Pressure head mechanism for seed crystal bonding

Abstract

The utility model relates to a pressure head mechanism for seed crystal bonding, which comprises a connecting seat, a flexible part and a piston, the connecting seat comprises a connecting seat body and an extension column, and the extension column is provided with a cavity penetrating along the vertical direction; the flexible part is arranged at the bottom of the connecting seat body and protrudes downwards, and a containing cavity is formed between the flexible part and the connecting seat body; the piston is movably arranged in the cavity and divides the cavity into a first part located on the upper side and a second part located on the lower side, and in the pressing process of the pressing head mechanism, the piston has the trend of moving upwards. According to the utility model, the cavity is arranged on the extension column, and the piston is arranged in the cavity, so that when the seed crystal is pressed, the piston can correspondingly move upwards along with the deformation of the flexible part, thereby ensuring that the pressure intensity in the accommodating cavity between the flexible part and the connecting seat body is kept unchanged, and the stress in the seed crystal pressing process is more uniform; therefore, the seed crystal bonding quality is effectively improved, and the service life of the pressure head mechanism is prolonged.

Description

Technical Field

[0001] The utility model relates to the technical field of artificial crystal growth, in particular to a pressure head mechanism for seed crystal bonding. Background Art

[0002] When growing silicon carbide crystals, a seed crystal must first be bonded to the seed crystal holder in the crucible lid. Carbon powder and silicon powder are then placed into the crucible. After the crucible is heated, the carbon powder and silicon powder vaporize and solidify at the seed crystal to form a silicon carbide crystal. Bonding the seed crystal to the seed crystal holder in the crucible lid is a critical step in this process. The quality of the bond between the silicon carbide seed crystal and the seed crystal holder directly affects the quality of the silicon carbide single crystal growth, and the uniformity and density of the bond are key to this quality.

[0003] Typically, an adhesive is applied to the upper surface of the seed crystal seat, the seed crystal is placed on top of the adhesive, and then an airbag-type flexible pressure head is used to apply pressure to the seed crystal, fully discharging the gas between the seed crystal and the seed crystal seat from the inside out, thereby tightly bonding the seed crystal to the seed crystal seat. Existing airbag-type flexible pressure heads, such as the pressure head mechanism disclosed in patent CN 219315149 U, include a connecting seat with a hollow cavity and a lower connecting plate covering the bottom of the upper connecting seat. The lower connecting plate is an elastic plate used to cover the hollow cavity from the bottom. Before applying pressure, the lower connecting plate is first inflated to keep it in an inflated state, and pressure is gradually applied to the seed crystal from the inside out.

[0004] However, as the elastic plate is compressed, the pressure between the elastic plate and the connecting seat will gradually increase, that is, the pressure of the elastic plate on the seed crystal will gradually increase. Not only will the pressure on the seed crystal be uneven, affecting the bonding quality of the seed crystal, but it will also easily cause the elastic plate to burst, affecting the service life of the flexible pressure head. Utility Model Content

[0005] The utility model aims to provide a pressure head mechanism for bonding seed crystals, which can maintain a constant pressure when applying pressure to the seed crystals, thereby improving the bonding quality of the seed crystals and increasing the service life of the pressure head mechanism.

[0006] In order to achieve the above purpose, the technical solution adopted by the utility model is:

[0007] A pressing head mechanism for seed crystal bonding, comprising:

[0008] A connecting base, the connecting base comprising a connecting base body and an extension column provided above the connecting base body, the extension column having a cavity extending through the extension column in an up-down direction;

[0009] a flexible member, the flexible member being arranged at the bottom of the connecting seat body and protruding downward to form a cavity between the flexible member and the connecting seat body, the cavity being in communication with the cavity;

[0010] A piston is movably disposed in the cavity and divides the cavity into a first portion located at the upper side and a second portion located at the lower side. The piston has a tendency to move upward during the pressing process of the pressing head mechanism.

