Accompanying strip feeding equipment

Abstract

The utility model discloses accompanying strip feeding equipment. The accompanying strip feeding equipment comprises a base; the accompanying strip storage clamp is arranged on the base, an accompanying strip storage cavity is formed in the accompanying strip storage clamp, and the accompanying strip storage cavity is used for storing a plurality of accompanying strips; an accompanying strip feeding opening is formed in the accompanying strip storage clamp, and the accompanying strip feeding opening is communicated with the accompanying strip storage cavity; and the pushing mechanism comprises a pushing end, and the pushing end is arranged to be capable of moving into the accompanying strip storage cavity and pushing accompanying strips to move to the accompanying strip feeding opening. The technical effects that the replacement frequency of the accompanying strip storage clamp is reduced, the production efficiency is improved, and the production cost is reduced are achieved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor manufacturing, in particular to a strip feeding device. Background Art

[0002] In wafer manufacturing, strips are placed around the wafer to prevent damage during processing. The number and placement of strips vary depending on the wafer's shape. For example, for a square wafer, four strips are placed around the wafer. During production, the number of strips required for the wafer processing is placed on a platform, which is then installed in a predetermined position. The strips are then manually transferred one by one around the wafer. After processing is complete, the platform with the strips needs to be replaced with a new one, resulting in frequent and inconvenient strip platform replacement. Utility Model Content

[0003] The main purpose of the utility model is to provide a strip feeding device to solve the problem in the related art that the strip platform needs to be replaced frequently and inconveniently.

[0004] In order to achieve the above object, the utility model provides a strip feeding device, comprising:

[0005] base;

[0006] A note storage folder is provided on the base, wherein a note storage cavity is provided in the note storage folder, and the note storage cavity is used to store a plurality of note;

[0007] The accompanying strip storage clamp is provided with an accompanying strip loading port, and the accompanying strip loading port is communicated with the accompanying strip storage cavity;

[0008] The pushing mechanism includes a pushing end, and the pushing end is configured to be able to move into the accompanying strip storage cavity and push the accompanying strip to the accompanying strip loading port.

[0009] Furthermore, a material taking trough is provided on the accompanying strip storage clamp, one side of which is connected to the accompanying strip loading port, and the material taking trough is used to accommodate a part of the accompanying strip when taking the material.

[0010] Furthermore, a limiting member is provided on the accompanying strip storage clamp, the limiting member corresponds to the accompanying strip feeding port, and the limiting member is used to limit the maximum movement of the accompanying strip under the action of the pushing end.

[0011] Furthermore, a material taking trough is provided in the length direction of the accompanying strip feeding port, and the length of the material taking trough is greater than or equal to the length of the portion of the limiting member corresponding to the accompanying strip feeding port; or

[0012] The material taking trough is arranged in the width direction of the accompanying strip feeding port, and the width of the material taking trough is greater than or equal to the width of the portion of the limiting member corresponding to the accompanying strip feeding port.

[0013] Furthermore, the limiting member includes a pressing block fixed on the accompanying bar storage clamp, at least a portion of the pressing block corresponds to the accompanying bar loading port; the depth of the material taking trough is greater than or equal to the height of the accompanying bar.

[0014] Furthermore, the accompanying strip storage clip includes a clip body and a cover plate, the accompanying strip storage cavity is provided in the clip body, and the cover plate is openably provided on the side of the clip body to open and close the accompanying strip storage cavity.

[0015] Furthermore, the pushing end includes a strip push plate, a first end of which is slidably disposed in the strip storage cavity, and a second end of which extends out of the strip storage clip.

[0016] Furthermore, a mounting groove is provided on the base, and the accompanying strip storage clip is detachably inserted into the mounting groove.

[0017] Furthermore, at least two mounting slots are provided, and at least two strip storage clips are provided and are detachably plugged into and matched with the mounting slots one by one.

[0018] Furthermore, a fixing piece is provided on the base, and the fixing piece is detachably fixedly connected to the accompanying strip storage clip.

[0019] Furthermore, a specification detection sensor is provided on the base, and the specification detection sensor is used to detect the specifications of the accompanying strip storage clip installed on the base.

[0020] Furthermore, there are multiple specification detection sensors, and multiple accompanying strip storage clips are provided. A detection part is provided on each of the accompanying strip storage clips, and the detection part is located at different positions of each of the accompanying strip storage clips. One of the multiple detection parts corresponds to the position of one of the multiple specification detection sensors.

[0021] Furthermore, the accompanying strip feeding device further comprises an accompanying strip position detection sensor, which is used to detect the position of the outermost layer of accompanying strips in the accompanying strip storage cavity.

