Quartz wafer flatness detection device

Abstract

The utility model discloses a quartz wafer flatness detection device, which comprises a bottom plate, a turntable rotationally arranged above the bottom plate, a rotating rod fixedly arranged in the middle above the turntable, an annular groove formed in the upper surface of the turntable, a connecting arm fixedly connected to the side surface of the rotating rod, and an auxiliary sliding rod fixedly connected to the lower part of the connecting arm, a pusher is fixedly arranged above the connecting arm, a push-pull rod is fixedly connected above the pusher, and a movable rod is fixedly connected above the push-pull rod; through the design of the turntable and the rotating rod, the connecting arm and the structure above the connecting arm can stably move along with the rotation of the rotating rod, the rotary design not only improves the detection efficiency, but also enables the operation to be more convenient, the auxiliary sliding rod below the connecting arm further enhances the stability of the structure, and through the cooperative use of the pusher, the push-pull rod and the movable rod, the detection efficiency is improved. By means of the design, the quartz wafer can be rapidly fixed and loosened, the operation process is simplified, and the automation degree of detection is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer detection equipment, in particular to a quartz wafer flatness detection device. Background Art

[0002] Patent publication number CN219737655U discloses a quartz MASE wafer inspection device. By rotating the output shaft of a drive motor forward and reverse, two moving blocks can drive the first and second connecting plates to move left and right. While the wafer on the first connecting plate is being inspected, the operator can remove the wafer on the second connecting plate and replace it with a new wafer to be inspected. This reciprocating operation can improve inspection efficiency.

[0003] Although the device of CN219737655U realizes the left and right movement of the two moving blocks by driving the output shaft of the motor in forward and reverse rotation, thereby allowing the operator to replace one wafer while inspecting another wafer, this operation still requires manual participation and has a relatively low degree of automation. In addition, the replacement and inspection of the wafers require the direct participation of the operator, which may introduce human operation errors. For example, when replacing the wafer, the operator may place the wafer improperly due to hand shaking or inaccurate positioning, thereby affecting the inspection results. Utility Model Content

[0004] The purpose of the present invention is to provide a quartz wafer flatness detection device in order to solve the problems mentioned in the above background.

[0005] Material toggling mechanism, its both sides respectively have a cylinder pressure, and the cylinder pressure bar connects swing arm, and the swing arm end face has hook portion, and a bar passes position between the end of two swing arms and the hook portion.

[0006] As a further solution of the present invention: a first base is fixedly provided on one side of the bottom plate, a support rod is fixedly provided above the first base, one end of the side of the support rod is fixedly connected to a connecting rod, a detector is fixedly provided on the side of the connecting rod, a light shield is fixedly provided below the detector, a detection lens is rotatably provided at the middle position inside the light shield, and a fill light is fixedly provided at the other end inside the light shield.

[0007] As a further solution of the present invention: a second base is fixedly provided on the other side of the bottom plate, a telescopic rod is fixedly connected above the second base, an adjusting disk is rotatably provided above the telescopic rod, a fixed rod is fixedly connected to the side of the adjusting disk, and a vacuum suction cup device is fixedly provided on the side of the fixed rod.

[0008] As a further solution of the present invention: a driving device is fixedly provided under the bottom plate, which drives the turntable to rotate, and the turntable drives the rotating rod to rotate, and multiple groups of the connecting arms and the structure above them are fixedly connected to the side of the rotating rod, and the base and the pusher are fixedly connected by a support rod, and the pusher drives the push-pull rod to allow the push-pull rod to drive the movable rod to telescopic movement in the movable groove, and a quartz wafer is placed above the support plate, and the movable rod is driven by the side connecting plate and the movable connecting rod to rotate in the movable seat through the telescopic movement of the movable rod, and the clamping plate rotates with the connecting plate to quickly fix and loosen the quartz wafer, and multiple groups of the movable seat, the connecting plate and the clamping plate are fixedly provided on the side of the support plate, and multiple side connecting plates and the movable connecting rod are also fixedly provided on the side of the movable rod.

[0009] As a further solution of the present invention: a slide rail is fixedly provided at one end of the side of the support rod, and the connecting rod drives the light shield to rise and fall by sliding on the slide rail. The rotating rod drives the connecting arm and the structure above it to rotate to the bottom of the light shield and temporarily stop rotating. The light shield covers the quartz wafer placed above the support plate to block light. The fill light has a ring-shaped appearance and provides uniform light illumination for the detection lens.

[0010] As a further solution of the present invention: two groups of the fixing rods and the vacuum suction cup device are fixedly connected to the side of the adjustment disk, and the quartz wafer on the support plate can be quickly replaced and loaded by rotating the adjustment disk and lifting the telescopic rod.

