Wafer box cleaning upper carrying table and wafer box cleaning machine provided with wafer box cleaning upper carrying table
By introducing a fixed platform and a transmission device into the cassette cleaning machine, combined with a scanning device, the matching of the cassette code and the tooling code is automatically achieved, solving the error problem caused by manual recording and improving the accuracy and efficiency of cleaning status monitoring.
Patent Information
- Application Number
- CN202422655224.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-10-31
- Publication Date
- 2025-09-19
- Estimated Expiration
- 2034-10-31
AI Technical Summary
In the prior art, the matching status of the cassette code and the tooling code needs to be recorded manually, which is prone to errors and results in low accuracy and efficiency in cleaning status monitoring.
A fixed platform and a transmission device are used, combined with a first scanning device and a second scanning device, to automatically match the cassette code and the tooling code, and automatic code binding and unbinding are achieved through the transmission component and the movable bracket.
It realizes the automatic matching of cassette codes and tooling codes, improves work efficiency and the accuracy of cleaning status monitoring, and reduces human errors.
Smart Images
Figure CN223363113U_ABST
Abstract
Description
Technical Field
[0001] The utility model belongs to the technical field of film box cleaning, in particular to a film box cleaning upper loading platform and a film box cleaning machine provided with the upper loading platform. Background Art
[0002] During the production process, silicon wafers are usually stored and transported in wafer boxes. In order to ensure the cleanliness of the silicon wafers, the wafer boxes need to be cleaned. To facilitate cleaning, the wafer boxes are placed on a cleaning tool, and then the wafer boxes and the cleaning tool are transferred together to the wafer box cleaning machine for cleaning. In order to monitor the cleaning status of the wafer boxes, a wafer box code is provided on the wafer box, and a tool code is provided on the cleaning tool. The wafer box code and the tool code are matched one-to-one. During cleaning, the wafer box cleaning machine monitors the cleaning status of each wafer box by identifying the tool code. In order to match the wafer box code and the tool code one-to-one and ensure the accuracy of monitoring, in the prior art, manual recording of the matching status of the wafer box code and the tool code is usually adopted, which is prone to errors and has low work efficiency, affecting the accuracy of the wafer box cleaning status monitoring. Utility Model Content
[0003] In order to solve the above technical problems, the utility model provides a film box cleaning loading platform and a film box cleaning machine equipped with the loading platform, which effectively solves the problem of easy errors in manually recording the matching status of the film box code and the tooling code, resulting in low work efficiency, and overcomes the shortcomings of the existing technology.
[0004] The technical solution adopted by the utility model is: a film box cleaning loading platform, comprising:
[0005] The fixed platform is provided with a first scanning device for scanning the cassette code;
[0006] A transmission device is provided on the fixed platform for transmitting the cleaning tooling. A second scanning device is provided on one side of the transmission device for scanning the tooling code.
[0007] Furthermore, a transmission entrance is provided on the connection side between the fixed platform and the film box cleaning machine.
[0008] Furthermore, a fixed stopper is provided on one side of the fixed platform close to the transmission entrance.
[0009] Furthermore, the transmission device includes relatively arranged transmission components, and a first movable bracket is provided at the bottom of the transmission component, which can drive the transmission component to move up and down.
[0010] Furthermore, a first driving device is provided at the bottom of the first movable bracket, and the first driving device can drive the first movable bracket to move up and down.
[0011] Furthermore, a guide rod is provided on the first movable bracket, and the guide rod is movably connected to the bottom of the fixed platform.
[0012] Furthermore, the transmission component includes transmission rollers arranged along the transmission direction, and guide rollers are provided between the transmission rollers.
[0013] Furthermore, the guide roller is arranged on a second movable bracket, and the second movable bracket is arranged above the first movable bracket, which can drive the guide roller to move up and down relative to the transmission roller.
[0014] Furthermore, a second driving device is provided at the bottom of the second movable bracket, and the second driving device is arranged on the first movable bracket.