[0022] Furthermore, detection holes are provided on both sides of the accompanying strip storage clip, and the detection holes are connected to the accompanying strip storage cavity;

[0023] The accompanying strip position detection sensor includes a signal transmitting sensor and a signal receiving sensor provided on the base. The signal transmitting sensor and the signal receiving sensor are respectively located on both sides of the accompanying strip storage clip and correspond to the detection hole.

[0024] Furthermore, a driving mechanism capable of outputting linear motion is provided on the base, and a driving end of the driving mechanism is connected to the pushing end of the pushing mechanism.

[0025] Furthermore, a motion sensor is included, and the motion sensor is used to detect the position of the driving end of the driving mechanism.

[0026] The present invention can be realized by providing a base; a bar storage clamp provided on the base; a bar storage cavity provided in the bar storage clamp, the bar storage cavity being used for storing a plurality of bar storages; a bar loading port provided on the bar storage clamp, the bar loading port being connected to the bar storage cavity; and a pushing mechanism including a pushing end, the pushing end being configured to be able to move into the bar storage cavity and push the bar to the bar loading port, on the one hand, achieving the purpose of using the bar storage clamp as a bar storage platform, and utilizing the pushing end of the pushing mechanism to push a plurality of bar storages in the bar storage cavity one by one to the bar loading port to complete the bar loading, thereby achieving the technical effect of reducing the replacement frequency of the bar storage clamp, improving production efficiency and reducing production costs, thereby solving the problem of frequent replacement of the bar platform and the inconvenience of replacement in the related art;

[0027] On the other hand, since the accompanying strips stored in the accompanying strip storage clip in the utility model can be pushed one by one to the accompanying strip loading port by the pushing end, the loading position of the accompanying strips is fixed at the accompanying strip loading port, which is convenient for cooperating with automated equipment to automatically grab the accompanying strips and load them from the accompanying strip loading port. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] The accompanying drawings, which constitute part of the present invention, are intended to provide a further understanding of the present invention and to make the other features, purposes, and advantages of the present invention more apparent. The accompanying drawings and descriptions of the exemplary embodiments of the present invention are intended to explain the present invention and do not constitute an undue limitation of the present invention. In the accompanying drawings:

[0029] Figure 1 This is a structural diagram of the strip feeding device according to an embodiment of the present utility model;

[0030] Figure 2 This is another structural schematic diagram of the accompanying strip feeding device according to an embodiment of the present utility model;

[0031] Figure 3 This is a schematic top view of the structure of the accompanying strip feeding device according to an embodiment of the utility model;

[0032] Figure 4 This is a schematic diagram of the structure of the accompanying strip storage clip according to an embodiment of the present utility model;

[0033] Figure 5This is a schematic diagram of the structure of the accompanying strip storage folder after it is opened according to an embodiment of the utility model;

[0034] Among them, 1 base, 100 top plate, 101 connecting rod, 102 bottom plate, 103 accompanying strip positioning plate, 1030 mounting slot, 2 accompanying strip storage clamp, 200 accompanying strip feeding port, 201 taking trough, 202 accompanying strip storage cavity, 203 cover plate, 204 clamp body, 205 detection hole, 3 accompanying strip position detection sensor, 4 driving mechanism, 5 connecting plate, 6 pushing mechanism, 60 pushing end, 600 accompanying strip pushing plate, 7 fixing parts, 8 limiting parts, 800 pressing block, 9 specification detection sensor, 10 sensor sensing sheet. DETAILED DESCRIPTION

[0035] In order to help those skilled in the art better understand the present invention, the following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts should fall within the scope of protection of the present invention.

[0036] It should be noted that the terms "first," "second," and the like in the specification and claims of the present invention and the accompanying drawings are used to distinguish similar objects and are not necessarily used to describe a specific order or precedence. It should be understood that the terms used in this manner are interchangeable where appropriate for the purposes of describing the embodiments of the present invention.

[0037] In this utility model, the terms "upper," "lower," "inner," and the like indicate positions or locations based on those shown in the accompanying drawings. These terms are intended to better describe the utility model and its embodiments and are not intended to limit the devices, elements, or components indicated to specific positions, or to their construction or operation in a specific position.

[0038] Furthermore, some of the above terms may be used to express other meanings besides indicating a position or location. For example, the term "on" may also be used to indicate a dependency or connection in certain circumstances. Those skilled in the art will understand the specific meanings of these terms in this utility model based on the specific circumstances.

[0039] Furthermore, the terms "disposed," "provided with," "connected," and "fixed" should be interpreted broadly. For example, "connected" can mean a fixed connection, a removable connection, or an integral structure; it can be a mechanical connection or an electrical connection; it can be a direct connection, an indirect connection through an intermediary, or an internal communication between two devices, elements, or components. Those skilled in the art will understand the specific meanings of these terms in this utility model based on the specific circumstances.