[0011] Compared with the prior art, the beneficial effects of the present invention are:

[0012] 1. In the present invention, the design of the turntable and the rotating rod enables the connecting arm and the structure above it to move smoothly with the rotation of the rotating rod. This rotary design not only improves the detection efficiency, but also makes the operation more convenient. The auxiliary sliding rod under the connecting arm further enhances the stability of the structure. The coordinated use of the pusher, the push-pull rod and the movable rod realizes the rapid fixation and loosening of the quartz wafer. This design not only simplifies the operation process, but also improves the degree of automation of the detection. By pulling the side connecting plate and the movable connecting rod, the connecting plate rotates in the movable seat, thereby driving the clamping plate to firmly fix the quartz wafer. The arrangement of multiple sets of movable seats, connecting plates and clamping plates ensures the stability and safety of the quartz wafer during the detection process.

[0013] 2. The light shield under the detector and the slide rail design on the side provide a stable and controllable light environment for detection. The light shield can effectively isolate the interference of external light, ensuring that the detection lens can capture clear and accurate images, while the ring fill light provides uniform lighting, further improving the accuracy and reliability of detection. This design not only improves detection efficiency, but also reduces the impact of natural environmental factors on test results. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 This is a schematic diagram of the overall structure of a quartz wafer flatness detection device described in the utility model;

[0015] Figure 2 This is a structural diagram of a detection mechanism in a quartz wafer flatness detection device described in the utility model;

[0016] Figure 3 This is a structural schematic diagram of a pusher in a quartz wafer flatness detection device described in the utility model;

[0017] Figure 4 This is a structural schematic diagram of a base in a quartz wafer flatness detection device described in the utility model;

[0018] Figure 5 The utility model is a schematic structural diagram of a light shield in a quartz wafer flatness detection device.

[0019] In the figure: 1. bottom plate; 2. turntable; 3. turning rod; 4. annular groove; 5. connecting arm; 6. auxiliary slide rod; 7. pusher; 8. push-pull rod; 9. movable rod; 10. base; 11. movable groove; 12. support plate; 13. side connecting plate; 14. movable seat; 15. connecting plate; 16. clamping plate; 17. movable connecting rod; 18. first base; 19. support rod; 20. connecting rod; 21. detector; 22. light hood; 23. detection lens; 24. fill light; 25. second base; 26. telescopic rod; 27. adjustment disk; 28. fixing rod; 29. ​​vacuum suction cup device. DETAILED DESCRIPTION

[0020] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0021] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating directions or positional relationships, are based on the directions or positional relationships shown in the accompanying drawings and are only for the convenience of describing the present invention and simplifying the description. They do not indicate or imply that the devices or components referred to must have a specific direction, be constructed and operate in a specific direction. Therefore, they should not be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only and should not be understood as indicating or implying relative importance. In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", and "set" should be understood in a broad sense. For example, they can be fixedly connected, detachably connected, or connected in an integral manner; they can be mechanically connected or electrically connected; they can be directly connected, indirectly connected through an intermediate medium, or they can be internal communication between two components. For those skilled in the art, the specific meanings of the above terms in the present invention can be understood according to the specific circumstances. The following describes the embodiments of the present invention based on its overall structure.

[0022] Reference Figures 1 to 5In an embodiment of the present invention, a quartz wafer flatness detection device includes: a turntable 2 drives a rotating rod 3 and a connecting arm 5 and other structures thereon to rotate together; a pusher 7, through the telescopic movement of a push-pull rod 8 and a movable rod 9, cooperates with the pulling of a side connecting plate 13 and a movable connecting rod 17, to rotate the connecting plate 15 in a movable seat 14, thereby driving the clamping plate 16 to quickly fix and loosen the quartz wafer. This design realizes the automatic fixing and release of the quartz wafer and improves the detection efficiency.

[0023] A light shield 22 is provided under the detector 21 to block external light and provide a stable light environment for the detection lens 23. A detection lens 23 is rotatably provided in the middle position inside the light shield 22 to perform flatness detection on the quartz wafer. A fill light 24 is fixedly provided at the other end inside the light shield 22 to provide uniform light illumination for the detection lens 23 to ensure the accuracy of the detection results.

[0024] The vacuum suction cup device 29 is connected to the adjustment disk 27 through the fixing rod 28. When the quartz wafer needs to be replaced or installed, the vacuum suction cup device 29 can quickly absorb and place the quartz wafer on the support plate 12 by rotating the adjustment disk 27 and raising and lowering the telescopic rod 26.

