Glass slide position normalizing mechanism

Abstract

The utility model provides a glass slide position normalizing mechanism, which relates to the technical field of semiconductor processing equipment and is characterized by comprising a substrate, an active push block is arranged in the middle of the upper side of the substrate, and a plurality of groups of linear guide rail components are uniformly and symmetrically arranged on the upper side of the substrate and on the periphery of the active push block. Driven blocks are slidably arranged on the upper sides of the linear guide rail assemblies respectively, profiling edge pushing grooves are formed in the upper portions of the outer sides of the driven blocks, fixing plates are fixedly arranged on the upper side of the base plate and correspond to the positions of the outer sides of the driven blocks respectively, glass slide grooves are formed in the upper sides of the fixing plates, and the sides, facing the directions of the driven blocks, of the glass slide grooves are open. According to the utility model, the automation degree of equipment is improved, the accuracy of feeding and discharging is improved, a plurality of glass slides can be simultaneously arranged and positioned, the production efficiency is improved, the problems of adhesion and water accumulation are solved, and the production efficiency and stability are improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor processing equipment, in particular to a glass slide position regularization mechanism. Background Art

[0002] In the existing technology landscape, MIP LED dicing machines, as precision semiconductor processing equipment, play a vital role in the manufacturing process. However, traditional MIP LED dicing machines mostly rely on manual loading and unloading, which is not only inefficient but also requires a large amount of manpower, increasing production costs and the risk of human error. With the continuous advancement of automation technology, the market has placed higher demands on the automation level of MIP LED dicing machines to achieve a more efficient and stable production process.

[0003] Specifically, existing MIP LED dicing machines have the following major problems during the loading and unloading process:

[0004] High reliance on manual operation: Traditional MIP LED dicing machines require operators to frequently manually load and unload materials, which is not only time-consuming and labor-intensive but also susceptible to human error, resulting in low production efficiency and unstable product quality. With the development of industrial automation technology, the drawbacks of manual operation have become increasingly prominent, and there is an urgent need to implement automated loading and unloading functions to reduce dependence on personnel.

[0005] Inconsistent glass slide positioning: During the automated loading and unloading process, the initial incoming glass slide position is often inconsistent, posing significant challenges to automated positioning and adjustment. To ensure accurate loading and unloading, it's essential that the glass slides quickly and stably reach the predetermined fixed position. However, existing technologies often struggle to effectively address this issue, impacting the stability and reliability of automated loading and unloading systems.

[0006] Difficulty in Simultaneously Loading and Unloading Multiple Glass Slides: To improve production efficiency, MIP LED dicing machines must process multiple glass slides simultaneously. However, existing automated loading and unloading systems often struggle to accurately position and align multiple glass slides simultaneously, resulting in low production efficiency and inconsistent product quality. Therefore, achieving simultaneous loading and unloading of multiple glass slides has become a key issue in improving the production efficiency of MIP LED dicing machines.

[0007] In response to the above problems, although there are some automatic loading and unloading mechanisms in the existing technology, they often have problems such as complex structure, inaccurate positioning, and poor stability, which makes it difficult to meet the high requirements of MIP LED dicing machines for automation and production efficiency. Utility Model Content

[0008] In view of the shortcomings of the existing technology, the utility model provides a glass carrier position regularization mechanism, which aims to solve the problems existing in the automatic loading and unloading process of the existing MIP LED dicing machine and realize a more efficient and stable automated production process.

[0009] In order to achieve the above objectives, the present invention is implemented through the following technical solutions:

[0010] A glass slide position regularization mechanism, characterized in that: it includes a base plate, an active push block is provided in the middle position of the upper side of the base plate, a plurality of groups of linear guide rail assemblies are evenly and symmetrically provided on the upper side of the base plate and located at the periphery of the active push block, the upper side of the linear guide rail assemblies are respectively slidably provided with follower blocks, the upper outer side of the follower blocks are provided with contoured edge push grooves, the upper side of the base plate and the positions corresponding to the outer sides of the follower blocks are fixedly provided with fixed plates, the upper side of the fixed plate is provided with glass slide grooves, and the glass slide grooves are open on the sides facing the direction of the follower blocks.