[0040] Additionally, the term "plurality" shall mean two or more.

[0041] It should be noted that, in the absence of conflict, the embodiments and features of the embodiments of the present invention can be combined with each other. The present invention will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0042] To solve related technical problems, such as Figures 1 to 5 As shown, the embodiment of the present invention provides a strip feeding device, comprising:

[0043] Base 1;

[0044] The accompanying strip storage clip 2 is provided on the base 1. The accompanying strip storage clip 2 is provided with an accompanying strip storage cavity 202. The accompanying strip storage cavity 202 is used to store a plurality of accompanying strips 11.

[0045] The accompanying strip storage clamp 2 is provided with an accompanying strip feeding port 200, which is communicated with the accompanying strip storage cavity 202;

[0046] The pushing mechanism 6 includes a pushing end 60 . The pushing end 60 is configured to be able to move into the accompanying strip storage cavity 202 and push the accompanying strip 11 to move to the accompanying strip loading port 200 .

[0047] In this embodiment, the base 1 as the installation base can be set in various structural forms, and the accompanying strip storage clip 2 is installed on the base 1. The accompanying strip storage clip 2 and the base 1 can be plugged together, and the plugging direction can be vertical or horizontal. Figure 1 As shown, in order to save the horizontal space occupied by the device, in this embodiment, it is preferred that the accompanying bar storage clip 2 can be vertically installed on the base 1. Specifically, a mounting groove 1030 can be opened at the upper end of the base 1, and the accompanying bar storage clip 2 is vertically inserted into the mounting groove 1030.

[0048] like Figure 4 and Figure 5As shown, the accompanying strip storage clip 2 serves as a storage structure for accompanying strips 11. A accompanying strip storage cavity 202 is provided within the accompanying strip storage clip 2, into which the accompanying strips 11 can be placed. The accompanying strip storage cavity 202 can be sized to accommodate varying numbers of accompanying strips 11, allowing multiple accompanying strips 11 to be stacked sequentially within the accompanying strip storage cavity 202. In one embodiment, the accompanying strip storage cavity 202 can accommodate at least 20 accompanying strips 11.

[0049] When the strip storage clip 2 is mounted vertically on the base 1, Figure 5 As shown, the plurality of accompanying bars 11 in the accompanying bar storage cavity 202 are stacked up and down. When the accompanying bar storage clip 2 is mounted on the base 1 in a horizontal direction, the plurality of accompanying bars 11 in the accompanying bar storage cavity 202 are stacked front to back.

[0050] To remove the accompanying strip 11 from the accompanying strip storage clamp 2, in this embodiment, the accompanying strip storage clamp 2 is provided with an accompanying strip loading port 200. The size of the accompanying strip loading port 200 matches the size of the accompanying strip 11. When the accompanying strip 11 is located at a position corresponding to the accompanying strip loading port 200, the accompanying strip 11 can be removed from the accompanying strip loading port 200. In one embodiment, the accompanying strip 11 is grasped by a robotic arm. Specifically, a suction cup is installed on the robotic arm, which absorbs and fixes the accompanying strip 11 through the accompanying strip loading port 200, and then the robotic arm transfers the accompanying strip 11.

[0051] like Figure 5 As shown, to move the multiple accompanying strips 11 within the accompanying strip storage clamp 2 to positions corresponding to the accompanying strip loading port 200, the accompanying strip 11 loading device in this embodiment further includes a pushing mechanism 6. The pushing mechanism 6 can be disposed on the base 1 or as a separate component. In this embodiment, the pushing mechanism 6, a motion mechanism capable of outputting linear motion, includes a pushing end 60. The pushing end 60 can be driven to perform reciprocating linear motion. The pushing end 60 can move into the accompanying strip storage chamber 202 and push all accompanying strips 11 therein toward the accompanying strip loading port 200. In this embodiment, the pushing end 60 can be pre-installed within the accompanying strip 11 storage chamber, and the accompanying strips 11 are stacked on the pushing end 60 during storage.

[0052] Of course, the pushing end 60 can also be a structure that moves into the accompanying strip storage chamber 202 during loading, and the accompanying strips 11 are stacked on the bottom of the accompanying strip storage chamber 202 during storage. In this embodiment, the accompanying strip storage clamp 2 needs to have a pushing opening corresponding to the pushing end 60, so that the pushing end 60 can move into the accompanying strip storage chamber 202 through the pushing opening to push the accompanying strips 11.