[0015] The utility model also provides a film box cleaning machine, comprising the film box cleaning loading platform as described above.
[0016] The advantages and positive effects of the utility model are: due to the adoption of the above technical solution, automatic matching of the film box code and the tooling code is achieved instead of manual work, which improves work efficiency, is more conducive to monitoring the film box cleaning status, and improves the accuracy of monitoring. BRIEF DESCRIPTION OF THE DRAWINGS
[0017] Figure 1 This is a schematic diagram of the placement of a cleaning tool for a film box cleaning loading platform according to an embodiment of the present invention.
[0018] Figure 2 It is a schematic diagram of the overall structure of a film box cleaning upper loading platform in an embodiment of the present utility model.
[0019] Figure 3 This is a schematic diagram of the internal structure of a film box cleaning loading platform without the transmission device and the first movable bracket in an embodiment of the present utility model.
[0020] In the picture:
[0021] 1. Fixed platform 2. First scanning device 3. Second scanning device
[0022] 4. Baffle 5. Transmission entrance 6. Fixed stopper
[0023] 7. Transmission assembly 8. First movable bracket 9. First driving device
[0024] 10. Fixed bracket 11. Connecting plate 12. Guide rod
[0025] 13. Fixed sleeve 14. Transmission roller 15. Guide roller
[0026] 16. Second movable bracket 17. Second driving device 18. Cleaning tool DETAILED DESCRIPTION
[0027] The embodiment of the present invention provides a film box cleaning loading platform and a film box cleaning machine provided with the loading platform. The embodiment of the present invention is described below with reference to the accompanying drawings.
[0028] In the description of the embodiments of the present invention, it should be understood that the orientation or positional relationship indicated by the terms "top", "bottom", etc. is based on the orientation or positional relationship shown in the accompanying drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In the description of the present invention, it should be noted that, unless otherwise clearly stipulated and limited, the terms "setting" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected, or indirectly connected through an intermediate medium, or it can be a communication between the internal parts of two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood based on specific circumstances.
[0029] like Figure 1 and Figure 2 As shown, an embodiment of the present invention provides a cassette cleaning loading platform comprising a fixed platform 1 and a transport device. The fixed platform 1 is positioned at the loading end of the cassette cleaning machine. A first scanning device 2 is mounted on the fixed platform 1 for scanning the cassette code. The specific mounting location is not restricted, as long as it is convenient for operation. The transport device is mounted on the fixed platform 1 and is used to transport a cleaning tool 18 loaded with a cassette to the cassette cleaning machine. A second scanning device 3 is mounted on one side of the transport device for scanning the tool code. In this embodiment, the first scanning device 2 is specifically an RFID reader for identifying the cassette code. The second scanning device 3 is specifically a barcode scanner for identifying the tool code, which is specifically a QR code. During cleaning and loading, the cleaning tool 18 is placed on the transport device so that the tool code is aligned with the second scanning device 3, which scans the tool code. After the first scanning device 2 scans the cassette code of the cassette to be cleaned, the cassette is then placed on the cleaning tool 18. The control system replaces manual recording by matching and binding the cassette code and tool code, facilitating monitoring of the cassette cleaning status. After cleaning is completed, the control system unbinds the matching cassette code and tooling code.
[0030] Specifically, a baffle 4 is fixed on the connection side between the fixed platform 1 and the film box cleaning machine. In order to facilitate the transmission of the cleaning tool 18 and the film box, a transmission entrance 5 is opened on the baffle 4. The transmission device can transmit the cleaning tool 18 loaded with the film box from the transmission entrance 5 to the film box cleaning machine.
[0031] Preferably, to prevent the cleaning tool 18 from moving when no cassette is placed, a fixed stopper 6 is provided on the side of the fixed platform 1 near the transfer entrance 5. The specific number and shape of the fixed stopper 6 are not limited. In this embodiment, two fixed stops 6 are provided, and the side of the fixed stopper 6 near the cleaning tool 18 is spherical.
