Photomask cleaning hanger

Abstract

The utility model discloses a photomask cleaning hanger, which relates to the field of photomask cleaning and comprises a cross rod, and a lower hanger is mounted at the lower end of the cross rod. Through the arrangement of the cross rod, the lower hanging frame, the first limiting groove, the second limiting groove, the third limiting groove, the clamping groove rod, the limiting plate block and the small cleaning frame, the small cleaning frame is installed on the lower hanging frame in the same mode, and the clamping groove rod and the limiting plate block on the third limiting groove are used for fixing the small cleaning frame. At the moment, 3-inch and 6-inch photomasks can be placed on the small cleaning frame, the photomasks of different sizes are fixed through the clamping groove rods and the limiting plate blocks in the first limiting groove and the second limiting groove so that the photomasks can be conveniently transferred or other processes can be carried out, the device can be compatible with the photomasks of different sizes, and the working efficiency is improved. The production capacity of the device is greatly improved, a customer can freely select a corresponding manufacturing process without being limited by the device, and the compatibility of the device is improved.

Description

Technical Field

[0001] The utility model relates to the field of photomask cleaning, in particular to a photomask cleaning rack. Background Art

[0002] Photomasks are an essential and important link in chip production. However, 90% of the current photomask market is monopolized by foreign countries. Due to limitations in production equipment, China can only produce small-sized substrates, such as three-inch and six-inch substrates. Contaminants on the photomask may cause various defects during the photolithography process. For example, particulate contaminants may cause local protrusions or depressions on the silicon wafer during photolithography, forming so-called particle defects. These defects may cause short circuits or open circuits in the circuits inside the chip, thereby causing chip failure. Cleaning the photomask can eliminate these potential sources of defects and reduce the failure rate in the chip manufacturing process. Therefore, a photomask cleaning rack is needed.

[0003] The existing photomask cleaning rack cannot effectively improve the compatibility of the device and cannot improve the convenience of the device fixing work during operation. Therefore, a photomask cleaning rack is urgently needed. Utility Model Content

[0004] Based on this, the purpose of the present invention is to provide a photomask cleaning rack to solve the problem that the existing photomask cleaning rack cannot effectively improve the compatibility of the device and cannot improve the convenience of the device fixing work when in use.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a photomask cleaning rack, comprising a cross bar, a lower rack installed at the lower end of the cross bar, a first limit slot provided at the middle end of the lower rack, a second limit slot provided at the middle end of the lower rack, a third limit slot provided at the middle end of the lower rack, a slot rod installed at the middle end of the third limit slot, a limiting plate installed at the front end of the slot rod, a fixed wheel installed at one end of the lower rack, a small cleaning rack installed at the upper end of the fixed wheel, a rack hook installed at the upper end of the small cleaning rack, and an 850x1440 photomask installed at the upper end of the fixed wheel.

[0006] Preferably, the length of the first limiting groove is greater than that of the second limiting groove, and the second limiting groove and the third limiting groove are arranged in parallel.

[0007] Preferably, the slot rod forms a sliding structure with the lower hanging frame through the third limiting groove, and the limiting plate forms a rotating structure with the lower hanging frame through the slot rod.

[0008] Preferably, the fixing wheels are engaged with the lower rack, and the fixing wheels of the lower rack are distributed at equal intervals about the central axis of the lower rack.

[0009] Preferably, the small cleaning rack is movably connected to the fixed wheel, and the small cleaning rack is engaged with the lower hanging rack through a limiting plate.

[0010] Preferably, the 850x1440 photomask is movably connected to the lower rack via a fixing wheel, and the 850x1440 photomask is engaged and connected to the lower rack via a limiting plate.

[0011] Compared with the prior art, the beneficial effects of the present invention are:

[0012] 1. The utility model installs the small cleaning rack on the lower hanging rack in the same manner by arranging a cross bar, a lower hanging rack, a first limiting slot, a second limiting slot, a third limiting slot, a slot rod, a limiting plate and a small cleaning rack. The small cleaning rack is fixed by the slot rod and the limiting plate on the third limiting slot. At this time, 3-inch and 6-inch photomasks can be placed on the small cleaning rack, and photomasks of different sizes can be fixed by the slot rods and the limiting plates in the first limiting slot and the second limiting slot, so as to be used for transportation or other processes. This device is compatible with photomasks of different sizes, which greatly improves the production capacity of the equipment. Customers can freely choose the corresponding process without being restricted by the equipment, thereby improving the compatibility of the device.