[0053] In this embodiment, the pushing direction of the pushing end 60 matches the installation direction of the accompanying bar storage clip 2 on the base 1. When the accompanying bar storage clip 2 is installed horizontally on the base 1, the pushing direction of the pushing end 60 is horizontal. When the accompanying bar storage clip 2 is installed vertically on the base 1, the pushing direction of the pushing end 60 is vertical. Depending on the function to be achieved by the pushing mechanism 6 in this embodiment, the pushing mechanism 6 can adopt a linear motor, a cylinder, a screw drive mechanism, or other mechanism capable of outputting linear motion, and this embodiment does not limit these mechanisms.

[0054] During wafer processing, a sufficient number of companion strips 11 for multiple wafer processing operations can be pre-placed within the companion strip storage chamber 202 of the companion strip storage clamp 2. When a companion strip 11 is needed, the pushing mechanism 6 is controlled to drive the pushing end 60 within the companion strip storage chamber 202 toward the companion strip loading port 200, thereby pushing all the companion strips 11 within the companion strip storage chamber 202 toward the companion strip loading port 200. After the companion strip 11 at the upper or front end is pushed to the companion strip loading port 200, the pushing end 60 stops. At this point, a robotic arm or similar retrieving device can be used to remove the companion strip 11 from the companion strip loading port 200 and transport it to the wafer processing location. During this process, the pushing end 60 continues to push the companion strip 11, moving the next companion strip 11 to the companion strip loading port 200. The retrieving device then removes the companion strip 11 from the companion strip loading port 200. This process is repeated until the required companion strips 11 for the current wafer processing are loaded.

[0055] Since the accompanying strips 11 are stored in the accompanying strip storage clamp 2 in a stacked manner, the storage capacity of the accompanying strips 11 in the accompanying strip storage clamp 2 can be designed to meet the processing requirements of multiple wafers, so that the accompanying strip storage clamp 2 does not need to be replaced during the processing of multiple wafers, which reduces the replacement frequency, improves production efficiency, and reduces production costs. This solves the problem of frequent and inconvenient replacement of the accompanying strip 11 platform in the related art.

[0056] On the other hand, since the accompanying strips 11 stored in the accompanying strip storage clip 2 in the utility model can be pushed one by one to the accompanying strip loading port 200 by the pushing end 60, the loading position of the accompanying strips 11 is fixed at the accompanying strip loading port 200, which is convenient for cooperating with automated equipment to automatically grab the accompanying strips 11 and load them from the accompanying strip loading port 200.

[0057] When the position of the accompanying strip feeding port 200 is located in the stacking direction of the accompanying strips 11, it is easy to take out multiple accompanying strips 11 directly from the accompanying strip feeding port 200 due to the stickiness of the accompanying strips 11 themselves. Figures 3 to 5 As shown, in this embodiment, a material taking trough 201 is provided on the accompanying strip storage clamp 2, one side of the material taking trough 201 is connected to the accompanying strip loading port 200, and the material taking trough 201 is used to accommodate a part of the accompanying strip 11 when taking the material.

[0058] Specifically, in this embodiment, taking the example of accompanying strips 11 stacked vertically within the accompanying strip storage chamber 202, the accompanying strip loading port 200 is located at the upper end of the accompanying strip storage clamp 2, and the extraction trough 201 is also located at the upper end of the accompanying strip storage clamp 2 and is provided on a side wall of the accompanying strip storage clamp 2. When the accompanying strips 11 are pushed upward from the bottom to the accompanying strip loading port 200, the uppermost accompanying strips 11 correspond with the extraction trough 201. At this time, after the accompanying strips 11 on the uppermost layer are grasped, they can be moved laterally toward the extraction trough 201, so that the accompanying strips 11 are partially located within the extraction trough 201, and then the accompanying strips 11 can be removed upward. In this embodiment, the extraction trough 201 allows the accompanying strips 11 on the uppermost layer to move laterally after being grasped, separating them from the accompanying strips 11 on the lower layer, preventing the removal of multiple accompanying strips 11 due to the inherent stickiness of the accompanying strips 11.

[0059] It is understood that the chute 201 can be located at a position corresponding to the length or width of the accompanying strips 11. The chute 201 can be a through-hole or a closed-end chute on one sidewall of the accompanying strip storage clamp 2. To facilitate lateral movement of the topmost accompanying strips 11, in this embodiment, the chute 201 is preferably located along the length of the accompanying strips 11. To prevent the accompanying strips 11 from escaping the chute 201, the side of the chute 201 away from the accompanying strip loading port 200 is closed in this embodiment.

[0060] In order to prevent the accompanying strip 11 from overtravel under the action of the pushing end 60, as shown in FIG. Figure 1 As shown, in this embodiment, a limiter 8 is provided on the accompanying strip storage clamp 2 , the limiter 8 corresponds to the accompanying strip feeding port 200 , and is used to limit the maximum movement of the accompanying strip 11 under the action of the pushing end 60 .

