Single crystal furnace auxiliary chamber cylinder and single crystal furnace

Abstract

The utility model relates to a single crystal furnace auxiliary chamber cylinder and a single crystal furnace, the single crystal furnace auxiliary chamber cylinder comprises a cylinder body and an observation window arranged at the lower part of the cylinder body, the observation window comprises: a window frame fixedly arranged on the cylinder body and provided with an observation channel communicated with the internal space of the cylinder body; the window cover is connected with the window frame in an opening and closing manner and is provided with a window corresponding to the observation channel of the window frame; the suction device comprises a plurality of electromagnetic units and a controller for controlling the electromagnetic units to be powered on or powered off, the electromagnetic units are divided into a first electromagnetic unit group and a second electromagnetic unit group, the first electromagnetic unit group is arranged on the attaching face where the window frame is attached to the window cover, and the second electromagnetic unit group is arranged on the attaching face where the window frame is attached to the window cover. The second electromagnetic unit group is arranged on the attaching surface of the window cover and the window frame, and by adopting the observation window of the single crystal furnace, the problem that the observation window of the single crystal furnace needs to be manually locked in the prior art is solved.

Description

Technical Field

[0001] The present application relates to the technical field of single crystal silicon production equipment, and in particular to a single crystal furnace sub-chamber tube and a single crystal furnace. Background Art

[0002] A single crystal furnace is a device used to produce single crystal materials. It can convert polycrystalline materials into single crystals through melting and recrystallization. It is an important semiconductor manufacturing equipment that provides a key technical means for the preparation of high-quality single crystals.

[0003] Since the growth status of the crystal, the condition of the melt in the crucible, and the distribution of the heat field need to be monitored in real time during the production process in order to adjust the process parameters in time to ensure the quality and growth efficiency of the crystal, an observation window is usually set on the sub-chamber barrel of the single crystal furnace. However, the existing observation window cannot be automatically controlled and requires frequent manual operation by on-site personnel and locking with bolts. Utility Model Content

[0004] Based on this, a single crystal furnace sub-chamber tube and a single crystal furnace are provided to improve the problem in the prior art that the single crystal furnace observation window needs to be manually locked.

[0005] In one aspect, a single crystal furnace auxiliary chamber barrel is provided, comprising: a barrel body and an observation window provided at the lower portion of the barrel body, wherein the observation window comprises:

[0006] a window frame fixedly disposed on the cylinder and having an observation channel communicating with the inner space of the cylinder;

[0007] a window cover, connected to the window frame in an openable and closable manner and having a viewing window corresponding to the observation channel of the window frame;

[0008] The suction device includes a plurality of electromagnetic units and a controller for controlling the power on or off of each electromagnetic unit.

[0009] Among them, the multiple electromagnetic units are divided into a first electromagnetic unit group and a second electromagnetic unit group, the first electromagnetic unit group is arranged on the fitting surface between the window frame and the window cover, and the second electromagnetic unit group is arranged on the fitting surface between the window cover and the window frame, and the multiple electromagnetic units included in the first electromagnetic unit group correspond one to one to the multiple electromagnetic units included in the second electromagnetic unit group.

[0010] In one embodiment, a plurality of first mounting grooves are provided on the mating surface between the window frame and the window cover, and the plurality of electromagnetic units included in the first electromagnetic unit group are respectively mounted in the plurality of first mounting grooves;

[0011] A plurality of second mounting grooves are formed on the fitting surface of the window cover and the window frame, and the plurality of electromagnetic units included in the second electromagnetic unit group are respectively installed in the plurality of second mounting grooves.

[0012] In one embodiment, a plurality of the first mounting grooves are evenly distributed along the periphery of the window frame; and a plurality of the second mounting grooves are evenly distributed along the periphery of the window cover.

[0013] In one embodiment, the electromagnetic unit includes a coaxially connected electromagnetic generating part and a connecting part, wherein an iron core and an electromagnetic coil surrounding the iron core are provided in the electromagnetic generating part, and the connecting part is detachably connected to the first mounting slot or the second mounting slot.

[0014] In one embodiment, the top surface of the electromagnetic unit is lower than the slot openings of the first mounting slot and the second mounting slot.

[0015] In one embodiment, sealing covers are provided at the openings of the first mounting groove and the second mounting groove, and the top surface of the sealing cover is flush with the openings of the first mounting groove and the second mounting groove.

[0016] In one embodiment, the suction device further includes an air pressure sensing unit, which is disposed in the observation channel of the window frame and is connected to the controller.