[0011] The preferred technical solution is that the active push block is in the shape of a boss, the active push block is set on the upper side of the base plate for sliding up and down, the outer side of the driven block is fixed with a spring, and the outer side of the fixed plate facing the direction of the driven block is provided with a notch plane, the notch plane cooperates with the outer end side of the spring, and the outer side surface of the active push block cooperates with the inner side surface of the driven block.

[0012] According to a preferred technical solution, a hydraulic cylinder or a motor is fixedly provided at the lower part of the base plate, the hydraulic rod of the hydraulic cylinder is fixedly connected to the bottom of the active push block through the base plate, and the motor drives the active push block to move up and down through a transmission member.

[0013] A preferred technical solution is that a groove is provided at the lower part of the fixed plate, an in-position sensor is fixedly provided on the upper side of the substrate and at a position corresponding to the groove, an in-position sensor detection hole is provided on the fixed plate and located in the inner middle position of the glass slide groove, and the in-position sensor detects the upper side of the fixed plate through the in-position sensor detection hole.

[0014] According to a preferred technical solution, a waterproof structure is provided on the detection hole of the in-place sensor, and the in-place sensor is a photoelectric sensor.

[0015] According to a preferred technical solution, a protrusion is provided on the upper side of the fixing plate and located in the glass slide groove, and the upper side surface of the protrusion, the upper side surface of the open side of the glass slide groove and the upper side surface of the contoured side push groove are located on the same horizontal plane.

[0016] According to a preferred technical solution, the protrusions are strip-shaped and are arranged along and close to the inner side of the glass slide groove.

[0017] According to a preferred technical solution, the inner side edge of the glass slide groove is a contoured edge.

[0018] According to a preferred technical solution, four fixing plates are provided and arranged in a rectangular shape on the upper side of the base plate.

[0019] According to a preferred technical solution, a drainage hole communicating with the glass slide groove is provided on the side of the fixing plate.

[0020] The utility model provides a glass slide position regularization mechanism, which has the following beneficial effects:

[0021] Improve the degree of automation: Through the up and down movement of the active push block, combined with the synergistic effect of the driven block and the linear guide assembly, the automatic regularization and positioning of the glass slides are achieved, reducing the dependence on manual operation and improving the degree of automation of the equipment.

[0022] Ensure position accuracy: The coordinated design of the active push block and the driven block, as well as the close fit between the contoured edge push groove and the glass slide groove on the fixed plate, ensure that the glass slide can quickly and stably reach the predetermined fixed position, improving the accuracy of loading and unloading.

[0023] Supports simultaneous processing of multiple wafers: The mechanism can simultaneously organize and position multiple glass slides, improving production efficiency and meeting the MIP LED dicing machine's demand for efficient production.

[0024] Solve the problems of adhesion and water accumulation: By setting bumps and drainage holes on the fixed plate, the problem of glass slides sticking to the fixed plate due to water on the surface, causing loading and unloading failure, is effectively solved. At the same time, it ensures that condensed water can be drained away in time, avoiding adverse effects on glass slides and equipment.

[0025] Improve production efficiency and stability: The regular mechanism of the utility model not only simplifies the operation process and reduces labor costs, but also improves the production efficiency and stability of the MIP LED dicing machine, bringing significant economic benefits to the LED manufacturing industry. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 This is a schematic diagram of the structure of the utility model;

[0027] Figure 2 It is a schematic diagram of the structure of the utility model after partial disassembly;

[0028] Figure 3 This is a schematic diagram of the bottom structure of the utility model;

[0029] Figure 4 This is a schematic diagram of the fixed plate structure of the utility model;

[0030] Figure 5This is a schematic diagram of the structure of the utility model after removing the fixing plate;

[0031] In the figure: 1-base plate, 2-active push block, 3-linear guide assembly, 4-driven block, 5-fixed plate, 6-spring, 7-hydraulic cylinder, 8-in-place sensor, 9-waterproof structure, 10-glass slide, 41-fixed horizontal plate, 51-glass slide groove, 52-cut plane, 53-groove, 54-in-place sensor detection hole, 55-bump, 56-drainage hole. DETAILED DESCRIPTION