[0061] In this embodiment, the stopper 8 serves to prevent the companion bar 11 from further movement. Specifically, when the companion bar 11 moves under the pushing action of the pushing end 60 until it abuts against the stopper 8, the companion bar 11 cannot move further. The stopper 8 can be a stopper plate fixed to the companion bar storage clip 2, etc., and its specific structure is not limited in this embodiment.

[0062] When the stopper 8 is aligned with the accompanying strip loading port 200, the accompanying strip 11 is pushed until it contacts the stopper 8. The accompanying strip 11 can then be removed only after it has been moved laterally to clear the stopper 8. Therefore, after the accompanying strip storage clamp 2 is provided with the extraction chute 201, the extraction chute 201 should ensure that when the accompanying strip 11 is moved laterally into the extraction chute 201, the position of the accompanying strip 11 clears the stopper 8.

[0063] Specifically, when the material trough 201 is arranged in the length direction of the accompanying strip loading port 200, the length of the material trough 201 is greater than or equal to the length of the part corresponding to the limiting member 8 and the accompanying strip loading port 200; when the material trough 201 is arranged in the width direction of the accompanying strip loading port 200, the width of the material trough 201 is greater than or equal to the width of the part corresponding to the limiting member 8 and the accompanying strip loading port 200.

[0064] like Figure 4 and Figure 5 As shown, in one embodiment of the position-limiting member 8, the position-limiting member 8 includes a pressing block 800 fixed to the accompanying bar storage clamp 2. At least a portion of the pressing block 800 corresponds to the accompanying bar loading port 200. The pressing block 800 can be fixed to the upper end of the accompanying bar storage clamp 2 by screws, and a portion of the pressing block 800 corresponds to the accompanying bar loading port 200. When the lower surface of the pressing block 800 is in contact with the upper surface of the accompanying bar loading port 200, to achieve lateral movement of the accompanying bar 11, the depth of the material extraction trough 201 in this embodiment is greater than or equal to the height of the accompanying bar 11, and preferably, the depth of the material extraction trough 201 is equal to the height of the accompanying bar 11. After the uppermost accompanying bar 11 contacts the pressing block 800, it can move laterally into the material extraction trough 201.

[0065] like Figure 4 and Figure 5 As shown, in one embodiment of the accompanying bar storage clip 2, in order to facilitate the placement of the accompanying bar 11 into the accompanying bar storage clip 2, the accompanying bar storage clip 2 includes a clamp body 204 and a cover plate 203, a accompanying bar storage cavity 202 is provided in the clamp body 204, and the cover plate 203 can be opened and closed on the side of the clamp body 204 to open and close the accompanying bar storage cavity 202.

[0066] Specifically, in this embodiment, the accompanying bar storage clamp 2 primarily comprises a clamp body 204 and a cover plate 203. A groove is defined on the side of the clamp body 204 to form the accompanying bar storage chamber 202. The length and width of the groove match those of the accompanying bar 11. The height of the groove can be designed based on the number of accompanying bars 11 to be stored, and this embodiment does not impose any restrictions thereon. To facilitate placement of the accompanying bar 11 into the accompanying bar storage chamber 202, a retractable cover plate 203 is provided on the side of the clamp body 204. The accompanying bar 11 can be placed into the accompanying bar storage chamber 202 by opening the cover plate 203. The cover plate 203 and the clamp body 204 can be opened and closed by either rotating or sliding. In the rotating mode, one side of the cover plate 203 is hingedly connected to the clamp body 204 via a pivot, and the accompanying bar storage chamber 202 is opened and closed by rotating the cover plate 203. When sliding opening and closing is adopted, the cover plate 203 is slidably connected to one side of the clamping body 204 via a sliding groove or a sliding rail, and the accompanying strip storage chamber 202 is opened and closed by sliding the cover plate 203 .

[0067] In one embodiment of the push end 60, as Figure 5As shown, the pushing end 60 includes a strip pushing plate 600 , a first end of which is slidably disposed in the strip storage cavity 202 , and a second end of which extends out of the strip storage clip 2 .

[0068] In this embodiment, the accompanying strip push plate 600 is installed within the accompanying strip storage cavity 202. The dimensions of the accompanying strip push plate 600 match those of the accompanying strip storage cavity 202, thereby stably pushing the accompanying strip 11 within the accompanying strip storage cavity 202. A pushing opening is defined at the lower end of the accompanying strip storage clamp 2. The second end of the accompanying strip push plate 600 extends out of the accompanying strip storage clamp 2 through the pushing opening and is connected to the driving end of the pushing mechanism 6, which then pushes the accompanying strip push plate 600 to move.