[0017] In one embodiment, the window cover and the window frame are connected in an openable and closable manner via a hinge structure.

[0018] In one embodiment, a sealing ring is provided on the window cover, and the sealing ring is provided corresponding to the outer periphery of the observation channel of the window frame.

[0019] On the other hand, a single crystal furnace is provided, comprising the single crystal furnace sub-chamber tube.

[0020] The above-mentioned single crystal furnace auxiliary chamber tube includes a cylinder and an observation window arranged at the lower part of the cylinder. The observation window includes a window frame, a window cover and a suction device. The suction device includes an electromagnetic unit and a controller. The electromagnetic unit is divided into two groups, which are respectively arranged on the fitting surfaces of the window cover and the window frame. The controller can control the power on or off of the electromagnetic unit. Through the suction device, the observation window on the single crystal furnace auxiliary chamber tube can be controlled to automatically close, lock or open. The use of the above-mentioned single crystal furnace auxiliary chamber tube can realize automatic locking of the observation window without manual mechanical locking, thereby improving convenience. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 Schematic diagram of the structure of the auxiliary chamber tube of a single crystal furnace in one embodiment;

[0022] Figure 2 A schematic structural diagram of an observation window in one embodiment;

[0023] Figure 3 for Figure 1 Enlarged schematic diagram of point C in the middle.

[0024] The accompanying drawings are numbered as follows: cylinder 100, window frame 110, first mounting groove 111, observation channel 112, window cover 120, second mounting groove 121, window 122, sealing ring 123, threaded groove 124, movable connection structure 130, suction device 200, electromagnetic unit 210, electromagnetic generating part 211, connecting part 212, sealing cover 213, first electromagnetic unit group 210A, second electromagnetic unit group 210B, controller 220. DETAILED DESCRIPTION

[0025] In order to make the purpose, technical solutions and advantages of this application more clear, the following further describes this application in detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain this application and are not intended to limit this application.

[0026] It should be noted that the illustrations provided in this embodiment are only used to schematically illustrate the basic concept of the present invention. Therefore, the illustrations only show components related to the present invention and are not drawn according to the number, shape and size of components in actual implementation. In actual implementation, the type, quantity and proportion of each component can be changed at will, and the component layout type may also be more complicated.

[0027] The structures, proportions, sizes, etc. illustrated in the drawings in this specification are only used to match the contents disclosed in the specification so as to facilitate understanding and reading by persons familiar with the art. They are not intended to limit the conditions under which the present invention can be implemented and therefore have no substantive technical significance. Any structural modifications, changes in proportions, or adjustments in sizes shall still fall within the scope of the technical contents disclosed in this utility model without affecting the efficacy and objectives that can be achieved by the present utility model.

[0028] Terms such as "upper," "lower," "left," "right," "center," "longitudinal," "transverse," "horizontal," "inner," "outer," "radial," and "circumferential" used in this specification to indicate positions or locations are based on those shown in the accompanying drawings and are intended solely for ease of description. They do not indicate or imply that the devices or components referred to must have, be constructed, or operate in a specific orientation, and therefore should not be construed as limitations on the present invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0029] A single crystal furnace, or single crystal silicon growth furnace, is a device for efficiently preparing silicon single crystals. Polycrystalline silicon raw materials are placed in a quartz crucible in the furnace body and melted at high temperature. Under the protection of argon gas, a seed crystal is inserted into the polycrystalline silicon melt, forming a supercooled state around the seed crystal and growing regularly to form a single crystal rod.

[0030] The single crystal furnace body primarily consists of a main chamber and a secondary chamber. The main chamber is used for loading and melting polycrystalline materials such as polysilicon, and maintaining the high-temperature environment required for crystal growth. The secondary chamber primarily consists of a secondary chamber cylinder, which holds the pulled crystals. An observation window is provided on the secondary chamber cylinder to facilitate monitoring of the growth process within the single crystal furnace. Existing single crystal furnace observation windows are not automated and require frequent manual locking by on-site personnel.

[0031] The present application provides a single crystal furnace auxiliary chamber tube, which improves the problem that the observation window of the existing single crystal furnace auxiliary chamber tube needs to be manually locked.

[0032] In one embodiment, the single crystal furnace auxiliary chamber barrel includes a barrel 100 and an observation window provided at the lower portion of the barrel 100 , wherein the observation window includes a window cover 120 , a window frame 110 and an attraction device 200 .