[0032] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0033] like Figure 1 As shown, a glass slide position regularization mechanism includes a base plate 1, an active push block 2 is provided in the middle position on the upper side of the base plate 1, and multiple sets of linear guide rail assemblies 3 are evenly and symmetrically provided on the upper side of the base plate 1 and located around the active push block 2. Follower blocks 4 are slidably provided on the upper sides of the linear guide rail assemblies 3, and contoured edge push grooves 41 are provided on the upper outer sides of the follower blocks 4. Fixed plates 5 are fixed on the upper side of the base plate 1 and corresponding to the outer sides of the follower blocks 4. Glass slide grooves 51 are provided on the upper side of the fixed plates 5, and the glass slide grooves 51 are open to the sides facing the direction of the follower blocks 4. Four fixed plates 5 are provided and arranged in a rectangular shape on the upper side of the base plate 1.

[0034] like Figure 1 、 Figure 2 and Figure 3 As shown, the active push block 2 is shaped like a boss and is slidably mounted on the upper side of the base plate 1. A spring 6 is fixedly mounted on the outer side of the driven block 4. A notch 52 is provided on the outer side of the fixed plate 5 facing the driven block 4. The notch 52 cooperates with the outer end of the spring 6, and the outer side of the active push block 2 cooperates with the inner side of the driven block 4. A hydraulic cylinder 7 is fixedly mounted on the lower portion of the base plate 1. The hydraulic rod of the hydraulic cylinder 7 is fixedly connected to the bottom of the active push block 2 through the base plate 1.

[0035] like Figure 2 and Figure 4As shown, a groove 53 is provided at the lower portion of the fixed plate 5, and an in-position sensor 8 is fixedly provided on the upper side of the substrate 1 and at a position corresponding to the groove 53. An in-position sensor detection hole 54 is provided on the fixed plate 5 and located in the inner middle position of the glass slide groove 51. The in-position sensor 8 detects the upper side of the fixed plate 5 through the in-position sensor detection hole 54.

[0036] like Figure 2 and Figure 4 As shown, a waterproof structure 9 is provided on the in-position sensor detection hole 54, and the in-position sensor 8 is a photoelectric sensor. The waterproof structure of the wafer in-position sensor solves the problem of false sensing by water droplets on the sensor. The waterproof structure used here can adopt a solution of covering the sensor detection hole 54 with a transparent material and sealing it with a rubber sealing ring. The in-position sensor 8 detects whether there is a wafer on the fixing plate 5, and the waterproof structure 9 protects the in-position sensor 8 from dripping onto the sensor.

[0037] like Figure 1-Figure 5 As shown, a protrusion 55 is provided on the upper side of the fixed plate 5 and within the glass slide groove 51. The upper side of the protrusion 55, the upper side of the open side of the glass slide groove 51, and the upper side of the contoured side push groove 41 are located on the same horizontal plane. The protrusion 55 is strip-shaped and is arranged along and close to the inner side of the glass slide groove 51. The glass slide is actually placed on the platform formed by the upper side of the protrusion 55 and the upper side of the open side of the glass slide groove 51. This makes the glass slide groove 51 hollow, and the contact area between the fixed plate 5 and the glass slide 10 is small, solving the problem of glass slide 10 sticking to the fixed plate 5 when water accumulates on the surface of the fixed plate 5, causing loading and unloading failures. The provision of the protrusion 55 also serves to prevent accumulated water from flowing back, allowing water accumulated on the side of the glass slide groove 51 to flow through the gap between the protrusion 55 and the side of the glass slide groove 51 and then drain through the drainage hole 56.

[0038] The inner side of the glass slide groove 51 is a contoured side. Contouring means that the inner side of the glass slide 10 has the same outer shape as the inner side of the glass slide 10 so that the two can fit tightly together and achieve the purpose of accurate positioning.

[0039] like Figure 4 As shown, the side of the fixing plate 5 is provided with a drainage hole 56 that communicates with the glass slide groove 51. Condensed water inside the glass slide groove 51 is drained away along the inner wall and through the drainage hole 56. Condensed water outside is drained away along the outer wall, and the water outside cannot flow into the inner part of the glass slide groove 51.