[0069] In this utility model, if Figure 1 and Figure 3 As shown, after the accompanying strips 11 in the accompanying strip storage clip 2 are taken out, the accompanying strip storage clip 2 needs to be replaced. To facilitate the replacement of the accompanying strip storage clip 2, a mounting groove 1030 can be opened at the upper end of the base 1 in this embodiment. The upper end of the accompanying strip storage clip 2 is provided with a protruding edge. The accompanying strip storage clip 2 can be detachably inserted into the mounting groove 1030, and the edge is against the upper end surface of the base 1 or falls into the groove of the upper end surface of the base 1, thereby facilitating the replacement of the accompanying strip storage clip 2.

[0070] Furthermore, due to the varying specifications of wafers, the required specifications of the accompanying strips 11 may vary. Therefore, in this embodiment, multiple accompanying strip storage clips 2 are provided, each capable of storing accompanying strips 11 of varying specifications. During processing, after the accompanying strips 11 in the accompanying strip storage clip 2 have been used up or when an accompanying strip 11 of a different specification is to be replaced, the accompanying strip storage clip 2 can be removed from the base 1. The accompanying strip storage clip 2, pre-installed with the required accompanying strips 11, can then be installed into the base 1 through the mounting slot 1030. This allows the loading device to accommodate accompanying strips 11 of varying specifications, making replacement both convenient and cost-effective.

[0071] In this embodiment, the pusher end 60 can be pre-installed on the accompanying bar storage clip 2 and replaced simultaneously with the accompanying bar storage clip 2. The driving end of the pushing mechanism 6 is mounted on the base 1. After the accompanying bar storage clip 2 is installed, the pusher end 60 is connected to the driving end simultaneously. Since no additional driving end is required, installation is more convenient and quick.

[0072] For square wafers, especially square wafers with different lengths and widths, the required sizes of the strips 11 are set to two. Figure 1 and Figure 3As shown, in this embodiment, at least two mounting slots 1030 are provided, and at least two accompanying strip storage clips 2 are provided, each of which is removably pluggable into the mounting slots 1030. In this embodiment, two sizes of accompanying strip storage clips 2 can be installed in the two mounting slots 1030, and the two sizes of accompanying strip storage clips 2 can store two different lengths of accompanying strips 11. The pushing ends 60 on the two accompanying strip storage clips 2 can be driven by the same driving end, allowing simultaneous loading of the two sizes of accompanying strips 11 during the accompanying strip 11 loading process, further improving production efficiency.

[0073] like Figure 1 and Figure 3 As shown, to prevent the accompanying bar storage clip 2 from moving when the accompanying bar 11 is pushed, a fixing member 7 is provided on the base 1 in this embodiment. The fixing member 7 is detachably fixed to the accompanying bar storage clip 2. Specifically, in this embodiment, the fixing member 7 is fixed to the upper end of the base 1 via screws, thereby pressing and securing the accompanying bar storage clip 2 to the base 1. In another embodiment, the fixing member 7 may be hinged to the upper end of the base 1 and can rotate until it abuts against the upper end of the accompanying bar storage clip 2, thereby limiting the position of the accompanying bar storage clip 2.

[0074] Since different sizes of accompanying strips 11 are required, it is necessary to configure accompanying strip storage clips 2 with different sizes of accompanying strip storage cavities 202. To prevent installation errors of the accompanying strip storage clips 2, a size detection sensor 9 is provided on the base 1 in this embodiment. The size detection sensor 9 is used to detect the size of the accompanying strip storage clip 2 installed on the base 1.

[0075] Specifically, in this embodiment, different specifications of the accompanying bar storage clips 2 can be configured with different features, such as graphic features, position features, color features, etc. The size detection sensor 9 can detect the features on the accompanying bar storage clip 2 to determine the size of the current accompanying bar storage clip 2. Of course, a chip can also be implanted in the accompanying bar storage clip 2, with information such as the size of the accompanying bar storage clip 2 written into the chip, and the size of the current accompanying bar storage clip 2 can be determined by reading the chip information.

[0076] In one embodiment of the specification detection sensor 9, as Figure 2 As shown, there are multiple specification detection sensors 9, and multiple accompanying strip storage clips 2 are provided. A detection part is provided on each of the accompanying strip storage clips 2, and the detection part is located at a different position of each accompanying strip storage clip 2. One of the multiple detection parts corresponds to the position of one of the multiple specification detection sensors 9.