[0025] The driving device under the base plate 1 drives the turntable 2 to rotate, and the turntable 2 drives the rotating rod 3 and the connecting arm 5 and other structures thereon to rotate together. When the rotating rod 3 drives the connecting arm 5 and the structure above it to rotate to the specified position, the pusher 7 starts to work, and the movable rod 9 is moved up and down in the movable groove 11 through the telescopic movement of the push-pull rod 8 and the movable rod 9. At the same time, the movable rod 9 is pulled by the side connecting plate 13 and the movable connecting rod 17 to rotate the connecting plate 15 in the movable seat 14, thereby driving the clamping plate 16 to quickly fix and loosen the quartz wafer. This design not only realizes the automatic detection and replacement of quartz wafers, but also improves the detection efficiency and reduces manual intervention.

[0026] A slide rail is fixedly provided at one end of the side of the support rod 19, and the connecting rod 20 drives the light shield 22 to rise and fall by sliding on the slide rail. When the rotating rod 3 drives the connecting arm 5 and the structure above it to rotate to the bottom of the light shield 22, the light shield 22 will descend and cover the quartz wafer placed above the support plate 12, providing a stable and uniformly lit detection environment for the detection lens 23. At the same time, the fill light 24 is annular in design, which can provide uniform light illumination for the detection lens 23 to ensure the accuracy of the detection results. This design effectively reduces the interference of external light on the detection results and improves the accuracy and reliability of the detection.

[0027] Two sets of fixed rods 28 and vacuum suction cup devices 29 are fixedly connected to the side of the adjustment disk 27. Through the rotation of the adjustment disk 27 and the lifting and lowering of the telescopic rod 26, the vacuum suction cup device 29 can quickly absorb and place the quartz wafer on the support plate 12. This design not only realizes the rapid replacement and loading of the quartz wafer, but also further improves the detection efficiency. At the same time, since the absorption and placement process of the vacuum suction cup device 29 is stable and reliable, the operation error is reduced and the accuracy of the detection is improved.

[0028] The working principle of the present invention is as follows: the device is mainly supported by a bottom plate 1 as a supporting base, a turntable 2 is rotatably provided above the bottom plate 1, a rotating rod 3 is fixedly provided in the middle position above the turntable 2, and multiple groups of connecting arms 5 and structures above the rotating rod 3 are fixedly connected to the side of the rotating rod 3. These structures rotate with the rotation of the rotating rod 3, an auxiliary sliding rod 6 is fixedly connected to the bottom of the connecting arm 5, and a pusher 7 is fixedly provided above the top. The pusher 7 is connected to the movable rod 9 through a push-pull rod 8 above the pusher 7, and the movable rod 9 is fixedly connected to the base 10 above. A movable groove 11 is provided below the base 10 to adapt to the telescopic movement of the movable rod 9, and a support plate 12 is fixedly provided above the base 10 for placing the test object. When the quartz wafer is placed on the support plate 12, the pusher 7 starts to work, driving the push-pull rod 8 to drive the movable rod 9 to perform telescopic movement in the movable groove 11 of the base 10. The telescopic movement of the movable rod 9 is pulled by the side connecting plate 13 and the movable connecting rod 17, driving the connecting plate 15 to rotate in the movable seat 14. The clamping plate 16 fixed above the connecting plate 15 will follow the rotation of the connecting plate 15 to quickly fix and loosen the quartz wafer. Multiple groups of movable seats 14, connecting plates 15 and clamping plates 16 are fixed on the side of the support plate 12 to ensure that the quartz wafer can be stably fixed. At the same time, a first bottom plate is fixed on one side of the bottom plate 1 The base 18 is provided with a support rod 19 fixedly arranged above the first base 18, and a detector 21 is fixedly arranged at one end of the side of the support rod 19 through a connecting rod 20. A light shield 22 is fixedly arranged below the detector 21. A slide rail is also fixedly arranged at one end of the side of the support rod 19. The connecting rod 20 can drive the light shield 22 to move up and down by sliding on the slide rail. When the rotating rod 3 drives the connecting arm 5 and the structure above it to rotate below the light shield 22, the turntable 2 will temporarily stop rotating. At this time, the light shield 22 will cover and shield the quartz wafer placed above the support plate 12 to provide a stable light environment for detection. A detection lens 2 is rotatably arranged at the middle position inside the light shield 22. 3, used to detect the flatness of the quartz wafer; an annular fill light 24 is fixedly provided at the other end of the inner side to provide uniform light illumination for the detection lens 23. In addition, a second base 25 is fixedly provided on the other side of the bottom plate 1, and a telescopic rod 26 is fixedly connected to the top of the second base 25. An adjusting disk 27 is rotatably provided above the telescopic rod 26. Two sets of fixing rods 28 are fixedly connected to the side of the adjusting disk 27, and a vacuum suction cup device 29 is fixedly provided on the side of the fixing rod 28. By rotating the adjusting disk 27 and lifting and lowering the telescopic rod 26, the quartz wafer on the support plate 12 can be quickly replaced and loaded, thereby realizing continuous detection of different quartz wafers.