[0011] When the temperature and the amount of the substance remain unchanged, the pressure of the gas is inversely proportional to its volume. Therefore, when pressure is applied to the seed crystal, as the flexible part deforms, the cavity formed by it and the connecting seat body will be gradually compressed, the volume of the cavity will gradually decrease, and the pressure in the cavity will gradually increase accordingly, resulting in uneven pressure during the seed crystal pressing process and easily causing the flexible part to explode. The present utility model creatively sets a cavity on the extension column of the connecting seat and sets a piston in the cavity. When pressure is applied to the seed crystal, as the flexible part deforms, the piston will move upward accordingly, thereby ensuring that the pressure in the cavity remains unchanged, which can effectively improve the seed crystal bonding quality and increase the service life of the pressure head mechanism.

[0012] Preferably, the sum of the volumes of the cavity and the second portion remains unchanged during the pressing process of the pressing head mechanism. When the volume of the cavity is compressed, the piston moves upward, and the volume of the second portion increases accordingly, so that the volumes of the cavity and the second portion remain unchanged.

[0013] Preferably, the first part, the second part and the piston are coaxial.

[0014] Further preferably, the inner diameter of the first portion is larger than that of the second portion.

[0015] In some embodiments, the extension column and the piston are a cylinder-piston assembly.

[0016] Preferably, the pressure head assembly further comprises a blocking member disposed at the upper end of the cavity, wherein the blocking member is provided with a through hole for connecting the cavity with the external environment. The blocking member can prevent the piston from rushing out of the cavity.

[0017] Preferably, the pressure head mechanism further comprises a counterweight block, which is arranged on the piston. The design of the counterweight block can further adjust the pressure in the cavity, thereby applying pressure to the seed crystal according to actual needs.

[0018] Preferably, the counterweight is selected from one or more weights and / or compression springs. The compression spring may be a constant pressure spring.

[0019] Preferably, the pressure head mechanism further comprises an air hole, which is provided in the connecting seat body and communicates with the cavity, or is provided in the extension column and communicates with the second portion. Air can be ventilated into the cavity through the air hole to cause the flexible member to bulge downward.

[0020] Preferably, a through hole is provided in the middle area of ​​the connecting seat body, and the accommodating cavity is connected with the cavity through the through hole.

[0021] Preferably, the flexible member is in the shape of a spherical cap.

[0022] Preferably, the flexible member is made of rubber.

[0023] Due to the application of the above technical solution, the utility model has the following advantages compared with the prior art:

[0024] The utility model provides a cavity on the extension column of the connecting seat and a piston in the cavity. When pressure is applied to the seed crystal, the piston can move upward accordingly with the deformation of the flexible part, thereby ensuring that the pressure in the cavity between the flexible part and the connecting seat body remains unchanged, making the pressure during the seed crystal pressing process more uniform, effectively improving the seed crystal bonding quality, and increasing the service life of the pressure head mechanism.

[0025] The pressure head assembly of the utility model has a simple structure and is easy to use, and can be widely used in the bonding process of silicon carbide seed crystals. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 This is a simplified structural diagram of the pressure head mechanism in Example 1;

[0027] Among them, 1. Connecting seat body; 11. Connecting seat body through hole; 2. Extension column; 21. First part; 22. Second part; 23. Air hole; 3. Flexible part; 31. Cavity; 4. Piston; 5. Counterweight; 6. Blocking part; 61. Blocking part through hole; 7. Connecting part. DETAILED DESCRIPTION

[0028] The present invention will be further described below with reference to the embodiments shown in the accompanying drawings.

[0029] Hereinafter, only certain exemplary embodiments are briefly described. As will be appreciated by those skilled in the art, the described embodiments may be modified in various ways without departing from the spirit or scope of the embodiments of the present invention. Therefore, the drawings and description are to be regarded as illustrative in nature and not restrictive.

[0030] In the description of the embodiments of the present invention, it should be understood that the terms "upper", "lower", etc. indicate positions or location relationships based on the Figure 1 The orientation shown is defined as follows, that is, the blocking member 6 is in the upper orientation and the flexible member 3 is in the upper orientation. This is only for the convenience of describing the embodiments of the present invention and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it cannot be understood as a limitation on the embodiments of the present invention.

[0031] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be understood to indicate or imply relative importance or implicitly specify the number of the technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of the embodiments of the present invention, "plurality" means two or more, unless otherwise specifically defined.