[0077] Specifically, in this embodiment, features are provided at various locations on the accompanying storage clip 2. These features are detection components provided on the accompanying storage clip 2. When the accompanying storage clip 2 is installed in the base 1, the detection components trigger corresponding size detection sensors 9. The signals emitted by these size detection sensors 9 can be used to determine the current size of the accompanying storage clip 2. In this embodiment, the size detection sensors 9 can be proximity sensors, with detection components protruding from the accompanying storage clip 2. When the detection components approach one of multiple proximity sensors, the proximity sensor generates an electrical signal.

[0078] In the process of pushing the accompanying strip 11, it is expected that the pushing end 60 stops moving when the accompanying strip 11 just hits the limiter 8, so it is necessary to clearly define the pushing stroke of the pushing end 60. Figure 1 As shown, in this embodiment, the accompanying strip 11 feeding device further includes an accompanying strip position detection sensor 3 , which is used to detect the position of the outermost accompanying strip 11 in the accompanying strip storage cavity 202 .

[0079] In the process of the accompanying strip 11 being moved toward the accompanying strip loading port 200 by the pushing end 60, the accompanying strip 11 will move to the position that triggers the accompanying strip position detection sensor 3. Since the distance difference between the accompanying strip 11 position sensor and the accompanying strip loading port 200 is a design value, when the accompanying strip 11 moves to the position that triggers the accompanying strip position detection sensor 3, the distance between the accompanying strip 11 and the accompanying strip loading port 200 is also determined. At this time, the pushing end 60 further pushes the accompanying strip 11 according to the distance to make the accompanying strip 11 just move to the accompanying strip loading port 200.

[0080] In this embodiment, the position sensor of the strip 11 can be a proximity sensor, or a Figure 4 and Figure 5 As shown, detection holes 205 are opened on both sides of the accompanying strip storage clip 2, and the detection holes 205 are connected to the accompanying strip storage cavity 202;

[0081] The accompanying strip position detection sensor 3 includes a signal transmitting sensor and a signal receiving sensor provided on the base 1 . The signal transmitting sensor and the signal receiving sensor are respectively located on both sides of the accompanying strip storage clip 2 and correspond to the detection hole 205 .

[0082] In this embodiment, when the accompanying bar 11 moves to block the signal path between the signal transmitting sensor and the signal receiving sensor, the signal receiving sensor is triggered, and at this time the driving end continues to push the accompanying bar 11 according to the set distance.

[0083] In one embodiment, Figure 1 and Figure 2As shown, a driving mechanism 4 capable of outputting linear motion is provided on the base 1, and the driving end of the driving mechanism 4 is connected to the pushing end 60 of the pushing mechanism 6. In this embodiment, the driving mechanism 4 includes a motor and a lead screw. The motor drives the lead screw to rotate and drives the lead screw slider to move linearly. The lead screw slider drives the pushing end 60 to move linearly through the connecting rod.

[0084] In this embodiment, if Figure 1 As shown, the pushing end 60 includes a strip push plate 600, and the base 1 includes a top plate 100, a bottom plate 102 and a strip positioning plate 103. The top plate 100 and the bottom plate 102 are fixedly connected by a number of connecting rods 101. A through hole is provided in the middle of the top plate 100. The strip positioning plate 103 is located above the top plate 100. The lower ends of the several connecting rods 101 are fixedly connected to the bottom plate 102, and the upper ends are fixedly connected to the strip positioning plate 103 after passing through the through hole. The mounting groove 1030 can be opened on the strip positioning plate 103, and the driving mechanism 4 can be installed on the bottom plate 102. The driving end of the driving mechanism 4 is provided with a connecting plate 5 after passing through the bottom plate 102, and the second end of the strip push plate 600 can be connected to the connecting plate 5.

[0085] In another embodiment, the driving mechanism 4 is a cylinder, which is fixed on the base plate 102 , and a piston rod of the cylinder passes through the base plate 102 and is fixedly connected to the connecting plate 5 .

[0086] In order to facilitate the accurate reset of the driving mechanism 4, as Figure 2 As shown, a motion sensor is also provided in this embodiment. The motion sensor includes a sensor sensing piece 10. The sensor sensing piece 10 is used to detect the position of the driving end of the driving mechanism 4. In one embodiment, the motion sensor can be installed on the driving end or on the connecting plate 5. The sensor sensing piece 10 extends out of the connecting plate 5 in the horizontal direction. A vertical plate is provided on the bottom plate 102 of the base 1. Positioning pieces are installed at both ends of the vertical plate. The motion sensor can be a proximity sensor. During the loading process of the accompanying strip 11, the sensor sensing piece 10 of the motion sensor moves between the two positioning pieces. When the sensor sensing piece 10 approaches the positioning piece at the lower end, an electrical signal is triggered, indicating that the driving end is at the origin position. When the sensor sensing piece 10 approaches the positioning piece at the upper end, an electrical signal is triggered, indicating that the driving end is at the extreme position.