[0032] Specifically, such as Figure 2 and Figure 3 As shown, the transport device includes opposing transport assemblies 7, with the second scanning device 3 positioned on one side of the transport assembly 7. A first movable bracket 8 is provided at the bottom of the transport assembly 7, which drives the transport assembly 7 up and down. When placing a film cassette on the cleaning fixture 18, the transport assembly 7 moves downward, causing the fixed stop 6 to abut against the cleaning fixture 18, preventing it from moving and facilitating placement of the film cassette. When loading the film cassette cleaning machine, the first movable bracket 8 drives the transport assembly 7 upward, raising the cleaning fixture 18 above the fixed stop 6, enabling normal loading and transport of the film cassette cleaning machine.
[0033] Specifically, a first drive device 9 is provided at the bottom of the first movable bracket 8, which can drive the first movable bracket 8 up and down. In this embodiment, a fixed bracket 10 is mounted at the bottom of the fixed platform 1, and the first drive device 9, specifically a cylinder, is vertically mounted on the fixed bracket 10. The movable end of the first drive device 9 is connected to the bottom of the first movable bracket 8 via a connecting plate 11, driving the first movable bracket 8 up and down, thereby driving the transmission assembly 7 up and down.
[0034] Preferably, in order to ensure the stability of the up and down movement of the transmission assembly 7, a guide rod 12 is provided on the first movable bracket 8, and the guide rod 12 is movably connected to the bottom of the fixed platform 1. The number of guide rods 12 is not limited. In this embodiment, four guide rods 12 are fixed to the first movable bracket 8, and a fixed sleeve 13 is fixed to the fixed bracket 10 at the bottom of the fixed platform 1 at a position relative to the guide rod 12. The fixed sleeve 13 is sleeved on the outside of the relatively arranged guide rod 12. When the first movable bracket 8 moves up and down, it can drive the guide rod 12 to move up and down along the fixed sleeve 13, thereby playing a guiding role.
[0035] Preferably, Figure 2 As shown, the transport assembly 7 includes transport rollers 14 arranged along the transport direction. A drive mechanism is provided on the transport rollers 14 to drive the transport rollers 14. The specific structure and connection method of the drive mechanism are conventional and are not shown in the figure, so they will not be described in detail here. Guide rollers 15 are provided between the transport rollers 14. These guide rollers 15 have the same diameter as the transport rollers 14 and are positioned at the same height during transport. This guide mechanism guides the cleaning tool 18 during transport, ensuring stable transport.
[0036] Preferably, the guide rollers 15 are disposed on a second movable bracket 16, which is disposed above the first movable bracket 8 and can drive the guide rollers 15 to move up and down relative to the transmission rollers 14. In this embodiment, the second movable bracket 16 is disposed between the transmission components 7, and guide rollers 15 are symmetrically disposed on both sides of the second movable bracket 16 near the transmission components 7, such that the guide rollers 15 are disposed between the transmission rollers 14. To facilitate placement of the cleaning tool 18, before placement of the cleaning tool 18, the second movable bracket 16 drives the guide rollers 15 on both sides to move upward, so that the guide rollers 15 are higher than the transmission components 7. After the cleaning tool 18 is placed on the guide rollers 15, the second movable bracket 16 drives the guide rollers 15 downward. When the guide rollers 15 are lowered to the height of the transmission rollers 14, the cleaning tool 18 is placed on the transmission rollers 14.
[0037] Specifically, such as Figure 3 As shown, a second driving device 17 is provided at the bottom of the second movable bracket 16, and the second driving device 17 is arranged on the first movable bracket 8. In this embodiment, the second driving device 17 is vertically mounted above the connecting plate 11 of the first movable bracket 8, and the movable end of the second driving device 17 is fixed to the bottom of the second movable bracket 16.
[0038] A film box cleaning machine is provided. The above-mentioned film box cleaning loading platform is installed at the loading end of the film box cleaning machine for loading the film box.