[0032] In the embodiments of the present invention, unless otherwise expressly specified or limited, a first feature being "above" or "below" a second feature may include the first and second features being in direct contact, or may include the first and second features being in contact not directly but through another feature between them. Moreover, a first feature being "above," "above," and "above" a second feature includes the first feature being directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below," "below," and "below" a second feature includes the first feature being directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0033] The disclosure below provides many different embodiments or examples for implementing different structures of the embodiments of the present invention. In order to simplify the disclosure of the embodiments of the present invention, the components and settings of specific examples are described below. Of course, these are merely examples and are not intended to limit the embodiments of the present invention. In addition, the embodiments of the present invention may repeat reference numbers and / or reference letters in different examples. Such repetition is for the purpose of simplicity and clarity and does not in itself indicate the relationship between the various embodiments and / or settings discussed.

[0034] Example 1

[0035] A pressure head mechanism for seed crystal bonding, such as Figure 1 As shown, it includes a connecting seat, a flexible member 3 and a piston 4.

[0036] The connector includes a connector body 1 and an extension column 2. A connector body through-hole 11 is defined in the central region of the connector body 1. The shape of the connector body 1 is not limited and can be circular, regular polygonal, or other shapes. The extension column 2 is positioned above the connector body 1 and defines a cavity extending vertically through the connector body 1. Preferably, the extension column 2 is positioned directly above the connector body through-hole 11, and its cavity is connected to the connector body through-hole 11.

[0037] The piston 4 is movably disposed in the cavity of the extension column 2 and divides the cavity into a first part 21 located on the upper side and a second part 22 located on the lower side. Preferably, the first part 21, the second part 22 and the piston 4 are coaxial. In the present embodiment, the first part 21 and the second part 22 are both cylindrical, and the inner diameter of the first part 21 is larger than that of the second part 22. The air hole 23 for inflation is provided on the extension column 2 and is connected to the second part 22. Of course, in other embodiments, the air hole 23 can also be provided on the connecting seat body 1. When the second part 22 is squeezed, the piston 4 tends to move upward. In addition, in order to prevent the piston 4 from rushing out of the cavity, a blocking member 6 is provided at the upper end of the cavity, and the blocking member 6 is provided with a blocking member through hole 61 for connecting the cavity (i.e., the first part 21) with the external environment. In the present embodiment, the blocking member 6 is annular.

[0038] The flexible member 3 is arranged at the bottom of the connecting seat body 1 and is tightly connected to the connecting seat body 1 on the circumferential side. In this embodiment, the flexible member 3 is connected to the connecting seat body 1 through a connecting member 7. The connecting member 7 includes a pressure ring abutting against the four sides of the flexible member 3 and a bolt connecting the pressure ring to the connecting seat body 1. The bolts have a plurality of bolts arranged along the circumferential direction. The flexible member 3 protrudes downward and forms a cavity 31 between the flexible member 3 and the connecting seat body 1. Preferably, the cavity 31 is inflated through the air hole 23 so that the flexible member 3 protrudes downward. Furthermore, the flexible member 3 is spherical. When pressing, the central convex point of the flexible member 3 first contacts the central part of the seed crystal, and gradually applies pressure to the seed crystal from the inside to the outside, and discharges the gas between the seed crystal and the seed crystal seat from the inside to the outside. In this way, the gas between the seed crystal and the seed crystal seat can be fully discharged, and a dense bond between the seed crystal and the seed crystal seat can be achieved. The flexible member 3 can be made of rubber. Cavity 31 communicates with the cavity through through-hole 11 of the connector body. When the flexible member 3 applies pressure to the seed crystal, it deforms, compressing cavity 31. The gas within cavity 31 escapes into the second portion 22 of the cavity, causing piston 4 to move upward accordingly. Thus, the volumes of cavity 31 and second portion 22 remain constant. This ensures uniform pressure on the seed crystal during the pressing process while preventing the flexible member 3 from bursting.

[0039] To adjust the pressure within the flexible member 3, the pressure head mechanism in this embodiment is also equipped with a counterweight 5. The counterweight 5 is detachably mounted on the piston 4. When greater pressure is required on the seed crystal, the weight of the counterweight 5 can be increased; when less pressure is required, the weight of the counterweight 5 can be reduced. This allows pressure to be applied to the seed crystal according to actual needs, providing improved applicability. The counterweight 5 is preferably one or more weights.