[0033] The window cover 120 is connected to the window frame 110 in an openable and closable manner.

[0034] During actual implementation, an observation channel 112 is formed in the window frame 110 to connect to the interior of the cylinder 100 so as to observe the interior of the sub-chamber. Typically, the window frame 110 is cylindrical, and the observation channel 112 is circular. The outer end surface of the window frame 110 is used to fit and seal with the window cover 120.

[0035] The window cover 120 has a shape similar to that of the window frame 110. In this embodiment, a circular shape is adopted. The window frame 110 and the window cover 120 are connected to each other in an openable and closable manner using a movable connection structure 130 on the side. The movable connection structure 130 can be, for example, a rotating shaft, a hinge, a sliding rail, etc. The movable connection structure 130 supports relative displacement between the window frame 110 and the window cover 120, thereby realizing the opening and closing of the window cover 120.

[0036] The suction device 200 is used to automatically lock and unlock the window cover 120 and the window frame 110. The suction device 200 includes a plurality of electromagnetic units 210 and a controller 220 for controlling the power on or off of each electromagnetic unit 210. The electromagnetic units 210 are implemented based on the principle of electromagnets.

[0037] Among them, the electromagnetic units 210 are divided into two groups, including a first electromagnetic unit group 210A and a second electromagnetic unit group 210B. In this embodiment, there are 4 electromagnetic units 210 in the first electromagnetic unit group 210A and the second electromagnetic unit group 210B. The first electromagnetic unit group 210A is arranged on the fitting surface between the window frame 110 and the window cover 120, and the second electromagnetic unit group 210B is arranged on the fitting surface between the window cover 120 and the window frame 110, and the multiple electromagnetic units 210 included in the first electromagnetic unit group 210A correspond one to one to the multiple electromagnetic units 210 included in the second electromagnetic unit group 210B.

[0038] Exemplarily, a plurality of first mounting grooves 111 (corresponding to 4 in this embodiment) are provided on the mating surface between the window frame 110 and the window cover 120, and the plurality of first mounting grooves 111 are evenly distributed along the periphery of the window frame 110, and the plurality of electromagnetic units 210 included in the first electromagnetic unit group 210A are respectively installed in the plurality of first mounting grooves 111.

[0039] Uniform distribution refers to a distribution in which each electromagnetic unit 210 in the first electromagnetic unit group 210A is at the same distance from the center of the observation channel 112 and the distances between adjacent electromagnetic units 210 are the same.

[0040] The second electromagnetic unit group 210B is arranged on the window cover 120. For example, a second mounting groove 121 is opened on the fitting surface of the window cover 120 and the window frame 110. The plurality of second mounting grooves 121 are evenly distributed along the periphery of the window cover 120. The plurality of electromagnetic units 210 included in the second electromagnetic unit group 210B are respectively installed in the plurality of second mounting grooves 121.

[0041] The controller 220 is electrically connected to the first electromagnetic unit group 210A and the second electromagnetic unit group 210B respectively, and controls each electromagnetic unit 210 to be powered on or off. When powered on, the first electromagnetic unit group 210A and the second electromagnetic unit group 210B are adsorbed, and when powered off, the adsorption force is eliminated.

[0042] It can be understood that when the window cover 120 and the window frame 110 are closed in place, the controller 220 is used to energize the electromagnetic unit 210, and the two groups of electromagnetic units 210 are controlled to generate magnetic attraction to lock the observation window. When the window cover 120 needs to be opened, the power is turned off to eliminate the magnetic attraction.

[0043] The single crystal furnace sub-chamber tube provided in this embodiment adopts the electromagnet principle to realize the automatic unlocking and locking of the window frame 110 and the window cover 120, which makes the operation of on-site operators easier and effectively improves work efficiency; on the other hand, the window frame 110 and the window cover 120 adopt two sets of electromagnetic units 210 arranged opposite to each other, rather than a magnetic attraction combination such as the electromagnetic unit 210 and the permanent magnet or the electromagnetic unit 210 and the ferromagnet, which fully takes into account the influence of the high temperature on the permanent magnet or the ferromagnet during the operation of the single crystal furnace.

[0044] A plurality of electromagnetic units 210 are evenly distributed around the observation channel 112 of the window frame 110 and on the fitting surface of the window cover 120. After being attracted, the attraction force can be evenly distributed, and the sealing is stronger after attraction, avoiding the influence of the single crystal quality due to poor sealing, and it is not easy to cause vacuum leakage due to uneven attraction force.