[0013] 2. The utility model sets a cross bar, a lower hanger, a first limit slot, a second limit slot, a third limit slot, a slot rod, a limit plate, a fixed wheel and an 850x1440 photomask. The lower hanger and the cross bar are assembled, and the fixed wheel is clamped on the lower hanger, and the three slot rods and the limit plate are clamped in the first limit slot, the second limit slot and the third limit slot respectively. After the entire hanger is assembled, the 850x1440 photomask can be placed directly on the fixed wheel, and the three slot rods are moved on the first limit slot, the second limit slot and the third limit slot to contact the 850x1440 photomask to prevent it from tipping over, and its position is limited by the limit plate, thereby improving the convenience of the device fixing work. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 This is a schematic diagram of the structure of the maximum-sized photomask loaded in the present invention;

[0015] Figure 2 This is a schematic diagram of the unobstructed structure of the crossbar and the lower bracket of the utility model;

[0016] Figure 3 This is a schematic diagram of a small cleaning rack equipped with the present invention.

[0017] In the figure: 1. Horizontal bar; 2. Lower hanging rack; 3. First limiting slot; 4. Second limiting slot; 5. Third limiting slot; 6. Slot rod; 7. Limit plate; 8. Fixed wheel; 9. Small cleaning rack; 10. Rack hook; 11. 850x1440 photomask. DETAILED DESCRIPTION

[0018] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. The embodiments described below with reference to the drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0019] The following describes an embodiment of the present invention based on its overall structure.

[0020] See also Figure 1-3 , a photomask cleaning rack, comprising a cross bar 1, a lower rack 2 is mounted on the lower end of the cross bar 1, a first limiting slot 3 is provided at the middle end of the lower rack 2, a second limiting slot 4 is provided at the middle end of the lower rack 2, a third limiting slot 5 is provided at the middle end of the lower rack 2, a slot rod 6 is installed at the middle end of the third limiting slot 5, a limiting plate 7 is installed at the front end of the slot rod 6, a fixed wheel 8 is mounted at one end of the lower rack 2, the length of the first limiting slot 3 is greater than the second limiting slot 4, and the second limiting slot 4 and the third limiting slot 5 are arranged in parallel, the slot rod 6 forms a sliding structure with the lower rack 2 through the third limiting slot 5, and the limiting plate 7 forms a rotating structure with the lower rack 2 through the slot rod 6, and the fixed wheel 8 and the lower rack are fixed. 2 is snap-fitted and connected, and the fixing wheels 8 of the lower rack 2 are evenly spaced about the central axis of the lower rack 2. The lower rack 2 is assembled with the cross bar 1, and the fixing wheels 8 are snap-fitted onto the lower rack 2. The three slot rods 6 and the limiting plate 7 are respectively snap-fitted into the first limiting slot 3, the second limiting slot 4 and the third limiting slot 5. After the entire rack is assembled, the 850x1440 photomask 11 can be placed directly on the fixing wheels 8, and the three slot rods 6 are moved on the first limiting slot 3, the second limiting slot 4 and the third limiting slot 5 to contact the 850x1440 photomask 11 to prevent it from tipping over, and its position is limited by the limiting plate 7, thereby improving the convenience of the device fixing work.