[0040] Working principle:

[0041] Select a suitable counterweight 5 and place it on the piston 4. Inflate the cavity 31 formed by the flexible member 3 and the connector body 1 through the air hole 23 to make the flexible member 3 bulge downward in a spherical crown shape.

[0042] The seed crystal is pressurized using a pressure head mechanism. Before the pressure is applied, the center position of the flexible member 3 is located directly above the center position of the seed crystal. When the pressure head mechanism is moved downward, the center point of the flexible member 3 first contacts the center point of the seed crystal. The pressure head mechanism is continuously moved downward, and the flexible member 3 gradually applies pressure to the seed crystal from the inside to the outside to discharge the gas between the seed crystal and the seed crystal seat from the inside to the outside. At the same time, the flexible member 3 is deformed, and the gas in the cavity 31 is squeezed and then passes into the second part 22 of the cavity of the extension column 2, driving the piston 4 and the counterweight 5 to slide upward against their gravity, so that the pressure in the cavity 31 remains unchanged. As the pressure is applied, the contact area between the flexible member 3 and the seed crystal gradually increases from the inside to the outside to fully discharge the gas between the seed crystal and the seed crystal seat, so that the seed crystal is bonded to the seed crystal seat.

[0043] The above embodiments are intended only to illustrate the technical concepts and features of the present invention. Their purpose is to enable those familiar with the art to understand the contents of the present invention and implement them accordingly. They are not intended to limit the scope of protection of the present invention. Any equivalent changes or modifications based on the spirit of the present invention are intended to be included in the scope of protection of the present invention.

Claims

1. A pressure head mechanism for seed crystal bonding, characterized in that: include: A connecting seat, the connecting seat comprising a connecting seat body (1) and an extension column (2) provided above the connecting seat body (1), the extension column (2) having a cavity penetrating in an up-down direction; A flexible member (3), the flexible member (3) being arranged at the bottom of the connecting seat body (1) and protruding downwards to form a cavity (31) between the flexible member and the connecting seat body (1), the cavity (31) being in communication with the cavity; A piston (4) is movably disposed in the cavity and divides the cavity into a first portion (21) located at the upper side and a second portion (22) located at the lower side. The piston (4) has a tendency to move upward during the pressing process of the pressing head mechanism.

2. The press head mechanism for bonding the seed crystal according to claim 1, characterized in that: The total volume of the cavity (31) and the second portion (22) remains unchanged during the pressing process of the pressing head mechanism.

3. The press head mechanism for bonding the seed crystal according to claim 1, characterized in that: The first part (21), the second part (22) and the piston (4) are coaxial.

4. The press head mechanism for seed crystal bonding according to claim 3, characterized in that: The inner diameter of the first portion (21) is larger than that of the second portion (22).

5. The press head mechanism for bonding the seed crystal according to claim 1, characterized in that: The pressure head mechanism further comprises a blocking member (6) disposed at the upper end of the cavity, and the blocking member (6) is provided with a through hole for connecting the cavity with the external environment.

6. The press head mechanism for bonding a seed crystal according to claim 1, characterized in that: The pressure head mechanism further comprises a counterweight (5), and the counterweight (5) is arranged on the piston (4).

7. The press head mechanism for bonding the seed crystal according to claim 6, characterized in that: The counterweight (5) is selected from one or more weights and / or compression springs.

8. The press head mechanism for bonding a seed crystal according to claim 1, characterized in that: The pressure head mechanism further comprises an air hole (23), wherein the air hole (23) is provided on the connecting seat body (1) and communicates with the accommodating cavity (31), or the air hole (23) is provided on the extension column (2) and communicates with the second portion (22).

9. The press head mechanism for bonding a seed crystal according to claim 1, characterized in that: A through hole is provided in the middle area of ​​the connecting seat body (1), and the accommodating cavity (31) is connected to the cavity through the through hole.

10. The press head mechanism for bonding a seed crystal according to claim 1, wherein: The flexible member (3) is in the shape of a spherical cap; and / or, The flexible member (3) is made of rubber.

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