[0039] The process begins as follows: The second drive 17 extends, causing the second movable support 16 to drive the guide rollers 15 upward above the transport assembly 7, placing the cleaning tool 18 on the guide rollers 15. The second drive 17 retracts, causing the second movable support 16 to drive the guide rollers 15 downward to the level of the transport rollers 14, placing the cleaning tool 18 on them. The fixed stop 6 blocks and positions the cleaning tool 18, aligning the tool code with the second scanner 3, which then scans the tool code. After the first scanner 2 scans the cassette code, the cassette is placed on the cleaning tool 18. The first drive 9 simultaneously drives the transport assembly 7 and the guide rollers 15 upward, raising the cleaning tool 18 above the fixed stop 6. The fixed stop 6 no longer blocks the cleaning tool 18, and the transport rollers 14 transport the loaded cleaning tool 18, with the guide rollers 15 guiding it during the transport process. The transport assembly 7 transfers the loaded cleaning tool 18 to the cassette cleaning machine through the transfer entrance 5. The control system replaces manual recording to match and bind the cassette code and tooling code, facilitating the monitoring of the cassette cleaning status. After cleaning is completed, the control system unbinds the matched cassette code and tooling code.
[0040] The advantages and positive effects of the utility model are:
[0041] 1. By setting up the first scanning device and the second scanning device, the automatic matching of the cassette code and the tooling code is realized instead of manual work, which improves work efficiency, is more conducive to the monitoring of the cassette cleaning status, and improves the accuracy of monitoring.
[0042] 2. By setting a fixed block, the cleaning tool is prevented from moving when the film box is placed. By setting a first movable bracket to drive the transmission component and the guide roller to move up and down, normal transportation is ensured.
[0043] 3. By setting up a second movable bracket to drive the guide roller to move up and down, it is more conducive to the placement of the cleaning tooling.
[0044] The above embodiments of the present invention are described in detail. However, the above contents are only preferred embodiments of the present invention and should not be considered to limit the scope of implementation of the present invention. All equivalent changes and improvements made within the scope of the present invention should still fall within the scope of the patent coverage of the present invention.
Claims
1. A film box cleaning loading platform, characterized in that: include: The fixed platform is provided with a first scanning device for scanning the cassette code; A transmission device is provided on the fixed platform for transmitting the cleaning tooling. A second scanning device is provided on one side of the transmission device for scanning the tooling code.
2. The cassette cleaning loading platform according to claim 1, characterized in that: A transmission entrance is provided on the connection side between the fixed platform and the film box cleaning machine.
3. The cassette cleaning loading platform according to claim 2, characterized in that: A fixed stopper is provided on one side of the fixed platform close to the transmission entrance.
4. A cassette cleaning loading platform according to any one of claims 1 to 3, characterized in that: The transmission device includes relatively arranged transmission components. A first movable bracket is provided at the bottom of the transmission component, which can drive the transmission component to move up and down.
5. The cassette cleaning loading platform according to claim 4, characterized in that: A first driving device is provided at the bottom of the first movable bracket, and the first driving device can drive the first movable bracket to move up and down.
6. The cassette cleaning loading platform according to claim 5, characterized in that: A guide rod is provided on the first movable bracket, and the guide rod is movably connected to the bottom of the fixed platform.
7. A cassette cleaning loading platform according to claim 5 or 6, characterized in that: The transmission assembly includes transmission rollers arranged along the transmission direction, and guide rollers are arranged between the transmission rollers.
8. The cassette cleaning loading platform according to claim 7, characterized in that: The guide roller is arranged on a second movable bracket, and the second movable bracket is arranged above the first movable bracket and can drive the guide roller to move up and down relative to the transmission roller.
9. The cassette cleaning loading platform according to claim 8, characterized in that: A second driving device is provided at the bottom of the second movable bracket, and the second driving device is arranged on the first movable bracket.
10. A film box cleaning machine, characterized in that: It comprises a film box cleaning loading platform as described in any one of claims 1-9.