[0021] See also Figure 1-3A photomask cleaning rack, a small cleaning rack 9 is installed on the upper end of the fixed wheel 8, a rack hook 10 is installed on the upper end of the small cleaning rack 9, an 850x1440 photomask 11 is installed on the upper end of the fixed wheel 8, the small cleaning rack 9 is movably connected to the fixed wheel 8, and the small cleaning rack 9 is connected to the lower rack 2 by a limit plate 7, the 850x1440 photomask 11 is movably connected to the lower rack 2 by the fixed wheel 8, and the 850x1440 photomask 11 is connected to the lower rack 2 by a limit plate 7, and the small cleaning rack 9 is installed on the lower rack in the same way 2, and the small cleaning rack 9 is fixed by the slot rod 6 and the limit plate 7 on the third limit slot 5. At this time, 3-inch and 6-inch photomasks can be placed on the small cleaning rack 9, and the slot rod 6 and the limit plate 7 in the first limit slot 3 and the second limit slot 4 can be used to fix photomasks of different sizes for transportation or other processes. This device is compatible with photomasks of different sizes, which greatly improves the production capacity of the equipment. Customers can freely choose the corresponding process without being restricted by the equipment, thereby improving the compatibility of the device.

[0022] Working principle: When in use, first assemble the lower rack 2 and the cross bar 1, and clamp the fixed wheel 8 on the lower rack 2, clamp the three slot rods 6 and the limit plate 7 in the first limit slot 3, the second limit slot 4 and the third limit slot 5 respectively, assemble the entire rack, and then the 850x1440 photomask 11 can be placed directly on the fixed wheel 8, and the three slot rods 6 are moved on the first limit slot 3, the second limit slot 4 and the third limit slot 5 to contact the 850x1440 photomask 11 to prevent it from tipping over, and its position is limited by the limit plate 7, or the small cleaning rack 9 can be installed on the lower rack 2 in the same way, and through The slot rod 6 and the limiting plate 7 on the third limiting slot 5 are used to fix the small cleaning rack 9. At this time, 3-inch and 6-inch photomasks can be placed on the small cleaning rack 9. The slot rod 6 and the limiting plate 7 in the first limiting slot 3 and the second limiting slot 4 are used to fix photomasks of different sizes so that they can be used for transportation or other processes. This device is compatible with photomasks of different sizes, which greatly improves the production capacity of the equipment. Customers can freely choose the corresponding process without being restricted by the equipment. This completes the use process of the device. The content not described in detail in this manual belongs to the existing technology known to professional and technical personnel in this field.

[0023] Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments, or make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A photomask cleaning rack, comprising a crossbar (1), characterized in that: The lower end of the crossbar (1) is equipped with a lower hanging frame (2), the middle end of the lower hanging frame (2) is provided with a first limiting groove (3), the middle end of the lower hanging frame (2) is provided with a second limiting groove (4), the middle end of the lower hanging frame (2) is provided with a third limiting groove (5), the middle end of the third limiting groove (5) is equipped with a slot rod (6), the front end of the slot rod (6) is equipped with a limiting plate (7), one end of the lower hanging frame (2) is equipped with a fixed wheel (8), the upper end of the fixed wheel (8) is equipped with a small cleaning rack (9), the upper end of the small cleaning rack (9) is equipped with a rack hook (10), and the upper end of the fixed wheel (8) is equipped with an 850x1440 photomask (11).

2. The photomask cleaning rack according to claim 1, characterized in that: The length of the first limiting groove (3) is greater than that of the second limiting groove (4), and the second limiting groove (4) and the third limiting groove (5) are arranged in parallel.

3. The photomask cleaning rack according to claim 1, characterized in that: The slot rod (6) forms a sliding structure with the lower rack (2) through the third limiting slot (5), and the limiting plate (7) forms a rotating structure with the lower rack (2) through the slot rod (6).

4. The photomask cleaning rack according to claim 1, wherein: The fixed wheels (8) are engaged with the lower rack (2), and the fixed wheels (8) of the lower rack (2) are distributed at equal intervals about the central axis of the lower rack (2).

5. The photomask cleaning rack according to claim 1, characterized in that: The small cleaning rack (9) is movably connected to the fixed wheel (8), and the small cleaning rack (9) is engaged and connected to the lower hanging rack (2) through a limiting plate (7).

6. The photomask cleaning rack according to claim 1, characterized in that: The 850x1440 photomask (11) is movably connected to the lower rack (2) via a fixed wheel (8), and the 850x1440 photomask (11) is snap-connected to the lower rack (2) via a limiting plate (7).

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