[0045] The controller 220 can adopt various units that can realize adjustable current and voltage, such as various single-chip microcomputers, microcontrollers 220, FPGAs (Field-Programmable Gate Arrays), host computers or central processing units (CPUs). In this embodiment, the controller 220 adopts a single-chip microcomputer, and various control functions can be realized by programming the single-chip microcomputer.

[0046] During the actual implementation process, the controller 220 cooperates with the single crystal furnace automatic system, the single crystal furnace electrical system, and the single crystal furnace programmable controller (PLC) to achieve automatic locking. At the same time, the single crystal furnace observation window suction device "on" and "off" interface panels can be added to the single crystal furnace operating system interface. When there is a specific need to use this suction device 200, such as the [Evacuation] process, [Barrel Re-injection], and [Sub-chamber Purification] process, its control parameters can be set and written into the background control parameters. When performing the above-mentioned special processes, this suction device 200 can achieve automatic suction and locking; in addition, when performing other necessary processes, it can be operated "on" and "off" on the industrial computer interface. Through this design method, on-site operators can operate more conveniently, work efficiency is improved, and the single crystal furnace automation function is further improved, and the single crystal furnace automation performance is further enhanced.

[0047] In one embodiment, the electromagnetic unit 210 includes a coaxially connected electromagnetic generating part 211 and a connecting part 212, wherein an iron core and an electromagnetic coil surrounding the iron core are provided in the electromagnetic generating part 211, and the connecting part 212 is detachably connected to the first mounting slot 111 or the second mounting slot 121.

[0048] Exemplarily, the electromagnetic generating portion 211 is cylindrical, capable of accommodating more electromagnetic coils and providing a larger top attraction surface, thereby achieving a stronger and more uniform magnetic attraction force.

[0049] The connecting portion 212 is a threaded column, and a threaded groove 124 is provided at the bottom of the first installation groove 111 and the second installation groove 121. In actual implementation, the electromagnetic unit 210 can be directly screwed and installed, which is simple and convenient.

[0050] In actual implementation, the number of electromagnetic units 210 in the first electromagnetic unit group 210A and the second electromagnetic unit group 210B is at least 4, and they can at least apply magnetic attraction on two intersecting symmetry axes passing through the center of the observation channel 112, thereby ensuring uniform distribution of locking pressure.

[0051] In another embodiment, during the actual installation process, the top surface of the electromagnetic unit 210 is lower than the slots of the first mounting groove 111 and the second mounting groove 121, and a sealing cover 213 is provided at the slots of the first mounting groove 111 and the mounting groove, and the top surface of the sealing cover 213 is flush with the slots of the first mounting groove 111 and the second mounting groove 121.

[0052] A sealing cover 213 is provided to isolate and protect the electromagnetic unit 210. On the other hand, the sealing cover 213 can ensure the flatness of the fitting surfaces of the window cover 120 and the window frame 110 and increase the contact area, thereby improving the sealing after locking; it can also eliminate the grooves on the fitting surfaces to avoid foreign matter residue.

[0053] In one embodiment, a window 122 is provided on the window cover 120 . The window 122 is made of transparent glass. The window 122 is provided at a position corresponding to the observation channel 112 of the window frame 110 , and can provide a certain field of view for staff outside the observation window.

[0054] The window cover 120 is provided with a sealing ring 123, which is arranged corresponding to the outer periphery of the observation channel 112 of the window frame 110. When the window cover 120 is closed and the electromagnetic unit 210 is turned on, the sealing ring 123 is compressed and deformed, filling the gap between the window cover 120 and the window frame 110, further improving the sealing performance of the single crystal furnace observation window of the present application.

[0055] In particular, the sealing ring 123 adopts the same shape as the observation channel 112, which is circular in this embodiment, and can form a uniform and complete sealing barrier around the observation channel 112, and the electromagnetic unit 210 is arranged on the outer side of the sealing ring 123, providing uniform and concentrated pressure to the sealing ring 123 when it is attracted.

[0056] In one embodiment of the present application, the suction device 200 also includes an air pressure sensing unit, which is arranged in the observation channel 112 of the window frame 110 and can sense the air pressure in the observation channel 112. The air pressure sensing unit is connected to the controller 220, and the controller 220 sets a rated safety pressure value. Taking into account special circumstances, when this observation window is subjected to strong pressure, it can automatically cut off the power and open, so it can play a safety and explosion-proof role and avoid the occurrence of safety accidents.