[0087] In another embodiment, the displacement of the driving end can be detected by configuring an encoder on the driving mechanism 4, so as to accurately control the displacement of the driving end, including the reset and maximum stroke control of the driving end.

[0088] The above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention. Those skilled in the art will readily appreciate that the present invention is susceptible to various modifications and variations. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of the present invention shall be included within the scope of protection of the present invention.

Claims

1. A strip feeding device, characterized in that: include: base; A note storage folder is provided on the base, wherein a note storage cavity is provided in the note storage folder, and the note storage cavity is used to store a plurality of note; The accompanying strip storage clamp is provided with an accompanying strip loading port, and the accompanying strip loading port is communicated with the accompanying strip storage cavity; The pushing mechanism includes a pushing end, and the pushing end is configured to be able to move into the accompanying strip storage cavity and push the accompanying strip to the accompanying strip loading port.

2. The strip feeding equipment according to claim 1, characterized in that: The accompanying strip storage clamp is provided with a material taking trough, one side of which is communicated with the accompanying strip feeding port, and the material taking trough is used to accommodate a part of the accompanying strip when taking the material.

3. The strip feeding equipment according to claim 2, characterized in that: A limiting piece is provided on the accompanying strip storage clamp, the limiting piece corresponds to the accompanying strip feeding port, and the limiting piece is used to limit the maximum movement of the accompanying strip under the action of the pushing end.

4. The strip feeding equipment according to claim 3, characterized in that: The material taking trough is arranged in the longitudinal direction of the accompanying strip feeding port, and the length of the material taking trough is greater than or equal to the length of the portion of the limiting member corresponding to the accompanying strip feeding port; or The material taking trough is arranged in the width direction of the accompanying strip feeding port, and the width of the material taking trough is greater than or equal to the width of the portion of the limiting member corresponding to the accompanying strip feeding port.

5. The strip feeding equipment according to claim 4, characterized in that: The limiting member includes a pressing block fixed on the accompanying bar storage clamp, at least a portion of the pressing block corresponds to the accompanying bar feeding port; the depth of the material taking trough is greater than or equal to the height of the accompanying bar.

6. The strip feeding equipment according to claim 1, characterized in that: The accompanying strip storage folder comprises a folder body and a cover plate. The accompanying strip storage cavity is provided in the folder body. The cover plate is openably provided on a side surface of the folder body to open and close the accompanying strip storage cavity.

7. The strip feeding equipment according to claim 1, characterized in that: The pushing end includes a strip push plate, a first end of which is slidably disposed in the strip storage cavity, and a second end of which extends out of the strip storage clip.

8. The strip feeding equipment according to claim 1, characterized in that: The base is provided with a mounting groove, and the accompanying strip storage clip is detachably inserted into the mounting groove.

9. The strip feeding device according to claim 8, characterized in that: There are at least two installation slots, and at least two accompanying strip storage clips are provided and are detachably plugged into and matched with the installation slots one by one.

10. The strip feeding equipment according to claim 1, characterized in that: The base is provided with a fixing piece, and the fixing piece is detachably fixedly connected to the accompanying strip storage clip.

11. The strip feeding device according to claim 1, characterized in that: The base is provided with a specification detection sensor, and the specification detection sensor is used to detect the specifications of the accompanying strip storage folder installed on the base.

12. The strip feeding device according to claim 11, characterized in that: There are multiple specification detection sensors, and there are multiple accompanying strip storage clips. A detection part is provided on each of the accompanying strip storage clips, and the detection part is located at a different position of each of the accompanying strip storage clips. One of the multiple detection parts corresponds to the position of one of the multiple specification detection sensors.

13. The strip feeding equipment according to claim 1, characterized in that: The accompanying strip feeding device further includes an accompanying strip position detection sensor, which is used to detect the position of the outermost accompanying strip in the accompanying strip storage cavity.

14. The strip feeding device according to claim 13, characterized in that: Detection holes are provided on both sides of the accompanying strip storage clip, and the detection holes are connected to the accompanying strip storage cavity; The accompanying strip position detection sensor includes a signal transmitting sensor and a signal receiving sensor provided on the base. The signal transmitting sensor and the signal receiving sensor are respectively located on both sides of the accompanying strip storage clip and correspond to the detection hole.

15. The strip feeding device according to claim 1, characterized in that: The base is provided with a driving mechanism capable of outputting linear motion, and the driving end of the driving mechanism is connected to the pushing end of the pushing mechanism.

16. The strip feeding device according to claim 15, characterized in that: A motion sensor is also included, and the motion sensor is used to detect the position of the driving end of the driving mechanism.

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