[0029] The above is only a preferred specific implementation method of the present invention, but the protection scope of the present invention is not limited to this. Any technician familiar with the technical field within the technical scope disclosed by the present invention can make equivalent replacements or changes based on the technical solution and utility model concept of the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A quartz wafer flatness detection device, characterized in that: include: A base plate (1) is provided with a rotating disk (2) on the top of the base plate (1), a rotating rod (3) is fixedly provided at the middle position above the rotating disk (2), an annular groove (4) is provided on the upper surface of the rotating disk (2), a connecting arm (5) is fixedly connected to the side of the rotating rod (3), an auxiliary sliding rod (6) is fixedly connected to the bottom of the connecting arm (5), a pusher (7) is fixedly provided above the connecting arm (5), a push-pull rod (8) is fixedly connected to the top of the pusher (7), a movable rod (9) is fixedly connected to the top of the movable rod (9), and a A base (10) is provided with a movable groove (11) at the bottom of the base (10), a support plate (12) is fixedly provided above the base (10), a side of the movable rod (9) is fixedly connected to a side connecting plate (13), a movable seat (14) is fixedly provided on the side of the support plate (12), a connecting plate (15) is rotatably provided inside the movable seat (14), a clamping plate (16) is fixedly provided above the connecting plate (15), a movable connecting rod (17) is movably connected to the side of the connecting plate (15), and the other side of the movable connecting rod (17) is movably connected to the side connecting plate (13).

2. A quartz wafer flatness detection device according to claim 1, characterized in that: A first base (18) is fixedly provided on one side of the bottom plate (1), a support rod (19) is fixedly provided above the first base (18), a connecting rod (20) is fixedly connected to one end of the side of the support rod (19), a detector (21) is fixedly provided on the side of the connecting rod (20), a light shield (22) is fixedly provided below the detector (21), a detection lens (23) is rotatably provided at the middle position inside the light shield (22), and a fill light (24) is fixedly provided at the other end inside the light shield (22).

3. A quartz wafer flatness detection device according to claim 1, characterized in that: A second base (25) is fixedly provided on the other side of the bottom plate (1); a telescopic rod (26) is fixedly connected above the second base (25); an adjustment disk (27) is rotatably provided above the telescopic rod (26); a fixed rod (28) is fixedly connected to the side of the adjustment disk (27); and a vacuum suction cup device (29) is fixedly provided on the side of the fixed rod (28).

4. A quartz wafer flatness detection device according to claim 1, characterized in that: A driving device is fixedly provided below the bottom plate (1) to drive the turntable (2) to rotate, and the turntable (2) drives the rotating rod (3) to rotate. The side of the rotating rod (3) is fixedly connected with multiple groups of connecting arms (5) and the structure above them. The base (10) and the pusher (7) are fixedly connected via a support rod. The pusher (7) drives the push-pull rod (8) to allow the push-pull rod (8) to drive the movable rod (9) to move telescopically in the movable groove (11). A quartz wafer is placed above the support plate (12). Through the movable rod The telescopic movement of (9) causes the movable rod (9) to drive the connecting plate (15) to rotate in the movable seat (14) through the pulling of the side connecting plate (13) and the movable connecting rod (17), and the clamping plate (16) rotates following the connecting plate (15) to quickly fix and loosen the quartz wafer. Multiple groups of the movable seat (14), the connecting plate (15) and the clamping plate (16) are fixedly provided on the side of the support plate (12), and multiple groups of the side connecting plates (13) and the movable connecting rod (17) are also fixedly provided on the side of the movable rod (9).

5. A quartz wafer flatness detection device according to claim 2, characterized in that: A slide rail is fixedly provided at one end of the side of the support rod (19); the connecting rod (20) drives the light shield (22) to rise and fall by sliding on the slide rail; the rotating rod (3) drives the connecting arm (5) and the structure above it to rotate to the bottom of the light shield (22) and temporarily stop rotating; the light shield (22) covers and shields the quartz wafer placed above the support plate (12); the fill light (24) has a ring-shaped appearance and provides uniform light illumination for the detection lens (23).

6. A quartz wafer flatness detection device according to claim 3, characterized in that: Two groups of fixed rods (28) and the vacuum suction cup device (29) are fixedly connected to the side of the adjustment disk (27). The quartz wafer on the support plate (12) can be quickly replaced and loaded by rotating the adjustment disk (27) and lifting the telescopic rod (26).

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