[0040] The present invention drives the active push block 2 to move up and down through the hydraulic cylinder 7. The outer side surface of the boss of the active push block 2 changes in inclination to squeeze the driven block 4, so that the driven block 4 moves linearly along the linear guide assembly 3, pushing the glass slide 10 close to the fixed plate 5 to achieve the purpose of regular position. Under the action of the spring 6, when the active push block 2 returns, the driven block 4 can automatically reset, and the space included between the driven block 4 and the fixed plate 5 will be in an expanded state to facilitate the placement of the glass slide 10 product. The glass slide 10 is placed in the space included between the driven block 4 and the fixed block 5. The size and shape of this space are determined by the size, shape (profiling) and shape and position deviation of the slide. The present invention will be widely used in the automatic loading and unloading mechanism of the MIP LED dicing machine. It can not only ensure the accurate and stable loading and unloading position of the dicing machine, but also can regularize multiple slides at a time, thereby improving the stability and production efficiency of the automatic loading mechanism of the MIPLED dicing machine, and is an important guarantee for the MIP LED dicing machine to achieve automatic loading and unloading.

[0041] Although the embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations may be made to these embodiments without departing from the principles and spirit of the present invention, and the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A glass slide position regularization mechanism, characterized by: The invention comprises a base plate (1), an active push block (2) is provided at the middle position of the upper side of the base plate (1), a plurality of linear guide rail assemblies (3) are evenly and symmetrically provided on the upper side of the base plate (1) and located at the periphery of the active push block (2), a driven block (4) is slidably provided on the upper side of the linear guide rail assemblies (3), a contoured edge push groove (41) is provided on the upper outer side of the driven block (4), a fixed plate (5) is fixedly provided on the upper side of the base plate (1) and at positions corresponding to the outer sides of the driven block (4), a glass slide groove (51) is provided on the upper side of the fixed plate (5), and the glass slide groove (51) is open on the side facing the direction of the driven block (4); The active push block (2) is in the shape of a boss. The active push block (2) is slidably arranged on the upper side of the base plate (1). A spring (6) is fixedly arranged on the outer side of the driven block (4). A cutout plane (52) is arranged on the outer side of the fixed plate (5) facing the direction of the driven block (4). The cutout plane (52) cooperates with the outer end side of the spring (6). The outer side surface of the active push block (2) cooperates with the inner side surface of the driven block (4). A groove (53) is provided at the lower portion of the fixing plate (5); an in-position sensor (8) is fixedly provided on the upper side of the substrate (1) and at a position corresponding to the groove (53); an in-position sensor detection hole (54) is provided on the fixing plate (5) and located in the middle position inside the glass slide groove (51); and the in-position sensor (8) detects the upper side of the fixing plate (5) through the in-position sensor detection hole (54).

2. A glass slide position regularization mechanism according to claim 1, characterized in that: A hydraulic cylinder (7) or a motor is fixedly provided at the lower part of the base plate (1); the hydraulic rod of the hydraulic cylinder (7) is fixedly connected to the bottom of the active push block (2) through the base plate (1); and the motor drives the active push block (2) to move up and down through a transmission member.

3. The glass slide position regularization mechanism according to claim 1, characterized in that: A waterproof structure (9) is provided on the in-place sensor detection hole (54), and the in-place sensor (8) is a photoelectric sensor.

4. The glass slide position regularization mechanism according to claim 1, characterized in that: A protrusion (55) is provided on the upper side of the fixing plate (5) and located in the glass slide groove (51); the upper side of the protrusion (55), the upper side of the open side of the glass slide groove (51) and the upper side of the contoured side push groove (41) are located on the same horizontal plane.

5. The glass slide position regularization mechanism according to claim 4, characterized in that: The protrusions (55) are strip-shaped and are arranged along and close to the inner side of the glass slide groove (51).

6. The glass slide position regularization mechanism according to claim 1, characterized in that: The inner side edge of the glass slide groove (51) is a contoured edge.

7. The glass slide position regularization mechanism according to claim 1, characterized in that: Four fixing plates (5) are provided and arranged in a rectangular shape on the upper side of the base plate (1).

8. The glass slide position regularization mechanism according to claim 1, characterized in that: The side of the fixing plate (5) is provided with a drainage hole (56) communicating with the glass slide groove (51).

Images