[0057] To ensure the effectiveness of the explosion-proof effect, the movable connection structure 130 is a hinge structure. When the electromagnetic unit 210 is powered off, the window cover 120 connected by the hinge structure can be opened in a flat opening manner under the action of air pressure.

[0058] The exemplary embodiment of the present utility model further provides a single crystal furnace, which includes the single crystal furnace sub-chamber tube provided in the above embodiment.

[0059] The technical features of the above embodiments can be combined arbitrarily. In order to make the description concise, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification. The above-mentioned embodiments only express several implementation methods of the present application. The description is relatively specific and detailed, but it cannot be understood as a limitation on the scope of the utility model patent. It should be pointed out that for ordinary technicians in this field, without departing from the concept of the present application, several variations and improvements can be made, which all fall within the scope of protection of the present application. Therefore, the scope of protection of the patent in this application shall be based on the attached claims.

Claims

1. A single crystal furnace auxiliary chamber tube, characterized in that: include: A cylinder (100) and an observation window provided at the lower portion of the cylinder (100), wherein the observation window comprises: a window frame (110) fixedly disposed on the cylinder (100) and having an observation channel (112) communicating with the internal space of the cylinder (100); a window cover (120) connected to the window frame (110) in an openable and closable manner and having a viewing window (122) corresponding to the observation channel (112) of the window frame (110); The suction device (200) includes a plurality of electromagnetic units (210) and a controller (220) for controlling the power on or off of each electromagnetic unit (210). The plurality of electromagnetic units (210) are divided into a first electromagnetic unit group (210A) and a second electromagnetic unit group (210B); the first electromagnetic unit group (210A) is arranged on the fitting surface between the window frame (110) and the window cover (120); the second electromagnetic unit group (210B) is arranged on the fitting surface between the window cover (120) and the window frame (110); and the plurality of electromagnetic units (210) included in the first electromagnetic unit group (210A) correspond one to one to the plurality of electromagnetic units (210) included in the second electromagnetic unit group (210B).

2. The single crystal furnace auxiliary chamber tube according to claim 1, characterized in that: A plurality of first installation grooves (111) are provided on the mating surface between the window frame (110) and the window cover (120), and the plurality of electromagnetic units (210) included in the first electromagnetic unit group (210A) are respectively installed in the plurality of first installation grooves (111); A plurality of second installation grooves (121) are provided on the fitting surface of the window cover (120) and the window frame (110), and the plurality of electromagnetic units (210) included in the second electromagnetic unit group (210B) are respectively installed in the plurality of second installation grooves (121).

3. The single crystal furnace auxiliary chamber tube according to claim 2, characterized in that: A plurality of the first mounting grooves (111) are evenly distributed along the periphery of the window frame (110); and a plurality of the second mounting grooves (121) are evenly distributed along the periphery of the window cover (120).

4. The single crystal furnace auxiliary chamber tube according to claim 2, characterized in that: The electromagnetic unit (210) comprises a coaxially connected electromagnetic generating portion (211) and a connecting portion (212); an iron core and an electromagnetic coil surrounding the iron core are provided in the electromagnetic generating portion (211); and the connecting portion (212) is detachably connected to the first mounting slot (111) or the second mounting slot (121).

5. The single crystal furnace auxiliary chamber tube according to claim 2, characterized in that: The top surface of the electromagnetic unit (210) is lower than the slot openings of the first mounting slot (111) and the second mounting slot (121).

6. The single crystal furnace auxiliary chamber tube according to claim 2, characterized in that: Sealing covers (213) are provided at the notches of the first installation groove (111) and the second installation groove (121), and the top surface of the sealing cover (213) is flush with the notches of the first installation groove (111) and the second installation groove (121).

7. The single crystal furnace auxiliary chamber tube according to claim 1, characterized in that: The suction device (200) further includes an air pressure sensing unit, the air pressure sensing unit being arranged in the observation channel (112) of the window frame (110), and the air pressure sensing unit being connected to the controller (220).

8. The single crystal furnace auxiliary chamber tube according to claim 5, characterized in that: The window cover (120) and the window frame (110) are connected in an openable and closable manner via a hinge structure.

9. The single crystal furnace auxiliary chamber tube according to claim 1, characterized in that: A sealing ring (123) is provided on the window cover (120), and the sealing ring (123) is provided corresponding to the outer periphery of the observation channel (112) of the window frame (110).

10. A single crystal furnace, characterized in that: The utility model comprises the single crystal furnace auxiliary chamber tube according to any one of claims 1 to 9.

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