. Therefore, the scope of protection of the present invention should be based on the scope of protection of the claims.

Claims

1. A clamping device for an exposure workpiece, characterized in that: include: The clamping component comprises a lower clamping plate assembly and an upper clamping plate assembly, wherein the upper clamping plate assembly is arranged above the lower clamping plate assembly; as well as a first lifting member and a second lifting member, wherein The first lifting component is connected to one side of the upper clamping plate assembly and can drive the corresponding side of the upper clamping plate assembly to lift or lower. The second lifting component is connected to the other side of the upper clamping plate assembly and can drive the other side of the upper clamping plate assembly to lift or lower; and The hinge component includes a pin, a hinge seat and a third driving member, The pin is installed in the hinge seat. One side of the upper clamping plate assembly is connected to the pin shaft, and can rotate with the pin shaft as the rotation hub. The third driving member is connected to one end of the pin shaft, and can drive the pin shaft to be disconnected from the hinge seat and the upper splint assembly, and can drive the pin shaft to reset and restore the connection between the pin shaft, the hinge seat and the upper splint assembly.

2. The clamping device for exposure workpiece according to claim 1, characterized in that: in: The first lifting component is connected to one side of the upper clamping plate assembly through a first connecting seat; The second lifting component is connected to the other side of the upper clamping plate assembly through a second connecting seat; The upper clamping plate assembly is connected to the pin shaft via a third connecting seat.

3. The clamping device for exposure workpiece according to claim 2, wherein: The second lifting component includes: a linear slide mechanism, which is disposed on the lower side of the second connecting seat and extends in a direction away from the upper clamping plate assembly; and a second drive member; and The second rotating member has two parts that can rotate relative to each other, one of which is connected to the linear slide mechanism, and the other is connected to the second driving member.

4. The clamping device for exposure workpiece according to claim 3, wherein: The first lifting component includes: a first driving member; and The first rotating member has two parts that can rotate relative to each other, one of which is connected to the first connecting seat, and the other is connected to the first driving member.

5. The clamping device for exposure workpiece according to claim 4, characterized in that: The first rotating member and the second rotating member are independently selected from a universal shaft or a hinge.

6. The clamping device for exposure workpiece according to claim 3, characterized in that: The first lifting component includes a first driving member, and the first driving member and the first connecting seat are directly or indirectly in contact with each other and can be separated from each other.

7. The clamping device for exposure workpiece according to claim 4 or 6, characterized in that: The first driving member, the second driving member and the third driving member are independently selected from a cylinder, a hydraulic cylinder, a screw lifting mechanism or an electric slide rail lifting mechanism.

8. The clamping device for exposure workpiece according to claim 1, characterized in that: The sum of the number of the first lifting components and the number of the second lifting components is greater than or equal to three.

9. The clamping device for an exposure workpiece according to claim 1, wherein: The lower clamping plate assembly and the upper clamping plate assembly each include a frame and a transparent pressing plate. The two transparent pressing plates are respectively arranged on the opposite sides of the frame of the lower clamping plate assembly and the frame of the upper clamping plate assembly.

10. An exposure device, characterized in that: The exposure apparatus is provided with the exposure workpiece holding device according to any one of claims 1 to 9.

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